CN109116114A - A kind of resistivity detecting device for wafer flow - Google Patents
A kind of resistivity detecting device for wafer flow Download PDFInfo
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- CN109116114A CN109116114A CN201811170578.6A CN201811170578A CN109116114A CN 109116114 A CN109116114 A CN 109116114A CN 201811170578 A CN201811170578 A CN 201811170578A CN 109116114 A CN109116114 A CN 109116114A
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- 238000012360 testing method Methods 0.000 claims abstract description 40
- 239000000523 sample Substances 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims abstract description 9
- 238000009434 installation Methods 0.000 claims description 12
- 238000003780 insertion Methods 0.000 claims description 7
- 230000037431 insertion Effects 0.000 claims description 7
- 238000005538 encapsulation Methods 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000003756 stirring Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000116 mitigating effect Effects 0.000 abstract description 3
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- 235000004443 Ricinus communis Nutrition 0.000 description 5
- 240000000528 Ricinus communis Species 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 210000002683 foot Anatomy 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0416—Connectors, terminals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0425—Test clips, e.g. for IC's
Abstract
The present invention relates to the technical fields of wafer flow production test auxiliary equipment, more particularly to a kind of resistivity detecting device for wafer flow, shelf-stability of the wafer flow on monitor station can be improved in it, prevent wafer flow during detecting using Resistivity testing probe to wafer flow from sliding, the extraneous factor for influencing testing result is reduced, use reliability is improved；And it takes Resistivity testing probe to detect wafer flow without artificial hand, reduces human factor, improve detection accuracy, while mitigating manpower, it is easy to operate, improve practicability；Including monitor station, left curved splint, right arc clip plate, upper rack, lower rack gear, left connecting rod, right connection board, support traveller, the first adjustment axis, ratchet, upper sliding rail, glidepath, baffle, support spring, limit pawl, left support plate, adjusting screw, fixed baffle, limit traveller, adjusting block, mounting plate, the first tapered gear, the second tapered gear and the second adjustment axis.
Description
Technical field
The present invention relates to the technical fields of wafer flow production test auxiliary equipment, are used for wafer flow more particularly to one kind
The resistivity detecting device of piece.
Background technique
It is well known that the resistivity detecting device for wafer flow is a kind of wafer flow to after the completion of production, it is right
Its resistivity is detected, in order to preferably examine wafer flow production whether auxiliary device up to standard, in wafer flow
It is widely used in a variety of applications in the field of piece production test；The existing resistivity detecting device for wafer flow includes detection
Platform and four groups of support travellers, the top of four groups of support travellers respectively with the front left side of monitor station bottom end, left rear side, forward right side and the right side
Rear side connection, and the top of monitor station is placed with Resistivity testing probe；The existing Resistivity testing for wafer flow
Then wafer flow to be detected is lain in inspection in use, first by inside the whole sensing chamber for placing dustfree environment by device
On scaffold tower, then Resistivity testing probe is connected with outer computer, the artificial bottom popped one's head in using Resistivity testing is exported
End is repeatedly detected it, and records the numerical value detected every time, and the numerical value after will test is counted and finds out average value i.e.
It can；It is found in the existing resistivity detecting device use for wafer flow, placement of the wafer flow on monitor station is stablized
Property it is poor, using Resistivity testing probe wafer flow is detected during wafer flow be easy to happen sliding, shadow
Testing result is rung, causes its use reliability lower；And artificial hand takes Resistivity testing probe to detect wafer flow,
Human factor is more, influences detection accuracy, while wasting more manpower, inconvenient, causes the practicality poor.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of shelf-stability for improving wafer flow on monitor station,
Prevent wafer flow during detecting using Resistivity testing probe to wafer flow from sliding, reducing influences inspection
The extraneous factor of result is surveyed, use reliability is improved；And it takes Resistivity testing to pop one's head in without artificial hand to carry out wafer flow
Detection reduces human factor, improves detection accuracy, while mitigating manpower, easy to operate, and that improves practicability is used for wafer flow
Resistivity detecting device.
It places on the top of a kind of resistivity detecting device for wafer flow of the invention, including monitor station, monitor station
There is Resistivity testing probe；Including left curved splint, right arc clip plate, upper rack, lower rack gear, left connecting rod, right connection board, branch
Support traveller, the first adjustment axis, ratchet, upper sliding rail, glidepath, baffle, support spring and limit pawl, the inside of the monitor station
It is provided with adjusting chamber, and the left and right side on monitor station top is horizontally arranged with the left sliding channel on left and right directions respectively
With right sliding channel, and left sliding channel and right sliding channel with adjust chamber interior communicate, the left curved splint and
The bottom end of right arc clip plate is slidably contacted with the top left hand of monitor station and right side respectively, and the left connecting rod and right company
The top of extension bar is connect with the center bottom of the left curved splint and right arc clip plate respectively, left connecting rod and right connecting rod
The top of the equal self-test scaffold tower in bottom end can be slid through inside left sliding channel and right sliding channel respectively and stretch to adjusting chamber
Inside, the support traveller are laterally positioned in the adjusting chamber interior, and support the left end of traveller and adjust the left end of chamber
The upper inside of connection on the upside of inner wall, left connecting rod and right connecting rod be horizontally arranged with respectively the perforative left support through-hole in left and right and
The right end of right support through-hole, the support traveller can be slid through left support through-hole and right support from the left end of left connecting rod respectively
Inside through-hole and it extend out to the right end external world of right connecting rod and is connect with the right end inner wall upside for adjusting chamber, the upper rack
Top left hand connect with the bottom end of left connecting rod, and the lower rack gear top on the right side of connect with the bottom end of right connecting rod,
It is provided with fixing groove in the middle part of the rear end inner wall for adjusting chamber, and fixing groove is internally provided with rotation ball bearing, it is described
