CN207474434U - Wafer Carrier box - Google Patents
Wafer Carrier box Download PDFInfo
- Publication number
- CN207474434U CN207474434U CN201721506301.7U CN201721506301U CN207474434U CN 207474434 U CN207474434 U CN 207474434U CN 201721506301 U CN201721506301 U CN 201721506301U CN 207474434 U CN207474434 U CN 207474434U
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- Prior art keywords
- plate
- wafer
- wafer carrier
- carrier box
- fixed cylinder
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of wafer Carrier box, including box body, hermatic door and support frame device, box body has an opening, support frame device for placing wafer can be placed on tray interior by the opening, and pass through opening and hermatic door mating connection, support frame device is made to be enclosed in tray interior.Since support frame device and box body are separate structure, therefore, corresponding various sizes of wafer, can be selected the support frame device of corresponding size, a phenomenon that wafer Carrier box can only place a kind of wafer of size is effectively prevented, and promotes the flexibility used and service efficiency.
Description
Technical field
The utility model is related to a kind of wafer Carrier boxs.
Background technology
In semicon industry and solar energy industry, a kind of sealing is needed, holding for certain amount and size can be loaded
Box is carried to be used in turn wafer carrying, general Carrier box is all that general style is made by the standard size of industry, including
Box body and hermatic door, the inside of the box body have the slit coordinated with wafer, and wafer is inserted into box by coordinating with slit
Internal portion, since slit and box body are integrated chemical conversion type, each box body can only place a kind of wafer of size, and
It can not change, when having small size or off-gauge wafer needs carrying, existing Carrier box is with regard to improper, it is necessary to make
Make suitable carrier to be attached in the Carrier box of standard, to meet the use needs of production.
Utility model content
The utility model provides a kind of wafer Carrier box, overcomes the difficulty of the prior art, and having started one kind can hold
Carry the Carrier box of more specifications or kind wafer.
The utility model provides a kind of wafer Carrier box, including：
Box body, the box body have an opening；
Hermatic door, the hermatic door are connected with the opening；
Support frame device, support frame as described above device can be placed in the tray interior by the opening；
Wherein, support frame as described above device includes a frame and at least two loading plates being oppositely arranged, the loading plate
It is fixed on frame, and the slit coordinated with wafer is provided on the opposite face of two be oppositely arranged the loading plate.
Further, the frame includes the first mounting plate, the second mounting plate and support plate, the support plate
Both ends connect first mounting plate and second mounting plate respectively, wherein, the both ends difference of the loading plate
Connect first mounting plate and second mounting plate.
Further, the loading plate also has the support plate to connect.
Further, the shape of first mounting plate and second mounting plate horizontal stroke with the box body respectively
Cross sectional shape is adapted.
Further, first mounting plate and second mounting plate are respectively provided with borehole slot.
Further, support frame as described above device further includes support column, and the support column is connect with the second mounting plate.
Further, the quantity of the loading plate is four.
Further, limiting pressing device is further included, the limiting pressing device is connect with the box body, for compressing wafer
Piece.
Further, the limiting pressing device includes withstanding installing plate, spring fixed cylinder, spring and hold-down column, the top
Multiple sets of holes are firmly provided on installing plate, the sets of holes arrange setting, Mei Gesuo along the length direction for withstanding installing plate
It states and is arranged respectively in sets of holes there are one the spring fixed cylinder, the spring fixed cylinder has an openend, the spring and institute
It states hold-down column to fill in from the openend of the spring fixed cylinder successively, the hold-down column compresses wafer under the action of the spring
Piece.
Further, the openend diameter of the spring fixed cylinder is less than the diameter inside the spring fixed cylinder, the pressure
Tight column and the abutting end diameter of the spring fixed cylinder are more than the abutting end diameter of the hold-down column and wafer, also, described
Hold-down column and the abutting end of the spring fixed cylinder are located inside the spring fixed cylinder.
As a result of above-mentioned technology, the utility model has the following advantages：
The box body of the utility model and the support frame device of carrying wafer are separate structure, therefore, can be according to wafer
Size, select corresponding support frame device, which can realize the placement of different size or character wafer.
The utility model is further illustrated with reference to the accompanying drawings and embodiments.
Description of the drawings
Fig. 1 is the explosive view of wafer Carrier box described in the utility model；
Fig. 2 is the stereogram of support frame device described in the utility model；
Fig. 3 is the sectional view of limiting pressing device described in the utility model；
Fig. 4 is the enlarged diagram of A in Fig. 3.
