CN207460573U - Wide cut plasma surface processing device - Google Patents

Wide cut plasma surface processing device Download PDF

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Publication number
CN207460573U
CN207460573U CN201721569775.6U CN201721569775U CN207460573U CN 207460573 U CN207460573 U CN 207460573U CN 201721569775 U CN201721569775 U CN 201721569775U CN 207460573 U CN207460573 U CN 207460573U
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plate
box body
fixed plate
surface processing
processing device
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CN201721569775.6U
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Chinese (zh)
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何婷
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Shenzhen Cheng Cheng Feng Co Ltd
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Shenzhen Cheng Cheng Feng Co Ltd
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Abstract

The utility model discloses wide cut plasma surface processing devices, box body including closing, fixed plate equipped with sealing plate and the insulation positioned at the lower section of sealing plate in box body, sealing plate and fixed plate separate the inner cavity of box body for air inlet area, Yun Qi areas and outlet area, outlet area is between fixed plate and the bottom plate of box body, sealing plate is equipped with the first through hole of at least one connection air inlet area and Yun Qi areas, and fixed plate is equipped with second through hole at least one connection Yun Qi areas and outlet area;Box body is equipped at least one air inlet being connected with air inlet area;The bottom plate of box body is equipped with multiple third through-holes, a nozzle is respectively and fixedly provided on each third through-hole, multiple electrodes component is fixed in fixed plate, the part that electrode assembly corresponds setting and electrode assembly with nozzle is located in nozzle, high-voltage line is fixed on box body, high-voltage line is turned on by the circuit in fixed plate with electrode assembly.With multiple nozzles, the efficiency that plasma surface processing device handles object to be processed is substantially increased.

