CN207495342U - A kind of installation tool - Google Patents
A kind of installation tool Download PDFInfo
- Publication number
- CN207495342U CN207495342U CN201721403243.5U CN201721403243U CN207495342U CN 207495342 U CN207495342 U CN 207495342U CN 201721403243 U CN201721403243 U CN 201721403243U CN 207495342 U CN207495342 U CN 207495342U
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- CN
- China
- Prior art keywords
- insulating disc
- support face
- support
- toroidal frame
- installation tool
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000009434 installation Methods 0.000 title claims abstract description 23
- 238000010276 construction Methods 0.000 claims abstract description 9
- 238000001312 dry etching Methods 0.000 claims abstract description 6
- 239000004065 semiconductor Substances 0.000 claims abstract description 5
- 238000005516 engineering process Methods 0.000 claims abstract description 4
- 238000007599 discharging Methods 0.000 abstract description 3
- 238000011900 installation process Methods 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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Abstract
The utility model provides a kind of installation tool, and between upper/lower electrode the dry etching equipment of semiconductor technology in the installation process of insulating disc, including toroidal frame, toroidal frame is provided with support face to support insulating disc；Support construction is set to toroidal frame in the one side in support face, to support toroidal frame；First location structure is distributed in the circumferential direction in support face, to position insulating disc；Second location structure is distributed in the circumferential direction at support face edge, to position the bolt of fixed insulating disc；Align structures are set to support face, to be directed at insulating disc.Advantage is：The position of insulating disc and fixing bolt can be accurately corresponded to, and insulating disc is made to be in the position of concentric circles with fixing bolt, reduce unnecessary damage parts and improve maximum race ETCD estimated time of commencing discharging.
Description
Technical field
The utility model is related to semiconductor production equipment technical fields more particularly to a kind of applied to dry etching equipment
The installation tool of insulating disc.
Background technology
There are upper electrode and lower electrode in semiconductor dry etching equipment, insulating disc is by upper electrode and lower part electricity
Pole is isolated and insulate, and the position of the installation of insulating disc is most important.
In the prior art, the erection sequence of insulating disc is first to place the lower part retainer plate of insulating disc, then place insulating disc
Then ontology places the top retainer plate of insulating disc, whether the insulating disc that finally to detect by an unaided eye is with multiple fixing bolts same
The heart justifies position to be adjusted.Since the groove above insulating disc is relatively more, fixing bolt and insulation can not be accurately observed
Whether in concentric circles position, the adjustment that detects by an unaided eye is not very accurately, if not in concentric circles position, upper electrode also can to disk
And then deviate, can lead to not smoothly close when closing reative cell, damage parts can be caused, board is influenced and normally run goods
Time.When four screws of top shield ring are dismantled above cushion simultaneously, since the cushion of four screws and ground is close,
When causing to dismantle not in same level, it be easy to cause screw damage.
Invention content
For the above-mentioned problems in the prior art, now offer, which aims at, accurately corresponds to insulating disc and fixing bolt
Position, and insulating disc and fixing bolt is made be in the position of concentric circles, unnecessary part in reduction insulating disc assembling process
The installation tool of damage.
Specific technical solution is as follows：
A kind of installation tool, the installation of insulating disc between upper/lower electrode the dry etching equipment of semiconductor technology
In the process, wherein, including：
Toroidal frame, the toroidal frame provide a support face to insulating disc described in support；
Support construction is set to the toroidal frame in the one side in the support face, to support the toroidal frame；
First location structure is distributed in the circumferential direction in the support face, to position the insulating disc；
Second location structure is distributed in the circumferential direction at support face edge, to position the bolt of the fixed insulating disc；
Align structures are set to the support face, to be directed at the insulating disc.
Preferably, the overall diameter of the toroidal frame is 900MM and the interior diameter of the toroidal frame is 600MM.
Preferably, first location structure is location hole, and the location hole is at least provided with three.
Preferably, a diameter of 5MM of the location hole.
Preferably, second location structure includes：
Connecting rod, one end are radially articulated with support face edge；
Positioning groove is set to the connecting rod backwards to the one end in the support face；
The positioning groove fixes the bolt of the insulating disc to position.
Preferably, second location structure at least sets three.
Preferably, the length of connecting rod for 14MM and/or
The positioning groove slot bottom width is 8MM.
