CN207289794U - A kind of baffle ring suitable for grinding head - Google Patents
A kind of baffle ring suitable for grinding head Download PDFInfo
- Publication number
- CN207289794U CN207289794U CN201721241388.XU CN201721241388U CN207289794U CN 207289794 U CN207289794 U CN 207289794U CN 201721241388 U CN201721241388 U CN 201721241388U CN 207289794 U CN207289794 U CN 207289794U
- Authority
- CN
- China
- Prior art keywords
- baffle ring
- cleaning
- hole
- threaded hole
- grinding head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000004140 cleaning Methods 0.000 claims abstract description 38
- 238000005457 optimization Methods 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000000356 contaminant Substances 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- NWFNSTOSIVLCJA-UHFFFAOYSA-L copper;diacetate;hydrate Chemical compound O.[Cu+2].CC([O-])=O.CC([O-])=O NWFNSTOSIVLCJA-UHFFFAOYSA-L 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The utility model provides a kind of baffle ring suitable for grinding head, is circumferentially uniformly provided with multiple cleaning holes on baffle ring, each cleaning hole is respectively between two neighboring threaded hole.The beneficial effects of the utility model：By being uniformly arranged multiple cleaning holes in the circumferential direction of baffle ring, each cleaning hole is respectively positioned between two neighboring threaded hole, often grinding terminates a piece of wafer, grinding head constantly rotates, water washes away baffle ring inner wall by cleaning hole, baffle ring is more efficiently cleaned, without setting extra cleaning step just to achieve the purpose that optimization cleaning baffle ring, avoid because baffle ring inner wall depositing contaminants influence processing quality.
Description
Technical field
It the utility model is related to technical field of semiconductors, more particularly to a kind of baffle ring suitable for grinding head.
Background technology
During chemical mechanical grinding (chemical mechanical polish, CMP), grinding head (head) is grinding
During the direct carrier of most important wafer (wafer).The main consumptive material of Head is baffle ring (retainer ring) and membrane
(membrane).Its guide ring is buckled in membrane outer ring, and playing prevents wafer scribing while lapping liquid (slurry) is uniformly divided
The effect on cloth grinding pad (pad) surface, baffle ring are usually annular ring, and 18 threaded holes, above-mentioned screw thread are evenly arranged with baffle ring
Hole is used for the fixation of baffle ring, and the opening direction of threaded hole is vertical with the radial direction layer of baffle ring.
Constantly supply lapping liquid is easy to remain between baffle ring and membrane gap and formed crystallization in process of lapping, crystallizes
Falling on grinding pad can cause to scrape, and bring flaw even to scrap.In rear end chemical mechanical grinding, between baffle ring and membrane gap
A large amount of verdigris aggregations can be also produced, this is also one of source scraped.
Utility model content
For problems of the prior art, the utility model provides a kind of baffle ring suitable for grinding head.
Embodiments herein is described in detail below, but what the application can be defined by the claims and cover
Multitude of different ways is implemented.
The utility model adopts the following technical solution：
A kind of baffle ring suitable for grinding head, the baffle ring are annular, are uniformly provided with multiple threaded holes on the baffle ring, often
The opening direction of a threaded hole is vertical with the radial direction of the baffle ring respectively；
Multiple cleaning holes are circumferentially uniformly provided with the baffle ring, each cleaning hole is respectively positioned at two neighboring described
Between threaded hole.
Preferably, a cleaning hole is equipped between the two neighboring threaded hole.
Preferably, the cleaning hole is oval.
Preferably, the line substantially symmetrical about its central axis of the cleaning hole is overlapped with the Axisymmetric Distributed Line of the two neighboring threaded hole.
Preferably, the quantity of the threaded hole is 18.
Preferably, the quantity of the cleaning hole is 18.
The beneficial effects of the utility model：By being uniformly arranged multiple cleaning holes in the circumferential direction of baffle ring, each cleaning hole is equal
Between two neighboring threaded hole, often grinding terminates a piece of wafer, and grinding head constantly rotates, and water washes away baffle ring by cleaning hole
Inner wall, allows baffle ring more efficiently to be cleaned, without setting extra cleaning step just to reach the mesh of optimization cleaning baffle ring
, avoid because baffle ring inner wall depositing contaminants influence processing quality.
Brief description of the drawings
Fig. 1 is one of structure diagram of baffle ring in a kind of preferred embodiment of the utility model；
Fig. 2 is the second structural representation of baffle ring in a kind of preferred embodiment of the utility model；
Fig. 3 is the third structural representation of baffle ring in a kind of preferred embodiment of the utility model.
Embodiment
It should be noted that in the case where there is no conflict, following technical proposals, can be mutually combined between technical characteristic.
Specific embodiment of the present utility model is further described below in conjunction with the accompanying drawings：
As shown in Figs. 1-3, a kind of baffle ring suitable for grinding head, the baffle ring are annular, are uniformly provided with above-mentioned baffle ring 1
Multiple threaded holes 2, the opening direction of each above-mentioned threaded hole 2 are vertical with the radial direction of above-mentioned baffle ring 1 respectively；
Multiple cleaning holes 3 are circumferentially uniformly provided with above-mentioned baffle ring 1, each above-mentioned cleaning hole 3 is respectively positioned at two neighboring
Between above-mentioned threaded hole 2.
In the present embodiment, by being uniformly arranged multiple cleaning holes 3 in the circumferential direction of baffle ring 1, each cleaning hole 3 is respectively positioned on phase
Between adjacent two threaded holes 2, often grinding terminates a piece of wafer, and grinding head constantly rotates, and water is washed away in baffle ring 1 by cleaning hole 3
Wall, allows baffle ring 1 more efficiently to be cleaned, without setting extra cleaning step just to reach the mesh of optimization cleaning baffle ring 1
, remove remaining lapping liquid and verdigris between baffle ring 1 and membrane gap, will caused by lapping liquid crystallizes wafer scratch by
30% is reduced to 15%, reduces each grinding head reset time 0.5hour, improves efficiency 30%.
In preferred embodiment, an above-mentioned cleaning hole 3 is equipped between two neighboring above-mentioned threaded hole 2.
In preferred embodiment, above-mentioned cleaning hole 3 is oval.
In the present embodiment, other shapes can be also adjusted to according to the actual requirements.
In preferred embodiment, the axial symmetry of the line substantially symmetrical about its central axis of above-mentioned cleaning hole 3 and two neighboring above-mentioned threaded hole 2
Line overlaps.
In the present embodiment, the line substantially symmetrical about its central axis of cleaning hole 3 is overlapped with the Axisymmetric Distributed Line of two neighboring above-mentioned threaded hole 2
It is capable of providing cleaning effect.
In preferred embodiment, the quantity of above-mentioned threaded hole 2 is 18, and the quantity of above-mentioned cleaning hole 3 is 18.
In the present embodiment, the quantity of cleaning hole 3 according to 2 quantity of threaded hole on baffle ring 1 and baffle ring 1 with being adjusted.
By explanation and attached drawing, the exemplary embodiments of the specific structure of embodiment are given, it is new based on this practicality
Type spirit, can also make other conversions.Although above-mentioned utility model proposes existing preferred embodiment, however, these contents
It is not intended as limiting to.
For a person skilled in the art, after reading described above, various changes and modifications undoubtedly will be evident.
Therefore, appended claims should regard whole variations and modifications of the true intention for covering the utility model and scope as.
Any and all scope and content of equal value, are all considered as the intention and model for still belonging to the utility model in Claims scope
In enclosing.
Claims (6)
1. a kind of baffle ring suitable for grinding head, the baffle ring is annular, is uniformly provided with multiple threaded holes on the baffle ring, each
The opening direction of the threaded hole is vertical with the radial direction of the baffle ring respectively；It is characterized in that,
Multiple cleaning holes are circumferentially uniformly provided with the baffle ring, each cleaning hole is located at the two neighboring screw thread respectively
Between hole.
2. baffle ring according to claim 1 a, it is characterised in that cleaning is equipped between the two neighboring threaded hole
Hole.
3. baffle ring according to claim 1, it is characterised in that the cleaning hole is oval.
4. baffle ring according to claim 1, it is characterised in that the line substantially symmetrical about its central axis of the cleaning hole and two neighboring institute
The Axisymmetric Distributed Line for stating threaded hole overlaps.
5. baffle ring according to claim 1, it is characterised in that the quantity of the threaded hole is 18.
6. baffle ring according to claim 1, it is characterised in that the quantity of the cleaning hole is 18.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721241388.XU CN207289794U (en) | 2017-09-26 | 2017-09-26 | A kind of baffle ring suitable for grinding head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721241388.XU CN207289794U (en) | 2017-09-26 | 2017-09-26 | A kind of baffle ring suitable for grinding head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207289794U true CN207289794U (en) | 2018-05-01 |
Family
ID=62439719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721241388.XU Active CN207289794U (en) | 2017-09-26 | 2017-09-26 | A kind of baffle ring suitable for grinding head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207289794U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114131502A (en) * | 2021-11-02 | 2022-03-04 | 北京子牛亦东科技有限公司 | Check ring of grinding head for chemical mechanical grinding equipment |
-
2017
- 2017-09-26 CN CN201721241388.XU patent/CN207289794U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114131502A (en) * | 2021-11-02 | 2022-03-04 | 北京子牛亦东科技有限公司 | Check ring of grinding head for chemical mechanical grinding equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee after: Wuhan Xinxin Integrated Circuit Co.,Ltd. Country or region after: China Address before: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee before: Wuhan Xinxin Semiconductor Manufacturing Co.,Ltd. Country or region before: China |