CN207502789U - Optical element carry device and the laser equipment with the device - Google Patents

Optical element carry device and the laser equipment with the device Download PDF

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Publication number
CN207502789U
CN207502789U CN201721454023.5U CN201721454023U CN207502789U CN 207502789 U CN207502789 U CN 207502789U CN 201721454023 U CN201721454023 U CN 201721454023U CN 207502789 U CN207502789 U CN 207502789U
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China
Prior art keywords
optical element
laser
scanner
support base
carry device
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CN201721454023.5U
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Chinese (zh)
Inventor
成奎栋
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EO LASER TECHNOLOGY (SUZHOU) Co Ltd
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EO LASER TECHNOLOGY (SUZHOU) Co Ltd
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Priority to CN201721454023.5U priority Critical patent/CN207502789U/en
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Abstract

The utility model discloses a kind of optical element carry device and with the device laser equipment, the optical element carry device includes support base and the optical element in support base, support base is equipped with mounting recess, further include the annular cover plate being fixed in support base, buffer gear is provided between annular cover plate and optical element, include the laser equipment of above-mentioned optical element carry device, further include laser light source, scanner and the Optical devices for controlling laser beam exits range, laser light source connects laser driver, the lens for adjusting laser beam size are configured in order on laser light source to the laser beam path between scanner, and the optical path change of adjustment laser beam path, optical path change includes several optical element carry devices.The utility model does not have bending or metaboly when can be ensured that optical element installation, by the distortion of optical element and minimizing deformation, so that it is guaranteed that laser equipment has higher processing quality.