The front end of the rear end self-test scaffold tower of first adjustment axis passes through the front end outer wall of monitor station and stretches to adjusting chamber interior, and the
The rear end of one adjustment axis is inserted and fixed inside installation to rotation ball bearing, is provided with adjusting tooth in first adjustment axis
Wheel, and the top of adjustment gear is engaged with the bottom end of upper rack, and the bottom end of adjustment gear is engaged with the top of lower rack gear, described
Ratchet is located at the front side of monitor station, and ratchet is fixedly set in the outside of the first adjustment axis, the upper sliding rail and glidepath point
Not Wei Yu the ratchet upper right side and lower right side, and the rear end of upper sliding rail and glidepath with the front end of monitor station on the right side of connect
It connects, the bottom end of upper sliding rail and the top of glidepath are horizontally arranged with upper hopper chute and gliding groove on left and right directions, the limit respectively
The top and bottom end of position pawl are respectively arranged with top shoe and sliding block, and the top shoe and sliding block are slidably arranged in respectively
Inside upper hopper chute and gliding groove, the upper side and lower side of the baffle left end connects with the right end of the upper sliding rail and glidepath respectively
It connecing, and the left end of the right end of the support spring and baffle connects, the left end of support spring is connect with the right end of limit pawl,
The left end of limit pawl is inserted into inside the right side ratchet of ratchet, and the front end of first adjustment axis has been arranged concentrically first-hand
Wheel；It further include left support plate, adjusting screw, fixed baffle, limit traveller, adjusting block, mounting plate, the first tapered gear, second
Tapered gear and the second adjustment axis, the bottom end of the left support plate is connect with the top left hand of the monitor station, and left support
Right end the upper side and lower side of plate is respectively arranged with top chock and step, and inside top chock and step respectively
It is provided with upper ball bearing and lower ball bearing, the top of the adjusting screw is inserted and fixed in installation to upper ball bearing
Portion, the bottom end of adjusting screw are inserted and fixed inside installation to lower ball bearing, and the fixed baffle is located at the top chock
Lower section, and connection on the upside of the right end of the left end of fixed baffle and left support plate, the inner right side of fixed baffle is provided with
Under perforative rotated through-hole, and fixed baffle is set in the outside of the adjusting screw by rotated through-hole, and the limit is slided
It is connected on the left of the top of column and the bottom end of fixed baffle, and the top left hand of the adjusting block and right side are respectively arranged with up and down
Perforative left limit through-hole and right-hand thread through-hole, adjustable plate are located at the outside of adjusting screw by tapped through hole spiral shell encapsulation, and
The bottom end self-regulated locking nub top of the limit traveller can be slid through inside left limit through-hole and stretch out the bottom end external world of adjusting block
It is connect with the top left hand of the step, the upper inside of the left support plate is horizontally arranged with adjusting through-hole, and adjusts
The right end of section through-hole has been arranged concentrically adjusting bearing block, adjusts bearing block and is internally provided with adjusting ball bearing, described second adjusts
The right end of nodal axisn can be slid through respectively from the left end of left support plate and adjust through-hole and adjust inside ball bearing and extend out to tune
The right end external world of bearings seat with the left end of the described first tapered gear is concentric connect, the second tapered gear is located at described solid
Determine the top of baffle, and the second tapered gear is fixedly set in the external upper of the adjusting screw, the second tapered gear with
First tapered gear engagement, the left end of the second adjustment axis has been arranged concentrically the second handwheel, the left end of the mounting plate and the tune
The right end of locking nub connects, and the top of Resistivity testing probe is connect with the center bottom of the mounting plate.
A kind of resistivity detecting device for wafer flow of the invention, further include four groups of Multi-section telescopic rods, threaded rod,
First screwed pipe, the second screwed pipe and bottom plate, the top of the four groups of Multi-section telescopic rods left side with the monitor station bottom end respectively
Front side, left rear side, forward right side are connected with right lateral side, and the bottom end of four groups of Multi-section telescopic rods is left front with bottom plate top respectively
Side, left rear side, forward right side are connected with right lateral side, and the top of the threaded rod is connect with the center bottom of the monitor station, and
The top middle portion of bottom plate is provided with fixing groove, and fixing groove is internally provided with adjusting ball bearing, the bottom end of second screwed pipe
Installation is inserted and fixed to adjusting inside ball bearing, the top that simultaneously spiral shell is filled to the first screwed pipe is inserted into the bottom end of the threaded rod
Inside, the outside of the first screwed pipe is provided with external screw-thread, and first screwed pipe is by external screw-thread insertion and spiral shell fills
To the top of the second screwed pipe.
A kind of resistivity detecting device for wafer flow of the invention further includes four groups of screw rods and four groups of multi-axis foots
Wheel, the top of four groups of screw rods are connect with front left side, left rear side, forward right side and the right lateral side of the bottom plate bottom end respectively, institute
The top for stating four groups of universal caster wheels is connect with the bottom end of four groups of screw rods respectively.
A kind of resistivity detecting device for wafer flow of the invention further includes the support cover, four groups of branch
The bottom end of support cover is provided with support slot, and support tapped through hole is provided on the top inner wall of four groups of support covers, and four groups
By support tapped through hole, spiral shell encapsulation is located at the outsides of four groups of screw rods, four groups of universal caster wheels difference positions to support cover respectively respectively
Inside four groups of support slots.
A kind of resistivity detecting device for wafer flow of the invention, further includes right support plate, overhead gage and auxiliary
Traveller, the right end of the mounting plate is provided with accessory plate, and the top of accessory plate is provided with perforative auxiliary through hole up and down, institute
It states and is connect on the right side of the bottom end of right support plate and the top of the monitor station, and a left side for the right end of the overhead gage and right support plate
It is connected on the left of the connection of end upside, the top of the auxiliary traveller and the bottom end of overhead gage, assists the bottom end of traveller from accessory plate
Top can be slid through inside auxiliary through hole and extend out to be connect on the right side of the bottom end external world of accessory plate and the top of the monitor station.