Description

Wide cut plasma surface processing device
Technical field
The utility model is related to plasma technology field more particularly to wide cut plasma surface processing devices.
Background technology
Plasma, also known as plasma state.Substance under plasma state, which has, is similar to gaseous property, such as well Mobility and diffusivity.But since the basic constituent particle of plasma is ion and electronics, it also has many It is different from gaseous property, such as good electric conductivity, thermal conductivity.Particularly, according to scientific algorithm, the specific heat capacity of plasma Directly proportional to temperature, the specific heat capacity of plasma is often hundreds times of gas under high temperature.So the application of plasma is very It is extensive, from our daily life to industry, agricultural, environmental protection, military affairs, aerospace, the energy, celestial body etc., it has very Important application value.
For existing plasma surface processing device only there are one nozzle, production efficiency is very low.It is therefore necessary to provide A kind of wide cut plasma surface processing device high with multiple nozzle production efficiencys.
Utility model content
Technical problem to be solved in the utility model is:There is provided a kind of production efficiency high wide cut Surface Treatment with Plasma Device.
In order to solve the above-mentioned technical problem, the technical solution adopted in the utility model is:Wide cut Surface Treatment with Plasma fills It puts, the box body including closing, the fixed plate equipped with sealing plate and the insulation positioned at the lower section of sealing plate, the sealing plate and fixation in box body The inner cavity partition of the box body is air inlet area, Yun Qi areas and outlet area by plate, and the outlet area is located at the bottom of fixed plate and box body Between plate, the sealing plate is equipped with the first through hole of at least one connection air inlet area and Yun Qi areas, and the fixed plate is equipped with extremely Second through hole in a few connection Yun Qi area and outlet area;The box body, which is equipped with, at least one to be connected with the air inlet area Air inlet;The bottom plate of the box body is equipped with multiple third through-holes, and a nozzle, institute are respectively and fixedly provided on each third through-hole It states and multiple electrodes component is fixed in fixed plate, the electrode assembly corresponds the one of setting and electrode assembly with the nozzle Part is located in the nozzle, high-voltage line is fixed on box body, the high-voltage line passes through the circuit in fixed plate and the electrode Element turns.
Further, the electrode assembly includes the electrode fixing axle being detachably connected and electrode, the electrode fixing axle It is detachably connected with the fixed plate, a part for the electrode is located in the nozzle.
Further, the electrode fixing axle is threadedly coupled with the fixed plate and passes through the circuit and led with high-voltage line It is logical.
Further, the electrode fixing axle is connected and turns on the electrode thread.
Further, the quantity of second through hole is multiple that multiple electrode assemblies are arranged on the central area of fixed plate It domain and is arranged at least two rows of.
Further, the adjacent two rows electrode assembly shifts to install.
Further, multiple second through holes are distributed in two rows in fixed plate, and the electrode assembly is located at two rows Between second through hole.
Further, the bottom plate of the box body is equipped at least one cooling duct.
Further, cold air or coolant are passed through in the cooling duct.
Further, the box body includes the internal frame body of the hollow structure of outer housing and both ends open, is set inside internal frame body There are the first annular groove and the second annular groove, the sealing plate is fixed on by the first annular groove in internal frame body, and the fixed plate passes through the second ring Slot is fixed in internal frame body, and outer housing includes the outer frame body of the hollow structure of top plate, bottom plate and both ends open, the top plate and bottom Plate is connected with outer frame body and blocks two openings of the outer frame body respectively respectively, and the internal frame body is located in outer frame body and is close to The outer frame body, the top plate are equipped with to fix the 3rd annular groove on internal frame body top, and the bottom plate is equipped with to fix 4th annular groove of internal frame body bottom.
The beneficial effects of the utility model are:Wide cut plasma surface processing device provided by the utility model has more A nozzle substantially increases plasma surface processing device production, the efficiency for handling object to be processed;Handle object to be processed Effect, which also has, to be obviously improved;It is simple in structure, easy to manufacture, it is worthy of popularization.
Description of the drawings
Fig. 1 is the integrally-built schematic diagram of the wide cut plasma surface processing device of the utility model embodiment one;
Fig. 2 is the explosive view of the wide cut plasma surface processing device of the utility model embodiment one;