Specific embodiment
As shown in Figure 1, the wafer Carrier box includes box body 100, hermatic door 200 and support frame device 300, box body
100 have an opening 110, and the support frame device 300 for placing wafer can be placed on by the opening 110 in box body 100
Portion, and pass through opening 110 and hermatic door 200 be connected, support frame device 300 is made to be enclosed in inside box body 100.Due to support
Rack device and box body are separate structure, therefore, correspond to various sizes of wafer, the support that corresponding size can be selected is rack-mounted
300 are put, effectively prevents a phenomenon that wafer Carrier box can only place a kind of wafer of size, and promote the spirit used
Activity and service efficiency.
The utility model also shows a kind of support frame device structure, as shown in Fig. 2, support frame as described above device 300 includes
Four loading plates 310 and a frame, loading plate 310 can be fixed on by modes such as fastener or fastenings on frame, this has
The support frame device of four loading plates 310 can place two row wafers, and specifically, two loading plates 310 correspond to a row wafer,
Other two carrying 310 corresponds to a row wafers, wherein, it is provided on the opposite face of opposite two loading plates 310 and wafer
The slit of piece cooperation, the quantity of slit is multiple, and is set along the length direction array of loading plate 310, the quantity of the slit
The quantity of wafer can be placed by determining, wafer can coordinate with slit to be inserted between two opposite loading plates 310.Ability
Field technique personnel are it is understood that the quantity of the loading plate 310 can be two, in this way, there are two loading plates 310 for the tool
Support frame device can place a row wafer, and therefore, the quantity of the loading plate 310 can also be other numbers.
As shown in Fig. 2, frame is by first mounting plate 320, the second mounting plates 330, a multiple supports
Plate 340 and multiple support columns 350 are built, wherein, the both ends of support plate 340 connect 320 He of the first mounting plate respectively
Second mounting plate 330, and pass through fastener and fix, support column 350 is connected to 330 bottom of the second mounting plate, in this way,
When frame is placed in box body 100, the padded frame of the support column 350, convenient for the insertion of wafer.The two of loading plate 310
End can connect the first mounting plate 320 and the second mounting plate 330, also, loading plate 310 can also be with support plate respectively
340 connections, in this way, loading plate 310 is mounted on the stability higher on frame, effectively prevent loading plate to loosen.Aforementioned first
The shape of 320 and second mounting plate 330 of mounting plate can be identical, and the cross-sectional shape with box body 100 is adapted, all
Semicircular in shape in this way, when frame is placed on tray interior, is effectively placed frame and is shaken, wherein, frame and box body 100 can be
It is full of and coordinates or fixed by fastener.In addition, also have on 320 and second mounting plate 330 of the first mounting plate
Borehole slot 321, to mitigate weight.
The materials such as aluminium alloy, POM, nylon can be selected in the material of aforementioned support frame device.
As shown in Figure 1, the wafer Carrier box further include limiting pressing device 400, limiting pressing device 400 can with it is close
200 connection of closure door, when hermatic door 200 is connect with the opening 110 on box body 100, limiting pressing device 400 compresses wafer,
Prevent wafer from shaking and leading to breakage.Wherein, each limiting pressing device 400 corresponds to a row wafer respectively, therefore, if
Support frame device 300 has two row wafers, and two limiting pressing devices 400 can be used at this time.As shown in Figure 3 and Figure 4, it limits
Pressing device 400 includes withstanding installing plate 410, spring fixed cylinder 420, spring and hold-down column 430, withstands and is set on installing plate 410
Be equipped with multiple sets of holes, sets of holes arrange setting along the length direction for withstanding installing plate 410, be arranged respectively in each sets of holes there are one
Spring fixed cylinder 420, spring fixed cylinder 420 have an openend, and spring and hold-down column 430 are successively from spring fixed cylinder 420
Openend is filled in, in this way, hold-down column 430 is under the action of the spring, the axis along spring fixed cylinder 420 is for linear motion, with
Wafer is compressed, therefore, 430 quantity of hold-down column on a limiting pressing device 400 and the slit on a loading plate 310
Quantity is consistent, and position is also corresponding.To prevent hold-down column 430 from being skidded off from the openend of spring fixed cylinder 420, spring fixed cylinder
420 openend diameter is less than the diameter inside spring fixed cylinder 420, also, hold-down column 430 and spring fixed cylinder 420 are matched
The abutting end diameter that end diameter is more than hold-down column 430 and wafer is closed, therefore, which matches with spring fixed cylinder 420
It closes end to be located inside spring fixed cylinder 420, in this way, hold-down column 430 would not be skidded off from the openend of spring fixed cylinder 420.
