CN207425868U - A kind of solar cell - Google Patents

A kind of solar cell Download PDF

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Publication number
CN207425868U
CN207425868U CN201721613735.7U CN201721613735U CN207425868U CN 207425868 U CN207425868 U CN 207425868U CN 201721613735 U CN201721613735 U CN 201721613735U CN 207425868 U CN207425868 U CN 207425868U
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China
Prior art keywords
layer
amorphous silicon
solar cell
silicon oxide
hydrogenated amorphous
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CN201721613735.7U
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陆海川
龙巍
董刚强
郁操
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Deyun Chuangxin (Beijing) Technology Co.,Ltd.
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Beijing Juntai Innovation Technology Co Ltd
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Abstract

The utility model discloses a kind of solar cells, by hydrogenated amorphous silicon oxide layer over transparent conductive layer, improve conventional monolayers structure of transparent conductive layer so that there is preferable wide band antireflective effect, optical transmittance can be effectively increased, improves the photoelectric properties of film;And the hydrogen atom in hydrogenated amorphous silicon oxide layer penetrates into transparency conducting layer in subsequent annealing process, so as to improve film conductivity, increases the short circuit current flow of battery so that the transfer efficiency of final battery is improved.

Description

A kind of solar cell
Technical field
The utility model is related to photovoltaic cell manufacture field more particularly to a kind of solar cells.
Background technology
HIT (Hetero-junction with Intrinsic Thin layer) heterojunction amorphous silicon/crystal silicon solar Battery due to its efficient transfer efficiency, more and more closed by the advantages that high stability, low-temperature coefficient, generating electricity on two sides Note is expected to become one of following mainstream photovoltaic technology.Transparent conductive oxide ITO (tin indium oxide) is since it is in visible light wave range High-permeability and its high conductivity, be widely used in playing the role of in HIT batteries collected current and reduce reflected light.However The optical property and electric property of transparent conductive oxide are a pair of contradictory bodies.The raising of electrical conductivity is often carrier concentration It improves, and carrier concentration is excessively high can influence optical transmission, this is because excessively high carrier concentration causes in infrared band Light absorption caused by.
Therefore, it while how ensureing high conductance, also can guarantee high light permeability, be urgently to be resolved hurrily ask Topic.
Utility model content
The purpose of this utility model is to provide a kind of solar cell, to solve the problems of the prior art, ensures higher While electrical conductivity, high light permeability also can guarantee.
The utility model provides a kind of solar cell, and the solar cell includes being successively set on monocrystalline silicon one Amorphous silicon layer, the transparency conducting layer of side surface, the solar cell, which further includes, sets over transparent conductive layer hydrogenated amorphous Silicon oxide layer, the gate line electrode being embedded in the hydrogenated amorphous silicon oxide layer, and the gate line electrode and the electrically conducting transparent Layer contact.
Preferably, the electrically conducting transparent layer thickness is 60-100nm, and the thickness of the hydrogenated amorphous silicon oxide layer is 100-130nm。
Preferably, the electrically conducting transparent layer thickness is 120-180nm, and the thickness of the hydrogenated amorphous silicon oxide layer is 100-130nm。
Preferably, the amorphous silicon layer includes the intrinsic amorphous silicon layer set gradually and n-type amorphous silicon layer, and described Sign amorphous silicon layer is arranged on one side surface of monocrystalline silicon.
Preferably, the solar cell further includes the intrinsic amorphous silicon for being successively set on another side surface of monocrystalline silicon Layer, p-type amorphous silicon layer, transparency conducting layer, hydrogenated amorphous silicon oxide layer.
Preferably, the transparency conducting layer is ito thin film layer.
Preferably, the refractive index of the transparency conducting layer is 2.0, the refractive index of the hydrogenated amorphous silicon oxide layer is 1.4。
Preferably, the square resistance of the gate line electrode is 10~50 Ω, thickness is 50~80nm.
Solar cell provided by the utility model by hydrogenated amorphous silicon oxide layer over transparent conductive layer, improves Conventional monolayers structure of transparent conductive layer so that there is preferable wide band antireflective effect, optical transmittance can be effectively increased, Improve the photoelectric properties of film;And the hydrogen atom in hydrogenated amorphous silicon oxide layer penetrates into electrically conducting transparent in subsequent annealing process Layer, so as to improve film conductivity, increases the short circuit current flow of battery so that the transfer efficiency of final battery is improved.
Description of the drawings
Fig. 1 is the structure diagram for the solar cell that the utility model embodiment provides.
Reference sign:
1- monocrystalline silicons, 2- intrinsic amorphous silicon layers, 3-n type amorphous silicon layers, 4- transparency conducting layers,
The hydrogenated amorphous silicon oxide layers of 5-, 6-p type amorphous silicon layers, 7- gate line electrodes.
Specific embodiment
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning Same or similar element is represented to same or similar label eventually or there is same or like element.Below by ginseng The embodiment for examining attached drawing description is exemplary, and is only used for explaining the utility model, and cannot be construed to the utility model Limitation.
As shown in Figure 1, the utility model embodiment provides a kind of solar cell, the solar cell is included successively Be arranged on amorphous silicon layer, the transparency conducting layer 4 of 1 one side surface of monocrystalline silicon, the solar cell further include be arranged on it is transparent Hydrogenated amorphous silicon oxide layer 5 on conductive layer 4, the gate line electrode 7 being embedded in the hydrogenated amorphous silicon oxide layer 5, and it is described Gate line electrode 7 is contacted with the transparency conducting layer 4.
Wherein, hydrogenated amorphous silicon oxide layer 5 is generally SiOx:H films;It can be with modes such as laser to hydrogenated amorphous silica Layer 5SiOx:The structure of H carries out, except film process, subsequently using silk-screen printing gate line electrode 7, making transparency conducting layer 4 and gate line electrode 7 contacts, so as to extracted current.Preferably, the transparency conducting layer 4 is ito thin film layer.Preferably, the amorphous silicon layer Including the intrinsic amorphous silicon layer 2 set gradually and n-type amorphous silicon layer 3, and the intrinsic amorphous silicon layer 2 is arranged on the monocrystal 1 one side surface of silicon.Preferably, the square resistance of the gate line electrode 7 is 10~50 Ω, thickness is 50~80nm.
Solar cell provided by the utility model by the hydrogenated amorphous silicon oxide layer 5 on transparency conducting layer 4, changes Kind 4 structure of conventional monolayers transparency conducting layer so that there is preferable wide band antireflective effect, optical transmission can be effectively increased Energy improves the photoelectric properties of film;And the hydrogen atom in hydrogenated amorphous silicon oxide layer 5 penetrated into subsequent annealing process it is transparent Conductive layer 4 so as to improve film conductivity, increases the short circuit current flow of battery so that the transfer efficiency of final battery is improved.
Preferably, when wavelength is 632.8nm, 4 refractive index of transparency conducting layer is 2.0, hydrogenated amorphous silicon oxide layer 5SiOx:H refractive index is 1.4, and according to Film Optics principle, there are mainly two types of structures for the antireflective film of index matching:
In the utility model embodiment, scheme one:The structure of V-structure, i.e. λ/4~λ/4.Pass through PVD (Physical Vapor Deposition) physical vaporous deposition sputtering prepares thickness as after 60-100nm transparency conducting layers 4, then in PECVD The vapour deposition process of (Plasma Enhanced Chemical Vapor Deposition) plasma enhanced chemical prepares one Layer thickness is 100~130nm SiOx:H films.
Scheme two:The structure of W type structures, i.e. λ/4~λ/2, PVD sputterings prepare thickness as 120nm-180 transparency conducting layers 4 Afterwards, then in pecvd a layer thickness is prepared as 100~130nm SiOx:H films.
Preferably, the solar cell further includes the intrinsic amorphous for being successively set on 1 another side surface of monocrystalline silicon Silicon layer 2, p-type amorphous silicon layer 6, transparency conducting layer 4, hydrogenated amorphous silicon oxide layer 5.
Wherein, intrinsic amorphous silicon layer 2, p-type amorphous silicon layer 6, transparency conducting layer 4 are set in 1 another side surface of monocrystalline silicon, As a same reason, one layer of hydrogenated amorphous silicon oxide layer 5 on transparency conducting layer 4 is set, double layer antireflection coating is integrally formed, improves light Effective transmission, improve the short circuit current flow of battery;Film conductivity is improved simultaneously, final transformation efficiency can obtain effectively It is promoted.
The structure, feature and effect of the utility model are described in detail based on the embodiments shown in the drawings, with Upper described is only the preferred embodiment of the utility model, but the utility model is to limit practical range shown in drawing, it is every according to Change that conception according to the utility model is made or the equivalent embodiment for being revised as equivalent variations, still without departing from specification and figure When showing covered spirit, it should be within the protection scope of the present utility model.

