CN207231518U - One kind is used for mono-crystalline silicon side skin fall detecting apparatus - Google Patents
One kind is used for mono-crystalline silicon side skin fall detecting apparatus Download PDFInfo
- Publication number
- CN207231518U CN207231518U CN201720521358.8U CN201720521358U CN207231518U CN 207231518 U CN207231518 U CN 207231518U CN 201720521358 U CN201720521358 U CN 201720521358U CN 207231518 U CN207231518 U CN 207231518U
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- Prior art keywords
- touching bar
- bar
- whereabouts
- whereabouts frame
- touching
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- Expired - Fee Related
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 15
- 239000013078 crystal Substances 0.000 claims description 15
- 238000003754 machining Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 3
- 230000001960 triggered effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- 230000008054 signal transmission Effects 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
It the utility model is related to monocrystalline silicon process equipment ancillary equipment, it is desirable to provide one kind is used for mono-crystalline silicon side skin fall detecting apparatus.This kind, which is used for mono-crystalline silicon side skin fall detecting apparatus, includes touching bar part and whereabouts frame part, whereabouts frame part includes whereabouts frame torr disk, whereabouts frame supporting seat, whereabouts frame rubber pad, flaw-piece draw runner, and touching bar part includes supporting rack, touching bar, touching bar mounting base, touching bar clump weight, touching bar hinge, signal frizzen, proximity sensor, sensor mount；The proximity sensor is fixed on supporting rack by sensor mount.Using the utility model, flaw-piece whereabouts information can be fed back in time, reduce the redundancy time in integral device operational process, lifting means overall processing efficiency.
Description
Technical field
The utility model is to be used for mono-crystalline silicon side skin on monocrystalline silicon process equipment ancillary equipment field, more particularly to one kind
Fall detecting apparatus.
Background technology
Silicon single crystal material is mostly important photovoltaic generation raw material, as photovoltaic industry is grown rapidly, silicon single crystal production capacity
Constantly lifting.Silicon single crystal often has vertical pulling method, zone-melting process etc. with preparation method, and monocrystalline silicon prepared by such method is in cylindrical type.
Prepare the silicon single crystal rod completed need to through blocking, butt, grinding, the process such as section, process and be used to manufacture solar battery sheet
Silicon chip.
In monocrystalline silicon cutting, mainly there are disk saw cut, band saw cut, free abrasive wire saw cutting and Buddha's warrior attendant wire cutting.
Various cutting modes can all produce flaw-piece, and it is also to cut the important criterion whether completed that whether flaw-piece, which comes off,.
Utility model content
The main purpose of the utility model is that overcome deficiency of the prior art, there is provided one kind can detect flaw-piece in time
The device of lower falling signal.In order to solve the above technical problems, the solution of the utility model is：
One kind is provided and is used for mono-crystalline silicon side skin fall detecting apparatus, including touching bar part and whereabouts frame part, under described
Falling frame part includes whereabouts frame torr disk, whereabouts frame supporting seat, whereabouts frame rubber pad, flaw-piece draw runner；The whereabouts frame torr Pan Bao
The horizontal segment and bevel phase of connection are included, whereabouts frame rubber pad is laid on the surface of bevel phase, and the edge of bevel phase is additionally provided with flaw-piece
Draw runner, horizontal segment are used for the lower section for being arranged on crystal bar machining area；
The touching bar part include supporting rack, touching bar, touching bar mounting base, touching bar clump weight, touching bar hinge,
Signal frizzen, proximity sensor, sensor mount；The proximity sensor is fixed on supporting rack by sensor mount
On；The touching bar is the touching bar (design at an angle) of 7 fonts, and touching bar is by touching bar hinge and touching bar mounting base
On supporting rack, touching bar clump weight is arranged on the upper end of touching bar, and the lower end for touching bar is equipped with guiding shape elbow (conveniently
Flaw-piece shipment), the lower end for touching bar is contacted with the bevel phase of whereabouts frame torr disk；The signal frizzen is also mounted on touching bar
And separated with proximity sensor, and ensure：Bar upper end is touched under field conditions (factors) into horizontal positioned, when having flaw-piece along whereabouts frame
When pallet slides next, when touching the lower end of bar can be jacked up, signal frizzen is moved with the angle change of touching bar, makes letter
Number frizzen realizes the detection that opposite side subcutaneously falls close proximity to sensor and trigger signal；
The whereabouts frame part is equipped with two, is separately positioned on the left and right sides of crystal bar, passes through whereabouts frame support feet respectively
Seat is installed on device chassis (whereabouts frame torr disk is of an inclined plane, and device chassis refers to the chassis of monocrystalline silicon process equipment), under making
Fall the horizontal segment of frame torr disk in the lower section of crystal bar machining area；The touching bar part also is provided with two, is utilized respectively supporting rack
On device chassis, and it is provided in by corresponding whereabouts frame part, enables lower end and the whereabouts frame torr disk of touching bar
Bevel phase contacts.
