CN207363840U - The big pumping speed vacuum suction unit of low-carbon, oil-free - Google Patents
The big pumping speed vacuum suction unit of low-carbon, oil-free Download PDFInfo
- Publication number
- CN207363840U CN207363840U CN201721191708.5U CN201721191708U CN207363840U CN 207363840 U CN207363840 U CN 207363840U CN 201721191708 U CN201721191708 U CN 201721191708U CN 207363840 U CN207363840 U CN 207363840U
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- pump assembly
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Abstract
The utility model provides the big pumping speed vacuum suction unit of a kind of low-carbon, oil-free, it uses some vertical compound runoff molecular pump+deep cooling steam pump+chemisorbed pumping mechanism of qi groups, obtain pumping speed that can be suitable with conventional diffusion pump, with air exhaust energy consumption is significantly saved, shorten pumpdown time and eliminate the remarkable advantage of oil vapour pollution.
Description
Technical field
The utility model belongs to technical field of vacuum, more particularly to the big pumping speed vacuum suction unit of a kind of low-carbon, oil-free.
Background technology
Conventional diffusion pump has the advantages that pumping speed is big, price is low and easy to maintain, is always large scale industry height in decades
The mainstream pump kind of vacuum equipment, however, the diffusion pump has the disadvantage that：
1. oil vapour pollution is big：Diffusion pump is evacuated using oil vapour injection stream, and oil vapour is seriously polluted, influences vacuum products
Quality.
3. high energy consumption：The diffusion pump pumping unit of one tens of thousands of L/s, power consumption are up to 30~500,000 degree/year.
Disadvantages mentioned above is that current vacuum industry is urgently to be resolved hurrily, but fails the problem captured always.
Utility model content
The purpose of this utility model is that using a kind of low-carbon, big pumping of oil-free for significantly reducing oil vapour pollution and energy consumption
Fast vacuum suction unit.
The utility model is realized in this way the big pumping speed vacuum suction unit of a kind of low-carbon, oil-free, including vacuum chamber, institute
State vacuum chamber to be connected with roughing vacuum pump unit, vaccum case, chemisorbed pump assembly, vent valve and vacuum gauge respectively, the vacuum
The first vacuum valve is equipped between room and roughing vacuum pump unit, the second vacuum valve is equipped between the vacuum chamber and vaccum case, it is described
Vaccum case inner upper is pumped equipped with deep cooling steam, and the vaccum case lower inside is equipped with runoff pump assembly, the radial flow pump
Unit is made of the vertical compound runoff molecular pump of some pumpings in parallel, and the exhaust outlet of the runoff pump assembly passes through the 3rd vacuum
Valve is connected with fore pump, and the 4th vacuum valve is equipped between the vacuum chamber and chemisorbed pump assembly.
Specifically, the chemisorbed pump assembly is composed in parallel by some electric arc titanium pumps.
Specifically, the vertical compound runoff molecular pump includes the pump barrel of upper end opening, and the side wall of the pump barrel offers
Air inlet and exhaust outlet, the pump barrel is interior to be equipped with runoff pumping cells, and the runoff pumping cells include rotor, quiet wheel and move close
Seal, the driving wheel of two flat round plate-likes is installed with the rotor, two driving wheels are parallel and are arranged at intervals, and the quiet wheel is arranged on two institutes
Between stating driving wheel, the quiet wheel is arranged in parallel with two driving wheels, the lower section of the underlying driving wheel of dynamic sealing, institute
State quiet wheel and dynamic sealing is fixedly arranged on the side wall of the pump barrel；The outside of the driving wheel above is equipped with one group of turbine leaf
Row, the turbine blade row are evacuated from top to bottom；The quiet wheel is equipped with some pumping grooves being made of spiral blade, described quiet
Partition plate is not provided with the middle part of wheel.
The utility model additionally provides the big pumping speed vacuum suction unit of another low-carbon, oil-free, including vacuum chamber, described true
Empty room is connected with roughing vacuum pump unit, vaccum case, vent valve and vacuum gauge respectively, is set between vacuum chamber and the roughing vacuum pump unit
Have the first vacuum valve, be equipped with the second vacuum valve between the vacuum chamber and vaccum case, in the vaccum case from bottom to top according to
Secondary to be equipped with runoff pump assembly, chemisorbed pump assembly and deep cooling steam pump, the runoff pump assembly is vertical by some pumpings in parallel
Formula compound runoff molecular pump composition, each radial flow pump share a fore pump, the exhaust outlet of the runoff pump assembly with it is described
The 3rd vacuum valve is equipped between fore pump, the deep cooling steam pump is using single refrigeration mode.