Fig. 3 is the sectional view of the wide cut plasma surface processing device of the utility model embodiment one;
Fig. 4 is the perspective view of the bottom plate in the wide cut plasma surface processing device of the utility model embodiment one.
Label declaration:
1st, box body;11st, top plate;12nd, bottom plate;121st, third through-hole;13rd, outer frame body;
14th, internal frame body;2nd, sealing plate;21st, first through hole;3rd, fixed plate;31st, the second through hole;
4th, air inlet area;5th, Yun Qi areas;6th, outlet area;7th, nozzle;8th, electrode assembly;
81st, electrode fixing axle;82nd, electrode;9th, high-voltage line;10th, cooling duct;20th, air inlet;
101st, the first annular groove;102nd, the second annular groove;103rd, the 3rd annular groove;104th, the 4th annular groove.
Specific embodiment
For the technology contents of the utility model, the objects and the effects are described in detail, below in conjunction with embodiment and match somebody with somebody Attached drawing is closed to be explained.
The design of the utility model most critical is:Multiple nozzles are set on plasma surface processing device.
Fig. 1 to Fig. 4 is refer to, wide cut plasma surface processing device, the box body 1 including closing, box body 1 is interior to be equipped with sealing plate 2 and the fixed plate 3 of the insulation positioned at the lower section of sealing plate 2, the sealing plate 2 and fixed plate 3 by the partition of the inner cavity of the box body 1 be into Gas area 4, Yun Qi areas 5 and outlet area 6, the outlet area 6 are located between fixed plate 3 and the bottom plate 12 of box body 1, on the sealing plate 2 First through hole 21 equipped at least one connection air inlet area 4 with Yun Qi areas 5, it is even that the fixed plate 3 is equipped at least one connection Second through hole 31 in gas area 5 and outlet area 6;The box body 1 is equipped at least one air inlet being connected with the air inlet area 4 20;The bottom plate 12 of the box body 1 is equipped with multiple third through-holes 121, and a spray is respectively and fixedly provided on each third through-hole 121 Mouth 7, is fixed with multiple electrodes component 8 in the fixed plate 3, and the electrode assembly 8 is corresponded with the nozzle 7 to be set and electricity A part for pole component 8 is located in the nozzle 7, and high-voltage line 9 is fixed on box body 1, and the high-voltage line 9 passes through in fixed plate 3 Circuit turned on the electrode assembly 8.
Structure/the operation principle of the utility model is summarized as follows:Electrode assembly 8 is used as cathode, and the inner wall of nozzle 7 is as sun Pole, the working air current gap between air inlet 20, first through hole 21, the second through hole 31 and electrode assembly 8 and nozzle 7 successively Discharge, working air current ionize at the gap, form plasma and spray.The effect in wherein air inlet area 4 and Yun Qi areas 5 is The flow velocity of working air current is reduced, so that the working air current into outlet area 6 is gentle, uniformly, and then allows what nozzle 7 sprayed etc. Gas ions are evenly.The gas of working air current includes but not limited to oxygen, argon gas, nitrogen and compressed air.The circuit includes But it is not limited by the structure of mode rectification and the conversion of the energy of control extra electric field or high-frequency and high-voltage induction field of resistance capacitance It makes.
As can be seen from the above description, the beneficial effects of the utility model are:Wide cut plasma table provided by the utility model Surface treatment device has multiple nozzles, substantially increases plasma surface processing device production, the efficiency for handling object to be processed; It handles the effect of object to be processed and also has and be obviously improved;It is simple in structure, easy to manufacture, it is worthy of popularization.
Further, the electrode assembly 8 includes the electrode fixing axle 81 being detachably connected and electrode 82, the electrode are consolidated Dead axle 81 is detachably connected with the fixed plate 3, and a part for the electrode 82 is located in the nozzle 7.
Seen from the above description, electrode fixing axle be connected with electrode replaceable electrode is individually replaced (electrode is Consumable articles), the maintenance cost of wide cut plasma surface processing device is advantageously reduced, is conducive to enhance user experience.
Further, the electrode fixing axle 81 is threadedly coupled with the fixed plate 3 and passes through the circuit and high-voltage line 9 Conducting.
Seen from the above description, electrode fixing axle is spirally connected with fixed plate allows electrode fixing axle to be individually replaced, favorably In the maintenance cost for reducing wide cut plasma surface processing device, be conducive to enhance user experience.
Further, the electrode fixing axle 81 is threadedly coupled and turns on the electrode 82.
Seen from the above description, electrode fixing axle and electrode stable connection, dismounting are easy.
Further, multiple electrode assemblies 8 are arranged on the middle section of fixed plate 3 and are arranged at least two rows of.
Seen from the above description, multiple electrodes component is provided at least two rows beneficial to reduction wide cut Surface Treatment with Plasma The volume of device.