As a further improvement, the bevel angle of the whereabouts frame torr disk bevel phase is between 30 °~60 °.
The operation principle of the utility model：After flaw-piece comes off, flaw-piece drops to the horizontal level buffering of whereabouts frame torr disk,
And slip on inclined-plane, during flaw-piece glides, contact and jack up touching bar, touch the signal frizzen on bar with touching bar
Moved centered on hinge axis, and be installed in the proximity sensor on supporting rack and sense, proximity sensor is i.e. by signal
Transmission feedback detection information.
Compared with prior art, the beneficial effects of the utility model are：
Using the utility model, flaw-piece whereabouts information can be fed back in time, when reducing the redundancy in integral device operational process
Between, lifting means overall processing efficiency.
Brief description of the drawings
Fig. 1 is the front view of the utility model.
Fig. 2 is the weight schematic diagram of frizzen and frizzen clump weight.
Reference numeral in figure is：1 whereabouts frame supporting seat；2 whereabouts frame torr disks；3 whereabouts frame rubber pads；4 flaw-piece draw runners；
5 touching bars；6 supporting racks；7 proximity sensors；8 sensor mounts；9 touching bar mounting bases；10 touching bar clump weights；11 signals
Frizzen；12 touching bar hinges；13 crystal bars；14 flaw-pieces；15 device chassis.
Embodiment
The utility model is described in further detail with embodiment below in conjunction with the accompanying drawings：
One kind as shown in Figure 1, which is used for mono-crystalline silicon side skin fall detecting apparatus, includes touching bar part and whereabouts frame part,
When butt process flaw-piece 14 falls, the flaw-piece 14 of whereabouts can be automatically detected, whereabouts signal transmission is returned in central control system
And it is identified.
The whereabouts frame part includes whereabouts frame torr disk 2, whereabouts frame supporting seat 1, whereabouts frame rubber pad 3, flaw-piece draw runner
4.The whereabouts frame torr disk 2 includes the horizontal segment of connection and bevel phase, whereabouts frame rubber pad 3 are laid on the surface of bevel phase, tiltedly
The edge of face section is additionally provided with flaw-piece draw runner 4, and the bevel angle of bevel phase is generally between 30 °~60 °.Horizontal segment is located at crystal bar
Below 13 machining areas.
The touching bar part includes supporting rack 6, touching bar 5, touching bar mounting base 9, touching bar clump weight 10, touching bar
Hinge 12, signal frizzen 11, proximity sensor 7, sensor mount 8, proximity sensor 7 are solid by sensor mount 8
It is scheduled on 6 relevant position of supporting rack.The touching bar 5 into 7 fonts, design at an angle, touching bar 5 is by touching bar hinge 12
It is installed on touching bar mounting base 9 on supporting rack 6.Touching bar clump weight 10 is arranged on the upper end of touching bar 5, the weight of clump weight
A1 need to be more than the weight of touching bar 5 A2 centered on touching bar hinge 12, refer to Fig. 2.There is a guiding shape in the lower end of touching bar 5
Elbow, facilitates 14 shipment of flaw-piece, and the lower end of touching bar 5 is contacted with the bevel phase of whereabouts frame torr disk 2.Signal frizzen 11 is installed on
Separated on touching bar 5 and with proximity sensor 7：5 upper end of bar is touched under field conditions (factors) into horizontal positioned, when have flaw-piece 14 along
Whereabouts frame torr disk 2 slides the lower end that bar 5 is touched when coming when being jacked up, signal frizzen 11 with the angle change of touching bar 5 and
Mobile, signal frizzen 11 illustrates that flaw-piece 14 successfully falls close proximity to sensor 7 and trigger signal.
