CN207318050U - The device of inhomogeneities in a kind of test probe pixel - Google Patents
The device of inhomogeneities in a kind of test probe pixel Download PDFInfo
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- CN207318050U CN207318050U CN201721026061.0U CN201721026061U CN207318050U CN 207318050 U CN207318050 U CN 207318050U CN 201721026061 U CN201721026061 U CN 201721026061U CN 207318050 U CN207318050 U CN 207318050U
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Abstract
The utility model principally falls into astronomical observation field, and in particular to the device of inhomogeneities in a kind of test probe pixel.Described device includes point light source system and motion platform；The motion platform causes detector to be measured to be moved on XYZ three-dimensionals；The point light source system provides the image patch less than detector pixel dimension, and motion platform is placed in point light source system side, and the point light source is imaged in the detector pixel of the point light source system.The apparatus and method that the utility model provides inhomogeneities in measurement detector picture, inhomogeneities in detector pixel can be measured using the apparatus and method, easy to screen out the poor detector of uniformity, while the data that measurement obtains can be used as the calibration of detector photographic subjects image.
Description
Technical field
The utility model principally falls into astronomical observation field, and in particular to inhomogeneities in a kind of test probe pixel
Device.
Background technology
The astronomical observation of optical region mainly has Photometric observation and spectrum observation, is chased after in fact, observational astronomy is one
Ultimate attainment subject is sought, there is very high requirement to equipment, in order to improve the signal-to-noise ratio of observed object, generally requires deep refrigerating detection
Device reduces dark noise；Detector needs very high quantum efficiency, very low reading noise；It is required that have fine linear response,
The photoelectric characteristic such as response homogeneity between pixel.
The optical detector of specialty astronomical observation field first choice is still CCD at present, it has, and dynamic range is big, space is divided
The advantages such as resolution height, good linearity, noise be low, disclosure satisfy that requirement of the astronomical observation to detector.As operation principle and CCD phases
Same another optical detector CMOS, compared with Scientific Grade back illumination CCD camera, traditional cmos camera quantum efficiency is low, fills out
Fill that the factor is low, dynamic range is small, noise is high, so not being widely used in professional astronomical observation.Nearly more than ten years CMOS skill
Art develops rapidly, its performance has been obtained effective lifting, and in civil field, CMOS instead of CCD substantially becomes mainstream,
Professional astronomical observation field, some CMOS research and development manufacturer both domestic and external have been proposed Scientific Grade back-illuminated type CMOS chip, they
Have the characteristics that high-quantum efficiency, high frame frequency, low noise, without mechanical shutter, low in energy consumption.
But CCD and CMOS are a kind of large-scale semiconductive integrated devices, and production technology is considerably complicated, in the process of manufacturing
In, inevitably uneven, precipitation thickness the difference of generation doping concentration, and photoetching error, once finished product is made, it is this congenital
Property the defects of can not just change, so as to introduce fixed mode noise, inhomogeneities of pixel response etc. is shown as, because of device
And it is different, so, it is necessary to carry out actual measurement to detector before use, on the one hand for the high-precision applications such as astronomical observation
The poor detector of uniformity is screened out, the inhomogeneities data of another aspect test probe can be subject to follow-up observed result
Compensation.
The existing research on detector inhomogeneities is all that Non-uniform responsivity detector pixel is tested, i.e.,
Inhomogeneities on target surface between pixel, but the pixel structure of different type detector is also not quite similar, for example have in CMOS pixels
Relative complex circuit structure, this part is not photosensitive, so when light impinges upon above, photoelectric effect would not occur and inspire
Electronics, traditional CMOS fill factor, curve factors only have 30%, 40%, can be carried fill factor, curve factor by adding lenticule in chip surface
For height to more than 90%, this structure has astronomical Photometric observation what to influence, it is necessary to test on earth；Back-illuminated type section under state-of-the-art technology
The fill factor, curve factor of classes and grades in school CMOS cameras can reach 100%, but still have circuit structure in pixel, these structures are to pixel sense
It is just no that there is influence, have an impact to the light of which wave band, be required for testing.In fact, the detector of same type, such as full frame
CCD camera, due to material and the difference of manufacturing process, inhomogeneities is also not quite similar in pixel.Now, 2 meter level spaces are looked in the distance
The heavy caliber ground telescope such as mirror, 4 meter levels, 8 meter levels, Twelve-Meter Class is required for the large scale focal plane camera that CCD splices, and how to select
It is the problem that we need to solve that the good CCD chip of performance, which carries out splicing,.Existing research does not recognize that pixel
Influence of the interior inhomogeneities to observed result, also lacks the apparatus and method detected to inhomogeneities in pixel.