Further, the adjacent two rows electrode assembly 8 shifts to install.
Seen from the above description, the adjacent two rows electrode assembly, which shifts to install, can further reduce wide cut plasma The volume of surface processing device.The electrode assembly referred in a row is shifted to install to correspond in adjacent row between two electrode assemblies The position in gap is set.
Further, the quantity of second through hole 31 is multiple that multiple second through holes 31 are distributed on solid in two rows On fixed board 3, and the electrode assembly 8 is located between two rows of second through holes 31.
Seen from the above description, multiple second through holes are set and the second through hole can uniformly allow the working air current in Yun Qi areas Gas uniformly enters outlet area and is discharged from nozzle, and it is more uniform to be conducive to the plasma that nozzle is allowed to spray.
Further, the bottom plate 12 of the box body 1 is equipped at least one cooling duct 10.
Further, cold air or coolant are passed through in the cooling duct 10.
Seen from the above description, setting cooling duct that can not only play cooling effect to bottom plate on bottom plate can also allow The state of plasma is more stablized, and is conducive to improve the processing effect that wide cut plasma surface processing device treats processing object Fruit.
Further, the box body 1 includes the internal frame body 14 of the hollow structure of outer housing and both ends open, in internal frame body 14 Portion is equipped with the first annular groove 101 and the second annular groove 102, and the sealing plate 2 is fixed on by the first annular groove 101 in internal frame body 14, described Fixed plate 3 is fixed on by the second annular groove 102 in internal frame body 14, and outer housing is included in top plate 11, bottom plate 12 and both ends open The outer frame body 13 of hollow structure, the top plate 11 and bottom plate 12 are connected with outer frame body 13 and block the outer frame body 13 respectively respectively Two openings, the internal frame body 14 are located in outer frame body 13 and are close to the outer frame body 13, and the top plate 11 is equipped with for solid Determine the 3rd annular groove 103 on 14 top of internal frame body, the bottom plate 12 is equipped with to fix the 4th annular groove of 14 bottom of internal frame body 104。
Seen from the above description, internal frame body is set, and top plate and bottom plate set the of fixed internal frame body top and bottom respectively Three annular grooves and the 4th annular groove are conducive to improve the leakproofness of wide cut plasma surface processing device.
Embodiment one
Fig. 1 to Fig. 4 is refer to, the embodiment one of the utility model is:Wide cut plasma surface processing device, including closing Box body 1, the fixed plate 3 equipped with sealing plate 2 and the insulation positioned at the lower section of sealing plate 2 in box body 1, the sealing plate 2 and fixed plate 3 will The inner cavity partition of the box body 1 is air inlet area 4, Yun Qi areas 5 and outlet area 6, and the outlet area 6 is located at fixed plate 3 and box body 1 Between bottom plate 12, the sealing plate 2 is equipped at least one connection air inlet area 4 and the first through hole 21 in Yun Qi areas 5, the fixed plate 3 are equipped with second through hole 31 at least one connection Yun Qi areas 5 and outlet area 6;The box body 1 be equipped with it is at least one with it is described The air inlet 20 that air inlet area 4 is connected;The bottom plate 12 of the box body 1 is equipped with multiple third through-holes 121, each threeway A nozzle 7 is respectively and fixedly provided on hole 121, is fixed with multiple electrodes component 8 in the fixed plate 3, the electrode assembly 8 with it is described Nozzle 7 corresponds setting and a part for electrode assembly 8 is located in the nozzle 7, and high-voltage line 9 is fixed on box body 1, described High-voltage line 9 is turned on by the circuit in fixed plate 3 and the electrode assembly 8.
Preferably, the air inlet 20 is set with 21 non-alignment of first through hole, so that air inlet 20 enters The gas of working air current can be in the resident a period of time of air inlet area 4, so as to allow the gas for entering Yun Qi areas 5 that can become gentle Some.Further preferably, the quantity of first through hole 21 is multiple, and multiple described first by being distributed on the edge of sealing plate 2.It is described Nozzle 7 is connected fixation by screw thread with the bottom plate 12.
The box body 1 includes the internal frame body 14 of the hollow structure of outer housing and both ends open, and internal frame body 14 is internally provided with the One annular groove 101 and the second annular groove 102, the sealing plate 2 are fixed on by the first annular groove 101 in internal frame body 14, and the fixed plate 3 is logical It crosses the second annular groove 102 to be fixed in internal frame body 14, outer housing includes the outer of the hollow structure of top plate 11, bottom plate 12 and both ends open Framework 13, the top plate 11 and bottom plate 12 are connected with outer frame body 13 and block two openings of the outer frame body 13 respectively respectively, The internal frame body 14 is located in outer frame body 13 and is close to the outer frame body 13, and the top plate 11 is equipped with to fix internal frame body 14 3rd annular groove 103 on top, the bottom plate 12 are equipped with to fix the 4th annular groove 104 of 14 bottom of internal frame body.Above-mentioned setting The air-tightness of wide cut plasma surface processing device can be improved.Readily comprehensible, the bottom plate 12 of outer housing is the bottom of box body 1 Plate 12, the top plate 11 of outer housing are the top plate 11 of box body 1.