A kind of resistivity detecting device for wafer flow of the invention further includes the first clamping screw and the second locking
Bolt, middle side part is provided with the first locking screw through-hole, and the first locking screw through-hole on the front end of first screwed pipe
It being communicated with inside the first screwed pipe, middle side part is provided with the second locking screw through-hole on the front end of second screwed pipe, and
It is communicated inside second locking screw through-hole and the second screwed pipe, the rear end difference of first clamping screw and the second clamping screw
It is inserted into and spiral shell is filled to inside the first locking screw through-hole and the second locking screw through-hole.
A kind of resistivity detecting device for wafer flow of the invention further includes rotation handwheel, the rotation handwheel
It is fixedly set in the outside of second screwed pipe.
A kind of resistivity detecting device for wafer flow of the invention, further includes four groups of anti-skid washers, and described four groups
The top of anti-skid washer respectively with the bottom end of four groups of support covers is concentric connect.
A kind of resistivity detecting device for wafer flow of the invention, further includes button handsetting, after the button handsetting
End middle part with it is described limit pawl front center connect, and the upper side and lower side of button handsetting rear end respectively with the upper sliding rail
It is slidably contacted with the front end of glidepath.
A kind of resistivity detecting device for wafer flow of the invention further includes plum blossom clamping screw, the auxiliary
The front end of plate is provided with positioning threads through-hole, and communicates inside positioning threads through-hole and the limiting through hole, the Plum blossom type lock
The rear end of tight bolt is from the insertion of the front end of accessory plate and spiral shell is filled to inside positioning threads through-hole, and the rear end of plum blossom clamping screw
It is contacted with the front end locking of the auxiliary traveller.
Compared with prior art the invention has the benefit that the first tune can be made by rotating clockwise the first handwheel
Nodal axisn drives adjustment gear rotation, by upper rack and lower engaging between rack gear and adjustment gear, slides upper rack in support
Move right under the action of column, while be moved to the left lower rack gear under the action of supporting traveller, thus make left curved splint to
It moves right, while is moved to the left right arc clip plate, wafer flow is clamped, while by ratchet with the first adjustment axis up time
Needle rotation makes to limit by top shoe on limit pawl and sliding block being slidably matched inside upper hopper chute and gliding groove respectively
Position ratchet can be injected to the right side ratchet of ratchet to the left under the support of support spring, so as to so that after rotation the
The position of one adjustment axis is locked, and prevents left curved splint and right arc clip plate from unclamping the wafer flow after clamping,
So as to improve shelf-stability of the wafer flow on monitor station, prevent from popping one's head in using Resistivity testing to wafer flow
Wafer flow is slided during being detected, and reduces the extraneous factor for influencing testing result, improves use reliability；And
And the first tapered teeth wheel can be made to rotate, by between the first tapered gear and the second tapered gear by rotating the second handwheel
Engagement, rotate adjusting screw under the action of upper ball bearing and lower ball bearing, pass through limit traveller and left limit
Being slidably matched between the through-hole of position moves up and down mounting plate along the direction of limit traveller, while passing through adjusting screw
Spiral shell between right-hand thread through-hole, which assembles, to be closed, and rotation adjusting screw can make to move down on mounting plate drive Resistivity testing probe
It is dynamic, it takes Resistivity testing probe to detect wafer flow without artificial hand, reduces human factor, improve detection accuracy, together
When mitigate manpower, it is easy to operate, improve practicability.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is support spring of the present invention, the structural schematic diagram for limiting the connections such as pawl and the first handwheel；
Fig. 3 is the partial enlargement structural representation in Fig. 1 of the present invention at A；
Fig. 4 is the partial enlargement structural representation in Fig. 1 of the present invention at B；
Fig. 5 is the partial enlargement structural representation in Fig. 1 of the present invention at C；
Fig. 6 is the partial enlargement structural representation in Fig. 2 of the present invention at D；
Fig. 7 is the partial enlargement structural representation in Fig. 2 of the present invention at E；
It is attached marked in the figure: 1, monitor station；2, Resistivity testing is popped one's head in；3, left curved splint；4, upper rack；5, left connecting rod；6,
Support traveller；7, the first adjustment axis；8, ratchet；9, upper sliding rail；10, baffle；11, support spring；12, pawl is limited；13, first
Handwheel；14, left support plate；15, adjusting screw；16, fixed baffle；17, traveller is limited；18, adjusting block；19, mounting plate；20,
First tapered gear；21, the second tapered gear；22, the second adjustment axis；23, Multi-section telescopic rod；24, threaded rod；25, the first spiral shell
Line pipe；26, the second screwed pipe；27, bottom plate；28, screw rod；29, universal caster wheel；30, support cover；31, right support plate；32, upper gear
Plate；33, traveller is assisted；34, the first clamping screw；35, the second clamping screw；36, handwheel is rotated；37, anti-skid washer；38, it dials
Dynamic button；39, plum blossom clamping screw.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
As shown in Figures 1 to 7, a kind of resistivity detecting device for wafer flow of the invention, including monitor station 1,
The top of monitor station 1 is placed with Resistivity testing probe 2；Including left curved splint 3, right arc clip plate, upper rack 4, lower rack gear,
Left connecting rod 5, right connection board, support traveller 6, the first adjustment axis 7, ratchet 8, upper sliding rail 9, glidepath, baffle 10, support spring
11 are internally provided with adjusting chamber, and the left and right side difference cross on 1 top of monitor station with limit pawl 12, monitor station 1
To the left sliding channel and right sliding channel being provided on left and right directions, and left sliding channel and right sliding channel with adjusting
Chamber interior communicates, the bottom end of left curved splint 3 and right arc clip plate respectively with the top left hand of monitor station 1 and right side slidably
Contact, and the top of left connecting rod 5 and right connecting rod connects with the center bottom of left curved splint 3 and right arc clip plate respectively
It connects, the top of the equal self-test scaffold tower 1 in the bottom end of left connecting rod 5 and right connecting rod can be slid through left sliding channel and right sliding respectively
Inside through slot and adjusting chamber interior is stretched to, support traveller 6 is laterally positioned in adjusting chamber interior, and supports a left side for traveller 6
