CN207401891U - A kind of semiconductor equipment dust removal device - Google Patents
A kind of semiconductor equipment dust removal device Download PDFInfo
- Publication number
- CN207401891U CN207401891U CN201721189306.1U CN201721189306U CN207401891U CN 207401891 U CN207401891 U CN 207401891U CN 201721189306 U CN201721189306 U CN 201721189306U CN 207401891 U CN207401891 U CN 207401891U
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- China
- Prior art keywords
- cabinet
- dust
- inductor
- semiconductor equipment
- cleaner body
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Abstract
The utility model discloses a kind of semiconductor equipment dust removal devices, its structure includes motor, disposal box, supporting rod, dust inductor, cleaner body, conduit, control cabinet, connecting groove, cabinet, the cabinet for outer wall is strong and both side surface is equal and rectangular parallelepiped structure, inner surface bottom is flexibly connected using interference fit type with disposal box lower surface and forms Back Word type, and cabinet height is 80cm.The utility model is equipped with dust inductor, by lower button inductor body is made to connect electric energy, actuator is made by driving plate dust detector to be controlled to be detected the dust of semiconductor equipment, it is transferred to through circuit board in inductor body and drives processor to detection data processing, inductor body controls indicator light to light by actuator, operation cleaner body carries out dedusting in time, avoids influencing the using effect of semiconductor equipment, improves efficiency of dust collection.
Description
Technical field
The utility model is a kind of semiconductor equipment dust removal device, belongs to field of semiconductor devices.
Background technology
Semiconductor refers to material of the electric conductivity between conductor and insulator under room temperature.Semiconductor is in radio, TV
It has a wide range of applications on machine and thermometric.If diode is exactly the device using semiconductor fabrication.Semiconductor refers to that one kind is led
It can electrically be controlled, scope can be from insulator to the material between conductor.
Prior art discloses Application No.：A kind of semiconductor equipment dust removal device of CN200920208855.8,
Including：Dust collector；Vacuum suction pipe connects handle, is connected to the dust collector.The utility model proposes partly lead
Body equipment dust removal device can effectively remove the solid fraction dust of processing chamber and inner-walls of duct, and will not be to operation
The health of member and the environment of encapsulation room adversely affect.But it is when being disadvantageous in that semiconductor equipment dedusting, it can not
To the carry out dust sensing on semiconductor equipment, easily make to remove not in time the dust of semiconductor equipment, influence semiconductor equipment
Using effect, reduce efficiency of dust collection.
Utility model content
In view of the deficienciess of the prior art, the utility model aim is to provide a kind of semiconductor equipment dust removal dress
It puts, during solving above equipment to semiconductor equipment dedusting, the carry out dust sensing on semiconductor equipment can not easily be made half-and-half
The dust of conductor device removes not in time, the problem of influencing the using effect of semiconductor equipment, reduce efficiency of dust collection.
To achieve these goals, the utility model is to realize by the following technical solutions：A kind of semiconductor equipment
Dust removal device, structure include motor, disposal box, supporting rod, dust inductor, cleaner body, conduit, control cabinet,
Connecting groove, cabinet, the cabinet for outer wall is strong and both side surface is equal and rectangular parallelepiped structure, inner surface bottom and dust
Case lower surface using interference fit type be flexibly connected and form Back Word type, cabinet height be 80cm, the cleaner body
For the cylindrical structure that both side surface is equal and inside is hollow, side surface is located at conduit side face extremities and forms convex,
The a diameter of 12cm-13cm of cleaner body, the cabinet inner surface bottom use interference fit side with disposal box lower surface
Formula is flexibly connected, and cabinet length is 1.2m, and the disposal box is outer wall is strong and the rectangular parallelepiped structure of inner hollow, side surface