Limiting pressing device 400 is not limited to the form with spring fixed cylinder 420, spring and hold-down column 430, can also use it
He replaces with elastically-deformable material, such as：Hollow silicon sebific duct etc..
The utility model can not only be used in semicon industry, can also be generalized to the row of corresponding similar application Carrier box
Industry, for example, solar energy industry.
Embodiment described above is merely to illustrate the technological thought and feature of the utility model, and its object is to make ability
Technical staff in domain can understand the content of the utility model and implement according to this, it is impossible to only limit this practicality with the present embodiment
Novel patent uses range, i.e., all equal variations or modification made according to the revealed spirit of the utility model are still fallen at this
In the scope of the claims of utility model.
Claims (10)
1. a kind of wafer Carrier box, which is characterized in that including：
Box body, the box body have an opening；
Hermatic door, the hermatic door are connected with the opening；
Support frame device, support frame as described above device can be placed in the tray interior by the opening；
Wherein, support frame as described above device includes a frame and at least two loading plates being oppositely arranged, the loading plate are fixed
On frame, and the slit coordinated with wafer is provided on the opposite face of two loading plates being oppositely arranged.
2. wafer Carrier box as described in claim 1, which is characterized in that the frame includes the first mounting plate, the
Two mounting plates and support plate, the both ends of the support plate connect first mounting plate and second installation respectively
Fixed plate, wherein, the both ends of the loading plate connect first mounting plate and second mounting plate respectively.
3. wafer Carrier box as claimed in claim 2, which is characterized in that the loading plate also has the support plate to connect.
4. wafer Carrier box as claimed in claim 2, which is characterized in that first mounting plate and second peace
Cross-sectional shape of the shape of fixed plate respectively with the box body is filled to be adapted.
5. wafer Carrier box as claimed in claim 2, which is characterized in that first mounting plate and second peace
Dress fixed plate is respectively provided with borehole slot.
6. wafer Carrier box as claimed in claim 2, which is characterized in that support frame as described above device further includes support column, institute
Support column is stated to connect with the second mounting plate.
7. wafer Carrier box as described in claim 1, which is characterized in that the quantity of the loading plate is four.
8. wafer Carrier box as described in claim 1, which is characterized in that further include limiting pressing device, the limiting pressure
Tight device is connect with the box body, for compressing wafer.
9. wafer Carrier box as claimed in claim 8, which is characterized in that the limiting pressing device includes withstanding installation
Plate, spring fixed cylinder, spring and hold-down column, described withstand are provided with multiple sets of holes on installing plate, the sets of holes are along the top
The firmly length direction arrangement setting of installing plate, is arranged that there are one the spring fixed cylinder, the bullets in each sets of holes respectively
Spring fixed cylinder has an openend, and the spring and the hold-down column are filled in successively from the openend of the spring fixed cylinder, institute
It states hold-down column and compresses wafer under the action of the spring.
10. wafer Carrier box as claimed in claim 9, which is characterized in that the openend diameter of the spring fixed cylinder is small
Diameter inside the spring fixed cylinder, the hold-down column and the abutting end diameter of the spring fixed cylinder are more than the compression
The abutting end diameter of column and wafer, also, the hold-down column and the abutting end of the spring fixed cylinder are located at the spring and consolidate
Inside safety barrel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721506301.7U CN207474434U (en) | 2017-11-13 | 2017-11-13 | Wafer Carrier box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721506301.7U CN207474434U (en) | 2017-11-13 | 2017-11-13 | Wafer Carrier box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207474434U true CN207474434U (en) | 2018-06-08 |
Family
ID=62260125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721506301.7U Active CN207474434U (en) | 2017-11-13 | 2017-11-13 | Wafer Carrier box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207474434U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109524359A (en) * | 2018-11-13 | 2019-03-26 | 常州信息职业技术学院 | A kind of clipping chip package mechanism of overturning |
-
2017
- 2017-11-13 CN CN201721506301.7U patent/CN207474434U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109524359A (en) * | 2018-11-13 | 2019-03-26 | 常州信息职业技术学院 | A kind of clipping chip package mechanism of overturning |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Room 202, Building 1, 555 Wanfang Road, Minhang District, Shanghai, 201100 Patentee after: Shanghai Han's Fuchuang Technology Co.,Ltd. Address before: Room 202, Building 1, 555 Wanfang Road, Minhang District, Shanghai, 201100 Patentee before: SHANGHAI FORTREND TECHNOLOGY Co.,Ltd. |