CN207457349U - A kind of slice resistivity detection device - Google Patents
A kind of slice resistivity detection device Download PDFInfo
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- CN207457349U CN207457349U CN201721686210.6U CN201721686210U CN207457349U CN 207457349 U CN207457349 U CN 207457349U CN 201721686210 U CN201721686210 U CN 201721686210U CN 207457349 U CN207457349 U CN 207457349U
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- housing
- threaded rod
- side wall
- helical gear
- wall
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Abstract
The utility model discloses a kind of slice resistivity detection devices,Including housing,The inner wall of the housing is rotatably connected to the first threaded rod laterally set by the first rotating member,And first threaded rod set through the one side side wall of housing,The sidewall sheath of first threaded rod is set there are two the first helical gear,There are two be equipped with the second threaded rod vertically by the rotation connection of the second rotating member for the upper end inner wall of the housing,And two the second threaded rods are located at the first helical gear top respectively,The two described one end of second threaded rod away from the second rotating member are equipped with and matched second helical gear of the first helical gear,The side wall of two second threaded rods is arranged with matched nut,Monitor station is equipped between two nuts,The upper end side wall of the housing is equipped with and the matched opening of monitor station,The utility model can detection resistance rate in a sealed meter environment,Improve accuracy.
Description
Technical field
The utility model is related to Resistivity testing technical field more particularly to a kind of slice resistivity detection devices.
Background technology
Chip is one of most important raw materials of LED, is the luminous component of LED, part most crucial LED, chip it is good
The bad performance that will directly determine LED, chip is by being made of III and V race's composite semiconductor substance, before chip dispatches from the factory all
Resistivity testing is carried out, current detection is all directly to be detected by detection device under external environment, not in view of air
The influence of humidity, temperature, air plankton to resistivity, therefore testing result has certain limitation, for this purpose, it is proposed that one
Slice resistivity detection device is planted to solve the above problems.
The content of the invention
It in order to solve detection current is in the prior art directly existed by detection device that the purpose of this utility model, which is,
It is detected under external environment, not in view of the influence of air humidity, temperature, air plankton to resistivity, therefore testing result has
Certain confinement problems, and a kind of slice resistivity detection device proposed.
To achieve these goals, the utility model employs following technical solution：
A kind of slice resistivity detection device, including housing, the inner wall of the housing is rotatablely connected by the first rotating member
There is the first threaded rod laterally set, and the first threaded rod is set through the one side side wall of housing, the side of first threaded rod
Wall is arranged there are two the first helical gear, and there are two be equipped with vertically by the rotation connection of the second rotating member for the upper end inner wall of the housing
Second threaded rod, and two the second threaded rods are located at the first helical gear top respectively, two second threaded rods are away from the
One end of two rotating members is equipped with to be covered with matched second helical gear of the first helical gear, the side wall of two second threaded rods
Equipped with matched nut, monitor station is equipped between two nuts, the upper end side wall of the housing is equipped with and monitor station
Matched opening, the upper end side wall of the housing are additionally provided with two sliding slots, and two sliding slots are located at the both sides of opening respectively, two
The sliding slot slidably connects closed plate by sliding block, and two closed plates are located at the top of opening, the one side of the housing
Inner wall is equipped with temperature controller, the opposite side inner wall vacuum pump of the housing, and vacuum pump and is set through the side wall of housing.
Preferably, first threaded rod is arranged with sealing ring at housing.
Preferably, first threaded rod is hollow structure, sets that there are two what is be arranged in parallel to dial in first threaded rod
Piece, and plectrum is set through one end side wall of the first threaded rod, is connected between two plectrums by presetting the spring of quantity,
One side side wall of two plectrums away from spring is equipped with the kelly of default quantity, and kelly runs through the side wall of the first threaded rod
It sets, the side wall of the housing is equipped with default quantity and the matched card slot of kelly.
Preferably, it is enclosed with sponge protective case on first threaded rod.
Preferably, two first helical gears are set in the same direction on the first threaded rod.
The utility model is got up housing seal by the way that monitor station is taken in housing, makes monitor station and external environment
Isolation, reduces influence of the extraneous factor to slice resistivity, improves the accuracy of detection.
Description of the drawings
Fig. 1 be the utility model proposes a kind of slice resistivity detection device structure diagram；
Fig. 2 is the structure diagram at A in Fig. 1.