It holds and is connect on the upside of the left end inner wall for adjusting chamber, the upper inside of left connecting rod 5 and right connecting rod is horizontally arranged with a left side respectively
Right perforative left support through-hole and right support through-hole, support the left end of right end from the left connecting rod 5 of traveller 6 to can be slid through respectively
Inside left support through-hole and right support through-hole and it extend out to the right end external world of right connecting rod and adjusts the right end inner wall upside of chamber
Connection, the top left hand of upper rack 4 are connect with the bottom end of left connecting rod 5, and the top right side of lower rack gear and right connecting rod
Bottom end connection adjusts and is provided with fixing groove in the middle part of the rear end inner wall of chamber, and fixing groove is internally provided with rotation ball bearing,
The front end of the rear end self-test scaffold tower 1 of first adjustment axis 7 passes through the front end outer wall of monitor station 1 and stretches to adjusting chamber interior, and
And first adjustment axis 7 rear end be inserted and fixed installation to rotation ball bearing inside, be provided with adjusting tooth in the first adjustment axis 7
Wheel, and the top of adjustment gear is engaged with the bottom end of upper rack 4, and the bottom end of adjustment gear is engaged with the top of lower rack gear, spine
Wheel 8 is located at the front side of monitor station 1, and ratchet 8 is fixedly set in the outside of the first adjustment axis 7, upper sliding rail 9 and glidepath difference
Positioned at the upper right side and lower right side of ratchet 8, and the rear end of upper sliding rail 9 and glidepath is connect with the front end of monitor station 1 right side,
The bottom end of upper sliding rail 9 and the top of glidepath are horizontally arranged with upper hopper chute and gliding groove on left and right directions respectively, limit pawl
12 top and bottom end are respectively arranged with top shoe and sliding block, top shoe and sliding block be slidably arranged in respectively upper hopper chute and
Inside gliding groove, the upper side and lower side of 10 left end of baffle is connect with the right end of upper sliding rail 9 and glidepath respectively, and support spring
11 right end is connect with the left end of baffle 10, and the left end of support spring 11 is connect with the right end of limit pawl 12, limits pawl 12
Left end be inserted into inside the right side ratchet of ratchet 8, the front end of the first adjustment axis 7 has been arranged concentrically the first handwheel 13；Further include
Left support plate 14, adjusting screw 15, fixed baffle 16, limit traveller 17, adjusting block 18, mounting plate 19, the first tapered gear 20,
Second tapered gear 21 and the second adjustment axis 22, the bottom end of left support plate 14 is connect with the top left hand of monitor station 1, and left branch
Right end the upper side and lower side of fagging 14 is respectively arranged with top chock and step, and inside top chock and step
It is respectively arranged with upper ball bearing and lower ball bearing, the top of adjusting screw 15 is inserted and fixed in installation to upper ball bearing
Portion, the bottom end of adjusting screw 15 are inserted and fixed inside installation to lower ball bearing, and fixed baffle 16 is located under top chock
Side, and connect on the upside of the left end of fixed baffle 16 and the right end of left support plate 14, the inner right side of fixed baffle 16 is provided with
Upper and lower perforative rotated through-hole, and fixed baffle 16 is set in the outside of adjusting screw 15 by rotated through-hole, limits traveller
It is connect on the left of 17 top and the bottom end of fixed baffle 16, and the top left hand of adjusting block 18 and right side are respectively arranged with up and down
Perforative left limit through-hole and right-hand thread through-hole, adjustable plate are located at the outside of adjusting screw 15 by tapped through hole spiral shell encapsulation, and
And 18 top of bottom end self-regulated locking nub for limiting traveller 17 can be slid through inside left limit through-hole and stretch out the bottom end of adjusting block 18
The external world is connect with the top left hand of step, and the upper inside of left support plate 14 is horizontally arranged with adjusting through-hole, and adjusts
The right end of through-hole has been arranged concentrically adjusting bearing block, adjusts bearing block and is internally provided with adjusting ball bearing, the second adjustment axis 22
Right end from the left end of left support plate 14 respectively can be slid through adjust through-hole and adjust ball bearing inside and extend out to adjusting
The right end external world of bearing block with the left end of the first tapered gear 20 is concentric connect, the second tapered gear 21 is located at fixed baffle 16
Top, and the second tapered gear 21 is fixedly set in the external upper of adjusting screw 15, the second tapered gear 21 and the first cone
Type gear 20 engages, and the left end of the second adjustment axis 22 has been arranged concentrically the second handwheel, left end and the adjusting block 18 of mounting plate 19
Right end connection, and the top of Resistivity testing probe 2 is connect with the center bottom of mounting plate 19；It can be by rotating clockwise
First handwheel makes the first adjustment axis drive adjustment gear rotation, by upper rack and lower engaging between rack gear and adjustment gear,
So that upper rack is moved right under the action of supporting traveller, while is moved to the left lower rack gear under the action of supporting traveller, from
And so that left curved splint is moved right, while be moved to the left right arc clip plate, wafer flow is clamped, at the same by ratchet with
The first adjustment axis rotate clockwise, through top shoe on limit pawl and sliding block respectively inside upper hopper chute and gliding groove
Be slidably matched, allow limit ratchet injected to the left under the support of support spring to the right side ratchet of ratchet, thus
The position of the first adjustment axis after can making rotation is locked, after preventing left curved splint and right arc clip plate from will clamp
Wafer flow unclamp, so as to improve shelf-stability of the wafer flow on monitor station, prevent from examining using resistivity
Wafer flow is slided during probing head detects wafer flow, reduces the extraneous factor for influencing testing result,
Improve use reliability；And the first tapered teeth wheel can be made to rotate by rotating the second handwheel, by the first tapered gear with
Engagement between second tapered gear, rotates adjusting screw under the action of upper ball bearing and lower ball bearing, leads to
Being slidably matched between limit traveller and left limit through-hole is crossed, moves up and down mounting plate along the direction of limit traveller,
It is assembled and is closed by the spiral shell between adjusting screw and right-hand thread through-hole simultaneously, rotation adjusting screw can make mounting plate drive resistivity
Detection probe moves up and down, and takes Resistivity testing probe to detect wafer flow without artificial hand, reduces human factor, mention
High measurement accuracy, while mitigating manpower, it is easy to operate, improve practicability.