Specifically, the chemisorbed pump assembly is made of some electric arc titanium pumps in parallel.
Specifically, the vertical compound runoff molecular pump includes the pump barrel of upper end opening, and the side wall of the pump barrel offers
Air inlet and exhaust outlet, the pump barrel is interior to be equipped with runoff pumping cells, and the runoff pumping cells include rotor, quiet wheel and move close
Seal, the driving wheel of two flat round plate-likes is installed with the rotor, two driving wheels are parallel and are arranged at intervals, and the quiet wheel is arranged on two institutes
Between stating driving wheel, the quiet wheel is arranged in parallel with two driving wheels, the lower section of the underlying driving wheel of dynamic sealing, institute
State quiet wheel and dynamic sealing is fixedly arranged on the side wall of the pump barrel；The outside of the driving wheel above is equipped with one group of turbine leaf
Row, the turbine blade row are evacuated from top to bottom；The quiet wheel is equipped with some pumping grooves being made of spiral blade, described quiet
Partition plate is not provided with the middle part of wheel.
The utility model additionally provides the big pumping speed vacuum suction unit of another low-carbon, oil-free, including vacuum chamber, described true
Empty room is connected with roughing vacuum pump unit, chemisorbed pump assembly, deep cooling steam pump, runoff pump assembly, vent valve and vacuum gauge respectively,
The first vacuum valve is equipped between vacuum chamber and the roughing vacuum pump unit, the is equipped between the vacuum chamber and chemisorbed pump assembly
Two vacuum valves, are equipped with the 3rd vacuum valve between vacuum chamber and deep cooling steam pump, between vacuum chamber and the runoff pump assembly
Equipped with the 4th vacuum valve, the runoff pump assembly is made of the vertical compound runoff molecular pump of some pumpings in parallel, the runoff
The exhaust outlet of pump assembly is connected by the 5th vacuum valve with fore pump.
Specifically, the chemisorbed pump assembly is composed in parallel by some electric arc titanium pumps.
Specifically, the vertical compound runoff molecular pump includes the pump barrel of upper end opening, and the side wall of the pump barrel offers
Air inlet and exhaust outlet, the pump barrel is interior to be equipped with runoff pumping cells, and the runoff pumping cells include rotor, quiet wheel and move close
Seal, the driving wheel of two flat round plate-likes is installed with the rotor, two driving wheels are parallel and are arranged at intervals, and the quiet wheel is arranged on two institutes
Between stating driving wheel, the quiet wheel is arranged in parallel with two driving wheels, the lower section of the underlying driving wheel of dynamic sealing, institute
State quiet wheel and dynamic sealing is fixedly arranged on the side wall of the pump barrel；The outside of the driving wheel above is equipped with one group of turbine leaf
Row, the turbine blade row are evacuated from top to bottom；The quiet wheel is equipped with some pumping grooves being made of spiral blade, described quiet
Partition plate is not provided with the middle part of wheel.
The big pumping speed vacuum suction unit of the low-carbon of the utility model, oil-free is using runoff pump assembly, deep cooling steam pump and changes
Learn the complementary exhaust capacity by runoff pump assembly, deep cooling steam pump and chemisorbed pump assembly of adsorption pump machine assembly air-exhausting ability
Realize and optimize, so as to substitute traditional high energy consumption, diffusion pump+Roots's pump assembly of high oil vapour pollution, it is dirty to eliminate oil vapour
Dye, realizes and eliminates oil vapour pollution, significantly improve vacuum products quality, reduce the purpose of air exhaust energy consumption about 80%.
Brief description of the drawings
, below will be to attached drawing needed in the embodiment in order to illustrate more clearly of the technical solution of the utility model
It is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the utility model, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is low-carbon, the schematic diagram of the big pumping speed vacuum suction unit of oil-free that the utility model embodiment one provides.
Fig. 2 is low-carbon, the schematic diagram of the big pumping speed vacuum suction unit of oil-free that the utility model embodiment two provides.
Fig. 3 is low-carbon, the schematic diagram of the big pumping speed vacuum suction unit of oil-free that the utility model embodiment three provides.
Fig. 4 is low-carbon, the pump barrel of the big pumping speed vacuum suction unit of oil-free that the utility model embodiment one, two, three provides
Schematic diagram.
Fig. 5 is the sectional view along the A-A directions in Fig. 4.