Description

Optical element carry device and the laser equipment with the device
Technical field
The utility model is related to a kind of optical element carry device and with the device laser equipment.
Background technology
In opto-mechanical mechanisms design, the variation of camera lens face type can occur due to assembly force deformation for optical element, and then Influence the precision and stability of projection imaging.In the prior art, it is by acting on for the fixing device that optical element uses Part on optical element concludes power and realizes fixation, easily leads to the problem of local deformation, so that laser beam characteristic generates change Change and further influence the quality of product acquired in Laser Processing engineering or low answer is carried out to optical element using flexible member Power is fixed, and concrete operating principle is that the bearing with hole for injecting glue is mounted respectively to the both ends of intermediate support first, is completed soft Property element assembling, then multiple flexible members are mounted respectively in the groove on the inside of microscope base fixed, optical element is positioned over Microscope base center is simultaneously surrounded by flexible piece, finally by the fixation to be solidified for completing optical element such as injecting glue in the hole for injecting glue of bearing Installation, but since flexible member is to be assembled by multiple components, needs to set multiple flexible members in same microscope base, lead to Later the mode of phase injecting glue is fixed, and operation is relatively complicated, while also brings difficulty to the handling of optical element, reduces work effect Rate.
Invention content
The utility model aim is:A kind of optical element carry device and the laser equipment with the device are provided.
The technical solution of the utility model is:Optical element including support base and in the support base, institute It states support base to be equipped with for the mounting recess that disposes the optical element, further includes to be fixed in the support base and be used for The annular cover plate of the mounting recess is covered, is provided between the annular cover plate and the optical element and optical element is held There is the buffer gear of peptizaiton by fixed force.
Further, annular cover plate described in the utility model is ring spring cover board, and the bottom of the mounting recess is set There is the through-hole worn for light beam.
Further, it is screwed between ring spring cover board described in the utility model and support base, it is described It is respectively equipped on ring spring cover board and support base and plugs fixed cover board location hole and threaded mounting hole successively for screw.
Further, ring spring cover board described in the utility model is equipped with elastic pressurized portion with by the buffer gear It pushes against on the optical element, the elastic pressurized portion is uniformly distributed along the inner peripheral of the ring spring cover board, is increased Compactness inside whole device.
Further, ring spring cover board described in the utility model is equipped with the screw thread being used in combination with support base The two to be tightened, the ring spring cover board be equipped with combined with support base for ring spring cover board, separating action The flat recess of impetus is provided.
Further, buffer gear described in the utility model includes flexible member and fixes or be shaped in institute The annular pressurization partition board on flexible member is stated, the flexible member after the fixed force dispersion of annular pressurization partition board transmission by will make For the optical element, the dismounting of buffer gear is more convenient compared with the prior art, and easy to operate and practicability is stronger.
Further, flexible member described in the utility model is annular silica gel.
Further, optical element described in the utility model includes substrate and the antireflection on the substrate Coating.
The another object of the utility model is to provide a kind of comprising optical element carry device described in above-mentioned any one Laser equipment further includes and generates the laser light source of laser beam, swashs for deflecting the scanner of laser beam running orbit and control The Optical devices of beam exit range, the laser light source is connected with the laser driver of control laser output action, described to swash The lens for adjusting laser beam size and adjustment laser beam are configured in order on radiant to the laser beam path between scanner The optical path change in path, the optical path change include several optical element carry devices.
Further, scanner described in the utility model includes X-axis scanner and Y axis scanning device, and the scanner connects Scanner driving device is connected to, the scanner driving device includes the X-axis of X-axis scanner and Y axis scanning device being controlled to sweep respectively Retouch device driver and Y axis scanning device driver.
The utility model has the following advantages compared with prior art:The utility model provides a kind of optical element carry dress Put and with the device laser equipment technical solution, first, optical element carry device mainly include be equipped with optics member It the support base of part and covers optical element and is fixed on the annular cover plate in support base, annular cover plate and optical element Between the buffer gear that sets act on the fixed force that dispersive optical element is born, utilize annular cover plate, buffer gear and branch Cooperation between support group seat so as to fulfill optical element axial restraint so that optical element is when mounted without bending or deformation Phenomenon by the distortion of optical element and minimizing deformation, secondly, includes the laser equipment of above-mentioned optical element carry device, by In having used the optical element carry device, therefore the laser beam characteristic being emitted in optical element can be made not change, from And ensuring laser equipment has higher processing quality.
Description of the drawings
The utility model is further described with reference to the accompanying drawings and embodiments:
Fig. 1 is the dimensional structure diagram of optical element in the utility model;
Fig. 2 is the side view of optical element in the utility model;
Fig. 3 is the dimensional structure diagram of optical element carry device in the utility model;
Fig. 4 is the vertical view of optical element carry device in the utility model;
Fig. 5 is the first decomposition diagram of optical element carry device in the utility model;
Fig. 6 is the first sectional view of optical element carry device in the utility model;
Fig. 7 is second of decomposition diagram of optical element carry device in the utility model;
Fig. 8 is second of sectional view of optical element carry device in the utility model;
Fig. 9 is the structure diagram of laser equipment in the utility model.
Wherein:1st, support base;11st, mounting recess;111st, through-hole;112nd, inner wall;12nd, threaded mounting hole;2nd, optics member Part;21st, substrate;22nd, anti-reflection coating;3rd, ring spring cover board;31st, elastic pressurized portion;32nd, flat recess;4th, flexible member;5、 Annular pressurization partition board;6th, screw;10th, laser light source;20th, lens;30th, optical path change;40th, scanner;40a, X-axis scanning Device;40b, Y axis scanning device;41st, scanner driving device;41a, X-axis scanner driver;41b, Y axis scanning device driver; 50th, Optical devices;60th, laser driver.
Specific embodiment
Embodiment:
A kind of optical element carry device of the utility model is shown with reference to attached drawing and there is the laser equipment of the device Specific embodiment, with reference to shown in Fig. 1 to Fig. 8, the optical element carry device includes support base 1 and set on the support Optical element 2 on pedestal 1, the support base 1 is equipped with the mounting recess 11 for disposing the optical element 2, described Mounting recess 11 has the inner wall 112 to fit with the optical element 2, and the bottom of the mounting recess 11 is equipped with for light beam The through-hole 111 worn, specifically as shown in Figure 1 and Figure 2, the optical element 2 include substrate 21 and on the substrates 21 The anti-reflection coating 22 on surface, the anti-reflection coating 22 are monolayer constructions, further include to be fixed in the support base 1 and are used for Cover the annular cover plate of the mounting recess 11, the annular cover plate is ring spring cover board 3, the ring spring cover board 3 with It is provided between the optical element 2 and buffer gear of the fixed force with peptizaiton, the buffering is born to optical element 2 Mechanism includes flexible member 4 and annular pressurization partition board 5 that is fixed or being shaped on the flexible member 4, wherein, institute Flexible member 4 is stated as annular silica gel, the flexible member 4 acts on after disperseing by the fixed force for transmitting annular pressurization partition board 5 In on the optical element 2, its dismounting of the buffer gear of this form is more convenient compared with the prior art, easy to operate and real It is stronger with property, the first mounting means of ring spring cover board 3, the ring spring cover board 3 are specifically shown with reference to Fig. 4, Fig. 5 It is fixed by three screws 6 between support base 1, is respectively equipped in the ring spring cover board 3 and support base 1 for screw 6 plug fixed cover board location hole and threaded mounting hole 12 successively, the ring spring cover board 3 be equipped with elastic pressurized portion 31 with The buffer gear is pushed against on the optical element 2, the tool of elastic pressurized portion 31 there are three and respectively along the annular The inner peripheral of spring bumper cover 3 is uniformly distributed, and second of mounting means of ring spring cover board 3 is shown in conjunction with Fig. 6, Fig. 7, The ring spring cover board 3 is equipped with the screw thread being used in combination so that the two to be tightened with support base 1, the annular elastomeric Spring cover board 3 be equipped with combined for ring spring cover board 3 with support base 1, separating action provides two flat recesses 32 of impetus, The axial restraint of optical element 2 can be realized using the cooperation between ring spring cover board 3, buffer gear, support base 1, is made Optical element 2 is obtained when mounted without bending or metaboly, thus by the distortion of optical element 2 and minimizing deformation.With reference to Shown in Fig. 8, the laser equipment of above-mentioned optical element carry device is included in the utility model, further includes the laser for generating laser beam Light source 10, the Optical devices 50 for deflecting the scanner 40 of laser beam running orbit and control laser beam exits range, institute Stating Optical devices 50 can preferably focus the laser beam in the manufacture field of workpiece to be machined, and the laser light source 10 connects There is the laser driver 60 of control laser output action, the scanner 40 includes X-axis scanner 40a and Y axis scanning device 40b, In addition, the scanner 40 is connected with scanner driving device 41, the scanner driving device 41 includes control X-axis respectively and sweeps Retouch the X-axis scanner driver 41a of device 40a and Y axis scanning device 40b and Y axis scanning device driver 41b, the laser light source 10 The lens 20 for adjusting laser beam size and adjustment laser beam are configured in order on to the laser beam path between scanner 40 The optical path change 30 of diameter, there are one the tools of lens 20, and the optical path change 30 includes five optical element carries Device since the laser equipment has used the optical element carry device, can make the laser being emitted in optical element 2 Beam characteristic does not change, so that it is guaranteed that laser equipment has higher processing quality.
Certain above-described embodiment is only the technical concepts and features for illustrating the utility model, and its object is to allow be familiar with this The people of technology can understand the content of the utility model and implement according to this, and the protection model of the utility model can not be limited with this It encloses.Any modifications made in accordance with the spirit of the main technical solutions of the utility model should all cover the guarantor in the utility model Within the scope of shield.