Claims (8)

1. a kind of solar cell, the solar cell include being successively set on the amorphous silicon layer of one side surface of monocrystalline silicon, Transparency conducting layer, which is characterized in that the solar cell further includes the hydrogenated amorphous silica set over transparent conductive layer Layer, the gate line electrode being embedded in the hydrogenated amorphous silicon oxide layer, and the gate line electrode is contacted with the transparency conducting layer.
2. solar cell according to claim 1, which is characterized in that the electrically conducting transparent layer thickness is 60-100nm, And the thickness of the hydrogenated amorphous silicon oxide layer is 100-130nm.
3. solar cell according to claim 1, which is characterized in that the electrically conducting transparent layer thickness is 120-180nm, And the thickness of the hydrogenated amorphous silicon oxide layer is 100-130nm.
4. solar cell according to claim 1, which is characterized in that the amorphous silicon layer includes setting gradually intrinsic Amorphous silicon layer and n-type amorphous silicon layer, and the intrinsic amorphous silicon layer is arranged on one side surface of monocrystalline silicon.
5. solar cell according to claim 1, which is characterized in that the solar cell, which further includes, to be successively set on The intrinsic amorphous silicon layer of another side surface of monocrystalline silicon, p-type amorphous silicon layer, transparency conducting layer, hydrogenated amorphous silicon oxide layer.
6. solar cell according to claim 1, which is characterized in that the transparency conducting layer is ito thin film layer.
7. solar cell according to claim 1, which is characterized in that the refractive index of the transparency conducting layer is 2.0, institute The refractive index for stating hydrogenated amorphous silicon oxide layer is 1.4.
8. according to claim 1-7 any one of them solar cells, which is characterized in that the square resistance of the gate line electrode For 10~50 Ω, thickness is 50~80nm.
CN201721613735.7U 2017-11-27 2017-11-27 A kind of solar cell Active CN207425868U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110808314A (en) * 2019-11-14 2020-02-18 西南石油大学 Method for improving photoelectric performance of heterojunction solar cell

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110808314A (en) * 2019-11-14 2020-02-18 西南石油大学 Method for improving photoelectric performance of heterojunction solar cell
CN110808314B (en) * 2019-11-14 2021-05-11 西南石油大学 Method for improving photoelectric performance of heterojunction solar cell

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Effective date of registration: 20201230

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Patentee after: Deyun Chuangxin (Beijing) Technology Co.,Ltd.

Address before: 100176 Beijing Daxing District Beijing Economic and Technological Development Zone, No. 66 Building, No. 2 Jingyuan North Street, 7th Floor 805

Patentee before: Juntai innovation (Beijing) Technology Co.,Ltd.