Preferably, the align structures are the concave groove mark being set on the support face, and the concave groove mark is matching
The alignment mark closed on the insulating disc is aligned.
Preferably, the support construction is supporting leg, the supporting leg it is vertical be set to the toroidal frame backwards to the support
The one side in face.
Preferably, the supporting leg at least sets three.
Advantage is：The position of insulating disc and fixing bolt can be accurately corresponded to, and make insulating disc and fixation
Bolt is in the position of concentric circles, reduces unnecessary damage parts and improves maximum race ETCD estimated time of commencing discharging.
Description of the drawings
Fig. 1 is a kind of overall structure diagram of the embodiment of installation tool of the utility model；
Fig. 2 is the vertical view about toroidal frame in the utility model；
Fig. 3 is the cross-sectional view about the second location structure in the utility model.
Reference numeral represents explanation in description above：
Toroidal frame (1)；Support face (10)；Support construction (2)；First location structure (3)；Second location structure (4)；Connecting rod
(40)；Positioning groove (41)；Align structures (5).
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are in the premise for not making creative work
Lower all other embodiments obtained, shall fall within the protection scope of the present invention.
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the utility model can
To be combined with each other.
The utility model is described in further detail in the following with reference to the drawings and specific embodiments, but not as the utility model
It limits.
As shown in Figure 1, a kind of embodiment of installation tool, including,
Toroidal frame 1, toroidal frame 1 provide a support face 10 to support insulating disc；
Support construction 2 is set to toroidal frame 1 in the one side in support face 10, to support toroidal frame 1；
First location structure 3 is distributed in the circumferential direction in support face 10, to position insulating disc；
Second location structure 4 is distributed in the circumferential direction at 10 edge of support face, to position the bolt of fixed insulating disc；
Align structures 5 are set to support face 10, to be directed at insulating disc.
The installation tool that Pass through above-mentioned technical proposal provides, in insulating disc installation process, by the support face 10 of toroidal frame 1
Support insulating disc, support construction 2 support toroidal frame 1, and when 10 support insulating disc of support face, the first location structure 3 is to insulating disc
It is positioned, meanwhile, the bolt of fixed insulating disc is positioned by the second location structure 4, the then coordinated insulation disk of align structures 5
On alignment mark, make insulating disc that can be aligned when being placed on support face 10.
In a kind of preferably embodiment, as shown in Fig. 2, the overall diameter of toroidal frame 1 is the interior straight of 900MM and toroidal frame 1
Diameter is 600MM, and the toroidal frame 1 of the size can coordinate the size of the insulating disc of common dry etching equipment.
In a kind of preferably embodiment, the first location structure 3 is location hole, and location hole is at least provided with three.
In a kind of preferably embodiment, a diameter of 5MM of location hole.
In a kind of preferably embodiment, as shown in figure 3, the second location structure 4 includes：
Connecting rod 40, one end are radially articulated with 10 edge of support face；
Positioning groove 41 is set to connecting rod 40 backwards to the one end in support face 10；
Positioning groove 41 is positioning the bolt of fixed insulating disc.
In a kind of preferably embodiment, the second location structure 4 at least sets three.
In a kind of preferably embodiment, length of connecting rod 40 for 14MM and/or
41 slot bottom width of positioning groove is 8MM.
In a kind of preferably embodiment, as shown in Fig. 2, align structures 5 are the concave groove mark being set on support face 10,
Concave groove mark is aligned to the alignment mark on coordinated insulation disk.
In a kind of preferably embodiment, as shown in Figure 1, support construction 2 is supporting leg, supporting leg it is vertical be set to toroidal frame
1 backwards to support face 10 one side.
In a kind of preferably embodiment, supporting leg at least sets three.
In a kind of preferably embodiment of the utility model, the lower part retainer plate of insulating disc is placed on toroidal frame first
On 1 support face 10, the first location structure of alignment mark 3 of lower part retainer plate, while the edge groove of lower part retainer plate
The align structures 5 on 1 support face 10 on toroidal frame are directed at, then insulating disc corresponds to the circular trough placement of lower part retainer plate, then
The circular trough of the top retainer plate alignment insulating disc of insulating disc is placed, while the edge groove pair of insulating disc and top retainer plate
Align structures 5 on quasi- 1 support face 10 of toroidal frame are placed.