It is located at conduit side surface and is mutually perpendicular to, disposal box outer wall thickness is 20mm-35mm, and the control cabinet is equal for both side surface
And the concave of side top indent, cabinet side surface are equipped with control cabinet side surface and in same level, control cabinets
Width is 7cm, cleaner body side surface be flexibly connected with conduit side face extremities using interference fit type and
It is mutually perpendicular to, cleaner body length is 26cm, and the conduit is outer wall is soft and the cylindrical structure of inner hollow, side table
Face is located at cabinet side surface, catheter length 1.8m-2.1m, and the supporting rod is cylinder that is inside and outside strong and being mutually parallel
Structure, cleaner body lower surface edge are equipped with support bar top surface and triangle, and supporting rod height is 2.2m, institute
Dust inductor lower surface is stated to be located at cleaner body lower surface edge center and be mutually perpendicular to；The dust inductor by
Dust detector, shell, driving plate, circuit board, actuator, inductor body composition, the dust detector are both side surface
Ellipse that is equal and being mutually parallel, outer surface is flexibly connected with cover top portion face center using interference fit type and structure
Into convex, dust detector length is 7cm, and the shell both side surface is equal and the convex of top bump, lower surface are located at
Cleaner body lower surface edge center, outer cover height 14cm-16cm, the driving plate are inside and outside strong and are mutually parallel
Rectangular parallelepiped structure, circuit board top surface is equipped with and driving plate lower surface and is mutually perpendicular to, and driving plate height is 6cm, described
Circuit board is rectangular parallelepiped structure that is inside and outside strong and being mutually parallel, and lower surface is with shell inner bottom surface using interference fit
Mode is flexibly connected and is mutually parallel, and circuit plate thickness is 30mm-40mm, and the actuator lower surface is located at the top of circuit board
Surface Edge along and be mutually perpendicular to, actuator length is 4.5cm, and the inductor body is equal and be mutually parallel for both side surface
Rectangular parallelepiped structure, circuit board top surface are equipped with inductor body lower surface and form convex, and inductor body length is
8cm-9cm。
Further, the control cabinet concave surface is equipped with connecting groove side face extremities and is mutually perpendicular to.
Further, the motor bottom surface be flexibly connected with cabinet inner surface edge using interference fit type and
It is mutually parallel, motor diameter 13cm-15cm..
Further, the case surface is equipped with indicator light and button.
Further, the cleaner body bottom is equipped with 2 supporting rods.
Further, the cabinet outer wall thickness is 30mm-40mm.
Further, the model YE3-132M-4-7.5KW of the motor.
Further, the circuit board is equipped with processor.
Advantageous effect
A kind of semiconductor equipment dust removal device of the utility model, equipped with dust inductor, makes inductor by lower button
Main body connects electric energy, actuator is made by driving plate dust detector to be controlled to be detected the dust of semiconductor equipment, through electricity
Road plate, which is transferred in inductor body, drives processor to handle detection data, and inductor body controls indicator light by actuator
It lights, operates cleaner body in time and carry out dedusting, avoid influencing the using effect of semiconductor equipment, improve efficiency of dust collection.
Description of the drawings
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model
Sign, objects and advantages will become more apparent upon：
Fig. 1 is a kind of structure diagram of semiconductor equipment dust removal device of the utility model；
Fig. 2 is the dust inductor external structure schematic diagram of the utility model.
Fig. 3 is the dust inductor internal structure schematic diagram of the utility model.
In figure：Motor -1, disposal box -2, supporting rod -3, dust inductor -4, dust detector -401, shell -402, drive
Movable plate -403, circuit board -404, inductor body -406, cleaner body -5, conduit -6, control cabinet -7, connect actuator -405
Wire casing -8, cabinet -9.
Specific embodiment
Technical means, creative features, achievable purpose and effectiveness to realize the utility model are easy to understand, below
With reference to specific embodiment, the utility model is expanded on further.