A kind of resistivity detecting device for wafer flow of the invention further includes four groups of Multi-section telescopic rods 23, screw threads
Bar 24, the first screwed pipe 25, the second screwed pipe 26 and bottom plate 27, the top of four groups of Multi-section telescopic rods 23 respectively with 1 bottom of monitor station
Front left side, left rear side, the forward right side at end are connected with right lateral side, and the bottom end of four groups of Multi-section telescopic rods 23 is pushed up with bottom plate 27 respectively
Front left side, left rear side, the forward right side at end are connected with right lateral side, and the top of threaded rod 24 is connect with the center bottom of monitor station 1, and
And the top middle portion of bottom plate 27 is provided with fixing groove, fixing groove is internally provided with adjusting ball bearing, the bottom of the second screwed pipe 26
It holds and is inserted and fixed installation to adjusting inside ball bearing, the top that simultaneously spiral shell is filled to the first screwed pipe 25 is inserted into the bottom end of threaded rod 24
End is internal, and the outside of the first screwed pipe 25 is provided with external screw-thread, and the first screwed pipe 25 passes through external screw-thread insertion and spiral shell
It is filled to inside the top of the second screwed pipe 26；It can be supported by bottom plate to whole, then hold the second screwed pipe simultaneously
With the first screwed pipe, the first screwed pipe and the second screwed pipe is made to keep relatively motionless, while rotating the first screwed pipe and the second spiral shell
Line pipe makes threaded rod screw out back-out inside the first screwed pipe, after threaded rod is screwed out to certain distance, can hold threaded rod
With the first screwed pipe, the second screwed pipe is rotated, makes the first screwed pipe precession and back-out inside the second screwed pipe, so as to root
According to the height of operator to the whole adjusting carried out in height, and can be by Multi-section telescopic rod to the monitor station after adjusting
Stable support is carried out between bottom plate, improves adaptability, is reduced and is used limitation.
A kind of resistivity detecting device for wafer flow of the invention further includes four groups of screw rods 28 and four groups of multi-axis foots
Wheel 29, the top of four groups of screw rods 28 is connect with front left side, left rear side, forward right side and the right lateral side of 27 bottom end of bottom plate respectively, and four groups
The top of universal caster wheel 29 is connect with the bottom end of four groups of screw rods 28 respectively；It can be by four groups of screw rods respectively to four groups of universal caster wheels
It is supported, and entirety can be facilitated to be moved by the rotation of four groups of universal caster wheels, improve adaptability, reduction makes
Use limitation.
A kind of resistivity detecting device for wafer flow of the invention further includes support cover 30, four groups of support covers 30
Bottom end be provided with support slot, and support tapped through hole is provided on the top inner wall of four groups of support covers 30, four groups of branch
By support tapped through hole, spiral shell encapsulation is located at the outsides of four groups of screw rods 28, the four groups of difference of universal caster wheels 29 positions to support cover 30 respectively respectively
Inside four groups of support slots；It, can be logical by the support screw thread on four groups of support covers behind overall movement to position needed for user
Spiral shell between four groups of screw rods is assembled and is closed respectively in hole, rotates down four groups of support covers, make four groups of support covers bottom end and ground into
Row contact, respectively enters four groups of castors inside four groups of support slots, so that four groups of castors be made to be detached from ground, will integrally stablize
Support, improves whole stability.
A kind of resistivity detecting device for wafer flow of the invention further includes right support plate 31, overhead gage 3210
With auxiliary traveller 33, the right end of mounting plate 19 is provided with accessory plate, and the top of accessory plate is provided with perforative auxiliary up and down
It is connect on the right side of through-hole, the bottom end of right support plate 31 and the top of monitor station 1, and the right end of overhead gage 3210 and right support plate 31
Left end on the upside of connection, assist connect on the left of the bottom end of top and the overhead gage 3210 of traveller 33, the bottom end of auxiliary traveller 33 is certainly
The top of accessory plate be can be slid through inside auxiliary through hole and be extend out on the right side of the bottom end external world of accessory plate and the top of monitor station 1
Connection；It can be by being slidably matched between the auxiliary through hole on auxiliary traveller and accessory plate, it can be to mounting plate with rotation
It carries out stablizing support when moving up and down when adjusting screw, during raising mounting plate drives Resistivity testing probe to move up and down
Stability.
A kind of resistivity detecting device for wafer flow of the invention further includes the first clamping screw 34 and the second lock
Tight bolt 35, middle side part is provided with the first locking screw through-hole on the front end of the first screwed pipe 25, and the first locking screw is logical
It being communicated inside hole and the first screwed pipe 25, middle side part is provided with the second locking screw through-hole on the front end of the second screwed pipe 26, and
And second communicates inside locking screw through-hole and the second screwed pipe 26, the rear end of the first clamping screw 34 and the second clamping screw 35
Simultaneously spiral shell is filled to inside the first locking screw through-hole and the second locking screw through-hole for insertion respectively；It can be incited somebody to action by the first clamping screw
Threaded rod is locked with the first threaded rod, while can be by the second clamping screw by the first screwed pipe and the second screwed pipe phase
To locking, when so as to whole progress height adjustment, without manually grabbing threaded rod and the first screwed pipe or the first spiral shell
Line pipe and the second screwed pipe, save manpower, while can be by the first clamping screw and the second clamping screw by the spiral shell after adjusting
The distance between rasp bar, the first screwed pipe and the second screwed pipe are locked, and improve whole stability.