Claims (10)

1. a kind of optical element carry device, it is characterised in that:Including support base(1)With set on the support base(1)On Optical element(2), the support base(1)It is equipped with to dispose the optical element(2)Mounting recess(11), also wrap It includes and is fixed on the support base(1)On for covering the mounting recess(11)Annular cover plate, the annular cover plate and institute State optical element(2)Between be provided with to optical element(2)Born fixed force has the buffer gear of peptizaiton.
2. optical element carry device according to claim 1, it is characterised in that:The annular cover plate is ring spring lid Plate(3), the mounting recess(11)Bottom be equipped with the through-hole worn for light beam(111).
3. optical element carry device according to claim 2, it is characterised in that:The ring spring cover board(3)With branch Support group seat(1)Between pass through screw(6)It is fixed, the ring spring cover board(3)With support base(1)On be respectively equipped with for screw (6)Fixed cover board location hole and threaded mounting hole are plugged successively(12).
4. optical element carry device according to claim 3, it is characterised in that:The ring spring cover board(3)On set Flexible pressurization part(31)Pushing against the buffer gear in the optical element(2)On, the elastic pressurized portion(31)Edge The ring spring cover board(3)Inner peripheral be uniformly distributed.
5. optical element carry device according to claim 2, it is characterised in that:The ring spring cover board(3)With branch Support group seat(1)The screw thread being used in combination is equipped with so that the two to be tightened, the ring spring cover board(3)It is equipped with as ring Shape spring bumper cover(3)With support base(1)The flat recess of impetus is provided with reference to, separating action(32).
6. optical element carry device according to claim 1, it is characterised in that:The buffer gear includes flexible member (4), it is fixed or be shaped in the flexible member(4)On annular pressurization partition board(5), the flexible member(4)Passing through will Annular pressurization partition board(5)The optical element is acted on after the fixed force dispersion of transmission(2)On.
7. optical element carry device according to claim 6, it is characterised in that:The flexible member(4)For annular silicon Glue.
8. optical element carry device according to claim 1, it is characterised in that:The optical element(2)Including substrate (21)And set on the substrate(21)On anti-reflection coating(22).
9. include the laser equipment of optical element carry device described in any one in claim 1 to 8, it is characterised in that:Also Laser light source including generating laser beam(10), scanner for deflecting laser beam running orbit(40)And control laser Beam is emitted the Optical devices of range(50), the laser light source(10)It is connected with the laser driver of control laser output action (60), the laser light source(10)To scanner(40)Between laser beam path on be configured in order and adjust laser beam size Lens(20)And the optical path change of adjustment laser beam path(30), the optical path change(30)Including several light Learn element carry device.
10. laser equipment according to claim 9, it is characterised in that:The scanner(40)Including X-axis scanner (40a)With Y axis scanning device(40b), the scanner(40)It is connected with scanner driving device(41), the scanner driving dress It puts(41)Including controlling X-axis scanner respectively(40a)With Y axis scanning device(40b)X-axis scanner driver(41a)It is swept with Y-axis Retouch device driver(41b).
CN201721454023.5U 2017-11-03 2017-11-03 Optical element carry device and the laser equipment with the device Active CN207502789U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721454023.5U CN207502789U (en) 2017-11-03 2017-11-03 Optical element carry device and the laser equipment with the device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721454023.5U CN207502789U (en) 2017-11-03 2017-11-03 Optical element carry device and the laser equipment with the device

Publications (1)

Publication Number Publication Date
CN207502789U true CN207502789U (en) 2018-06-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721454023.5U Active CN207502789U (en) 2017-11-03 2017-11-03 Optical element carry device and the laser equipment with the device

Country Status (1)

Country Link
CN (1) CN207502789U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111505785A (en) * 2019-01-31 2020-08-07 中强光电股份有限公司 Fixing base and projection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111505785A (en) * 2019-01-31 2020-08-07 中强光电股份有限公司 Fixing base and projection device

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