- Fig. 3 is please referred to Fig.1, the utility model provides a kind of technical solution：A kind of semiconductor equipment dust removal device,
Its structure includes motor 1, disposal box 2, supporting rod 3, dust inductor 4, cleaner body 5, conduit 6, control cabinet 7, connecting groove
8th, cabinet 9, the cabinet 9 for outer wall is strong and both side surface is equal and rectangular parallelepiped structure, inner surface bottom and disposal box 2
Lower surface using interference fit type be flexibly connected and form Back Word type, 9 height of cabinet be 80cm, the cleaner body 5
For the cylindrical structure that both side surface is equal and inside is hollow, side surface is located at 6 side face extremities of conduit and forms convex,
5 a diameter of 12cm-13cm of cleaner body, the 9 inner surface bottom of cabinet is with 2 lower surface of disposal box using interference fit
Mode is flexibly connected, and 9 length of cabinet is 1.2m, and the disposal box 2 is outer wall is strong and the rectangular parallelepiped structure of inner hollow, side
Surface is located at 6 side surface of conduit and is mutually perpendicular to, and 2 outer wall thickness of disposal box is 20mm-35mm, and the control cabinet 7 is both sides
Surface is equal and side at the top of indent concave, 9 side surface of cabinet is equipped with 7 side surface of control cabinet and in same water
Flat, 7 width of control cabinet is 7cm, and the 5 side surface of cleaner body uses interference fit side with 6 side face extremities of conduit
Formula is flexibly connected and is mutually perpendicular to, and 5 length of cleaner body is 26cm, and the conduit 6 is the circle of outer wall softness and inner hollow
Column structure, side surface are located at 9 side surface of cabinet, and 6 length of conduit is 1.8m-2.1m, and the supporting rod 3 is inside and outside strong
And the cylindrical structure being mutually parallel, 5 lower surface edge of cleaner body are equipped with 3 top surface of supporting rod and form triangle
Shape, 3 height of supporting rod be 2.2m, 4 lower surface of dust inductor be located at 5 lower surface edge of cleaner body center and
It is mutually perpendicular to；The dust inductor 4 is by dust detector 401, shell 402, driving plate 403, circuit board 404, actuator
405th, inductor body 406 forms, and the dust detector 401 is both side surface is equal and the ellipse that is mutually parallel, outside
Surface is flexibly connected using interference fit type with 402 top surface of shell center and forms convex, 401 length of dust detector
For 7cm, 402 both side surface of shell is equal and the convex of top bump, lower surface are located at 5 lower surface of cleaner body
Edge center, 402 height of shell are 14cm-16cm, and the driving plate 403 is cuboid knot that is inside and outside strong and being mutually parallel
Structure, 404 top surface of circuit board are equipped with and 403 lower surface of driving plate and are mutually perpendicular to, and 403 height of driving plate is 6cm, the electricity
Road plate 404 is rectangular parallelepiped structure that is inside and outside strong and being mutually parallel, and lower surface uses interference with 402 inner bottom surface of shell
Fit system is flexibly connected and is mutually parallel, and 404 thickness of circuit board is 30mm-40mm, and 405 lower surface of actuator is located at
It 404 top surface edge of circuit board and is mutually perpendicular to, 405 length of actuator is 4.5cm, and the inductor body 406 is both sides
Surface is equal and the rectangular parallelepiped structure that is mutually parallel, 404 top surface of circuit board are equipped with 406 lower surface of inductor body and structure
Into convex, 406 length of inductor body is 8cm-9cm.7 concave surface of control cabinet is equipped with 8 side face extremities of connecting groove
And it is mutually perpendicular to.1 lower surface of motor be flexibly connected with 9 inner surface edge of cabinet using interference fit type and mutually
It is parallel, 1 a diameter of 13cm-15cm of motor.402 surface of shell is equipped with indicator light and button.5 bottom of cleaner body
Equipped with 2 supporting rods 3.9 outer wall thickness of cabinet is 30mm-40mm.
Dust inductor 4 described in this patent is a kind of electric signal that physical quantity or chemical quantity can be transformed into utilize
Device.
It is carrying out in use, 4 lower surface of dust inductor will be stated in 5 lower surface edge of cleaner body
Centre makes inductor body 406 connect electric energy, actuator 405 is made to control dust detector 401 by driving plate 403 by lower button
The dust of semiconductor equipment is detected, is transferred to through circuit board 404 in inductor body 406 and drives processor to detecting number
According to processing, inductor body 406 controls indicator light to light by actuator 405, and operation control box 7 makes motor 1 pass through electrical connection
Cleaner body 5 is driven to run, makes cleaner body 5 that the dust of semiconductor equipment is transported to through conduit 6 in disposal box 2, keeps away
Exempt from the using effect of influence semiconductor equipment, improve efficiency of dust collection.
