CN207339716U - The monitoring device of on-chip power fan - Google Patents
The monitoring device of on-chip power fan Download PDFInfo
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- CN207339716U CN207339716U CN201721418204.2U CN201721418204U CN207339716U CN 207339716 U CN207339716 U CN 207339716U CN 201721418204 U CN201721418204 U CN 201721418204U CN 207339716 U CN207339716 U CN 207339716U
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- fan
- sensor
- controller
- monitoring device
- chip power
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- 238000012806 monitoring device Methods 0.000 title claims abstract description 32
- 230000002159 abnormal effect Effects 0.000 claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 11
- 238000007689 inspection Methods 0.000 abstract description 10
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 description 9
- 241000883990 Flabellum Species 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
It the utility model is related to technical field of manufacturing semiconductors, more particularly to a kind of monitoring device of on-chip power fan.The monitoring device of the on-chip power fan, including first sensor and controller；The first sensor, connects the controller, for detecting the electric signal inside fan and being transmitted to the controller；The controller, for judging whether the electric signal exceeds the first preset range, if so, it is abnormal then to confirm that the fan occurs.The utility model can in real time, accurately understand whether fan exception occurs, avoid missing inspection and the delay property of hand inspection mode, prevent in wafer production equipment running process a series of problems caused by fan exception, while service life of equipment is improved, the quality of product wafer also ensure that.
Description
Technical field
It the utility model is related to technical field of manufacturing semiconductors, more particularly to a kind of monitoring device of on-chip power fan.
Background technology
At present, semiconductor integrated circuit (IC) industry has gone through Exponential growth.Technology in IC materials and design
Progressive generated is counted for IC, wherein, all often there is smaller and more complicated circuit than prior-generation IC for IC.In IC development
During, functional density (quantity of interconnection devices on i.e. each chip area) has generally increased, and physical dimension is (i.e. using system
Make the minimal parts that technique can produce) but reduce.Except IC components become smaller and it is more complicated in addition to, manufacture IC on it
Wafer become increasing, this is just higher and higher to the quality requirement of wafer.
In the manufacturing process of wafer, it is necessary to by multi-step process, such as surface clean, Primary Oxidation, chemical vapor deposition
Product plated film, chemical mechanical grinding, photoetching, annealing, ion implanting etc., and the realization of each step process is required for by corresponding system
Manufacturing apparatus.With the continuous improvement of the degree of automation during wafer manufacturing process, the various equipment of completion wafer manufacturing process
It is substantially all and belongs to electronic equipment.And the normal operation of a kind of electronic equipment, it is desirable to provide one or more power supplys.In order to beneficial to
Power supply heat sinking, is usually all built-in with radiator fan in these power supplys, to assist power supply heat sinking.
, also can be to heat dissipation usually during making periodically to maintain to power supply in order to ensure radiator fan normal operation
Fan is periodically checked.But there are missing inspection and delay property for the mode of hand inspection, it is impossible in time, accurately sends out
The defects of existing radiator fan.Therefore, if the defects of not knowing radiator fan in time, and dissipated in equipment running process
The situation of Hot-air fan failure, can not only seriously affect the output of power supply, but also can cause power supply because temperature raises or even burns,
Power supply cost and board efficiency are directly affected, also the product wafer in generating process can be caused to damage when serious.
Therefore, how in time, accurately to know the situation of radiator fan in power supply, avoid radiator fan in use
There are a series of influences failed and brought, be a technical problem to be solved urgently.
Utility model content
The utility model provides a kind of monitoring device of on-chip power fan, to solve in the prior art cannot in time,
, there is radiation air to avoid in wafer production equipment running process in the problem of accurately knowing the situation of radiator fan in power supply
Fan the phenomenon of failure.
To solve the above-mentioned problems, the utility model provides a kind of monitoring device of on-chip power fan, including first
Sensor and controller；The first sensor, connects the controller, for detecting the electric signal inside fan and being transmitted to
The controller；The controller, for judging whether the electric signal exceeds the first preset range, if so, described in then confirming
Fan occurs abnormal.