Fig. 6 is the low-carbon of the offer of the utility model embodiment one, two, three, the section view of the big pumping speed vacuum suction unit of oil-free
Figure.
Fig. 7 is low-carbon, the quiet wheel of the big pumping speed vacuum suction unit of oil-free that the utility model embodiment one, two, three provides
Structure diagram.
Embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describe.
One oilless vacuum pump of embodiment is assembled in low-carbon, the big pumping speed vacuum suction unit of oil-free in two vaccum cases
As shown in Figure 1, a kind of low-carbon, the big pumping speed vacuum suction unit of oil-free that the utility model embodiment one provides, bag
Include vacuum chamber 11, vacuum chamber 11 respectively with roughing vacuum pump unit 12, vaccum case 13, chemisorbed pump assembly 14, vent valve 15 and
Vacuum gauge 16 connects, and the first vacuum valve 17, vacuum chamber 11 and vaccum case 13 are equipped between vacuum chamber 11 and roughing vacuum pump unit 12
Between be equipped with the second vacuum valve 18,13 inner upper of vaccum case is equipped with deep cooling steam pump 19, and 13 lower inside of vaccum case is set
There is runoff pump assembly 110, runoff pump assembly 110 is made of the vertical compound runoff molecular pump of four pumpings in parallel, runoff pump machine
The exhaust outlet of group 110 is connected by the 3rd vacuum valve 112 with fore pump 111, between vacuum chamber 11 and chemisorbed pump assembly 14
Equipped with the 4th vacuum valve 113, chemisorbed pump assembly 14 is composed in parallel by six electric arc titanium pumps.
As shown in Figure 4 to 7, the vertical compound runoff molecular pump of the present embodiment one includes the pump barrel 41 of upper end opening, pump
The side wall of cylinder 41 offers air inlet 42 and exhaust outlet (not shown), and runoff pumping cells, runoff pumping are equipped with pump barrel 41
Unit includes rotor 43, quiet wheel 44 and dynamic sealing 45, and the driving wheel 46 of two flat round plate-likes is installed with rotor 43, and two driving wheels 46 are parallel
And be arranged at intervals, quiet wheel 44 is arranged between two driving wheels 46, and quiet wheel 44 is arranged in parallel with two driving wheels 46, and dynamic sealing 45 is underlying
The lower section of driving wheel 46, quiet wheel 44 and dynamic sealing 45 are fixedly arranged on the side wall of pump barrel 41；The outside of driving wheel 46 above is set
There is one group of turbine blade row 47, turbine blade row 47 is evacuated from top to bottom；Quiet wheel 44 is equipped with some pumpings being made of spiral blade
Air drain 441, the middle part of quiet wheel 44 are not provided with partition plate, since the middle part of quiet wheel 44 is not provided with partition plate, so as to improve the pumping of gas
Speed.
As shown in Figure 4 to 7, the operation principle of the vertical compound runoff molecular pump of the present embodiment one is as follows：
(1) air inlet 42 of the present embodiment one is located at the side wall of pump barrel 41, and the gas in the outside of pump barrel 41 is successively through air inlet
42 are evacuated to the lower section of runoff pumping cells with pumping groove 441；
(2) simultaneously as 41 upper end of pump barrel of the present embodiment one is opening, bleed-off passage is added above pump barrel 41,
The gas of the top of pump barrel 41 is evacuated under runoff pumping cells through the opening above it, turbine blade row 47 and pumping groove 441 successively
Side.
Since the vertical compound runoff molecular pump of the present embodiment one can be evacuated at the same time from the top of pump barrel 41 and side wall, and
The middle part of quiet wheel 44 is not provided with partition plate, and therefore, the pumping speed of vertical compound runoff molecular pump is higher by traditional runoff molecular pump about 80%.
In addition, vertical compound runoff molecular pump also have the advantages that it is simple in structure with manufacture cost it is low.
Shown in Fig. 1, the roughing vacuum pump unit 12 of the present embodiment one is identical with the roughing vacuum pump unit of conventional diffusion pump assembly.