Utility model content
In view of the above-mentioned problems, the utility model provides a kind of device of inhomogeneities in test probe pixel.The dress
Put using stable point light source, be imaged point light source diverse location in the pixel of detector, analyze image patch flow and ellipticity
A series of change, by testing pixels, to evaluate and test the inhomogeneities in detector pixel.
The utility model is achieved through the following technical solutions：
The device of inhomogeneities in a kind of test probe pixel, described device include point light source system and motion platform；
The motion platform causes detector to be measured to be moved on XYZ three-dimensionals；
The point light source system provides the image patch less than detector pixel dimension, i.e. the energy of image patch 80% concentrates on one
In pixel, usually during the test, the full width at half maximum of image patch can be also adjusted to 1.5,2.0 pixels or so by we, and simulation is true
Corresponding inhomogeneities in pixel under real observed case, motion platform are placed in point light source system side, and the point light source is in institute
State imaging in the pixel of point light source system.
Further, the motion platform includes sample stage, moving mechanism and rotating mechanism, and the sample stage is used to place
Detector to be measured is set, and the moving mechanism causes the sample stage to be moved on XYZ three-dimensionals；The rotating mechanism makes
The detector is obtained to rotate on sample stage.
Further, described device includes control system, and the control system is connected and controls with the motion platform
The movement of the motion platform.
Further, the point light source system includes sequentially connected light source, filter system, cone and camera lens；
The light source is connected with collimater；
The filter system is the pin hole or pin hole runner detachably replaced；
The diaphragm detachably replaced or diaphragm runner are provided between the cone and camera lens；
The length of the cone is related with camera lens, and camera lens has a minimum focal distance, and the length of cone is big
In the minimum focal distance equal to camera lens, so ensure that image patch being capable of focus；
The distance of detector to be measured and the camera lens on the motion platform is not more than rear cout off distance, then by soft
Part automatic focusing function, by controlling the parallel and platform of device optical axis to move, completes focusing.
The aperture of pin hole is selected according to different detectors, and image patch is adjusted to detector sub-pixed mapping using pin hole；
The aperture selection gist image quality of diaphragm is, it is necessary to be uniformly distributed the energy of the light of whole annulus in empty burnt image quality.
Further, the control system includes analysis system, and the analysis system is connected with the detector, divides in real time
Analyse the image patch flow and ellipticity of the image of the detector shooting；
The control system can control the movement of the moving mechanism according to the analysis result of the analysis system.
Further, the light source is LED light source, optical source wavelength 365nm, 385nm, 405nm, 455nm, 470nm,
505nm, 530nm, 590nm, 617nm, 625nm, 660nm, 730nm, 780nm, 810nm, 850nm, 940nm, according to treating probing
Device selection suitable sources are surveyed, if detector is the detector of Lan Min, the partially blue target of observation, then the emphasis of test is exactly indigo plant
End, selects 365nm, 385nm, 405nm, 455nm；If detector is red quick detector, the partially red target of observation, then test
Emphasis be exactly red end, may be selected 660nm, 730nm, 780nm, 850nm, 940nm；If detector is sensitive in visible ray, see
The target of survey is also visible light wave range, then focal selection 455nm, 530nm, 617nm, 730nm.
A kind of method of inhomogeneities in test probe pixel, the method by point light source in detector pixel into
Picture, shoots to obtain image patch image of the point light source in pixel during diverse location, analysis point light source is different in pixel using detector
The image patch flow and ellipticity of image patch image at position.
Further, the described method comprises the following steps：
Light source is set：Suitable point light source is selected according to detector so that the image patch size of point light source can be less than detection
Device pixel dimension；The point light source is imaged in detector；
Focusing：The detector on the platform of mobile optical axis direction, detector captured in real-time point-sourcre imaging image patch, meter
The full width at half maximum of detector shooting image patch is calculated, full width at half maximum numerical value is considered focal position when minimum, recording focus position, is completed
Focusing；
Image patch is calibrated：Rotate the detector, detector captured in real-time point-sourcre imaging image patch, calculating detector shooting picture
Full width at half maximum, ellipticity, the flow of spot, adjusting apparatus position is recorded when full width at half maximum, ellipticity, flow meet threshold value, completes picture
Spot is calibrated；
Follow shot：Make detector mobile according to certain step-length in a certain direction and shoot, obtain at diverse location
Image patch image；
Data analysis：Analyze the image patch flow and ellipticity of image patch image.