Whereabouts frame part is equipped with two, is separately positioned on the left and right sides of crystal bar 13, passes through whereabouts frame supporting seat 1 respectively
It is of an inclined plane installed in (device chassis 15 refers to the chassis of monocrystalline silicon process equipment) on device chassis 15, the frame torr that causes to fall and break disk 2
Horizontal segment in the lower section of 13 machining area of crystal bar.Touching bar part also be provided with two, be utilized respectively supporting rack 6 be installed on set
On standby chassis 15, and it is provided in by corresponding whereabouts frame part, enables the lower end and the inclined-plane of whereabouts frame torr disk 2 of touching bar 5
Section contact.
During utility model works, it is specially：After flaw-piece 14 is cut through, it can be separated by gravity from crystal bar 13
To 2 horizontal segment buffering area of whereabouts frame torr disk, afterwards turn over along 2 bevel phase of whereabouts frame torr disk to downslide, wherein whereabouts frame torr disk 2
On whereabouts frame rubber pad 3 and flaw-piece draw runner 4 primarily to protection 14 gouge of flaw-piece, falls under flaw-piece 14 at touching bar 5, around
Touching bar hinge 12,5 lower end of touching bar rises, and signal frizzen 11 also and then rises, and is triggered to therewith installed in supporting rack 6
On proximity sensor 7, proximity sensor 7 i.e. by signal transmission feedback PLC perform in next step act.Flaw-piece 14 has manually taken
Afterwards, touch 5 lower end of bar and decline reset, signal frizzen 11 also follows decline and 7 separating signal of proximity sensor, returns to normal.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new
Type is not limited to above example, can also there is many variations.Those of ordinary skill in the art can be from disclosed in the utility model
All deformations for directly exporting or associating in content, are considered as the scope of protection of the utility model.
Claims (2)
1. one kind is used for mono-crystalline silicon side skin fall detecting apparatus, including touching bar part and whereabouts frame part, it is characterised in that institute
Stating whereabouts frame part includes whereabouts frame torr disk, whereabouts frame supporting seat, whereabouts frame rubber pad, flaw-piece draw runner；The whereabouts frame torr
Disk includes the horizontal segment of connection and bevel phase, whereabouts frame rubber pad are laid on the surface of bevel phase, and the edge of bevel phase is additionally provided with
Flaw-piece draw runner, horizontal segment are used for the lower section for being arranged on crystal bar machining area；
The touching bar part includes supporting rack, touching bar, touching bar mounting base, touching bar clump weight, touching bar hinge, signal
Frizzen, proximity sensor, sensor mount；The proximity sensor is fixed on supporting rack by sensor mount；
The touching bar is the touching bar of 7 fonts, and touching bar is installed on supporting rack by touching bar hinge and touching bar mounting base, touched
Touching lever clump weight is arranged on the upper end of touching bar, and the lower end for touching bar is equipped with guiding shape elbow, touches lower end and the whereabouts frame of bar
The bevel phase contact of pallet；The signal frizzen is also mounted on touching bar and is separated with proximity sensor, and ensures：Certainly
Bar upper end is touched under the conditions of so into horizontal positioned, when having flaw-piece to slide along whereabouts frame torr disk to come, the lower end for touching bar can quilt
During jack-up, signal frizzen is moved with the angle change of touching bar, is made signal frizzen close proximity to sensor and is triggered
Signal, realizes the detection that opposite side subcutaneously falls；
The whereabouts frame part is equipped with two, is separately positioned on the left and right sides of crystal bar, is pacified respectively by whereabouts frame supporting seat
On device chassis, the horizontal segment of the frame torr that causes to fall and break disk is in the lower section of crystal bar machining area；The touching bar part also is provided with
Two, supporting rack is utilized respectively on device chassis, and is provided in by corresponding whereabouts frame part, is made under touching bar
End can be contacted with the bevel phase of whereabouts frame torr disk.
2. one kind according to claim 1 is used for mono-crystalline silicon side skin fall detecting apparatus, it is characterised in that the whereabouts frame
The bevel angle of pallet bevel phase is between 30 °~60 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720521358.8U CN207231518U (en) | 2017-05-11 | 2017-05-11 | One kind is used for mono-crystalline silicon side skin fall detecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720521358.8U CN207231518U (en) | 2017-05-11 | 2017-05-11 | One kind is used for mono-crystalline silicon side skin fall detecting apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207231518U true CN207231518U (en) | 2018-04-13 |
Family
ID=61838986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720521358.8U Expired - Fee Related CN207231518U (en) | 2017-05-11 | 2017-05-11 | One kind is used for mono-crystalline silicon side skin fall detecting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207231518U (en) |
-
2017
- 2017-05-11 CN CN201720521358.8U patent/CN207231518U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180413 |