Certainly, be not provided with internal frame body 14 be also it is feasible, only need to be in the junction of outer frame body 13 and top plate 11 and bottom plate 12 Set sealing ring that can also improve the air-tightness of wide cut plasma surface processing device.
The electrode assembly 8 includes the electrode fixing axle 81 that is detachably connected and electrode 82, the electrode fixing axle 81 with The fixed plate 3 is detachably connected, and a part for the electrode 82 is located in the nozzle 7.
In the present embodiment, the electrode fixing axle 81 is threadedly coupled with the fixed plate 3 and by the circuit and high pressure Line 9 turns on, and the electrode fixing axle 81 is threadedly coupled and turns on the electrode 82.
Multiple electrode assemblies 8 are arranged on the middle section of fixed plate 3 and are arranged at least two rows, described in adjacent two rows Electrode assembly 8 shifts to install.
In the present embodiment, the quantity of second through hole 31 is multiple, and multiple second through holes 31 are distributed in two rows In fixed plate 3, and the electrode assembly 8 is located between two rows of second through holes 31.
The bottom plate 12 of the box body 1 is equipped at least one cooling duct 10, be passed through in the cooling duct 10 cold air or Coolant.
Electrode assembly 8 is used as cathode, and as anode, working air current leads to the inner wall of nozzle 7 via air inlet 20, first successively Gap discharge between hole 21, the second through hole 31 and electrode assembly 8 and nozzle 7, the high-frequency and high-voltage shape between cathode and anode Under state, the elastic collision of electronics and neutral molecule in the gap in the gas of working air current causes molecular kinetic energy to increase, table Now raised for temperature;And inelastic collision then cause excite (electronics in molecule or atom transits to high level by low-lying level), Dissociate (molecule is decomposed into atom) or ionization (outer-shell electron of molecule or atom becomes free electron from bound state).High-temperature gas Energy is transmitted to by conduction, convection current and radiation by ambient enviroment, under Steady, to the input energy in constant volume and loss Energy is equal.The rate of energy transmission and collision frequency (are touched in the unit interval between electronics and heavy particle (ion, molecule and atom) The number hit) it is directly proportional.Under low air pressure condition, collision is seldom, and the energy that electronics is obtained from electric field is not easy to be transmitted to heavy particle, Electron temperature is higher than gas temperature at this time, forms nonequilibrium plasma.Plasma is under the pressure of working gas, from nozzle It is ejected on 7, directly acts on the surface of processing object, realize the following effect for treating processing body surface:Etching action, Cleaning action, startup effect, ablation, crosslinked action etc..
In conclusion wide cut plasma surface processing device provided by the utility model, has multiple nozzles, greatly improves Plasma surface processing device production, the efficiency of processing object to be processed;The effect for handling object to be processed also has substantially Promotion;It is simple in structure, easy to manufacture, it is worthy of popularization;Electrode fixing axle is connected with electrode replaceable so that electrode can be with It is individually replaced, advantageously reduces the maintenance cost of wide cut plasma surface processing device, be conducive to enhance user experience;Multiple electricity Pole component is provided at least two rows of beneficial to the volume for reducing wide cut plasma surface processing device;Set multiple second through holes and Second through hole can uniformly allow the gas of the working air current in Yun Qi areas to uniformly enter outlet area and discharged from nozzle, be conducive to allow The plasma that nozzle sprays is more uniform;Cooling duct is set not only can to play cooling effect to bottom plate on bottom plate may be used also State to allow plasma is more stablized, and is conducive to improve the processing that wide cut plasma surface processing device treats processing object Effect;Internal frame body is set, and top plate and bottom plate set the 3rd annular groove on fixed internal frame body top and bottom and the 4th annular groove to have respectively Beneficial to the leakproofness for improving wide cut plasma surface processing device.
The above description is only the embodiments of the present invention, and it does not limit the scope of the patent of the present invention, every Equivalents made based on the specification and figures of the utility model are directly or indirectly used in relevant technology neck Domain is equally included in the patent within the scope of the utility model.