Preferably, the electric signal is voltage signal, and the first sensor is voltage sensor.
Preferably, the electric signal is current signal, and the first sensor is current sensor.
Preferably, the first sensor connects the supply input line or power supply output line of the fan.
Preferably, second sensor is further included；The second sensor, connects the controller, for detecting the wind
The motor temperature of fan is simultaneously transmitted to the controller；Whether the controller is additionally operable to judge the temperature beyond the second default model
Enclose, if so, it is abnormal then to confirm that the fan occurs.
Preferably, 3rd sensor is further included；The 3rd sensor, is fixed on the stent of the fan, for examining
Survey the distance between flabellum in the 3rd sensor and the fan and be transmitted to the controller；The controller judges
Whether the distance that continuous several times detect is identical, if so, it is abnormal then to confirm that the fan occurs.
Preferably, the controller includes display screen, and the display screen is used to show the electric signal.
Preferably, alarm is further included；The alarm, connects the controller, abnormal for occurring in the fan
When send alarm signal.
Preferably, the alarm includes buzzer and/or light emitting diode.
The monitoring device of on-chip power fan provided by the utility model, based on when fan occurs abnormal, inside fan
The principle that must be abnormal of electric signal, the electric signal inside fan is detected by first sensor and be transmitted to controller into
Row analysis, it is possible in real time, accurately understand whether fan exception occurs, avoid the missing inspection and delay of hand inspection mode
Property, it is therefore prevented that in wafer production equipment running process caused by fan exception a series of problems, improve equipment use
While service life, the quality of product wafer also ensure that.
Brief description of the drawings
Attached drawing 1 is the structure diagram of the monitoring device of the on-chip power fan of the utility model embodiment；
Attached drawing 2 is the structure that the monitoring device of the on-chip power fan of the utility model embodiment is connected with fan
Schematic diagram.
Embodiment
The embodiment of the monitoring device of on-chip power fan provided by the utility model is done below in conjunction with the accompanying drawings
Describe in detail.
Present embodiment provides a kind of monitoring device of on-chip power fan, and attached drawing 1 is that the utility model is specific
The structure diagram of the monitoring device of the on-chip power fan of embodiment, attached drawing 2 are the electricity of the utility model embodiment
The structure diagram that the monitoring device of source built-in fans is connected with fan.
As shown in Figure 1, 2, the monitoring device for the on-chip power fan that present embodiment provides, including first sensor
11 and controller 12；The first sensor 11, connects the controller 12, for detecting electric signal and biography inside fan 21
Transport to the controller 12；The controller 12, for judging whether the electric signal exceeds the first preset range, if so, then
Confirm that exception occurs in the fan 21.Fan in present embodiment, refers to be built in power supply, for power supply heat sinking
Fan.Those skilled in the art could be aware that according to its ordinary technical knowledge grasped, when fan occurs abnormal, its inside
Electric signal inherently changes, and present embodiment is based on this principle, construct including the first sensor 11 with
The monitoring device of the controller 12, judges whether fan occurs by the electric signal inside real-time, automatic detection fan
It is abnormal, missing inspection and delay property so as to avoid existing hand inspection mode.Wherein, the controller 12 can be placed in electricity
Inside source or it is placed in outside power supply, in order not to increase the complexity of power source internal structure and be easy to staff real-time
, intuitively check fan situation, it is preferred that the controller 12 is placed in outside power supply, and the power supply refers to be built-in with described
The power supply of fan 21.The connection mode of the first sensor 11 and the fan 21, those skilled in the art can also basis
Actual needs is set, as long as the electric signal inside the fan 21 can be detected.The tool of first preset range
Body numerical value, those skilled in the art can also be set according to actual needs, such as according to the property of fan, power supply heat sinking
It is required that etc., present embodiment is not construed as limiting this.
Those skilled in the art can be according to the particular type for being actually needed selection electric signal, in order to improve the accurate of detection
Property, it is preferred that electric signal described in present embodiment is voltage signal, and the first sensor 11 is voltage sensor.
Alternatively, the electric signal in present embodiment is current signal, the first sensor 11 is current sensor.Not only
In this way, in order to further improve the accuracy of detection, it is preferred that the electric signal can also include current signal and voltage at the same time
Signal, the first sensor 11 include current sensor and voltage sensor.In this way, by the same time to current signal and voltage
The detection of signal, so as to improve the reliability of testing result.
In order to realize the accurate detection to the electric signal, while the complexity of the fan internal circuit configuration is not caused again
Property, it is preferred that as shown in Fig. 2, the first sensor 11 connects the supply input line 214 of the fan 21 or for electricity output
Line.In present embodiment, the supply input line 214, refers to transmit power supply electricity to the fan 21 by power supply
The circuit of pressure.
In order to further improve the monitoring device of on-chip power fan detection accuracy, reliability, it is preferred that as Fig. 1,
Shown in 2, the monitoring device for the on-chip power fan that present embodiment provides further includes second sensor；Second sensing
Device 13, connects the controller 12, for detecting 212 temperature of motor of the fan 21 and being transmitted to the controller 12；Institute
State controller 12 to be additionally operable to judge whether the temperature exceeds the second preset range, if so, it is different then to confirm that the fan 21 occurs
Often.This is because during the fan 21 runs well, the motor 212 can produce one due to the rotation of its own
Fixed heat, so that the temperature of motor is kept within the specific limits, when the rotating speed of the fan 21 declines or stop to turn
When dynamic, the temperature of the motor 212 will reduce；And when the fan 21 occurs that rotating speed is too fast or internal appearance is short-circuit,
The temperature of the motor 212 will raise.Therefore, by detection of the second sensor 13 to 212 temperature of motor, and
The temperature is analyzed by the controller 12, so that the standard of the monitoring device testing result of on-chip power fan
True property and reliability higher.In order to accurately measure the temperature of the motor 212, it is furthermore preferred that as shown in Fig. 2, described
Second sensor 13 is placed in 212 surface of motor.In this way, pass through the direct of the second sensor 13 and the motor 212
Contact to detect the temperature of the motor 212, the accuracy of detection can increase substantially.
In order to further improve the monitoring device of on-chip power fan detection accuracy, reliability, it is preferred that as Fig. 1,
Shown in 2, the monitoring device for the on-chip power fan that present embodiment provides further includes 3rd sensor 14；Described 3rd passes
Sensor 14, is fixed on the stent 213 of the fan 21, for detecting the 3rd sensor 14 and a fan in the fan 21
The distance between leaf 211 is simultaneously transmitted to the controller 12；The controller 12 judges whether is distance that continuous several times detect
It is identical, if so, then confirming that exception occurs in the fan 21.Since the 3rd sensor 14 is affixed on the stent 213
, i.e., described 3rd sensor 14 is relatively fixed relative to the position of the stent 213 constant, but the fan 21
In operational process, the flabellum 211 is constantly rotated under the drive of the motor 212, i.e., is normally transported in the fan
During turning, the flabellum 211 relative to the position of the 3rd sensor 14 be continually changing, when continuous several times detect
The 3rd sensor 14 it is identical with the distance between the flabellum 211 when, then prove that the flabellum 211 is not turned
It is dynamic, that is, confirm that exception occurs in the fan 21.The fan is judged with reference to the turn signal of electric signal and electric fan is
It is no exception occur, the accuracy and reliability of monitoring can be further improved.Wherein, the stent 213 can be used to fix
The stent of the flabellum 211 of the fan 21.
In order to enable user can get information about the electric signal situation in fan operational process, it is preferred that the control
Device 12 includes display screen 121, and the display screen 121 is used to show the electric signal.Wherein, the display screen 121 shows described
The mode of electric signal, can show or show to graphically in digital form.Moreover, the display screen
121 can be also used for showing that the motor temperature that the second sensor 13 detects and/or the 3rd sensor 14 detect
The 3rd sensor 14 and the distance between the flabellum 211.It is furthermore preferred that the controller 12 can be a calculating
Machine.
In order to timely remind staff when the fan is abnormal, so that staff takes measures in time,
Avoid causing damages, it is preferred that the monitoring device for the on-chip power fan that present embodiment provides further includes alarm 15；
The alarm 15, connects the controller 12, for sending alarm signal when exception occurs in the fan 21.More preferably
, the alarm 15 includes buzzer and/or light emitting diode.When the fan 21 occurs abnormal, the buzzer hair
Go out the buzzer of a preset time and/or the LED flash pre-determined number.
The monitoring device for the on-chip power fan that present embodiment provides, based on when fan occurs abnormal, fan
The principle that internal electric signal must be abnormal, detects the electric signal inside fan by first sensor and is transmitted to control
Device is analyzed, it is possible in real time, accurately understand fan whether there is exception, avoid hand inspection mode missing inspection and
Delay property, it is therefore prevented that in wafer production equipment running process caused by fan exception a series of problems, improve equipment
While service life, the quality of product wafer also ensure that.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
Art personnel, on the premise of the utility model principle is not departed from, can also make some improvements and modifications, these improvements and modifications
Also it should be regarded as the scope of protection of the utility model.
Claims (9)
1. a kind of monitoring device of on-chip power fan, it is characterised in that including first sensor and controller；
The first sensor, connects the controller, for detecting the electric signal inside fan and being transmitted to the controller；
The controller, for judging whether the electric signal exceeds the first preset range, if so, it is different then to confirm that the fan occurs
Often.
2. the monitoring device of on-chip power fan according to claim 1, it is characterised in that the electric signal is believed for voltage
Number, the first sensor is voltage sensor.
3. the monitoring device of on-chip power fan according to claim 1, it is characterised in that the electric signal is believed for electric current
Number, the first sensor is current sensor.
4. the monitoring device of the on-chip power fan according to Claims 2 or 3, it is characterised in that the first sensor
Connect the supply input line or power supply output line of the fan.
5. the monitoring device of on-chip power fan according to claim 1, it is characterised in that further include second sensor；
The second sensor, connects the controller, for detecting the motor temperature of the fan and being transmitted to the controller；Institute
State controller to be additionally operable to judge whether the temperature exceeds the second preset range, if so, it is abnormal then to confirm that the fan occurs.
6. the monitoring device of on-chip power fan according to claim 1, it is characterised in that further include 3rd sensor；
The 3rd sensor, is fixed on the stent of the fan, for detecting the 3rd sensor and a fan in the fan
The distance between leaf is simultaneously transmitted to the controller；The controller judges whether the distance that continuous several times detect is identical, if
It is then to confirm that exception occurs in the fan.
7. the monitoring device of on-chip power fan according to claim 1, it is characterised in that the controller includes display
Screen, the display screen are used to show the electric signal.
8. the monitoring device of on-chip power fan according to claim 1, it is characterised in that further include alarm；It is described
Alarm, connects the controller, for sending alarm signal when the fan occurs abnormal.
9. the monitoring device of on-chip power fan according to claim 8, it is characterised in that the alarm includes buzzing
Device and/or light emitting diode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721418204.2U CN207339716U (en) | 2017-10-30 | 2017-10-30 | The monitoring device of on-chip power fan |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721418204.2U CN207339716U (en) | 2017-10-30 | 2017-10-30 | The monitoring device of on-chip power fan |
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| Publication Number | Publication Date |
|---|---|
| CN207339716U true CN207339716U (en) | 2018-05-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721418204.2U Expired - Fee Related CN207339716U (en) | 2017-10-30 | 2017-10-30 | The monitoring device of on-chip power fan |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112748221A (en) * | 2020-12-30 | 2021-05-04 | 南京汽车集团有限公司 | Method for detecting hydrogen leakage of whole vehicle by using light truck hydrogen fuel cell vehicle |
-
2017
- 2017-10-30 CN CN201721418204.2U patent/CN207339716U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112748221A (en) * | 2020-12-30 | 2021-05-04 | 南京汽车集团有限公司 | Method for detecting hydrogen leakage of whole vehicle by using light truck hydrogen fuel cell vehicle |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180508 |
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| CF01 | Termination of patent right due to non-payment of annual fee |