A kind of resistivity detecting device for wafer flow of the invention further includes rotation handwheel 36, rotates handwheel 36
It is fixedly set in the outside of the second screwed pipe 26；Operator can be facilitated to rotate the second screwed pipe or same by rotation handwheel
When rotate the first screwed pipe and the second screwed pipe, improve practicability.
A kind of resistivity detecting device for wafer flow of the invention further includes four groups of anti-skid washers 37, and four groups anti-
The top of skidding circle 37 respectively with the bottom end of four groups of support covers 30 is concentric connect；Four groups of branch can be improved by four groups of anti-skid washers
The anti-slip stable ability of support cover bottom end and ground face contact.
A kind of resistivity detecting device for wafer flow of the invention, further includes button handsetting 38, after button handsetting 38
End middle part with limit pawl 12 front center connect, and the upper side and lower side of 38 rear end of button handsetting respectively with upper sliding rail 9 and
The front end of glidepath slidably contacts；When needing to be dismantled wafer flow, limit can be slided to the right by button handsetting
Pawl, so as to which so that ratchet rotates counterclockwise, from that upper rack can be made to be moved to the left, lower rack gear moves right, and makes left arc
The distance between clamping plate and right arc clip plate increase, and conveniently unload wafer flow, improve practicability.
A kind of resistivity detecting device for wafer flow of the invention, further includes plum blossom clamping screw 39, accessory plate
Front end be provided with positioning threads through-hole, and communicated inside positioning threads through-hole and limiting through hole, plum blossom clamping screw 39
Rear end is from the insertion of the front end of accessory plate and spiral shell is filled to inside positioning threads through-hole, and the rear end of plum blossom clamping screw 39 and auxiliary
Lock contact in the front end of traveller 33；Rear end and the auxiliary traveller of plum blossom clamping screw by the plum blossom locking that rotates backward, can be made
Front end locking, so as to improve so that the position after the Resistivity testing probe after mobile is adjusted can be locked
Use reliability.
A kind of resistivity detecting device for wafer flow of the invention at work first will be entirely through four
Group castor is moved to position needed for user, then through the support tapped through hole on four groups of support covers respectively between four groups of screw rods
Spiral shell assemble and close, rotate down four groups of support covers, contact the bottom end of four groups of support covers with ground, distinguish four groups of castors
Into inside four groups of support slots, so that four groups of castors be made to be detached from ground, it will integrally carry out stablizing support, pass through four groups of anti-skid washers
Improve four groups of support cover bottom ends and ground face contact anti-slip stable ability, then rotate the second clamping screw by the second screwed pipe with
First screwed pipe is opposite to lock, and the first screwed pipe and the second screwed pipe is made to keep relatively motionless, at the same rotate the first screwed pipe and
Second screwed pipe makes threaded rod screw out back-out inside the first screwed pipe, after threaded rod is screwed out to certain distance, rotation first
Clamping screw makes threaded rod locking opposite with the first screwed pipe, rotates the second screwed pipe, make the first screwed pipe in the second screwed pipe
Internal precession and back-out, by rotate handwheel facilitate operator rotate the second screwed pipe or simultaneously rotate the first screwed pipe and
Second screwed pipe so as to carry out the adjusting in height to entirety according to the height of operator, and can pass through more piece
Telescopic rod carries out stable support between the monitor station and bottom plate after adjusting, and then wafer flow is placed on monitor station
Between left curved splint and right arc clip plate, by rotating clockwise the first handwheel, the first adjustment axis is made to drive adjusting tooth rotation
It is dynamic, by upper rack and lower engaging between rack gear and adjustment gear, upper rack is made to move right under the action of supporting traveller,
It is moved to the left lower rack gear under the action of supporting traveller simultaneously, so that left curved splint be made to move right, while making right arc
Clamping plate is moved to the left, and wafer flow is clamped, while by ratchet as the first adjustment axis rotates clockwise, by limiting pawl
On top shoe and sliding block being slidably matched inside upper hopper chute and gliding groove respectively, allow to limit ratchet in support spring
Support under injected to the right side ratchet of ratchet to the left, so as to so that the position of the first adjustment axis after rotation is locked
It fastens, prevents left curved splint and right arc clip plate from unclamping the wafer flow after clamping, so as to improve wafer flow
Shelf-stability on monitor station prevents wafer during detecting using Resistivity testing probe to wafer flow
Flow is slided, and the first tapered teeth wheel can be made to rotate by rotating the second handwheel, passes through the first tapered gear and the
Engagement between two tapered gears, rotates adjusting screw under the action of upper ball bearing and lower ball bearing, passes through
Being slidably matched between limit traveller and left limit through-hole moves up and down mounting plate along the direction of limit traveller, together
When assembled and close by spiral shell between adjusting screw and right-hand thread through-hole, rotation adjusting screw can make mounting plate drive resistivity inspection
Probing head moves up and down, and Resistivity testing probe is adjusted to the suitable position detected to wafer flow, then by resistance
Rate detection probe and outer computer are connected, and the artificial bottom output end popped one's head in using Resistivity testing examines it repeatedly
Survey, and record the numerical value that detects every time, the numerical value after will test is counted and is found out average value, finally, by button handsetting to
Right sliding limits pawl, so as to which so that ratchet rotates counterclockwise, from that upper rack can be made to be moved to the left, lower rack gear moves right
It is dynamic, increase the distance between left curved splint and right arc clip plate, wafer flow is unloaded.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications, these improvements and modifications can also be made
Also it should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of resistivity detecting device for wafer flow, including monitor station (1), the top of monitor station (1) are placed with electricity
Resistance rate detection probe (2)；It is characterised in that it includes left curved splint (3), right arc clip plate, upper rack (4), lower rack gear, Zuo Lian