Claims (10)

1. wide cut plasma surface processing device, it is characterised in that:Box body including closing, box body is interior to be equipped with sealing plate and positioned at envelope The partition of the inner cavity of the box body is air inlet area by the fixed plate of the insulation of the lower section of plate, the sealing plate and fixed plate, Yun Qi areas and Outlet area, between fixed plate and the bottom plate of box body, the sealing plate is equipped at least one connection air inlet area in the outlet area With the first through hole in Yun Qi areas, the fixed plate is equipped with second through hole at least one connection Yun Qi areas and outlet area;It is described Box body is equipped at least one air inlet being connected with the air inlet area;The bottom plate of the box body is equipped with multiple threeways Hole is each respectively and fixedly provided with a nozzle on the third through-hole, multiple electrodes component, the electrode is fixed in the fixed plate The part that component corresponds setting and electrode assembly with the nozzle is located in the nozzle, and high pressure is fixed on box body Line, the high-voltage line are turned on by the circuit in fixed plate with the electrode assembly.
2. wide cut plasma surface processing device according to claim 1, it is characterised in that:The electrode assembly includes can The electrode fixing axle and electrode of dismantling connection, the electrode fixing axle are detachably connected with the fixed plate, and the one of the electrode Part is located in the nozzle.
3. wide cut plasma surface processing device according to claim 2, it is characterised in that:The electrode fixing axle and institute It states fixed plate and is threadedly coupled and passes through the circuit and turned on high-voltage line.
4. the wide cut plasma surface processing device according to Claims 2 or 3, it is characterised in that:The electrode fixing axle It is connected and turns on the electrode thread.
5. wide cut plasma surface processing device according to claim 1, it is characterised in that:The quantity of second through hole To be multiple, multiple electrode assemblies are arranged on the middle section of fixed plate and are arranged at least two rows of.
6. wide cut plasma surface processing device according to claim 5, it is characterised in that:The adjacent two rows electrode Component shifts to install.
7. wide cut plasma surface processing device according to claim 5, it is characterised in that:Multiple second through holes are in Two rows are distributed in fixed plate, and the electrode assembly is located between two rows of second through holes.
8. wide cut plasma surface processing device according to claim 1, it is characterised in that:It is set on the bottom plate of the box body There is at least one cooling duct.
9. wide cut plasma surface processing device according to claim 8, it is characterised in that:It is passed through in the cooling duct Cold air or coolant.
10. wide cut plasma surface processing device according to claim 1, it is characterised in that:The box body includes shell The internal frame body of the hollow structure of body and both ends open, internal frame body are internally provided with the first annular groove and the second annular groove, and the sealing plate passes through First annular groove is fixed in internal frame body, and the fixed plate is fixed on by the second annular groove in internal frame body, and outer housing includes top plate, bottom The outer frame body of the hollow structure of plate and both ends open, the top plate and bottom plate are connected with outer frame body and block respectively described outer respectively Two openings of framework, the internal frame body are located in outer frame body and are close to the outer frame body, and the top plate is equipped with to fix 3rd annular groove on internal frame body top, the bottom plate are equipped with to fix the 4th annular groove of internal frame body bottom.
CN201721569775.6U 2017-11-21 2017-11-21 Wide cut plasma surface processing device Active CN207460573U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721569775.6U CN207460573U (en) 2017-11-21 2017-11-21 Wide cut plasma surface processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721569775.6U CN207460573U (en) 2017-11-21 2017-11-21 Wide cut plasma surface processing device

Publications (1)

Publication Number Publication Date
CN207460573U true CN207460573U (en) 2018-06-05

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Application Number Title Priority Date Filing Date
CN201721569775.6U Active CN207460573U (en) 2017-11-21 2017-11-21 Wide cut plasma surface processing device

Country Status (1)

Country Link
CN (1) CN207460573U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107801288A (en) * 2017-11-21 2018-03-13 深圳市诚峰智造有限公司 Wide cut plasma surface processing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107801288A (en) * 2017-11-21 2018-03-13 深圳市诚峰智造有限公司 Wide cut plasma surface processing device
CN107801288B (en) * 2017-11-21 2024-06-04 深圳市诚峰智造有限公司 Broad-width plasma surface treatment device

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