The motor 1 of the utility model, disposal box 2, supporting rod 3, dust inductor 4, cleaner body 5, conduit 6, control
Case 7, connecting groove 8, cabinet 9, the component that component is universal standard part or those skilled in the art know, structure and principle are all
Can be learnt by technical manual for this technology personnel or be known by routine experiment method, the utility model solve the problems, such as be
When above equipment is to semiconductor equipment dedusting, the carry out dust sensing on semiconductor equipment can not easily be made to semiconductor equipment
Dust removal not in time, the problem of influencing the using effect of semiconductor equipment, reduce efficiency of dust collection, the utility model passes through upper
Being combined with each other for component is stated, equipped with dust inductor, by lower button inductor body is made to connect electric energy, actuator is made to pass through driving
Plate control dust detector is detected the dust of semiconductor equipment, and being transferred to drive in inductor body through circuit board is handled
Device controls indicator light to light detection data processing, inductor body by actuator, operates cleaner body in time and is removed
Dirt avoids influencing the using effect of semiconductor equipment, improves efficiency of dust collection.It is described in detail below:
The dust detector 401 is the ellipse that both side surface is equal and is mutually parallel, and outer surface is pushed up with shell 402
Portion's face center using interference fit type be flexibly connected and form convex, 401 length of dust detector be 7cm, the shell
402 both side surfaces are equal and the convex of top bump, and lower surface is located at 5 lower surface edge of cleaner body center, shell
402 height are 14cm-16cm, and the driving plate 403 is rectangular parallelepiped structure that is inside and outside strong and being mutually parallel, and circuit board 404 pushes up
Portion surface is equipped with 403 lower surface of driving plate and is mutually perpendicular to, and 403 height of driving plate is 6cm, and the circuit board 404 is inside and outside
Rectangular parallelepiped structure that is strong and being mutually parallel, lower surface use interference fit type activity with 402 inner bottom surface of shell
It connects and is mutually parallel, 404 thickness of circuit board is 30mm-40mm, and 405 lower surface of actuator is located at circuit board 404 and pushes up
Portion Surface Edge along and be mutually perpendicular to, 405 length of actuator is 4.5cm, and the inductor body 406 is both side surface is equal and phase
Mutually parallel rectangular parallelepiped structure, 404 top surface of circuit board are equipped with 406 lower surface of inductor body and form convex, sensing
406 length of device main body is 8cm-9cm.
The basic principle of the utility model and main feature and the advantages of the utility model has been shown and described above, for
For those skilled in the art, it is clear that the utility model is not limited to the details of above-mentioned exemplary embodiment, and without departing substantially from this
In the case of the spirit or essential attributes of utility model, the utility model can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the utility model is by institute
Attached claim rather than above description limit, it is intended that will fall within the meaning and scope of the equivalent requirements of the claims
All changes are embraced therein.Any reference numeral in claim should not be considered as to the involved right of limitation
It is required that.
Moreover, it will be appreciated that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
Using specification as an entirety, the technical solutions in each embodiment can also be properly combined, forms those skilled in the art
It is appreciated that other embodiment.