Extension bar (5), right connection board, support traveller (6), the first adjustment axis (7), ratchet (8), upper sliding rail (9), glidepath, baffle (10),
Support spring (11) and limit pawl (12), the monitor station (1) is internally provided with adjusting chamber, and monitor station (1) pushes up
The left and right side at end is horizontally arranged with left sliding channel and right sliding channel on left and right directions, and left sliding channel respectively
With right sliding channel with adjust chamber interior communicate, the bottom end of the left curved splint (3) and right arc clip plate respectively with inspection
The top left hand of scaffold tower (1) and right side slidably contact, and the top of the left connecting rod (5) and right connecting rod respectively with institute
It states left curved splint (3) to connect with the center bottom of right arc clip plate, the equal self-test in bottom end of left connecting rod (5) and right connecting rod
The top of platform (1) can be slid through inside left sliding channel and right sliding channel respectively and stretch to adjusting chamber interior, described
Support traveller (6) is laterally positioned in the adjusting chamber interior, and supports the left end of traveller (6) and adjust the left end inner wall of chamber
Upside connection, the upper inside of left connecting rod (5) and right connecting rod be horizontally arranged with respectively the perforative left support through-hole in left and right with
Right support through-hole, it is described support traveller (6) right end from left connecting rod (5) left end can be slid through respectively left support through-hole and
Inside right support through-hole and it extend out to the right end external world of right connecting rod and is connect with the right end inner wall upside for adjusting chamber, it is described
The top left hand of upper rack (4) is connect with the bottom end of left connecting rod (5), and the top right side of the lower rack gear and right connecting rod
Bottom end connection, be provided with fixing groove in the middle part of the rear end inner wall for adjusting chamber, and fixing groove is internally provided with rotation rolling
Pearl bearing, the front end of the rear end self-test scaffold tower (1) of first adjustment axis (7) pass through the front end outer wall of monitor station (1) and protrude into
To adjusting chamber interior, and the rear end of the first adjustment axis (7) is inserted and fixed inside installation to rotation ball bearing, and described the
Adjustment gear is provided in one adjustment axis (7), and the top of adjustment gear is engaged with the bottom end of upper rack (4), adjustment gear
Bottom end engaged with the top of lower rack gear, the ratchet (8) is located at the front side of monitor station (1), and ratchet (8) is fixedly set in
The outside of first adjustment axis (7), the upper sliding rail (9) and glidepath are located at the upper right side and lower right side of the ratchet (8),
And the rear end of upper sliding rail (9) and glidepath is connect with the front end of monitor station (1) right side, the bottom end of upper sliding rail (9) and downslide
The top of rail is horizontally arranged with upper hopper chute and gliding groove on left and right directions, the top and bottom end of limit pawl (12) respectively
It is respectively arranged with top shoe and sliding block, the top shoe and sliding block are slidably arranged in upper hopper chute and gliding groove respectively
Portion, the upper side and lower side of baffle (10) left end are connect with the right end of the upper sliding rail (9) and glidepath respectively, and described
The right end of support spring (11) is connect with the left end of baffle (10), the left end of support spring (11) and the right end of limit pawl (12)
The left end of connection, limit pawl (12) is inserted into inside the right side ratchet of ratchet (8), and the front end of first adjustment axis (7) is same
The heart is provided with the first handwheel (13)；It further include left support plate (14), adjusting screw (15), fixed baffle (16), limit traveller
(17), adjusting block (18), mounting plate (19), the first tapered gear (20), the second tapered gear (21) and the second adjustment axis (22),
The bottom end of the left support plate (14) is connect with the top left hand of the monitor station (1), and on the right end of left support plate (14)
Side and downside are respectively arranged with top chock and step, and are respectively arranged with rolling inside top chock and step
Pearl bearing and lower ball bearing, the top of the adjusting screw (15) are inserted and fixed inside installation to upper ball bearing, are adjusted
The bottom end of lead screw (15) is inserted and fixed inside installation to lower ball bearing, and the fixed baffle (16) is located at the upper bearing (metal)
The lower section of seat, and the right end upside of the left end of fixed baffle (16) and left support plate (14) is connect, fixed baffle (16) it is interior
Perforative rotated through-hole up and down is provided on the right side of portion, and fixed baffle (16) is set in the adjusting screw by rotated through-hole
(15) outside, the top of limit traveller (17) and the bottom end left side of fixed baffle (16) are connect, and the adjusting block
(18) top left hand and right side is respectively arranged with perforative left limit through-hole and right-hand thread through-hole, adjustable plate up and down and passes through screw thread
Through-hole spiral shell encapsulation is located at the outside of adjusting screw (15), and bottom end self-regulated locking nub (18) top of limit traveller (17) can
It slides through inside left limit through-hole and the bottom end external world for stretching out adjusting block (18) is connect with the top left hand of the step,
The upper inside of the left support plate (14) is horizontally arranged with adjusting through-hole, and the right end for adjusting through-hole has been arranged concentrically adjusting
Bearing block adjusts bearing block and is internally provided with adjusting ball bearing, and the right end of second adjustment axis (22) is from left support plate
(14) left end can be slid through respectively to be adjusted through-hole and adjusts inside ball bearing and extend out to outside the right end for adjusting bearing block
Boundary with the left end of the described first tapered gear (20) is concentric connect, the second tapered gear (21) is located at the fixed baffle
(16) top, and the second tapered gear (21) is fixedly set in the external upper of the adjusting screw (15), and second is tapered
Gear (21) is engaged with the first tapered gear (20), and the left end of the second adjustment axis (22) has been arranged concentrically the second handwheel, the peace
The left end of loading board (19) is connect with the right end of the adjusting block (18), and the top of Resistivity testing probe (2) and institute
State the center bottom connection of mounting plate (19).