Further, corresponding ten bolts to fixed insulating disc on insulating disc of installation, are not tightened first, then with
The articulated section for being articulated with the connecting rod 40 at 10 edge of support face is axis, and positioning groove 41 is blocked bolt, makes to be determined by upset connecting rod 40
The screw hole that the bolt that position groove 41 blocks corresponds to bolt on insulating disc is in concentric position, due to part bolt and insulating disc
Exactitude position makes remaining bolt that can also be in the concentric position of screw hole corresponding on insulating disc.
Further, it is fixed after three bolts by positioning groove 41 and tightens remaining seven bolt, finally restore connecting rod 40,
It will be screwed before by 41 fixed three bolts of positioning groove, the fixed screw of four top shield rings is finally installed.
Advantage is：Can accurately correspond to assembling insulating disc and fixing bolt position, and make insulating disc with
Fixing bolt is in the position of concentric circles, reduces unnecessary damage parts and improves maximum race ETCD estimated time of commencing discharging.
The foregoing is merely the utility model preferred embodiment, not thereby limit the utility model embodiment and
Protection domain to those skilled in the art, should can appreciate that all in the utility model specification and diagram
Hold made equivalent replacement and obviously change obtained scheme, the protection model of the utility model should all be included in
In enclosing.
Claims (10)
1. a kind of installation tool, the installation of insulating disc between upper/lower electrode the dry etching equipment of semiconductor technology
Cheng Zhong, which is characterized in that including：
Toroidal frame, the toroidal frame provide a support face to insulating disc described in support；
Support construction is set to the toroidal frame in the one side in the support face, to support the toroidal frame；
First location structure is distributed in the circumferential direction in the support face, to position the insulating disc；
Second location structure is distributed in the circumferential direction at support face edge, to position the bolt of the fixed insulating disc；
Align structures are set to the support face, to be directed at the insulating disc.
2. installation tool according to claim 1, which is characterized in that the overall diameter of the toroidal frame is 900MM and described
The interior diameter of toroidal frame is 600MM.
3. installation tool according to claim 1, which is characterized in that first location structure is location hole, described fixed
Position hole is at least provided with three.
4. installation tool according to claim 3, which is characterized in that a diameter of 5MM of the location hole.
5. installation tool according to claim 1, which is characterized in that second location structure includes：
Connecting rod, one end are radially articulated with support face edge；
Positioning groove is set to the connecting rod backwards to the one end in the support face；
The positioning groove fixes the bolt of the insulating disc to position.
6. installation tool according to claim 5, which is characterized in that second location structure at least sets three.
7. installation tool according to claim 5, which is characterized in that the length of connecting rod for 14MM and/or
The positioning groove slot bottom width is 8MM.
8. installation tool according to claim 1, which is characterized in that the align structures is are set on the support face
Concave groove mark, the concave groove mark is coordinating the alignment mark on the insulating disc to be aligned.
9. installation tool according to claim 1, which is characterized in that the support construction is supporting leg, and the supporting leg is vertical
Be set to one side of the toroidal frame backwards to the support face.
10. installation tool according to claim 9, which is characterized in that the supporting leg at least sets three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721403243.5U CN207495342U (en) | 2017-10-27 | 2017-10-27 | A kind of installation tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721403243.5U CN207495342U (en) | 2017-10-27 | 2017-10-27 | A kind of installation tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207495342U true CN207495342U (en) | 2018-06-15 |
Family
ID=62502286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721403243.5U Active CN207495342U (en) | 2017-10-27 | 2017-10-27 | A kind of installation tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207495342U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023284033A1 (en) * | 2021-07-16 | 2023-01-19 | 长鑫存储技术有限公司 | Installation apparatus and installation method |
| US12125887B2 (en) | 2021-07-16 | 2024-10-22 | Changxin Memory Technologies, Inc. | Mounting apparatus and mounting method |
-
2017
- 2017-10-27 CN CN201721403243.5U patent/CN207495342U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023284033A1 (en) * | 2021-07-16 | 2023-01-19 | 长鑫存储技术有限公司 | Installation apparatus and installation method |
| US12125887B2 (en) | 2021-07-16 | 2024-10-22 | Changxin Memory Technologies, Inc. | Mounting apparatus and mounting method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee after: Wuhan Xinxin Integrated Circuit Co.,Ltd. Country or region after: China Address before: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee before: Wuhan Xinxin Semiconductor Manufacturing Co.,Ltd. Country or region before: China |