The big pumping speed vacuum suction unit of the low-carbon of the present embodiment one, oil-free uses the air aspiration process of following intelligent control：
(1) preparation stage：Vacuum chamber 11,15 and second vacuum valve 18 of vent valve are closed, opens the first vacuum valve the 17, the 3rd
112 and the 4th vacuum valve 113 of vacuum valve, while start runoff pump assembly 110, fore pump 111 and deep cooling steam pump 19, runoff
The pumpdown time of pump assembly 110 and fore pump 111 is 4~6min, and the pumpdown time of deep cooling steam pump 19 is 8~12min；
(2) stage (atmospheric pressure~50Pa) is slightly taken out：Start roughing vacuum pump unit 12 to be evacuated, 11 pressure of vacuum chamber is down to 50Pa
Afterwards, i.e., the first vacuum valve 17 and roughing vacuum pump unit 12 are closed one after another；
(3) vacuum stages (50~0.1Pa) in：The second vacuum valve 18 is opened, vacuum chamber 11 is by runoff pump assembly 110 and deeply
Cold water heat pump 19 is evacuated；
(4) smart pumping stage (0.1~0.05Pa)：The 4th vacuum valve 113 is opened, starts chemisorbed pump assembly 14+ runoffs
19 pumping of pump assembly 110+ deep coolings steam pump, wherein, deep cooling steam pump 19 extracts condensable gas, and chemisorbed pump assembly 14 is taken out
Except active gases, runoff pump assembly 110 extracts remaining inert gas and permanent gas；
(5) shutdown phase：After the completion of the process of high vacuum, close the second vacuum valve 18 and the 4th vacuum valve 113, opening are put
Air valve 15, after 11 pressure of vacuum chamber rises to atmospheric pressure, opens vacuum chamber 11, prepares vacuum suction next time.
The big pumping speed vacuum suction unit of the low-carbon of the present embodiment one, oil-free utilizes three kinds of oilless vacuum pump (runoff pump assemblys
110th, deep cooling steam pump 19 and chemisorbed pump assembly 14) exhaust capacity complementarity, and intelligent control air aspiration process, by footpath
The exhaust capacity of flow pump machine group 110, deep cooling steam pump 19 and chemisorbed pump assembly 14, which is realized, to be optimized, so as to substitute traditional height
Energy consumption, diffusion pump+Roots's pump assembly of high oil vapour pollution, realize and eliminate oil vapour pollution, significantly improve vacuum products quality,
Reduce the purpose of air exhaust energy consumption about 80%.
Two oilless vacuum pump of embodiment is assembled in low-carbon, the big pumping speed vacuum suction unit of oil-free in same vaccum case
As shown in Fig. 2, a kind of low-carbon, the big pumping speed vacuum suction unit of oil-free that the utility model embodiment two provides, bag
Vacuum chamber 21 is included, vacuum chamber 21 is connected with roughing vacuum pump unit 22, vaccum case 23, vent valve 24 and vacuum gauge 25 respectively, vacuum
The first vacuum valve 26 is equipped between room 21 and roughing vacuum pump unit 22, the second vacuum valve is equipped between vacuum chamber 21 and vaccum case 23
27, it is equipped with runoff pump assembly 212, chemisorbed pump assembly 28 and deep cooling steam pump 29 in vaccum case 23 successively from bottom to top,
Runoff pump assembly 212 is made of the vertical compound runoff molecular pump of four pumpings in parallel, and each radial flow pump shares a fore pump
210, be equipped with the 3rd vacuum valve 211 between the exhaust outlet and fore pump 210 of runoff pump assembly 212, chemisorbed pump assembly 28 by
Six electric arc titanium pump compositions in parallel, deep cooling steam pump 29 is using single refrigeration mode.
As shown in Figure 4 to 7, the vertical compound runoff molecular pump of the present embodiment two includes the pump barrel 41 of upper end opening, pump
The side wall of cylinder 41 offers air inlet 42 and exhaust outlet (not shown), and runoff pumping cells, runoff pumping are equipped with pump barrel 41
Unit includes rotor 43, quiet wheel 44 and dynamic sealing 45, and the driving wheel 46 of two flat round plate-likes is installed with rotor 43, and two driving wheels 46 are parallel
And be arranged at intervals, quiet wheel 44 is arranged between two driving wheels 46, and quiet wheel 44 is arranged in parallel with two driving wheels 46, and dynamic sealing 45 is underlying
The lower section of driving wheel 46, quiet wheel 44 and dynamic sealing 45 are fixedly arranged on the side wall of pump barrel 41；The outside of driving wheel 46 above is set
There is one group of turbine blade row 47, turbine blade row 47 is evacuated from top to bottom；Quiet wheel 44 is equipped with some pumpings being made of spiral blade
Air drain 441, the middle part of quiet wheel 44 are not provided with partition plate, since the middle part of quiet wheel 44 is not provided with partition plate, so as to improve the pumping of gas
Speed.