In figure：1 housing, 2 first rotating members, 3 first threaded rods, 4 first helical gears, 5 second rotating members, 6 second screw threads
Bar, 7 second helical gears, 8 nuts, 9 monitor stations, 10 openings, 11 sliding slots, 12 sliding blocks, 13 closed plates, 14 temperature controllers, 15 are very
Empty pump, 16 plectrums, 17 springs, 18 kellies, 19 card slots.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.
With reference to Fig. 1-2, a kind of slice resistivity detection device, including housing 1, the inner wall of housing 1 passes through the first rotating member 2
It is rotatably connected to the first threaded rod 3 laterally set, the first threaded rod 3 is hollow structure, sets that there are two flat in the first threaded rod 3
The plectrum 16 that row is set, and plectrum 16 is set through one end side wall of the first threaded rod 3, passes through present count between two plectrums 16
The spring 17 of amount connects, and one side side wall of two plectrums 16 away from spring 17 is equipped with the kelly 18 of default quantity, and kelly 18
Side wall through the first threaded rod 3 is set, and the side wall of housing 1 is equipped with default quantity and 18 matched card slot 19 of kelly, this knot
Structure can prevent the first threaded rod 3 from voluntarily rotating that monitor station 9 is caused to teetertotter on the second threaded rod 6, therefore turn every time
Before dynamic first threaded rod 3, plectrum 16 is first stirred, makes two plectrums 16 close to each other, the spring 17 between plectrum 16 is compressed, card
Bar 18 is separated with card slot 19 and is retracted in the first threaded rod 3, and the first threaded rod 3 can rotate, after plectrum 16 are unclamped, spring 17
Elastic force kelly 18 is snapped into card slot 19, the first threaded rod 3 is fixed, and sponge protective case is enclosed on the first threaded rod 3,
Hand abrades when preventing from rotating, and the first threaded rod 3 is arranged with sealing ring at housing 1, prevents extraneous air permeable from running through
The gap at place is entered in housing 1, and the first threaded rod 3 is set through the one side side wall of housing 1, the side wall of the first threaded rod 3
It is arranged there are two the first helical gear 4, two the first helical gears 4 are set in the same direction on the first threaded rod 3, in order to make two the second spiral shells
The rotation direction of rasp bar 6 is identical, so that nut 8 drives monitor station 9 to move up and down, the upper end inner wall of housing 1 passes through second turn
There are two vertically equipped with the second threaded rod 6, and two the second threaded rods 6 are respectively positioned at the first helical gear 4 for the rotation connection of moving part 5
Top, two one end of the second threaded rod 6 away from the second rotating member 5 are equipped with and 4 matched second helical gear of the first helical gear
7, the side wall of two the second threaded rods 6 is arranged with matched nut 8, and monitor station 9, housing 1 are equipped between two nuts 8
Upper end side wall be equipped with monitor station 9 it is matched opening 10, the upper end side wall of housing 1 is additionally provided with two sliding slots 11, and two cunnings
Slot 11 is located at the both sides of opening 10 respectively, and two sliding slots 11 slidably connect closed plate 13, and two closings by sliding block 12
Plate 13 is located at the top of opening 10, and the one side inner wall of housing 1 is equipped with temperature controller 14, the opposite side inner wall vacuum pump of housing 1
15, and vacuum pump 15 is set through the side wall of housing 1.
During utility model works, first chip is placed on monitor station 9, then rotates the first threaded rod 3, the first threaded rod
3 the first helical gears 4 of drive rotate, and the first helical gear 4 drives the second helical gear 7 to rotate, and the second helical gear 7 drives the second threaded rod
6 rotate, and since two nuts 8 on the second threaded rod 6 are connected with monitor station 9, nut 8 can be on the second threaded rod 6
It is mobile, so as to which monitor station 9 be driven to move up and down, after monitor station 9 is moved in housing 1, two closed plates 13 are closed, then
Temperature controller 14 starts to control the temperature in housing 1, and vacuum pump 15 establishes an environment close to vacuum inside housing 1,
So when monitor station 9 carries out Resistivity testing to chip, the disturbing factor being subject to just reduces, and the result of detection is more smart
Really.
