CN207439359U - 一种非接触式光学测量设备 - Google Patents
一种非接触式光学测量设备 Download PDFInfo
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CN112240755A (zh) * | 2020-12-18 | 2021-01-19 | 适新科技(苏州)有限公司 | 一种用于高精度高表面底板的非接触检测载台 |
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CN112240755A (zh) * | 2020-12-18 | 2021-01-19 | 适新科技(苏州)有限公司 | 一种用于高精度高表面底板的非接触检测载台 |
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Effective date of registration: 20220803 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd. Address before: 518000 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |
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Effective date of registration: 20220927 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd. Address before: 518000 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |