CN207415103U - A kind of multistation chip grinding attachment - Google Patents
A kind of multistation chip grinding attachment Download PDFInfo
- Publication number
- CN207415103U CN207415103U CN201721525845.8U CN201721525845U CN207415103U CN 207415103 U CN207415103 U CN 207415103U CN 201721525845 U CN201721525845 U CN 201721525845U CN 207415103 U CN207415103 U CN 207415103U
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- plant
- processing unit
- control device
- chip
- mechanical hand
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Abstract
The utility model provides a kind of multistation chip grinding attachment, including security fence, and chip memory devices, processing unit (plant), discharging storing unit, feeding manipulator and blanking mechanical hand, the processing unit (plant), feeding manipulator and the blanking mechanical hand being arranged in security fence are connected with a control device and are controlled by the control device；And effective monitoring is carried out to the operation process of processing unit (plant) by setting vision inspection apparatus, so as to improve the precision of chip manufacture operation and security.
Description
Technical field
The utility model is related to semiconductor applications more particularly to a kind of multistation chip grinding attachments.
Background technology
It is in life now, under the progress of Science and Technology Day crescent benefit, robot and the arm maximum area for having the mankind
It is not that flexibility ratio and resistance to dynamics, that is, the sharpest edges of manipulator recursive do same action in the positive reason of machinery
It will not always feel tired under condition, the application of manipulator also will be more and more extensive.
The manufacture of semiconductor crystal wafer chip includes：Semiconductor crystal wafer is cut down from crystal, followed by many companies
The procedure of processing of continuous removal material.These procedure of processings be in order to obtain surface as smooth as possible, semiconductor crystal wafer it is flat
The semiconductor crystal wafer of row side and offer with rounding seamed edge.The procedure of processing of the removal material usually considered includes：Partly lead
Seamed edge rounding, grinding or twin grinding, etching and the polishing of body wafer.In the processing operation of semiconductor crystal wafer chip, exist
Substantial amounts of repeated labor, it is more demanding simultaneously for operating environment, manipulator is applied in the processing operation of chip wafer
It is the trend of current social development, while also needs to general sex chromosome mosaicism and safety problem in processing operation etc..
Utility model content
In order to solve the above-mentioned technical problem, the utility model provides a kind of multistation chip grinding attachment.
The utility model is realized with following technical solution：
A kind of multistation chip grinding attachment is filled including security fence and the chip memory being arranged in security fence
Put, processing unit (plant), discharging storing unit, feeding manipulator and blanking mechanical hand, the processing unit (plant), feeding manipulator and blanking
Manipulator is connected with a control device and is controlled by the control device；
The chip memory devices and discharging storing unit are placed in the both sides of the processing unit (plant), the feeding manipulator
For the generation processing chip taking-up in the chip memory devices to be placed on processing unit (plant), the blanking mechanical hand is used for will
Chip taking-up after the processing unit (plant) processing is positioned in the discharging storing unit,
Fixed frame on the processing unit (plant) is installed, two sets of machining tools, first set processing are installed on the fixed frame
Instrument is corase grinding cutting knife tool, and second set of machining tool is fine grinding cutting knife tool, and vision inspection is additionally provided with above the processing unit (plant)
Device is surveyed, the vision inspection apparatus is communicated to connect with the control device.
Further, the corase grinding cutting knife tool and fine grinding cutting knife tool are in the plane internal rotation parallel to the fixed frame, institute
The mobile station that an endless track shape is also set up on fixed frame is stated, the mobile station is provided with conveyer belt, and the movement takes setting
Multiple mounting tables can place a chip to be processed on each mounting table.
Further, the vision inspection apparatus is multiple cameras, and multiple cameras are used to gather the work of processing unit (plant)
Industry situation, and the image/video data of acquisition are sent to the control device, the control device is according to the data received
It controls the startup of processing unit (plant) and pause, while also feeding manipulator and blanking mechanical hand is controlled to carry out loading and unloading in time.
Further, manipulator control unit, the machinery are both provided in the feeding manipulator and blanking mechanical hand
Hand control unit is communicated to connect with the control device, so that the feeding manipulator and blanking mechanical hand are controlled by the control
Device processed.
Further, the feeding manipulator is identical with blanking mechanical hand structure, including hoistable platform, large arm, middle arm,
Forearm and end effector, the hoistable platform include a lifting shaft, and the large arm is by the first revolute pair and lifts axis connection,
The middle arm is connected by the second revolute pair with large arm, and the forearm is connected by the 3rd revolute pair with middle arm, and the end is held
Row device is connected by a prismatic pair with forearm, the end effector grab chips.
The beneficial effects of the utility model are：
The utility model provides a kind of multistation chip grinding attachment, including security fence and is arranged on security fence
Interior chip memory devices, processing unit (plant), discharging storing unit, feeding manipulator and blanking mechanical hand, the processing unit (plant), on
Material manipulator and blanking mechanical hand are connected with a control device and are controlled by the control device；And pass through setting vision-based detection
Device to carry out effective monitoring to the operation process of processing unit (plant), so as to improve the precision of chip manufacture operation and security.
Description of the drawings
Fig. 1 is a kind of multistation chip grinding attachment overall schematic provided in this embodiment；
Fig. 2 is robot manipulator structure schematic diagram provided in this embodiment.
Specific embodiment
It is new to this practicality below in conjunction with attached drawing to make the purpose of this utility model, technical solution and advantage clearer
Type is described in further detail.
A kind of multistation chip grinding attachment is filled including security fence and the chip memory being arranged in security fence
Put 1, processing unit (plant) 2, discharging storing unit 3, feeding manipulator 4 and blanking mechanical hand 5, the processing unit (plant), feeding manipulator
It is connected with blanking mechanical hand with a control device 100 and is controlled by the control device 100；
The chip memory devices 1 and discharging storing unit 3 are placed in the both sides of the processing unit (plant) 2, the feeder
Tool hand 4 is used to the generation processing taking-up of chip 6 in the chip memory devices 1 being placed on processing unit (plant) 2, the blanking mechanical
The chip taking-up that hand 5 is used for after the processing unit (plant) 2 is processed is positioned in the discharging storing unit 3,
Fixed frame 21 on the processing unit (plant) 2 is installed, two sets of machining tools, first set are installed on the fixed frame 21
Machining tool is corase grinding cutting knife tool 22, and second set of machining tool is fine grinding cutting knife tool 23, is also set up above the processing unit (plant)
There is vision inspection apparatus, the vision inspection apparatus is communicated to connect with the control device.
Further, the corase grinding cutting knife tool and fine grinding cutting knife tool are in the plane internal rotation parallel to the fixed frame, institute
The mobile station that an endless track shape is also set up on fixed frame is stated, the mobile station is provided with conveyer belt, and the movement takes setting
Multiple mounting tables 24 can place a chip to be processed on each mounting table.
Further, the vision inspection apparatus is multiple cameras, and multiple cameras are used to gather the work of processing unit (plant)
Industry situation, and the image/video data of acquisition are sent to the control device, the control device is according to the data received
It controls the startup of processing unit (plant) and pause, while also feeding manipulator and blanking mechanical hand is controlled to carry out loading and unloading in time.
Further, manipulator control unit, the machinery are both provided in the feeding manipulator and blanking mechanical hand
Hand control unit is communicated to connect with the control device, so that the feeding manipulator and blanking mechanical hand are controlled by the control
Device processed.
Further, the feeding manipulator is identical with blanking mechanical hand structure, by taking feeding manipulator as an example, including lifting
Platform 51, large arm 52, middle arm 53, forearm 54 and end effector 55, the hoistable platform include a lifting shaft 56, the large arm
By the first revolute pair and lifting axis connection, the middle arm is connected by the second revolute pair with large arm, and the forearm passes through the 3rd
Revolute pair is connected with middle arm, and the end effector is connected by a prismatic pair with forearm, the end effector grab chips.
Above disclosed is only the utility model preferred embodiment, cannot limit the utility model with this certainly
Interest field, therefore equivalent variations made according to the utility model claims still belong to the scope that the utility model is covered.
Claims (4)
1. a kind of multistation chip grinding attachment, it is characterised in that：Including security fence and the core being arranged in security fence
Piece storage device, processing unit (plant), discharging storing unit, feeding manipulator and blanking mechanical hand, the processing unit (plant), feeding machinery
Hand and blanking mechanical hand are connected with a control device and are controlled by the control device；
The chip memory devices and discharging storing unit are placed in the both sides of the processing unit (plant), and the feeding manipulator is used for
Generation processing chip taking-up in the chip memory devices is placed on processing unit (plant), the blanking mechanical hand is used for by described in
Chip taking-up after processing unit (plant) processing is positioned in the discharging storing unit,
Fixed frame on the processing unit (plant) is installed, two sets of machining tools, first set machining tool are installed on the fixed frame
To roughly grind cutting knife tool, second set of machining tool is fine grinding cutting knife tool, and vision-based detection dress is additionally provided with above the processing unit (plant)
It puts, the vision inspection apparatus is communicated to connect with the control device；
The corase grinding cutting knife tool and fine grinding cutting knife tool are also set in the plane internal rotation parallel to the fixed frame, the fixed frame
The mobile station of an endless track shape is put, the mobile station is provided with conveyer belt, and the movement, which takes, sets multiple mounting tables, each
A chip to be processed can be placed on mounting table.
2. a kind of multistation chip grinding attachment according to claim 1, it is characterised in that：
The vision inspection apparatus is multiple cameras, and multiple cameras are used to gather the handling situations of processing unit (plant), and will adopt
The image/video data of collection are sent to the control device, and the control device controls processing unit (plant) according to the data received
Startup and pause, while also feeding manipulator and blanking mechanical hand is controlled to carry out loading and unloading in time.
3. a kind of multistation chip grinding attachment according to claim 2, it is characterised in that：
Manipulator control unit, the manipulator control unit and institute are both provided in the feeding manipulator and blanking mechanical hand
Control device communication connection is stated, so that the feeding manipulator and blanking mechanical hand are controlled by the control device.
4. a kind of multistation chip grinding attachment according to claim 1, it is characterised in that：
The feeding manipulator is identical with blanking mechanical hand structure, is held including hoistable platform, large arm, middle arm, forearm and end
Row device, the hoistable platform include a lifting shaft, and the large arm is passed through by the first revolute pair and lifting axis connection, the middle arm
Second revolute pair is connected with large arm, and the forearm is connected by the 3rd revolute pair with middle arm, and the end effector is moved by one
Dynamic pair is connected with forearm, the end effector grab chips.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721525845.8U CN207415103U (en) | 2017-11-16 | 2017-11-16 | A kind of multistation chip grinding attachment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721525845.8U CN207415103U (en) | 2017-11-16 | 2017-11-16 | A kind of multistation chip grinding attachment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207415103U true CN207415103U (en) | 2018-05-29 |
Family
ID=62304920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721525845.8U Expired - Fee Related CN207415103U (en) | 2017-11-16 | 2017-11-16 | A kind of multistation chip grinding attachment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207415103U (en) |
-
2017
- 2017-11-16 CN CN201721525845.8U patent/CN207415103U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180529 Termination date: 20191116 |