CN207338337U - Improve the quartz boat of sheet resistance uniformity in boat - Google Patents
Improve the quartz boat of sheet resistance uniformity in boat Download PDFInfo
- Publication number
- CN207338337U CN207338337U CN201721364853.9U CN201721364853U CN207338337U CN 207338337 U CN207338337 U CN 207338337U CN 201721364853 U CN201721364853 U CN 201721364853U CN 207338337 U CN207338337 U CN 207338337U
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- boat
- sheet resistance
- silicon chip
- thickness
- piece
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
A kind of quartz boat for improving sheet resistance uniformity in boat is the utility model is related to, by increasing the quartzy stationary barrier being equal with silicon chip size, thickness newly on quartz boat, efficiently solves sheet resistance abnormal phenomenon after the edge piece diffusion that quartz boat this body structure is brought；By increasing mobilizable, the quartzy active clapboard that size, thickness and silicon chip size, thickness are equal newly, flexibly effectively stress piece is solved, guide card machine falls piece etc. causes to be not fixed sheet resistance abnormal phenomenon after the newly-increased edge piece diffusion of position extremely.
Description
Technical field
Technical field of solar is the utility model is related to, in particular for used in the diffusing procedure of solar battery sheet field
Quartz boat, the utility model provide a kind of quartz boat for improving sheet resistance uniformity in boat.
Background technology
At present in solar battery sheet field, P-N junction is made, that is, is diffused as the core of solar battery technology, diffusion is logical
Quartz boat carrying silicon chip, the TongYuan in the hot environment of boiler tube, production phosphorus Deng Sanzu races simple substance are crossed, and is diffused into silicon chip surface
A process, wherein, the flow distribution of gas field has a great influence the surface concentration of silicon chip in quartz boat with junction depth in boiler tube, main
To be embodied by the test of silicon chip surface sheet resistance, the film releasing mode that quartz boat mainly uses at present has card slot type diamond shape film releasing side
Two kinds of formula and the square film releasing mode of card slot type, silicon chip are wiped be placed in card slot each other, this inevitably makes silicon with a fixed intervals
Panel region produces edge piece, therefore has done following experiment to edge side silicon chip：
Confirm abnormal experiment：
Collect edge side silicon chip and carry out sheet resistance test：It was found that sheet resistance is extremely relatively low, 70 ohm/◇ of average, be above standard model
Enclose (83~97 ohm/◇)；
Another progress sheet resistance test of adjacent edge side silicon chip is collected, finds sheet resistance (83~97 Europe in normal range (NR)
Nurse/◇)；
Another progress producing line contrast experiment for collecting edge side silicon chip and being close to, it is found that edge side silicon chip power is more another
Low more than the 0.07W of a piece of power, is mainly reflected in out the loss of pressure and electric current, and carries out EL tests to rear gear, is dark piece；
Fall the reasons such as piece in stress section, rewinder, it has to quartz boat inside points slice, thin piece is taken out to situation about doing over again, can be led
An area of silicon wafer is caused to become more than two area of silicon wafer (i.e. more than one card slot distance of piece spacing, and edge piece position in this
Put, size not can determine that, first to the edge side silicon chip, carry out sheet resistance test, it is found that it is lower by 10 than silicon chip sheet resistance adjacent thereto
Ohm/◇, and become lower with distance increase；
From above-mentioned experiment, sheet resistance abnormal phenomenon after the edge piece diffusion that this body structure of quartz boat is easily brought；In response to
Power piece, guide card machine fall abnormal be easy to cause such as piece and are not fixed sheet resistance abnormal phenomenon after newly-increased edge piece is spread；Edge piece is due to side
The exception of resistance, will directly affect producing line power, produce a large amount of low-power pieces.
Utility model content
The technical problems to be solved in the utility model is：In order to overcome the side that this body structure of quartz boat is brought in the prior art
Sheet resistance abnormal phenomenon after embolium diffusion；Stress piece, guide card machine fall piece etc. to be caused to be not fixed newly-increased edge piece diffusion rear extremely
A kind of the problem of hindering abnormal phenomenon, there is provided quartz boat for improving sheet resistance uniformity in boat.