As shown in Figure 4 to 7, the operation principle of the vertical compound runoff molecular pump of the present embodiment two is as follows：
(1) air inlet 42 of the present embodiment two is located at the side wall of pump barrel 41, and the gas in the outside of pump barrel 41 is successively through air inlet
42 are evacuated to the lower section of runoff pumping cells with pumping groove 441；
(2) simultaneously as 41 upper end of pump barrel of the present embodiment two is opening, bleed-off passage is added above pump barrel 41,
The gas of the top of pump barrel 41 is evacuated under runoff pumping cells through the opening above it, turbine blade row 47 and pumping groove 441 successively
Side.
Since the vertical compound runoff molecular pump of the present embodiment two can be evacuated at the same time from the top of pump barrel 41 and side wall, and
The middle part of quiet wheel 44 is not provided with partition plate, and therefore, the pumping speed of vertical compound runoff molecular pump is higher by traditional runoff molecular pump about 80%.
In addition, vertical compound runoff molecular pump also have the advantages that it is simple in structure with manufacture cost it is low.The roughing vacuum pump machine of the present embodiment two
Group 22 is identical with the roughing vacuum pump unit 12 of embodiment one.
As shown in Fig. 2, the runoff pump assembly 212 of the present embodiment two, chemisorbed pump assembly 28 and deep cooling steam pump 29 groups
In same vaccum case 23, simplify the structure of extract system, reduce cost of equipment, be especially suitable for conventional individual group
The high-vacuum apparatus of pumping.
As shown in Fig. 2, the big pumping speed vacuum suction unit of the low-carbon of the present embodiment two, oil-free uses the pumping of following intelligent control
Gas technique：
(1) preparation stage：Vacuum chamber 21,24 and second vacuum valve 27 of vent valve are closed, opens the first vacuum valve 26 and the
Three vacuum valves 211, start runoff pump assembly 212, fore pump 210 and deep cooling steam pump 29, runoff pump assembly 212 and fore pump
210 pumpdown time is 4~6min, and the pumpdown time of deep cooling steam pump 29 is 8~12min；
(2) stage (atmospheric pressure~50Pa) is slightly taken out：Starting roughing vacuum pump unit 22 to be evacuated, 21 pressure of vacuum chamber is down to 100Pa,
The first vacuum valve 26 and roughing vacuum pump unit 22 are successively closed, stops roughing vacuum pump unit 22 and runs；
(3) vacuum stages section (50~0.1Pa) in：The second vacuum valve 27 is opened, vacuum chamber 11 is by runoff pump assembly 212
With 29 pumping of deep cooling steam pump；
(4) smart pumping stage (0.1~0.05Pa)：Using chemisorbed pump 28+ runoff pump assembly 212+ deep coolings steam pump 29
Pumping, wherein, deep cooling steam pump 29 extracts vapor, and chemisorbed pump 28 extracts active gases, and runoff pump assembly 212 extracts residual
The inert gas and permanent gas stayed.
The big pumping speed vacuum suction unit of the low-carbon of the present embodiment two, oil-free utilizes three kinds of oilless vacuum pump (runoff pump assemblys
212nd, deep cooling steam pump 29 and chemisorbed pump 28) complementarity of exhaust capacity and intelligent control air aspiration process, by radial flow pump
The exhaust capacity of unit 212, deep cooling steam pump 29 and chemisorbed pump 28, which is realized, to be optimized, so as to substitute traditional high energy consumption, height
Diffusion pump+Roots's pump assembly of oil vapour pollution, realizes and eliminates oil vapour pollution, significantly improve vacuum products quality, reduce and take out
The purpose of gas energy consumption about 80%.
Three oilless vacuum pump group of embodiment is attached separately to low-carbon, the big pumping speed vacuum air pump of oil-free in a vaccum case
Group
As shown in figure 3, a kind of low-carbon, the big pumping speed vacuum suction unit of oil-free that the utility model embodiment three provides, bag
Vacuum chamber 31 is included, vacuum chamber 31 pumps 34, runoff pump machine with roughing vacuum pump unit 32, chemisorbed pump assembly 33, deep cooling steam respectively
Group 35, vent valve 36 and vacuum gauge 37 connect, and the first vacuum valve 38, vacuum chamber are equipped between vacuum chamber 31 and roughing vacuum pump unit 32
The second vacuum valve 39 is equipped between 31 and chemisorbed pump assembly 33, it is true to be equipped with the 3rd between vacuum chamber 31 and deep cooling steam pump 34
Empty valve 310, is equipped with the 4th vacuum valve 311, chemisorbed pump assembly 33 is by six electricity between vacuum chamber 11 and runoff pump assembly 35
Arc titanium pump composes in parallel, and runoff pump assembly 35 is made of the vertical compound runoff molecular pump of four pumpings in parallel, runoff pump assembly
35 exhaust outlet is connected by the 5th vacuum valve 312 with fore pump 313.
As shown in Figure 4 to 7, the vertical compound runoff molecular pump of the present embodiment three includes the pump barrel 41 of upper end opening, pump
The side wall of cylinder 41 offers air inlet 42 and exhaust outlet (not shown), and runoff pumping cells, runoff pumping are equipped with pump barrel 41
Unit includes rotor 43, quiet wheel 44 and dynamic sealing 45, and the driving wheel 46 of two flat round plate-likes is installed with rotor 43, and two driving wheels 46 are parallel
And be arranged at intervals, quiet wheel 44 is arranged between two driving wheels 46, and quiet wheel 44 is arranged in parallel with two driving wheels 46, and dynamic sealing 45 is underlying
The lower section of driving wheel 46, quiet wheel 44 and dynamic sealing 45 are fixedly arranged on the side wall of pump barrel 41；The outside of driving wheel 46 above is set
There is one group of turbine blade row 47, turbine blade row 47 is evacuated from top to bottom；Quiet wheel 44 is equipped with some pumpings being made of spiral blade
Air drain 441, the middle part of quiet wheel 44 are not provided with partition plate, since the middle part of quiet wheel 44 is not provided with partition plate, so as to improve the pumping of gas
Speed.
As shown in Figure 4 to 7, the operation principle of the runoff molecular pump of the present embodiment three is as follows：
(1) air inlet 42 of the present embodiment three is located at the side wall of pump barrel 41, and the gas in the outside of pump barrel 41 is successively through air inlet
42 are evacuated to the lower section of runoff pumping cells with pumping groove 441；
(2) simultaneously as 41 upper end of pump barrel of the present embodiment three is opening, bleed-off passage is added above pump barrel 41,
The gas of the top of pump barrel 41 is evacuated under runoff pumping cells through the opening above it, turbine blade row 47 and pumping groove 441 successively
Side.
Since the vertical compound runoff molecular pump of the present embodiment three can be evacuated at the same time from the top of pump barrel 41 and side wall, and
The middle part of quiet wheel 44 is not provided with partition plate, and therefore, the pumping speed of vertical compound runoff molecular pump is higher by traditional runoff molecular pump about 80%.
In addition, vertical compound runoff molecular pump also have the advantages that it is simple in structure with manufacture cost it is low.
As shown in figure 3, the roughing vacuum pump unit 32 of the present embodiment three is identical with the roughing vacuum pump unit of traditional vacuum pumping unit.
The present embodiment three separates chemisorbed pump assembly 33 and runoff pump assembly 35, eliminates the powder of the generation of chemisorbed pump assembly 33
The pollution of dirt diameter flow pump machine group 35, can improve the time of 35 failure-free operation of runoff pump machine.Embodiment three particularly suitable for
The large-scale vacuum pumping unit of double machine assembly air-exhaustings.
As shown in figure 3, the big pumping speed vacuum suction unit of the low-carbon of the present embodiment three, oil-free uses the pumping of following intelligent control
Gas technique：
(1) preparation stage：Vacuum chamber 31, vent valve 36, the 3rd vacuum valve 310 and the 4th vacuum valve 311 are closed, is opened
First vacuum valve 38, the second vacuum valve 39 and the 5th vacuum valve 312, while start deep cooling steam pump 34,35 and of runoff pump assembly
The pumpdown time of fore pump 313, runoff pump assembly 35 and fore pump 313 is 4~6min, and the pumpdown time of deep cooling steam pump 34 is
8~12min；
(2) stage (atmospheric pressure~50Pa) is slightly taken out：Start roughing vacuum pump unit 32 to be evacuated, 31 pressure of vacuum chamber is down to 50Pa
Afterwards, i.e., the first vacuum valve 38 and roughing vacuum pump unit 32 are closed one after another；
(3) vacuum stages (50~0.1Pa) in：Open the 3rd vacuum valve 310 and the 4th vacuum valve 311, vacuum chamber 31 by
34 pumping of runoff pump assembly 35 and deep cooling steam pump；
(4) smart pumping stage (0.1~0.05Pa)：The second vacuum valve 39 is opened, starts chemisorbed pump assembly 33+ runoffs
34 pumping of pump assembly 35+ deep coolings steam pump, wherein, deep cooling steam pump 34 extracts condensable gas, and chemisorbed pump assembly 33 removes
Active gases, runoff pump assembly 35 extract remaining inert gas and permanent gas.
The big pumping speed vacuum suction unit of the low-carbon of the present embodiment three, oil-free utilizes three kinds of oilless vacuum pump (runoff pump assemblys
35th, deep cooling steam pump 34 and chemisorbed pump assembly 33) exhaust capacity complementarity and intelligent control air aspiration process, by runoff
The exhaust capacity of pump assembly 35, deep cooling steam pump 34 and chemisorbed pump assembly 33, which is realized, to be optimized, so as to substitute traditional high energy
Consumption, diffusion pump+Roots's pump assembly of high oil vapour pollution, realize and eliminate oil vapour pollution, significantly improve vacuum products quality, drop
The purpose of low air exhaust energy consumption about 80%.
The above is the preferred embodiment of the utility model, it is noted that for the ordinary skill of the art
For personnel, on the premise of the utility model principle is not departed from, some improvements and modifications can also be made, these are improved and profit
Decorations are also considered as the scope of protection of the utility model.
Claims (9)
- A kind of 1. big pumping speed vacuum suction unit of low-carbon, oil-free, it is characterised in that including vacuum chamber, the vacuum chamber respectively with Roughing vacuum pump unit, vaccum case, chemisorbed pump assembly, vent valve are connected with vacuum gauge, vacuum chamber and the roughing vacuum pump unit Between be equipped with the first vacuum valve, the second vacuum valve is equipped between the vacuum chamber and vaccum case, on the vaccum case inside Side is equipped with deep cooling steam and pumps, and the vaccum case lower inside is equipped with runoff pump assembly, and the runoff pump assembly is by some parallel connections The vertical compound runoff molecular pump composition of pumping, the exhaust outlet of the runoff pump assembly are connected by the 3rd vacuum valve and fore pump Connect, the 4th vacuum valve is equipped between the vacuum chamber and chemisorbed pump assembly.
- 2. the big pumping speed vacuum suction unit of low-carbon according to claim 1, oil-free, it is characterised in that the chemisorbed Pump assembly is composed in parallel by some electric arc titanium pumps.
- 3. the big pumping speed vacuum suction unit of low-carbon according to claim 1, oil-free, it is characterised in that described vertical compound Runoff molecular pump includes the pump barrel of upper end opening, and the side wall of the pump barrel offers air inlet and exhaust outlet, set in the pump barrel There are runoff pumping cells, the runoff pumping cells include rotor, quiet wheel and dynamic sealing, two flat disks are installed with the rotor The driving wheel of shape, two driving wheels are parallel and are arranged at intervals, and the quiet wheel is arranged between two driving wheels, described in the quiet wheel and two Driving wheel is arranged in parallel, the lower section of the underlying driving wheel of dynamic sealing, and the quiet wheel is fixedly arranged on described with dynamic sealing On the side wall of pump barrel；The outside of the driving wheel above is equipped with one group of turbine blade row, and the turbine blade row is taken out from top to bottom Gas；The quiet wheel is equipped with some pumping grooves being made of spiral blade, and partition plate is not provided with the middle part of the quiet wheel.
- A kind of 4. big pumping speed vacuum suction unit of low-carbon, oil-free, it is characterised in that including vacuum chamber, the vacuum chamber respectively with Roughing vacuum pump unit, vaccum case, vent valve are connected with vacuum gauge, and the first vacuum is equipped between vacuum chamber and the roughing vacuum pump unit Valve, is equipped with the second vacuum valve, runoff is equipped with successively from bottom to top in the vaccum case between the vacuum chamber and vaccum case Pump assembly, chemisorbed pump assembly and deep cooling steam pump, the runoff pump assembly is by some vertical compound runoffs in parallel being evacuated Molecular pump forms, and each radial flow pump shares a fore pump, between the exhaust outlet and the fore pump of the runoff pump assembly Equipped with the 3rd vacuum valve, the deep cooling steam pump is using single refrigeration mode.
- 5. the big pumping speed vacuum suction unit of low-carbon according to claim 4, oil-free, it is characterised in that the chemisorbed Pump assembly is made of some electric arc titanium pumps in parallel.
- 6. the big pumping speed vacuum suction unit of low-carbon according to claim 4, oil-free, it is characterised in that described vertical compound Runoff molecular pump includes the pump barrel of upper end opening, and the side wall of the pump barrel offers air inlet and exhaust outlet, set in the pump barrel There are runoff pumping cells, the runoff pumping cells include rotor, quiet wheel and dynamic sealing, two flat disks are installed with the rotor The driving wheel of shape, two driving wheels are parallel and are arranged at intervals, and the quiet wheel is arranged between two driving wheels, described in the quiet wheel and two Driving wheel is arranged in parallel, the lower section of the underlying driving wheel of dynamic sealing, and the quiet wheel is fixedly arranged on described with dynamic sealing On the side wall of pump barrel；The outside of the driving wheel above is equipped with one group of turbine blade row, and the turbine blade row is taken out from top to bottom Gas；The quiet wheel is equipped with some pumping grooves being made of spiral blade, and partition plate is not provided with the middle part of the quiet wheel.
- A kind of 7. big pumping speed vacuum suction unit of low-carbon, oil-free, it is characterised in that including vacuum chamber, the vacuum chamber respectively with Roughing vacuum pump unit, chemisorbed pump assembly, deep cooling steam pump, runoff pump assembly, vent valve are connected with vacuum gauge, the vacuum chamber The first vacuum valve is equipped between roughing vacuum pump unit, the second vacuum valve is equipped between the vacuum chamber and chemisorbed pump assembly, The 3rd vacuum valve is equipped between vacuum chamber and deep cooling the steam pump, it is true to be equipped with the 4th between vacuum chamber and the runoff pump assembly Empty valve, the runoff pump assembly are made of the vertical compound runoff molecular pump of some pumpings in parallel, the row of the runoff pump assembly Gas port is connected by the 5th vacuum valve with fore pump.
- 8. the big pumping speed vacuum suction unit of low-carbon according to claim 7, oil-free, it is characterised in that the chemisorbed Pump assembly is composed in parallel by some electric arc titanium pumps.
- 9. the big pumping speed vacuum suction unit of low-carbon according to claim 7, oil-free, it is characterised in that described vertical compound Runoff molecular pump includes the pump barrel of upper end opening, and the side wall of the pump barrel offers air inlet and exhaust outlet, set in the pump barrel There are runoff pumping cells, the runoff pumping cells include rotor, quiet wheel and dynamic sealing, two flat disks are installed with the rotor The driving wheel of shape, two driving wheels are parallel and are arranged at intervals, and the quiet wheel is arranged between two driving wheels, described in the quiet wheel and two Driving wheel is arranged in parallel, the lower section of the underlying driving wheel of dynamic sealing, and the quiet wheel is fixedly arranged on described with dynamic sealing On the side wall of pump barrel；The outside of the driving wheel above is equipped with one group of turbine blade row, and the turbine blade row is taken out from top to bottom Gas；The quiet wheel is equipped with some pumping grooves being made of spiral blade, and partition plate is not provided with the middle part of the quiet wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721191708.5U CN207363840U (en) | 2017-09-18 | 2017-09-18 | The big pumping speed vacuum suction unit of low-carbon, oil-free |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721191708.5U CN207363840U (en) | 2017-09-18 | 2017-09-18 | The big pumping speed vacuum suction unit of low-carbon, oil-free |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207363840U true CN207363840U (en) | 2018-05-15 |
Family
ID=62348616
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721191708.5U Withdrawn - After Issue CN207363840U (en) | 2017-09-18 | 2017-09-18 | The big pumping speed vacuum suction unit of low-carbon, oil-free |
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| Country | Link |
|---|---|
| CN (1) | CN207363840U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107489605A (en) * | 2017-09-18 | 2017-12-19 | 储昕 | The big pumping speed vacuum suction unit of low-carbon, oil-free |
-
2017
- 2017-09-18 CN CN201721191708.5U patent/CN207363840U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107489605A (en) * | 2017-09-18 | 2017-12-19 | 储昕 | The big pumping speed vacuum suction unit of low-carbon, oil-free |
| CN107489605B (en) * | 2017-09-18 | 2019-07-12 | 储昕 | Low-carbon, oil-free big pumping speed vacuum suction unit |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180914 Address after: 215400 38 Qingdao West Road, Taicang Economic Development Zone, Suzhou, Jiangsu Patentee after: Suzhou Moxing Vacuum Technology Co Ltd Address before: 518000 Guangdong Haitang Pavilion, Futian District Baihua garden, Shenzhen, 18C Patentee before: Chu Cuan |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180515 Effective date of abandoning: 20190712 |