Further, the light-source brightness meets that hot spot flow is about the half of completely trap.
Further, in the follow shot step, the direction of detector movement is X-direction, Y-direction and XY directions（I.e.
Detector diagonal）.
The advantageous effects of the utility model：
（1）The apparatus and method that the utility model provides inhomogeneities in measurement detector pixel, using the device and
Method can measure inhomogeneities in detector pixel, and easy to screen out the poor detector of uniformity, while measurement obtains not
Uniformity data can be used as the calibration of detector photographic subjects image.
（2）Light source, pin hole, lens barrel, diaphragm are detachably replaced in the device of the utility model, can be according to different to be measured
Detector selects the light source of different wave length, the pin hole of different pore size, diaphragm and various sizes of lens barrel, has universality.
（3）The utility model is controlled by control system, and the degree of automation is high, and measurement is convenient, and precision is high.
Brief description of the drawings
Point light source system schematic diagram in Fig. 1, the utility model embodiment 1；
Motion platform schematic diagram in Fig. 2, the utility model embodiment 1；
Device use flow diagram in Fig. 3, the utility model embodiment 1；
Focus in Fig. 4, the utility model embodiment 1 flow chart；
Image patch calibrates flow chart in Fig. 5, the utility model embodiment 1；
Fig. 6, the utility model embodiment 1 measure obtained flow changing curve；
Fig. 7, the utility model embodiment 1 measure obtained ellipticity change curve；
Fig. 8, the utility model embodiment 2 measure obtained flow changing curve；
Fig. 9, the utility model embodiment 2 measure obtained ellipticity change curve；
Figure 10, the utility model embodiment 3 measure obtained flow changing curve；
Figure 11, the utility model embodiment 3 measure obtained ellipticity change curve.
In figure：1. stablize LED light source；2. runner A；3. cone；4. runner B；5. camera lens；6. stent；7. base；8. three
Tie up high precision displacement platform；9. pitching, inclination and swing offset platform；10. detector to be measured.
Embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, is explained in further detail the utility model.It should be appreciated that specific embodiment described herein is used only for explaining
The utility model, is not used to limit the utility model.
On the contrary, the utility model cover it is any be defined by the claims do in the spirit and scope of the utility model
Replacement, modification, equivalent method and scheme.Further, it is right below in order to make the public have a better understanding the utility model
It is detailed to describe some specific detail sections in the detailed description of the utility model.Do not have for a person skilled in the art
The description of these detail sections can also understand the utility model completely.
Embodiment 1
The device of inhomogeneities in a kind of test probe pixel, described device include point light source system and motion platform.
Motion platform includes sample stage, moving mechanism 8 and rotating mechanism 9, and the sample stage is used to place detection to be measured
The long time electricity GSENSE400BSI sCMOS of device 10 are set, and the moving mechanism 8 causes the sample stage in XYZ three-dimensionals
Upper movement；The rotating mechanism 9 is so that the long time electricity GSENSE400BSI sCMOS of detector 10 turn on sample stage
It is dynamic.
Point light source system includes sequentially connected light source 1, runner A2, cone 3 and camera lens 5；
Camera lens 5 uses Nikon 50mm f1.8；
Light source 1 is connected with collimater；Light source is LED light source, optical source wavelength 365nm；
Runner B4 is provided between cone 3 and camera lens 5, since lens aperture is made of regular polygon, using in camera lens
Aperture, easily corner position formed thorn aristiform diffraction image, influence to test, so adding circular incidence before camera lens
Diaphragm, can inhibit veiling glare, while reduce entrance pupil, improve image quality, increase the depth of field.
The aperture of pin hole has：2um、5um、10um、20um、50um；The aperture of diaphragm has：4cm、3cm、2cm、1cm、
0.5cm；Pinhole aperture and the aperture of the diaphragm is used to be respectively in the example：10um and 2cm.
The aperture of pin hole need to be selected according to different detectors, and the pixel dimension of different detectors is different, need to be by image patch tune
To sub-pixed mapping, the camera lens maximum amplification times yield that the present apparatus uses is about 0.152 times, so the aperture of selection pin hole and detector picture
Elemental size is basically identical can.
Diaphragm is primarily to optimization image quality and stop veiling glare, the selection of diaphragm are needed according to image quality, i.e., first by light
Spot is tuned into out of focus to one annulus, and in the case of lens aperture standard-sized sheet, camera lens coma is than more serious, by diaphragm by diameter by big
Sequentially added to small in light path, check empty burnt image quality, the light of whole annulus, which is uniformly distributed, can determine which diaphragm used.
The size of the cone is：Outside diameter 68mm, internal diameter 62mm, long 450mm.
The length of cone 3 is related with camera lens 5, and camera lens 5 has a minimum focal distance, and the length of cone 3 is big
In the minimum focal distance equal to camera lens 5, so ensure image patch can focus, we use Nikon 50 in the present embodiment
The manual tight shot of f1.8, its most short focal distance is 45cm, so the Design of length of cone is 45cm.Due to runner
The bore of A and runner B are 62mm, so the internal diameter of cone 3 is designed as 62mm, in order to make cone 3 in mobile whole device
When sustain the weight of whole device, so the wall thickness of cone 3 is designed as 3mm, therefore outside diameter is 68mm.
Cone 3 uses aluminium, integrally does blackening process, can effectively reduce influence of the veiling glare to experiment.
For the distance of the motion platform and the camera lens according to being identified below, the present apparatus uses 50 f1.8's of Nikon
Manual tight shot, rear cut-off distance are 46.5mm, so camera to be measured to be adjusted to the position of about 46mm after camera lens first, are then passed through
Automatic software automatic focusing function, by controlling the platform parallel to device optical axis to move, completes focusing.
Runner A, runner B can replace with monolithic pin hole and monolithic diaphragm accordingly.
Point light source system further includes stent 6 and base 7, and to support point light source system, stabilized light source is simultaneously easy to carry.
Described device includes control system, and the control system is connected with the motion platform and controls the movement flat
The movement of platform, detector shoot exposure etc..
The control system includes analysis system, and the analysis system is connected with the detector, analyzes the spy in real time
Survey the image patch flow and ellipticity of the image of device shooting；
The control system can control the movement of the moving mechanism according to the analysis result of the analysis system.
A kind of method of inhomogeneities in test probe pixel, the method by point light source in detector pixel into
Picture, shoots to obtain image patch image of the point light source in pixel during diverse location, analysis point light source is different in pixel using detector
The image patch flow and ellipticity of image patch image at position.
Further, the method is as shown in figure 3, comprise the following steps：
Light source is set：Suitable image patch is selected according to detector so that the size of image patch is less than detector pixel dimension；Institute
Point light source is stated to be imaged in detector；The light-source brightness meets that hot spot flow is about the half of completely trap；
The energy of image patch 80% is concentrated in a pixel, and usually during the test, we also can be by half Gao Quan of image patch
It is wide to be adjusted to 1.5,2.0 pixels or so, simulate the interior inhomogeneities responded of pixel in the case of true astronomical observation；
Focusing：The detector on the platform of mobile optical axis direction, detector captured in real-time point-sourcre imaging image patch, meter
The full width at half maximum of detector shooting image patch is calculated, full width at half maximum numerical value is considered focal position when minimum, recording focus position, is completed
Focusing；
Image patch is calibrated：Rotate the detector, detector captured in real-time point-sourcre imaging image patch, calculating detector shooting picture
Full width at half maximum, ellipticity, the flow of spot, adjusting apparatus position is recorded when full width at half maximum, ellipticity, flow meet threshold value, completes picture
Spot is calibrated；Image patch calibration flow chart is as shown in Figure 5；
Follow shot：Make detector mobile according to certain step-length in a certain direction and shoot, obtain at diverse location
Image patch image；
Data analysis：Analyze the image patch flow and ellipticity of image patch image.
Further, in the follow shot step, the direction of detector movement is X-direction, Y-direction and XY directions（Visit
Survey device diagonal）.
