CN207338320U - Process gas air inlet pipeline system - Google Patents
Process gas air inlet pipeline system Download PDFInfo
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- CN207338320U CN207338320U CN201721125247.1U CN201721125247U CN207338320U CN 207338320 U CN207338320 U CN 207338320U CN 201721125247 U CN201721125247 U CN 201721125247U CN 207338320 U CN207338320 U CN 207338320U
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- gas
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- saturated vapor
- unsaturation
- air inlet
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Abstract
The utility model discloses a kind of process gas air inlet pipeline system, including at least one unsaturation steam gas pipeline, unsaturation steam gas collect pipeline, saturated vapor gas piping and mixed pipe line, unsaturation steam gas, which are communicated in, after at least one unsaturation steam gas pipeline parallel connection collects pipeline, mixed pipe line is communicated in after unsaturation steam gas collect pipeline and saturated vapor gas piping crosses, mixed pipe line is used to be connected to vacuum technology chamber, process gas air inlet pipeline system further includes voltage regulation part, voltage regulation part collects on pipeline arranged on unsaturation steam gas, the pressure in the exit for unsaturation steam gas to be collected to pipeline is adjusted to predetermined value.The process gas air inlet pipeline system can realize that plasma etching machine, PVD saturated vapor gas and unsaturation steam gas whiles when vacuum equipment distribution transmits, and saturated vapor gas is matched with other process gas by any flow.
Description
Technical field
It the utility model is related to semiconductor manufacturing equipment, and in particular to a kind of process gas air inlet pipeline system.
Background technology
Plasma apparatus is widely used in the manufacturing process of integrated circuit (IC) or MEMS (MEMS), inductance
Coupled plasma (ICP) device is wherein by a kind of commonly used device.The device is generally required kinds of processes gas
Be passed through chamber, mixed gas formed under the action of inductive coupling substantial amounts of electronics, ion, the atom of excitation state, molecule and from
By base isoreactivity particle, these active particles and substrate interaction make material surface that various physical and chemical reactions occur, from
And changed material surface performance, achieve the purpose that deposition or etching.
For the process gas for inductance coupled plasma device, common is a kind of such as N2、Cl2、O2、CF4, He etc.
It is at room temperature gaseous state, the chamber of device can be delivered directly to.Another kind of such as SiCl4、BCl3Deng being liquid at normal temperatures, or
Boiling point is slightly less than room temperature, can be stored in steel cylinder by steel cylinder pressurization, is needed when conveying this kind of gas in liquid form
Supplied by the saturated vapor of steel cylinder ullage.The main reason for this kind of gas is not easy to convey be work as pipeline in temperature it is slightly lower or
Liquefaction phenomenon just occurs when pressure is bigger than normal, so source of the gas and pipeline periphery are required for one layer of electricity of addition in course of conveying
Heating unit, to keep the temperature of source of the gas and conveyance conduit.In addition, the pressure of source of the gas and pipeline will also be maintained at certain scope
It is interior, it is impossible to excessive.So when reaction unit needs above-mentioned two classes gas to be mixed so that plasma reaction occurs at the same time,
With regard to needing uniformly to mix two class gases in advance before chamber is entered, and ensure saturated vapor gas and smoothly enter chamber and become very
It is crucial.
With the development of etching technics, saturated vapor gas such as SiCl4Gas is increasingly becoming technique pre-treatment and technique is carved
Indispensable process gas is lost, but due to SiCl4The reason for itself saturated vapour pressure is low, when configuring and transmitting the gas
Easily there is underfed even blockage problem.
General etching technics gas configuration principle is that the multichannel process gas in air chest is mixed in the outlet of each control piper
Sent after conjunction into vacuum reaction chamber, as shown in Figure 1.Process gas in Fig. 1 includes the 1st tunnel technique for unsaturation steam gas
Gas is to the n-th road process gas, and saturated vapor gas SiCl4.Each road process gas is distinguished after factory's factory service end access
By pipeline 10 or pipeline 12, filter 20, hand-operated valve 30, pressure regulator valve 40, pressure gauge 50, pneumatic operated valve 60, flow control valve 70,
After secondary pneumatic operated valve 61, pipeline 11 is met in outlet, then injects vacuum technology chamber 90 by filter 21, pipeline 13
It is interior.Wherein with saturated vapor gas SiCl4Air chest connection pipeline 12 need to configure electric tracing 80 to prevent saturated vapor
Gas SiCl4Condensation.
SiCl4The saturated vapour pressure of itself is low, about the work of 25kPa-30kPa, far smaller than other process gas
Pressure 350kPa-500kPa.Each road process gas meets at pipeline 11 after setting different flow, passes through 21 He of filter
Pipeline 13 reaches vacuum technology chamber 90.Due between the inlet end and an outlet end of filter 21 when flow is larger there are back pressure,
And the import end pressure of filter 21 is equal to SiCl4Pipeline 12 outlet pressure, therefore, the total flow of process gas is bigger,
The back pressure of filter 21 is bigger, and the outlet pressure of pipeline 12 is also bigger, causes side pressure before and after the flow control valve 70 on pipeline 12
Force difference is too small, will appear from SiCl4Gas flow difficulties, the phenomenon of underfed；When the back pressure of filter 21 is more than SiCl4Gas
Inlet pressure when, SiCl4Gas will be unable to flow.Case above can not all meet technological requirement.
Utility model content
The purpose of this utility model is to provide a kind of process gas air inlet pipeline system, it can solve existing air inlet pipeline
Existing for system the problem of saturated vapor gas flow difficulties, underfed.
To achieve these goals, the utility model proposes a kind of process gas air inlet pipeline system, including at least one
A unsaturation steam gas pipeline, unsaturation steam gas collect pipeline, saturated vapor gas piping and mixed pipe line, it is described extremely
The unsaturation steam gas, which are communicated in, after a few unsaturation steam gas pipeline parallel connection collects pipeline, the unsaturation steam
Gas collection pipeline and the saturated vapor gas piping are communicated in the mixed pipe line after crossing, the mixed pipe line is used to connect
Vacuum technology chamber is passed to, the process gas air inlet pipeline system further includes voltage regulation part, and the voltage regulation part is arranged on described non-
On saturated vapor gas collection pipeline, the pressure in the exit for the unsaturation steam gas to be collected pipeline is adjusted to pre-
Below definite value.
Preferably, the voltage regulation part include be arranged at the unsaturation steam gas collect on pipeline first filtering
Device.
Preferably, the process gas air inlet pipeline system further includes be arranged on the saturated vapor gas piping
Tow filtrator.
Preferably, the voltage regulation part, which includes being arranged at the unsaturation steam gas, collects throttle valve on pipeline.
Preferably, the process gas air inlet pipeline system further includes the mixing tube being arranged on the mixed pipe line and passes by
Filter.
Preferably, the latus rectum of the throttle valve is 0.1-1.5mm.
Preferably, the unsaturation steam gas pipeline is used to be connected to unsaturation steam air chest, in the unsaturation
On steam gas pipeline from described unsaturation steam air chest one end successively be equipped with filter, hand-operated valve, pressure regulator valve, pressure gauge,
At least one of pneumatic operated valve, flow control valve, secondary pneumatic operated valve.
Preferably, the saturated vapor gas piping is used to be connected to saturated vapor air chest, in the saturated vapor gas
Filter, hand-operated valve, pressure regulator valve, pressure gauge, pneumatic operated valve, stream are equipped with successively from described saturated vapor air chest one end on body pipeline
At least one of control valve, secondary pneumatic operated valve.
Preferably, it is equipped with electric tracing component along the saturated vapor gas piping.
The beneficial effects of the utility model are：The pressure that unsaturation steam gas collect the exit of pipeline can be reduced
Power, that is, reduce the pressure in the exit of saturated vapor gas piping, so that it is poor to improve saturated vapor gas piping inlet and outlet pressure,
Ensure that saturated vapor gas is smooth and flow into vacuum technology chamber；And then realize that plasma etching machine, PVD are satisfied when vacuum equipment distribution
With steam gas with being transmitted while unsaturation steam gas, make saturated vapor gas can be with other process gas by any flow
Matched, and big flow (>Also distribution demand can be met under the conditions of 1000sccm).In addition, by setting filter, can prevent
The molecule pollution vacuum technology chamber only included in gas.
Brief description of the drawings
The utility model illustrative embodiments are described in more detail in conjunction with the accompanying drawings, the utility model it is upper
State and other purposes, feature and advantage will be apparent.
Fig. 1 shows the schematic diagram of process gas air inlet pipeline system according to prior art；
Fig. 2 shows the signal of the process gas air inlet pipeline system of an exemplary embodiment according to the present utility model
Figure；
Fig. 3 shows the signal of the process gas air inlet pipeline system of another exemplary embodiment according to the present utility model
Figure.
Description of reference numerals：
10- pipelines, 11- pipelines, 12- pipelines, 13- pipelines, 20- filters, 21- filters, 30- hand-operated valves, 40- pressure regulation
Valve, 50- pressure gauges, 60- pneumatic operated valves, No. bis- pneumatic operated valves of 61-, 70- flow control valves, 80- electric tracings, 90- vacuum technology chambers；
210- unsaturation steam gas pipelines, 211- unsaturation steam gas collect pipeline, 212- saturated vapor flues
Road, 213- mixed pipe lines, 220- filters, 221- first filters, the second filters of 222-, 230- hand-operated valves, 240- pressure regulation
Valve, 250- pressure gauges, 260- pneumatic operated valves, No. bis- pneumatic operated valves of 261-, 270- flow control valves, 280- electric tracing components, 290- are true
Empty process cavity；
310- unsaturation steam gas pipelines, 311- unsaturation steam gas collect pipeline, 312- saturated vapor flues
Road, 313- mixed pipe lines, 320- filters, 321- mixed pipe line filters, 330- hand-operated valves, 340- pressure regulator valves, 350- pressure
Table, 360- pneumatic operated valves, No. bis- pneumatic operated valves of 361-, 370- flow control valves, 380- electric tracing components, 390- vacuum technology chambers,
391- throttle valves.
Embodiment
The utility model is more fully described below with reference to accompanying drawings.Although the preferred of the utility model is shown in attached drawing
Embodiment, however, it is to be appreciated that may be realized in various forms the utility model without should be by embodiments set forth herein
Limited.On the contrary, these embodiments are provided so that the utility model is more thorough and complete, and can be by this practicality
New scope is intactly communicated to those skilled in the art.
The process gas air inlet pipeline system of exemplary embodiment according to the present utility model includes at least one unsaturation
Steam gas pipeline, unsaturation steam gas collect pipeline, saturated vapor gas piping and mixed pipe line, at least one unsaturation
Unsaturation steam gas are communicated in after steam gas pipeline parallel connection and collect pipeline, unsaturation steam gas collect pipeline and saturation is steamed
Vapour gas piping is communicated in mixed pipe line after crossing, mixed pipe line is used to be connected to vacuum technology chamber, process gas air inlet pipeline
System further includes voltage regulation part, and voltage regulation part collects on pipeline arranged on unsaturation steam gas, for by unsaturation steam gas
The pressure for collecting the exit of pipeline is adjusted to predetermined value.
In use, it is gaseous unsaturation steam gas that unsaturation steam gas pipeline, which is used to be passed through under room temperature, saturation is steamed
Vapour gas piping is used to be passed through the saturated vapor gas for being slightly less than room temperature under room temperature for liquid or boiling point.The process gas air inlet pipe
Road system collects the pressure in the exit of pipeline by voltage regulation part adjusting unsaturation steam gas, due to unsaturation steam gas
Collect pipeline and saturated vapor gas piping crosses, you can to adjust the pressure in the exit of saturated vapor gas piping, make it
Less than predetermined value, so as to improve the pressure differential between saturated vapor gas piping inlet and outlet, saturated vapor gas stream is overcome
The dynamic difficult, phenomenon of underfed, makes it to be matched with other process gas by any flow.
Predetermined value can be set according to the process conditions such as ratio requirement of the actual flow of process gas, each process gas
Fixed, this is that those skilled in the art easily determine.
In one example, voltage regulation part, which includes being arranged at unsaturation steam gas, collects first filter on pipeline.
Collect the joint of pipeline and saturated vapor gas piping since the port of export of first filter passes through unsaturation steam gas, mix
The vacuum technology chamber that pipeline connection to absolute pressure is zero is closed, therefore, at the port of export of first filter, joint, saturation steams
The outlet pressure of vapour gas piping is all close to zero, and saturated vapor gas is with the mixed gas of unsaturation steam gas approximate
Mixed under vacuum, mutually without pressure disturbances, and the pressure differential increase between saturated vapor gas piping inlet and outlet, saturation
Steam gas can smooth outflow.In this case, the inlet and outlet pressure difference and unsaturation steam gas of saturated vapor gas piping
The pressure and flow of body pipeline are irrelevant, disclosure satisfy that technological requirement.
In one example, process gas air inlet pipeline system further includes second be arranged on saturated vapor gas piping
Filter.Second filter filters fall the molecule included in saturated vapor gas, prevent pollution vacuum technology chamber.
In one example, voltage regulation part, which includes being arranged at unsaturation steam gas, collects throttle valve on pipeline.Throttling
Valve can control the flow for the unsaturation steam gas for collecting pipeline by unsaturation steam gas, and then adjust unsaturation steam gas
Body collects the pressure in the exit of pipeline, that is, adjusts the pressure at the joint and exit of saturated vapor gas piping, carry
The inlet and outlet pressure of high saturated vapor gas piping is poor, lifts the negotiability of saturated vapor gas.Especially, throttle valve is logical
Footpath is 0.1-1.5mm.
In one example, process gas air inlet pipeline system further includes the mixed pipe line filtering being arranged on mixed pipe line
Device.The filter filters fall the molecule included in saturated vapor gas and the unsaturation steam gas of mixing, prevent dirt
Contaminate vacuum technology chamber.
In one example, unsaturation steam gas pipeline is used to be connected to unsaturation steam air chest, is steamed in unsaturation
On vapour gas piping from unsaturation steam air chest one end successively be equipped with filter, hand-operated valve, pressure regulator valve, pressure gauge, pneumatic operated valve,
At least one of flow control valve, secondary pneumatic operated valve.These components can be used for filtering unsaturation steam gas, opening
Pass, pressure regulation, pressure measurement, flow control.
In one example, saturated vapor gas piping is used to be connected to saturated vapor air chest, in saturated vapor gas
Self-saturation steam air chest one end is equipped with filter, hand-operated valve, pressure regulator valve, pressure gauge, pneumatic operated valve, flow control successively on pipeline
At least one of valve, secondary pneumatic operated valve.These components can be used for saturated vapor gas is filtered, is switched, pressure regulation, survey
Pressure, flow control.
In one example, heat tracing component is equipped with along saturated vapor gas piping, especially, heat tracing component is electric tracing
Component.Heat tracing component is used to prevent saturated vapor gas from condensing.
Embodiment 1
Fig. 2 shows the signal of the process gas air inlet pipeline system of an exemplary embodiment according to the present utility model
Figure, in this embodiment, saturated vapor gas is Sicl4Saturated vapor gas.
The process gas air inlet pipeline system is collected including n unsaturation steam gas pipeline 210, unsaturation steam gas
Pipeline 211, saturated vapor gas piping 212 and mixed pipe line 213, are communicated in after n 210 parallel connection of unsaturation steam gas pipeline
Unsaturation steam gas collect pipeline 211, and unsaturation steam gas collect pipeline 211 and saturated vapor gas piping 212 crosses
After be communicated in mixed pipe line 213, mixed pipe line 213 is used to be connected to vacuum technology chamber 290, and process gas air inlet pipeline system is also
Including voltage regulation part, voltage regulation part collects on pipeline 211 arranged on unsaturation steam gas, for unsaturation steam gas to be collected
The pressure in the exit of pipeline 211 is adjusted to predetermined value.
Wherein, voltage regulation part, which includes being arranged at unsaturation steam gas, collects first filter 221 on pipeline 211.
Saturated vapor gas piping 212 is equipped with the second filter 222, it is used to remove the molecule in saturated vapor gas.
Wherein, unsaturation steam gas pipeline 210 is used to be connected to unsaturation steam air chest (not shown), in unsaturation
On steam gas pipeline 210 from unsaturation steam air chest one end successively be equipped with filter 220, hand-operated valve 230, pressure regulator valve 240,
Pressure gauge 250, pneumatic operated valve 260, flow control valve 270, secondary pneumatic operated valve 261；Similar, saturated vapor gas piping 212 is used
In being connected to saturated vapor air chest (not shown), on saturated vapor gas piping 212 self-saturation steam air chest one end according to
It is secondary to be equipped with filter 220, hand-operated valve 230, pressure regulator valve 240, pressure gauge 250, pneumatic operated valve 260, flow control valve 270, secondary gas
Dynamic valve 261.
Wherein, it is equipped with electric tracing component 280 along saturated vapor gas piping 212.
Embodiment 2
Fig. 3 shows the signal of the process gas air inlet pipeline system of another exemplary embodiment according to the present utility model
Figure, in this embodiment, saturated vapor gas is Sicl4Saturated vapor gas.
The process gas air inlet pipeline system is collected including n unsaturation steam gas pipeline 310, unsaturation steam gas
Pipeline 311, saturated vapor gas piping 312 and mixed pipe line 313, are communicated in after n 310 parallel connection of unsaturation steam gas pipeline
Unsaturation steam gas collect pipeline 311, and unsaturation steam gas collect pipeline 311 and saturated vapor gas piping 312 crosses
After be communicated in mixed pipe line 313, mixed pipe line 313 is used to be connected to vacuum technology chamber 390, and process gas air inlet pipeline system is also
Including voltage regulation part, voltage regulation part collects on pipeline 311 arranged on unsaturation steam gas, for unsaturation steam gas to be collected
The pressure in the exit of pipeline 311 is adjusted to predetermined value.
Wherein, voltage regulation part, which includes being arranged at unsaturation steam gas, collects throttle valve 391 on pipeline 311, throttle valve
Latus rectum be 1.0mm.Mixed pipe line 313 is equipped with mixed pipe line filter 321, it is used to remove small in mixed gas
Grain.
Wherein, unsaturation steam gas pipeline 310 is used to be connected to unsaturation steam air chest (not shown), in unsaturation
On steam gas pipeline 310 from unsaturation steam air chest one end successively be equipped with filter 320, hand-operated valve 330, pressure regulator valve 340,
Pressure gauge 350, pneumatic operated valve 360, flow control valve 370, secondary pneumatic operated valve 361；Similar, saturated vapor gas piping 312 is used
In being connected to saturated vapor air chest (not shown), on saturated vapor gas piping 312 self-saturation steam air chest one end according to
It is secondary to be equipped with filter 320, hand-operated valve 330, pressure regulator valve 340, pressure gauge 350, pneumatic operated valve 360, flow control valve 370, secondary gas
Dynamic valve 361.
Wherein, it is equipped with electric tracing component 380 along saturated vapor gas piping 312.
Each embodiment of the utility model is described above, described above is exemplary, and non-exclusive, and
And it is also not necessarily limited to disclosed each embodiment.In the case of without departing from the scope and spirit of illustrated each embodiment, for
Many modifications and changes will be apparent from for those skilled in the art.The choosing of term used herein
Select, it is intended to best explain the principle of each embodiment, practical application or to the technological improvement in market, or make the art
Other those of ordinary skill be understood that each embodiment disclosed herein.
Claims (9)
1. a kind of process gas air inlet pipeline system, including at least one unsaturation steam gas pipeline, unsaturation steam gas
Collect pipeline, saturated vapor gas piping and mixed pipe line, connected after at least one unsaturation steam gas pipeline parallel connection
Collect pipeline in the unsaturation steam gas, the unsaturation steam gas collect pipeline and the saturated vapor gas piping
The mixed pipe line is communicated in after crossing, the mixed pipe line is used to be connected to vacuum technology chamber, it is characterised in that the technique
Gas inlet pipeline system further includes voltage regulation part, and the voltage regulation part collects on pipeline arranged on the unsaturation steam gas,
The pressure in the exit for the unsaturation steam gas to be collected pipeline is adjusted to predetermined value.
2. process gas air inlet pipeline system according to claim 1, it is characterised in that the voltage regulation part includes setting
Collect the first filter on pipeline in the unsaturation steam gas.
3. process gas air inlet pipeline system according to claim 2, it is characterised in that further include and be arranged at the saturation
The second filter on steam gas pipeline.
4. process gas air inlet pipeline system according to claim 1, it is characterised in that the voltage regulation part includes setting
Collect the throttle valve on pipeline in the unsaturation steam gas.
5. process gas air inlet pipeline system according to claim 4, it is characterised in that further include and be arranged at the mixing
Mixed pipe line filter on pipeline.
6. process gas air inlet pipeline system according to claim 4, it is characterised in that the latus rectum of the throttle valve is
0.1-1.5mm。
7. process gas air inlet pipeline system according to claim 1, it is characterised in that the unsaturation steam gas pipe
Road is used to be connected to unsaturation steam air chest, from the unsaturation steam air chest on the unsaturation steam gas pipeline
One end successively be equipped with filter, hand-operated valve, pressure regulator valve, pressure gauge, pneumatic operated valve, flow control valve, secondary pneumatic operated valve at least its
One of.
8. process gas air inlet pipeline system according to claim 1, it is characterised in that the saturated vapor gas piping
For being connected to saturated vapor air chest, on the saturated vapor gas piping from described saturated vapor air chest one end successively
Equipped with least one of filter, hand-operated valve, pressure regulator valve, pressure gauge, pneumatic operated valve, flow control valve, secondary pneumatic operated valve.
9. process gas air inlet pipeline system according to claim 8, it is characterised in that along the saturated vapor gas
Pipeline is equipped with electric tracing component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721125247.1U CN207338320U (en) | 2017-09-04 | 2017-09-04 | Process gas air inlet pipeline system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721125247.1U CN207338320U (en) | 2017-09-04 | 2017-09-04 | Process gas air inlet pipeline system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207338320U true CN207338320U (en) | 2018-05-08 |
Family
ID=62372222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721125247.1U Active CN207338320U (en) | 2017-09-04 | 2017-09-04 | Process gas air inlet pipeline system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207338320U (en) |
-
2017
- 2017-09-04 CN CN201721125247.1U patent/CN207338320U/en active Active
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