The above is only the preferable specific embodiment of the utility model, but the scope of protection of the utility model is not
This is confined to, in the technical scope that any one skilled in the art discloses in the utility model, according to this practicality
New technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (5)
1. a kind of slice resistivity detection device, including housing（1）, which is characterized in that the housing（1）Inner wall pass through first
Rotating member（2）It is rotatably connected to the first threaded rod laterally set（3）, and the first threaded rod（3）Through housing（1）One side side
Wall is set, first threaded rod（3）Sidewall sheath set there are two the first helical gear（4）, the housing（1）Upper end inner wall lead to
Cross the second rotating member（5）There are two be equipped with the second threaded rod vertically for rotation connection（6）, and two the second threaded rods（6）Position respectively
In the first helical gear（4）Top, two second threaded rods（6）Away from the second rotating member（5）One end be equipped with and the
One helical gear（4）Matched second helical gear（7）, two second threaded rods（6）Side wall be arranged with it is matched
Nut（8）, two nuts（8）Between be equipped with monitor station（9）, the housing（1）Upper end side wall be equipped with and monitor station（9）
Matched opening（10）, the housing（1）Upper end side wall be additionally provided with two sliding slots（11）, and two sliding slots（11）It is located at respectively
Opening（10）Both sides, two sliding slots（11）Pass through sliding block（12）Slidably connect closed plate（13）, and two closings
Plate（13）Positioned at opening（10）Top, the housing（1）One side inner wall be equipped with temperature controller（14）, the housing（1）
Opposite side inner wall vacuum pump（15）, and vacuum pump（15）Through housing（1）Side wall set.
A kind of 2. slice resistivity detection device according to claim 1, which is characterized in that first threaded rod（3）
Through housing（1）Place is arranged with sealing ring.
A kind of 3. slice resistivity detection device according to claim 1, which is characterized in that first threaded rod（3）
For hollow structure, first threaded rod（3）In set that there are two the plectrums that are arranged in parallel（16）, and plectrum（16）Through the first spiral shell
Rasp bar（3）One end side wall set, two plectrums（16）Between by preset quantity spring（17）Connection, described in two
Plectrum（16）Away from spring（17）One side side wall be equipped with the kelly of default quantity（18）, and kelly（18）Through the first screw thread
Bar（3）Side wall set, the housing（1）Side wall be equipped with default quantity and kelly（18）Matched card slot（19）.
A kind of 4. slice resistivity detection device according to claim 1, which is characterized in that first threaded rod（3）
On be enclosed with sponge protective case.
A kind of 5. slice resistivity detection device according to claim 1, which is characterized in that two first helical gears
（4）In the first threaded rod（3）It is upper to set in the same direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721686210.6U CN207457349U (en) | 2017-12-07 | 2017-12-07 | A kind of slice resistivity detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721686210.6U CN207457349U (en) | 2017-12-07 | 2017-12-07 | A kind of slice resistivity detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207457349U true CN207457349U (en) | 2018-06-05 |
Family
ID=62276420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721686210.6U Active CN207457349U (en) | 2017-12-07 | 2017-12-07 | A kind of slice resistivity detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207457349U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108704694A (en) * | 2018-06-20 | 2018-10-26 | 党惠平 | A kind of medical Novel blood letting test tube |
| CN109116114A (en) * | 2018-10-09 | 2019-01-01 | 江苏英锐半导体有限公司 | A kind of resistivity detecting device for wafer flow |
| CN109296150A (en) * | 2018-10-31 | 2019-02-01 | 杨浩 | A kind of stair promptly used |
-
2017
- 2017-12-07 CN CN201721686210.6U patent/CN207457349U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108704694A (en) * | 2018-06-20 | 2018-10-26 | 党惠平 | A kind of medical Novel blood letting test tube |
| CN109116114A (en) * | 2018-10-09 | 2019-01-01 | 江苏英锐半导体有限公司 | A kind of resistivity detecting device for wafer flow |
| CN109296150A (en) * | 2018-10-31 | 2019-02-01 | 杨浩 | A kind of stair promptly used |
| CN109296150B (en) * | 2018-10-31 | 2020-08-11 | 台州市路桥高精模具厂 | Emergency staircase |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 273100 No. 166 Chunqiu East Road, Qufu City, Jining City, Shandong Province Patentee after: Shandong crystal guided microelectronic Limited by Share Ltd Address before: 273100 No. 166 Chunqiu East Road, Qufu City, Jining City, Shandong Province Patentee before: Shandong Jing Dao Microtronics A/S |