It is specific to be specially to Inhomogeneity measurement in detector pixel using the apparatus and method of the present embodiment：
（1）Suitable light source is placed on specific location manually, regulates light-source brightness, hot spot flow about expires trap half
；
（2）Suitable pin hole and diaphragm are selected according to testing requirement, runner is adjusted using control system；
（3）8 focus point of control moving mechanism automatically adjusts, and is formed in analysis system analysis focussing process during each position
Image patch full width at half maximum, and the full width at half maximum of each image patch is compared, when full width at half maximum is minimum, records position at this time
As focus；
（4）Due to being difficult once just to make light normal incidence to camera target surface in installation process, so needing to analyze image patch
Ellipticity, adjusts rotating mechanism 9 to adjust pitching, inclination and swing offset of the detector on platform, analysis system analyzes this mistake
The image patch ellipticity of position in journey, judges the position of image patch ellipticity minimum, while when full width at half maximum meets test request
The mechanism that stops operating rotates, and completes detector test initial position and sets；
（5）With step（4）Definite test initial position rises, and starts to test inhomogeneities in detector pixel,
Control system command displacement platform often moves a step-length in X direction, and camera shoots an image patch image, analysis system analysis picture
Spot flow and ellipticity simultaneously record, and then continue along same direction movement and shooting image, record data after analysis, eventually form
One flow and ellipticity change curve, as shown in Figure 6, Figure 7.After the completion of X-direction test, Y-direction is tested and along XY directions picture
The situation of change of spot.
Embodiment 2
The present embodiment is substantially the same manner as Example 1, light source has been changed to 850nm, contrast test same probe is in difference
Inhomogeneities situation in pixel under wave band light source.The change curve of flow and ellipticity is measured, such as Fig. 8, Fig. 9.
Embodiment 3
The present embodiment is substantially the same manner as Example 1, and difference lies in be changed to Andor DV435 CCD phases by detector to be measured
Machine, contrast test is under test session same case, different type camera, Non-uniform responsivity in the pixel of CCD and CMOS.Survey
The change curve of flow and ellipticity is obtained, such as Figure 10, Figure 11.
Claims (6)
- A kind of 1. device of inhomogeneities in test probe pixel, it is characterised in that described device include point light source system and Motion platform；The motion platform causes detector to be measured to be moved on XYZ three-dimensionals；The point light source system provides the image patch less than detector pixel dimension, and motion platform is placed in point light source system side, institute Point light source is stated to be imaged in the pixel of the detector.
- 2. device as claimed in claim 1, it is characterised in that the motion platform includes sample stage, moving mechanism and rotating machine Structure, detector to be measured are installed on the sample stage by the rotating mechanism, and moving mechanism is connected with sample stage, the movement Mechanism makes the sample stage be moved on XYZ three-dimensionals；The rotating mechanism causes the detector to be rotated on sample stage.
- 3. device as claimed in claim 2, it is characterised in that described device includes control system, the control system with it is described Motion platform is connected, and controls the movement of the motion platform.
- 4. device as claimed in claim 1, it is characterised in that the point light source system includes sequentially connected light source, filter system System, cone and camera lens；The light source is connected with collimater；The filter system is the pin hole or pin hole runner detachably replaced；The diaphragm detachably replaced or diaphragm runner are provided between the cone and camera lens；The length of the cone is related with camera lens, and the length of cone is greater than the minimum focal distance equal to camera lens；The distance of the motion platform and the camera lens is not more than rear cout off distance.
- 5. device as claimed in claim 3, it is characterised in that the control system includes analysis system, the analysis system with The detector is connected, and analyzes the image patch flow and ellipticity of the image of the detector shooting in real time；The control system controls the movement of the moving mechanism according to the analysis result of the analysis system.
- 6. device as claimed in claim 4, it is characterised in that the light source is LED light source, optical source wavelength 365nm, 385nm, 405nm、455nm、470nm、505nm、530nm、590nm、617nm、625nm、660nm、730nm、780nm、810nm、850nm Or 940nm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107449587A (en) * | 2017-08-16 | 2017-12-08 | 中国科学院国家天文台 | The device and method of inhomogeneities in a kind of test probe pixel |
| CN109257595A (en) * | 2018-11-23 | 2019-01-22 | 中国科学院长春光学精密机械与物理研究所 | The system of Photo-Response Non-Uniformity in a kind of testing image sensor pixel |
-
2017
- 2017-08-16 CN CN201721026061.0U patent/CN207318050U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107449587A (en) * | 2017-08-16 | 2017-12-08 | 中国科学院国家天文台 | The device and method of inhomogeneities in a kind of test probe pixel |
| CN109257595A (en) * | 2018-11-23 | 2019-01-22 | 中国科学院长春光学精密机械与物理研究所 | The system of Photo-Response Non-Uniformity in a kind of testing image sensor pixel |
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