Technical solution is used by the utility model solves its technical problem：The stone of sheet resistance uniformity in a kind of raising boat
Ying Zhou, including boat body, the boat body are made of boat foot, boat body and card slot, it is characterised in that：Further include stationary barrier, two institutes
Stationary barrier is stated to be respectively and fixedly installed in the card slot at boat body both ends, the size of the stationary barrier, the size of thickness and silicon chip,
Thickness is equal, and the material of the stationary barrier is high temperature-proof, acid-proof material.
The utility model be fixedly mounted respectively at the both ends of quartz boat boat body with the fixation that silicon chip size, thickness are equal every
Plate so that newly-increased stationary barrier is changed into present edge side silicon chip, and after diffusion, original edge side silicon chip sheet resistance is normal,
Present edge side silicon chip sheet resistance is extremely relatively low, i.e., increases stationary barrier newly on the outside of edge side and may be such that silicon chip sheet resistance is changed into normal.
During diffusion, stress piece, guide card machine, which fall piece etc. and be easy to cause extremely, to be not fixed edge piece and increases newly, is spread
After there is sheet resistance abnormal phenomenon, to solve this problem, the utility model further includes active clapboard, and some active clapboards are inserted
It is located in the card slot, the size of the active clapboard, the size of thickness and silicon chip, thickness are equal, the active clapboard
Material is high temperature-proof, acid-proof material.
It is some movable that the utility model plugs in the card slot of quartz boat boat body, what size, thickness and silicon chip were equal
Active clapboard, for replacing stress section, guide card machine falls piece or the card slot being plugged in beside newly-increased edge piece in, after preventing diffusion
Sheet resistance phenomenon extremely less than normal.
Preferably, the material of the stationary barrier and the active clapboard is quartz.
The beneficial effects of the utility model are:The utility model improve boat in sheet resistance uniformity quartz boat, by
Increase the quartzy stationary barrier being equal with silicon chip size, thickness on quartz boat newly, efficiently solve quartz boat this body structure and bring
Edge piece diffusion after sheet resistance abnormal phenomenon；By newly-increased mobilizable, size, thickness and silicon chip size, thickness are equal
Quartzy active clapboard, flexibly effectively solves stress piece, guide card machine falls the newly-increased edge piece that piece etc. causes to be not fixed position extremely
Sheet resistance abnormal phenomenon after diffusion.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the schematic three dimensional views of the utility model；
Fig. 2 is the enlarged drawing at A in the utility model Fig. 1；
Fig. 3 is the front view of the utility model；
Fig. 4 is the top view of the utility model.
In figure：1. boat foot, 2. boat bodies, 3. card slots, 4. stationary barriers, 5. active clapboards.
Embodiment
Presently in connection with attached drawing, the utility model is described in more detail.These attached drawings are simplified schematic diagram,
Only illustrate the basic structure of the utility model in a schematic way, therefore it only shows the composition related with the utility model.
As shown in Figure 1, Figure 3 and Figure 4 in a kind of shown raising boat sheet resistance uniformity quartz boat, including boat body, the boat body
It is made of boat foot 1, boat body 2 and card slot 3, it is characterised in that：Stationary barrier 4 is further included, two stationary barriers 4 are fixed respectively
In the card slot 3 at 2 both ends of boat body, the size of the stationary barrier 4, the size of thickness and silicon chip, thickness are equal, described
The material of stationary barrier 4 is quartz material.
The utility model further includes active clapboard 5, and some active clapboards 5 are plugged in the card slot 3, such as Fig. 2 institutes
Show, the size of the active clapboard 5, the size of thickness and silicon chip, thickness are equal, and the material of the active clapboard 5 is quartz
Material.
Improvement experiment is carried out to improved structure：
1st, the fixation being equal with silicon chip size, thickness is fixedly mounted at the both ends of quartz boat boat body respectively for the utility model
Partition plate 4 so that newly-increased stationary barrier 4 is changed into present edge side silicon chip, and after diffusion, original edge side silicon chip sheet resistance is just
Often, present edge side silicon chip sheet resistance is extremely relatively low, i.e., increases stationary barrier 4 newly on the outside of edge side and may be such that silicon chip sheet resistance is changed into just
Often；
2nd, to equally carrying out increasing piece experiment, sheet resistance since stress section, rewinder fall the abnormal caused newly-increased edge piece such as piece
It is same to recover normal；
It can thus be appreciated that：The edge silicon chip of all situations can prevent that sheet resistance is abnormal after diffusion by partition plates such as newly-increased silicon chips
Phenomenon less than normal.
Using the above-mentioned desirable embodiment according to the utility model as enlightenment, pass through above-mentioned description, related work people
Member can carry out various changes and amendments in the range of without departing from this item utility model technological thought completely.This item is real
The content being not limited to new technical scope on specification, it is necessary to which its technology is determined according to right
Property scope.
Claims (3)
1. a kind of quartz boat for improving sheet resistance uniformity in boat, including boat body, the boat body is by boat foot (1), boat body (2) and card slot
(3) form, it is characterised in that：Stationary barrier (4) is further included, two stationary barriers (4) are respectively and fixedly installed to boat body (2)
In the card slot (3) at both ends, the size of the stationary barrier (4), the size of thickness and silicon chip, thickness are equal, the fixation every
The material of plate (4) is high temperature-proof, acid-proof material.
2. the quartz boat of sheet resistance uniformity in boat is improved as claimed in claim 1, it is characterised in that：Further include active clapboard
(5), some active clapboards (5) are plugged in the card slot (3), the size of the active clapboard (5), thickness and silicon chip
Size, thickness are equal, and the material of the active clapboard (5) is high temperature-proof, acid-proof material.
3. the quartz boat of sheet resistance uniformity in boat is improved as claimed in claim 2, it is characterised in that：The stationary barrier (4)
Material with the active clapboard (5) is quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721364853.9U CN207338337U (en) | 2017-10-20 | 2017-10-20 | Improve the quartz boat of sheet resistance uniformity in boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721364853.9U CN207338337U (en) | 2017-10-20 | 2017-10-20 | Improve the quartz boat of sheet resistance uniformity in boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207338337U true CN207338337U (en) | 2018-05-08 |
Family
ID=62366212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721364853.9U Active CN207338337U (en) | 2017-10-20 | 2017-10-20 | Improve the quartz boat of sheet resistance uniformity in boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207338337U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110364465A (en) * | 2019-07-21 | 2019-10-22 | 常州时创能源科技有限公司 | Quartz boat is used in a kind of carrying of silicon wafer |
| CN113644163A (en) * | 2021-08-06 | 2021-11-12 | 横店集团东磁股份有限公司 | Silicon wafer sheet resistance uniform diffusion device, assembling method and renovating method thereof |
| CN116804272A (en) * | 2023-08-28 | 2023-09-26 | 江苏宏伟石英科技有限公司 | LPCVD baffle type quartz boat and preparation process thereof |
-
2017
- 2017-10-20 CN CN201721364853.9U patent/CN207338337U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110364465A (en) * | 2019-07-21 | 2019-10-22 | 常州时创能源科技有限公司 | Quartz boat is used in a kind of carrying of silicon wafer |
| CN110364465B (en) * | 2019-07-21 | 2023-08-29 | 常州时创能源股份有限公司 | Quartz boat for bearing silicon wafer |
| CN113644163A (en) * | 2021-08-06 | 2021-11-12 | 横店集团东磁股份有限公司 | Silicon wafer sheet resistance uniform diffusion device, assembling method and renovating method thereof |
| CN113644163B (en) * | 2021-08-06 | 2023-07-14 | 横店集团东磁股份有限公司 | Silicon wafer sheet resistance uniform diffusion device, assembly method and renovation method thereof |
| CN116804272A (en) * | 2023-08-28 | 2023-09-26 | 江苏宏伟石英科技有限公司 | LPCVD baffle type quartz boat and preparation process thereof |
| CN116804272B (en) * | 2023-08-28 | 2023-11-28 | 江苏宏伟石英科技有限公司 | Preparation facilities including LPCVD baffle formula quartz boat |
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