2. a kind of resistivity detecting device for wafer flow as described in claim 1, which is characterized in that further include four groups
Multi-section telescopic rod (23), threaded rod (24), the first screwed pipe (25), the second screwed pipe (26) and bottom plate (27), it is described more than four groups
The top of section telescopic bar (23) is connect with the front left side, left rear side, forward right side and right lateral side of the monitor station (1) bottom end respectively,
And the bottom end of four groups of Multi-section telescopic rods (23) front left side, left rear side, forward right side and the right lateral side with bottom plate (27) top respectively
Connection, the top of the threaded rod (24) is connect with the center bottom of the monitor station (1), and the top middle portion of bottom plate (27)
It is provided with fixing groove, fixing groove is internally provided with adjusting ball bearing, and the bottom end of second screwed pipe (26) is inserted and fixed
Installation is to adjusting inside ball bearing, and simultaneously spiral shell is filled in the top of the first screwed pipe (25) for the bottom end insertion of the threaded rod (24)
Portion, the outside of the first screwed pipe (25) is provided with external screw-thread, and first screwed pipe (25) is inserted by external screw-thread
And spiral shell is filled to inside the top of the second screwed pipe (26).
3. a kind of resistivity detecting device for wafer flow as claimed in claim 2, which is characterized in that further include four groups
Screw rod (28) and four groups of universal caster wheels (29), the top of four groups of screw rods (28) are left front with the bottom plate (27) bottom end respectively
Side, left rear side, forward right side are connected with right lateral side, the top of four groups of universal caster wheels (29) respectively with four groups of screw rods (28)
Bottom end connection.
4. a kind of resistivity detecting device for wafer flow as claimed in claim 3, which is characterized in that further include described
Support cover (30), the bottom end of four groups of support covers (30) are provided with support slot, and in the top of four groups of support covers (30)
Be provided with support tapped through hole on wall, four groups of support covers (30) respectively by support tapped through hole respectively spiral shell encapsulation be located at it is described
The outside of four groups of screw rods (28), four groups of universal caster wheels (29) are located inside four groups of support slots.
5. a kind of resistivity detecting device for wafer flow as claimed in claim 4, which is characterized in that further include right branch
Fagging (31), overhead gage (32) and auxiliary traveller (33), the right end of the mounting plate (19) are provided with accessory plate, and accessory plate
Top be provided with perforative auxiliary through hole up and down, the top of the bottom end of the right support plate (31) and the monitor station (1) is right
Side connection, and connect on the upside of the right end of the overhead gage (32) and the left end of right support plate (31), the auxiliary traveller (33)
Top and overhead gage (32) bottom end on the left of connect, assist traveller (33) bottom end can be slid through from the top of accessory plate it is auxiliary
It helps inside through-hole and extend out to and connect on the right side of the bottom end external world of accessory plate and the top of the monitor station (1).
6. a kind of resistivity detecting device for wafer flow as claimed in claim 5, which is characterized in that further include first
Clamping screw (34) and the second clamping screw (35), middle side part is provided with the first locking on the front end of first screwed pipe (25)
Tapped through hole, and communicated inside the first locking screw through-hole and the first screwed pipe (25), before second screwed pipe (26)
Middle side part is provided with the second locking screw through-hole, and the second locking screw through-hole and the internal phase of the second screwed pipe (26) on end
Logical, the rear end of first clamping screw (34) and the second clamping screw (35) is inserted into respectively and spiral shell is filled to the first locking screw and leads to
Inside hole and the second locking screw through-hole.
7. a kind of resistivity detecting device for wafer flow as claimed in claim 6, which is characterized in that further include rotation
Handwheel (36), rotation handwheel (36) are fixedly set in the outside of second screwed pipe (26).
8. a kind of resistivity detecting device for wafer flow as claimed in claim 7, which is characterized in that further include four groups
Anti-skid washer (37), the top of four groups of anti-skid washers (37) respectively with the bottom end of four groups of support covers (30) is concentric connects
It connects.
9. a kind of resistivity detecting device for wafer flow as claimed in claim 8, which is characterized in that further include stirring
The rear end middle part of button (38), the button handsetting (38) is connect with the front center of limit pawl (12), and button handsetting
(38) the upper side and lower side of rear end is slidably contacted with the front end of the upper sliding rail (9) and glidepath respectively.
10. a kind of resistivity detecting device for wafer flow as claimed in claim 9, which is characterized in that further include plum
Flower clamping screw (39), the front end of the accessory plate are provided with positioning threads through-hole, and positioning threads through-hole and the limit
It is communicated inside through-hole, the rear end of the plum blossom clamping screw (39) is from the insertion of the front end of accessory plate and spiral shell is filled to positioning threads through-hole
Inside, and the rear end of plum blossom clamping screw (39) is contacted with the front end locking of auxiliary traveller (33).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811170578.6A CN109116114A (en) | 2018-10-09 | 2018-10-09 | A kind of resistivity detecting device for wafer flow |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811170578.6A CN109116114A (en) | 2018-10-09 | 2018-10-09 | A kind of resistivity detecting device for wafer flow |
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| Publication Number | Publication Date |
|---|---|
| CN109116114A true CN109116114A (en) | 2019-01-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811170578.6A Pending CN109116114A (en) | 2018-10-09 | 2018-10-09 | A kind of resistivity detecting device for wafer flow |
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| CN109946579A (en) * | 2019-04-04 | 2019-06-28 | 杭州载力科技有限公司 | A kind of semiconductor wafer detecting device |
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| CN112141507A (en) * | 2020-10-10 | 2020-12-29 | 安徽中鑫宏伟科技有限公司 | Transfer device for transporting nylon heat insulation strip master batches and using method thereof |
| CN112540200A (en) * | 2020-12-09 | 2021-03-23 | 浙江树人学院（浙江树人大学） | Probe test board |
| CN113884716A (en) * | 2021-10-26 | 2022-01-04 | 江西龙芯微科技有限公司 | Integrated circuit wafer testing device and method |
| CN117214309A (en) * | 2023-11-08 | 2023-12-12 | 河北邯峰发电有限责任公司 | Boiler water wall pipe lateral wall detection device |
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