Claims (6)
1. a kind of semiconductor equipment dust removal device, structure includes motor (1), disposal box (2), supporting rod (3), dust sense
Device (4), cleaner body (5), conduit (6), control cabinet (7), connecting groove (8), cabinet (9) are answered, the cabinet (9) is hard for outer wall
Reality and both side surface it is equal and rectangular parallelepiped structure, inner surface bottom and disposal box (2) lower surface use interference fit side
Formula is flexibly connected and forms Back Word type, and cabinet (9) is highly 80cm, and the cleaner body (5) is equal and interior for both side surface
The hollow cylindrical structure in side, side surface are located at conduit (6) side face extremities and form convex, and cleaner body (5) is straight
Footpath is 12cm-13cm, it is characterised in that：
Cabinet (9) the inner surface bottom is flexibly connected with disposal box (2) lower surface using interference fit type, cabinet
(9) length is 1.2m, and for the disposal box (2) for outer wall is strong and the rectangular parallelepiped structure of inner hollow, side surface is located at conduit
(6) side surface and it is mutually perpendicular to, disposal box (2) outer wall thickness is 20mm-35mm, and the control cabinet (7) is both side surface phase
Deng and side at the top of indent concave, cabinet (9) side surface is equipped with control cabinet (7) side surface and in same water
Flat, control cabinet (7) width is 7cm, and cleaner body (5) the side surface uses interference with conduit (6) side face extremities
Fit system is flexibly connected and is mutually perpendicular to, and cleaner body (5) length is 26cm, and the conduit (6) is soft and interior for outer wall
The hollow cylindrical structure in portion, side surface are located at cabinet (9) side surface, and conduit (6) length is 1.8m-2.1m, the branch
Strut (3) is cylindrical structure that is inside and outside strong and being mutually parallel, and cleaner body (5) lower surface edge is equipped with supporting rod
(3) top surface and triangle, supporting rod (3) are highly 2.2m, and dust inductor (4) lower surface is located at dedusting
Device main body (5) lower surface edge is central and is mutually perpendicular to；
The dust inductor (4) is by dust detector (401), shell (402), driving plate (403), circuit board (404), execution
Device (405), inductor body (406) composition, the dust detector (401) are the ellipse that both side surface is equal and is mutually parallel
Shape, outer surface are flexibly connected using interference fit type with shell (402) top surface center and form convex, dust detection
Device (401) length is 7cm, and shell (402) both side surface is equal and the convex of top bump, lower surface are located at deduster
Main body (5) lower surface edge center, shell (402) highly for 14cm-16cm, the driving plate (403) to be inside and outside strong and
The rectangular parallelepiped structure being mutually parallel, circuit board (404) top surface are equipped with driving plate (403) lower surface and are mutually perpendicular to, drive
For movable plate (403) highly for 6cm, the circuit board (404) is rectangular parallelepiped structure that is inside and outside strong and being mutually parallel, lower surface with
Shell (402) inner bottom surface is flexibly connected and is mutually parallel using interference fit type, and circuit board (404) thickness is
30mm-40mm, actuator (405) lower surface are located at circuit board (404) top surface edge and are mutually perpendicular to, actuator
(405) length is 4.5cm, and the inductor body (406) is both side surface is equal and the rectangular parallelepiped structure that is mutually parallel, circuit
Plate (404) top surface is equipped with inductor body (406) lower surface and forms convex, and inductor body (406) length is
8cm-9cm。
2. a kind of semiconductor equipment dust removal device according to claim 1, it is characterised in that：The control cabinet (7)
Concave surface is equipped with connecting groove (8) side face extremities and is mutually perpendicular to.
3. a kind of semiconductor equipment dust removal device according to claim 1, it is characterised in that：Motor (1) bottom
Portion surface is flexibly connected and is mutually parallel using interference fit type with cabinet (9) inner surface edge, and motor (1) is a diameter of
13cm-15cm。
4. a kind of semiconductor equipment dust removal device according to claim 1, it is characterised in that：The shell (402)
Surface is equipped with indicator light and button.
5. a kind of semiconductor equipment dust removal device according to claim 1, it is characterised in that：The cleaner body
(5) bottom is equipped with 2 supporting rods (3).
6. a kind of semiconductor equipment dust removal device according to claim 1, it is characterised in that：The cabinet (9) is outside
Wall thickness is 30mm-40mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721189306.1U CN207401891U (en) | 2017-09-18 | 2017-09-18 | A kind of semiconductor equipment dust removal device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721189306.1U CN207401891U (en) | 2017-09-18 | 2017-09-18 | A kind of semiconductor equipment dust removal device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207401891U true CN207401891U (en) | 2018-05-25 |
Family
ID=62405700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721189306.1U Expired - Fee Related CN207401891U (en) | 2017-09-18 | 2017-09-18 | A kind of semiconductor equipment dust removal device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207401891U (en) |
-
2017
- 2017-09-18 CN CN201721189306.1U patent/CN207401891U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180525 Termination date: 20180918 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |