CN207331069U - A kind of etching fluid injector suitable for copper-clad plate process - Google Patents
A kind of etching fluid injector suitable for copper-clad plate process Download PDFInfo
- Publication number
- CN207331069U CN207331069U CN201721204563.8U CN201721204563U CN207331069U CN 207331069 U CN207331069 U CN 207331069U CN 201721204563 U CN201721204563 U CN 201721204563U CN 207331069 U CN207331069 U CN 207331069U
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- CN
- China
- Prior art keywords
- water conservancy
- conservancy diversion
- needle tubing
- spray
- diversion needle
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Abstract
It the utility model is related to substrate process processing unit technical field, especially a kind of etching fluid injector suitable for copper-clad plate process.It includes nozzle overcoat and water conservancy diversion needle tubing, formed with the first sap cavity in the perisporium of nozzle overcoat, the front end face of nozzle overcoat is formed with spray arm, formed with the second sap cavity in the arm plate of spray arm, it is in offer spray-hole on the side being distributed in opposite directions on the arm plate of spray arm and with water conservancy diversion needle tubing, the central axes of spray-hole are intersected with the central axes of water conservancy diversion needle tubing, and a fluid injection connecting tube being connected with the first sap cavity is provided with the side wall of the rearward end of nozzle overcoat.At least two-way reservoir channel is formed in the utility model, pass through the cooperation of water conservancy diversion needle tubing and spray-hole, it can be achieved to realizing to the widening of center fluid column, the dosage of the etching solution of center fluid column or the etching process etc. for completing a plurality of parallel line at the same time, it can effectively meet the etching requirement of the complex figure circuit in copper-clad plate, ensure the precision of figure circuit etching processing.
Description
Technical field
Substrate process processing unit technical field is the utility model is related to, it is especially a kind of to be suitable for copper-clad plate process
Etching fluid injector.
Background technology
Known, copper-clad plate is (i.e.：Copper Clad Laminate, full name copper-clad plate lamination plate, English abbreviation CCL) be by
Wood pulp paper or glass-fiber-fabric etc. make reinforcing material, soak with resin, single or double coated with a kind of product formed after copper foil through hot pressing,
Its basic material as electronics industry, is mainly processed and is manufactured into printed circuit board, so as to be widely used in television set, receive
On the electronic products such as the mechanical, electrical brain of sound, computer, mobile communication.
A vital process links of the etching process process as copper-clad plate in the fabrication process, it is mainly sharp
With Etaching device to copper-clad plate surface spraying acid etching liquid to etch figure circuit on the surface of copper-clad plate.However,
Due to the etching solution injection device on existing Etaching device in structure design there are it is certain the defects of, essence can not be obtained all the time
The higher figure circuit of degree, and injection device can not quickly and accurately control the injection of liquid according to the change of figure circuit
Speed, direction and track etc., so as to cause the figure circuit that is etched in copper-clad plate not satisfactory.
Utility model content
In view of the deficiency of the prior art, the purpose of this utility model is to provide one kind to be suitable for copper-clad plate work
The etching fluid injector of skill processing.
To achieve these goals, the utility model adopts the following technical solution：
A kind of etching fluid injector suitable for copper-clad plate process, it include one have front end face nozzle overcoat and
One is placed in nozzle overcoat and front port is through the water conservancy diversion needle tubing of the front end EDS maps of nozzle overcoat, the week of the nozzle overcoat
Extend forward along the axial direction of nozzle overcoat formed with the first sap cavity, the profile edge of the front end face of the nozzle overcoat in wall
It is interior formed with one and first around the equally distributed spray arm of water conservancy diversion needle tubing, the arm plate of the spray arm formed with least two afterwards
The second sap cavity that sap cavity is communicated as one, is in be opened up on the side being distributed in opposite directions on the arm plate of the spray arm and with water conservancy diversion needle tubing
There is spray-hole, the central axes of the spray-hole are intersected with the central axes of water conservancy diversion needle tubing, the side wall of the rearward end of the nozzle overcoat
On be provided with a fluid injection connecting tube being connected with the first sap cavity.
Preferably, the water conservancy diversion needle tubing include supervisor portion, shunk by the front end of supervisor portion after the taper pipe portion that is formed with
And the straight mouth pipe portion formed after being extended forward by the axial direction of front end along the supervisor portion of taper pipe portion, the straight mouth pipe portion run through
In the front end EDS maps of nozzle overcoat.
Preferably, the 3rd sap cavity is also formed between the internal perisporium and water conservancy diversion needle tubing of the nozzle overcoat, outside the nozzle
Offered on the front end face of set one be used for for straight mouth pipe portion through distribution and aperture more than straight mouth pipe portion outer tube diameter perforating,
Formed with the annular orifice for being connected with the 3rd sap cavity between the perforating and straight mouth pipe portion.
Preferably, it is surround after the axial direction of front end face along the water conservancy diversion needle tubing of the nozzle overcoat extends forward formed with one
Port surface with wearing pore size distribution and port surface and straight mouth pipe portion is in the spacing bustle pipe in same plane.
Preferably, it is in the axis for the side and water conservancy diversion needle tubing being distributed in opposite directions on the arm plate of the spray arm and with water conservancy diversion needle tubing
Angle between line is acute angle, and the central axes of the spray-hole are divided on the arm plate of spray arm and with water conservancy diversion needle tubing in opposite
The side of cloth.
Preferably, it is in be provided with a radial support plate on the side that is distributed in opposite directions on the spray arm and with water conservancy diversion needle tubing,
An axial shield is provided between the mouth of pipe of the support plate and water conservancy diversion needle tubing.
As a result of such scheme, at least two-way reservoir channel is formed in the utility model, passes through water conservancy diversion needle tubing and spray
The cooperation of perforation is, it can be achieved that to realizing to the widening of center fluid column, the dosage of the etching solution of center fluid column or completing at the same time more
Etching process of bar parallel line etc., can effectively meet the etching requirement of the complex figure circuit in copper-clad plate, ensure
The precision of figure circuit etching processing, has very strong practical value and market popularization value.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the utility model embodiment；
Fig. 2 is the frontal planar structure diagram of the utility model embodiment；
Fig. 3 is the side cross-sectional structure diagram of the utility model embodiment；
Fig. 4 is the circulation path schematic diagram of the etching solution of the utility model embodiment.
Embodiment
The embodiment of the utility model is described in detail below in conjunction with attached drawing, but the utility model can be by right
It is required that the multitude of different ways for limiting and covering is implemented.
As shown in Figures 1 to 4, a kind of etching fluid injector suitable for copper-clad plate process provided in this embodiment,
It includes that a nozzle overcoat 10 and one with front end face is placed in nozzle overcoat 10 and front port is through nozzle overcoat 10
The water conservancy diversion needle tubing 20 of front end EDS maps, (can be understood as in the perisporium of nozzle overcoat 10 formed with the first sap cavity a：Outside nozzle
Set 10 perisporium be cavity structure), nozzle overcoat 10 front end face profile edge along nozzle overcoat 10 axial direction to
After preceding extension formed with least two around 20 equally distributed spray arm 30 of water conservancy diversion needle tubing (the present embodiment is preferably two, when
So, or three or four, its particular number, which is preferably subject between adjacent spray arm 30, has enough gaps),
Formed with one and first the second sap cavity b that are communicated as one of sap cavity a in the arm plate of spray arm 30, while in the arm plate of spray arm 30
It is in above and with water conservancy diversion needle tubing 20 that spray-hole c is offered on the side being distributed in opposite directions, central axes and the water conservancy diversion needle tubing 20 of spray-hole c
Central axes are intersected, and a fluid injection being connected with the first sap cavity a is provided with the side wall of the rearward end in nozzle overcoat 10 and is connected
Adapter 40.
Thus, directly water conservancy diversion needle tubing 20 can be connected with the etching solution supply arrangement of such as liquid pump, and nozzle overcoat 10 is then
It can be connected by fluid injection connecting tube 40 with etching solution supply arrangements such as liquid pumps, so as to form two-way note in an injector
Liquid passage, i.e.,：By the etching liquid that water conservancy diversion needle tubing 20 ejects as with the center fluid column of specified standards size come use with
Realize the etching operation to the center route of copper-clad plate, and the fluid column that the etching liquid ejected by spray-hole c is formed is (quite
In auxiliary fluid column) it can then be sprayed along the straight line path to intersect with center fluid column and be completed with sectional center fluid column to copper-clad plate
On image line etching process, such as：By to aid in fluid column jet length selection control or adjustment copper-clad plate with
The distance between injector hydrojet end is, it can be achieved that to realizing widening (i.e. to center fluid column：Widen the figure circuit in copper-clad plate
Width), the dosage of the etching solution of center fluid column (i.e.：Equivalent to the etching intensity increased to the center line in copper-clad plate) or
Person completes etching process of a plurality of parallel line etc. at the same time, so as to effectively meet the complex figure circuit in copper-clad plate
Etching requirement, ensure the precision of figure circuit etching processing.
To ensure the jeting effect of center fluid column, strengthen its directive property and aggregation and reduce its dispersiveness, the present embodiment
Water conservancy diversion needle tubing 20 include supervisor portion 21, shunk by the front end of supervisor portion 21 after the taper pipe portion 22 that is formed and by conical pipe
The straight mouth pipe portion 23 that the axial direction of the front end in portion 22 along supervisor portion 21 is formed after extending forward, wherein, straight mouth pipe portion 23 runs through
In the front end EDS maps of nozzle overcoat 10.Thus, by improving the structure of water conservancy diversion needle tubing 20, using taper pipe portion 22 in structure
On the contractive effect etching solution that enables to be injected into water conservancy diversion needle tubing 20 by liquid pump enough pressure is kept after gathering rapidly,
Finally to be sprayed by straight mouth pipe portion 23, so as to ensure the form of center fluid column, avoid hair occur on the circuit etching of copper-clad plate
The flaws such as side.
To further enhance the applicability of whole injector, meet the requirement of the different graphic circuit of copper-clad plate, in nozzle
The 3rd sap cavity d is also formed between the internal perisporium and water conservancy diversion needle tubing 20 of overcoat 10, is offered on the front end face of nozzle overcoat 10
One be used for for straight mouth pipe portion 23 through distribution and aperture be more than straight mouth pipe portion 23 outer tube diameter perforating, in perforating and Zhi Zui
Formed with the annular orifice e for being connected with the 3rd sap cavity d between pipe portion 23.Thus, nozzle overcoat 10 can both pass through
Fluid injection connecting tube 10 is attached with liquid pump, also can be directly connected with liquid pump, so as to form three road liquid in whole injector
Passage, using annular orifice e can centered on the quantity widening or increase parallel line of fluid column auxiliary be provided support.
To strengthen the form for making the annular fluid column formed by the annular orifice e etching solutions sprayed, its property gathered is improved,
The axial direction of the front end face of nozzle overcoat 10 along water conservancy diversion needle tubing 20 extend forward after formed with one around with wear pore size distribution and
Port surface and the port surface of straight mouth pipe portion 23 are in the spacing bustle pipe 50 in same plane.
To effectively improve the jeting effect of auxiliary fluid column, avoid by the liquid column-spraying that spray-hole c sprays to ejector body
On, in the side being distributed in opposite directions and the axis of water conservancy diversion needle tubing 20 on the arm plate of the spray arm 30 of the present embodiment and with water conservancy diversion needle tubing 20
Angle between line is that acute angle (can be understood as：The jet face of spray arm 30 uses ramp structure, or multiple spray arms 30
Jet face is in horn-like distribution form relative to water conservancy diversion needle tubing 20), the arm plate of the central axes of spray-hole c perpendicular to spray arm 30
Above and with water conservancy diversion needle tubing 20 in the side being distributed in opposite directions.Thus, it is ensured that center can be intended to by aiding in the injection direction of fluid column
The injection direction of fluid column,
It is in be provided with one on the side being distributed in opposite directions on spray arm 30 and with water conservancy diversion needle tubing 20 as a preferred solution
Radial support plate 31, is provided with an axial shield 32 between the mouth of pipe of support plate 31 and water conservancy diversion needle tubing 20.So as to utilize
Spray-hole c is made isolating for certain distance by axial shield 32 with water conservancy diversion needle tubing 20, is prevented between center fluid column and auxiliary fluid column
Premature progress cross jamming or contact.
The above is only the preferred embodiment of the present invention, and it does not limit the scope of the patent of the present invention,
Every equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, is directly or indirectly transported
Used in other related technical areas, it is equally included in the patent within the scope of the utility model.
Claims (6)
- A kind of 1. etching fluid injector suitable for copper-clad plate process, it is characterised in that：It, which includes one, has front end face Nozzle overcoat and one is placed in nozzle overcoat and front port is through the water conservancy diversion needle tubing of the front end EDS maps of nozzle overcoat, the spray Formed with the first sap cavity in the perisporium of mouth overcoat, the axial direction side of the profile edge of the front end face of the nozzle overcoat along nozzle overcoat Formed to after extending forward formed with least two in the equally distributed spray arm of water conservancy diversion needle tubing, the arm plate of the spray arm There are one and first the second sap cavity that is communicated as one of sap cavity, be in what is be distributed in opposite directions on the arm plate of the spray arm and with water conservancy diversion needle tubing Spray-hole is offered on side, the central axes of the spray-hole are intersected with the central axes of water conservancy diversion needle tubing, after the nozzle overcoat A fluid injection connecting tube being connected with the first sap cavity is provided with the side wall of end.
- A kind of 2. etching fluid injector suitable for copper-clad plate process as claimed in claim 1, it is characterised in that：It is described Water conservancy diversion needle tubing includes supervisor portion, shunk by the front end of supervisor portion after the taper pipe portion that is formed and the front end edge by taper pipe portion The straight mouth pipe portion that the axial direction of supervisor portion is formed after extending forward, front end face point of the straight mouth pipe portion through nozzle overcoat Cloth.
- A kind of 3. etching fluid injector suitable for copper-clad plate process as claimed in claim 2, it is characterised in that：It is described The 3rd sap cavity is also formed between the internal perisporium and water conservancy diversion needle tubing of nozzle overcoat, one is offered on the front end face of the nozzle overcoat Perforating for the outer tube diameter for being more than straight mouth pipe portion through distribution and aperture for straight mouth pipe portion, the perforating and straight mouth pipe portion Between formed with the annular orifice for being connected with the 3rd sap cavity.
- A kind of 4. etching fluid injector suitable for copper-clad plate process as claimed in claim 3, it is characterised in that：It is described The axial direction of the front end face of nozzle overcoat along water conservancy diversion needle tubing is surround with wearing pore size distribution and port after extending forward formed with one The port surface of face and straight mouth pipe portion is in the spacing bustle pipe in same plane.
- 5. a kind of etching fluid injector suitable for copper-clad plate process as any one of claim 1-4, it is special Sign is：In between the side being distributed in opposite directions and the central axes of water conservancy diversion needle tubing on the arm plate of the spray arm and with water conservancy diversion needle tubing Angle is acute angle, and the central axes of the spray-hole are in the side that is distributed in opposite directions on the arm plate of spray arm and with water conservancy diversion needle tubing Face.
- A kind of 6. etching fluid injector suitable for copper-clad plate process as claimed in claim 5, it is characterised in that：It is described It is in that a radial support plate is provided with the side being distributed in opposite directions on spray arm and with water conservancy diversion needle tubing, the support plate and water conservancy diversion needle tubing The mouth of pipe between be provided with an axial shield.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721204563.8U CN207331069U (en) | 2017-09-18 | 2017-09-18 | A kind of etching fluid injector suitable for copper-clad plate process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721204563.8U CN207331069U (en) | 2017-09-18 | 2017-09-18 | A kind of etching fluid injector suitable for copper-clad plate process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207331069U true CN207331069U (en) | 2018-05-08 |
Family
ID=62369054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721204563.8U Expired - Fee Related CN207331069U (en) | 2017-09-18 | 2017-09-18 | A kind of etching fluid injector suitable for copper-clad plate process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207331069U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116623184A (en) * | 2023-07-19 | 2023-08-22 | 西安精谐科技有限责任公司 | Ion beam etching tool and ion beam etching trimming method for hemispherical harmonic oscillator |
-
2017
- 2017-09-18 CN CN201721204563.8U patent/CN207331069U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116623184A (en) * | 2023-07-19 | 2023-08-22 | 西安精谐科技有限责任公司 | Ion beam etching tool and ion beam etching trimming method for hemispherical harmonic oscillator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180508 |