CN207183208U - A kind of admission gear and pre-cleaning cavity - Google Patents
A kind of admission gear and pre-cleaning cavity Download PDFInfo
- Publication number
- CN207183208U CN207183208U CN201720714993.8U CN201720714993U CN207183208U CN 207183208 U CN207183208 U CN 207183208U CN 201720714993 U CN201720714993 U CN 201720714993U CN 207183208 U CN207183208 U CN 207183208U
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- Prior art keywords
- plate
- cover plate
- admission gear
- channel
- gas
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Abstract
The utility model provides a kind of admission gear and pre-cleaning cavity.Admission gear of the present utility model includes cover plate and protection board, wherein, inlet channel is provided with cover plate, the inlet channel is connected with source of the gas；Cushion chamber is provided between cover plate and protection board；Gas outlet is provided with protection board；The process gas that source of the gas provides passes sequentially through inlet channel, cushion chamber and gas outlet and enters process cavity, and, admission gear also includes block piece, the block piece is arranged in cushion chamber, and gas outlet can be blocked, to stop that the particulate matter for entering cushion chamber from gas outlet reaches the cover plate, cover plate is prevented to be contaminated.Pre-cleaning cavity of the present utility model includes admission gear of the present utility model.Admission gear provided by the utility model and pre-cleaning cavity, cover plate can be avoided to be contaminated, so as to improve the service life of equipment.
Description
Technical field
Field of semiconductor devices is the utility model is related to, in particular it relates to a kind of admission gear and pre-cleaning cavity.
Background technology
In physical gas-phase deposition equipment, especially for integrated circuit (IC), silicon perforation (TSV), encapsulation
(Packaging) manufacturing process is, it is necessary to which a kind of prerinse (Preclean) process cavity, carries out pre-cleaning processes, with deposition gold
Before belonging to film, the pollutant of crystal column surface, or groove and the residue of perforated bottom are removed.In general pre-cleaning processes, it is
By process gas, such as Ar (argon gas), He (helium), excite as plasma, utilize the chemical reaction and physics of plasma
Bombardment is acted on, and the processing of decontamination is carried out to wafer.
At present, upper air mechanism is set generally at the top of reaction chamber, to convey process gas into reaction chamber.Figure
1 is the structure chart of existing upper air mechanism.Fig. 2 is the upward view of Tu1Zhong upper airs mechanism.Fig. 3 is enterprising mechanism of qi in Fig. 1
The partial sectional view of structure.Also referring to Fig. 1~Fig. 3, upper air mechanism includes upper cover plate 1 and is arranged on the bottom of upper cover plate 1
Protection board 2, inlet channel 3 is provided with upper cover plate 1, and multiple gas outlets 4, multiple outlets are provided with protection board 2
Mouth 4 is located at the edge of protection board 2, and symmetrical along the circumference of protection board 2, as shown in Figure 2.Moreover, in the upper cover plate 1
Lower surface forms fluted, and the upper surface of the groove and protection board 2 forms center-aisle 5, and the center-aisle 5 leads to air inlet respectively
The outlet side in road 3 is connected with each gas outlet 4, and process gas is successively via inlet channel 3, center-aisle 5 and each outlet
Mouth 4 is flowed into reaction chambers, and the flow direction of the process gas is as indicated by the arrows in fig. 3.
Above-mentioned upper air mechanism is inevitably present problems with actual applications：
As shown in figure 4, the pollutant in reaction chamber can from bottom to top pass through gas outlet 4, and enter center-aisle
In 5, it is attached on the inwall of upper cover plate 1, so as to cause pollution to upper cover plate 1, due to being difficult that upper cover plate 1 is cleaned
And replacing, so as to reduce the service life of equipment.
Utility model content
The utility model is intended at least solve one of technical problem present in prior art, it is proposed that a kind of admission gear
And pre-cleaning cavity, it can avoid the contaminated problem of cover plate, so as to improve the service life of equipment.
According to one side of the present utility model, there is provided a kind of admission gear includes cover plate and protection board, wherein, described
Inlet channel is provided with cover plate, the inlet channel is connected with source of the gas；It is provided between the cover plate and the protection board
Cushion chamber；Gas outlet is provided with the protection board；The process gas that the source of the gas provides pass sequentially through the inlet channel,
The cushion chamber and the gas outlet enter process cavity,
The admission gear also includes block piece, and the block piece is arranged in the cushion chamber, and can block described
Gas outlet, to stop that the particulate matter for entering the cushion chamber from the gas outlet reaches the cover plate, prevent that the cover plate is dirty
Dye.
Alternatively, plate-like body is included according to admission gear of the present utility model, the block piece, wherein,
There is first passage between the plate-like body and the cover plate；
There is second channel in the plate-like body, or have between the plate-like body and the side wall of the cushion chamber
Second channel；
There is third channel between the plate-like body and the protection board；
The process gas passes sequentially through the inlet channel, the first passage, the second channel, the threeway
Road and the gas outlet enter the process cavity.
Alternatively, included according to admission gear of the present utility model, the first passage：
The first recess being arranged in the plate-like body, and/or the second recess being arranged on the cover plate；Wherein,
First recess and second recess are respectively arranged at the plate-like body surface relative with the cover plate
On.
Alternatively, according to admission gear of the present utility model, there is second channel in the plate-like body；
The second channel be along the plate-like body thickness direction set through hole, and the through hole deviate with it is described go out
The relative position of gas port.
Alternatively, included according to admission gear of the present utility model, the third channel：
The 3rd recess being arranged in the plate-like body, and/or the 4th recess being arranged on the protection board；Its
In,
3rd recess and the 4th recess are respectively arranged at the plate-like body table relative with the protection board
On face.
Alternatively, it is corresponding with the center of the plate-like body according to admission gear of the present utility model, the gas outlet；
The through hole is multiple, and multiple through holes are using the center of the plate-like body as the circle of center of circle distribution at least one.
Alternatively, a plurality of recessed channel is included according to admission gear of the present utility model, the 3rd recess；Wherein,
One end of a plurality of recessed channel converges in the opening position corresponding with the gas outlet；
The other end of a plurality of recessed channel extends to opening position corresponding with multiple through holes correspondingly, and and its
The corresponding through hole connection.
Alternatively, according to admission gear of the present utility model, the gas outlet is conical through-hole, the footpath of the conical through-hole
One end larger to area of section is towards the process cavity.
Alternatively, according to admission gear of the present utility model, multiple institutes are included between the cover plate and the protection board
Cushion chamber and multiple gas outlets are stated, multiple cushion chambers are corresponded with multiple gas outlets and set, and each
The block piece is provided with cushion chamber.
According to another aspect of the present utility model, there is provided a kind of pre-cleaning cavity, including cavity and it is arranged at cavity wall
On admission gear, the admission gear uses admission gear of the present utility model.
The utility model has the advantages that：
Admission gear provided by the utility model, by being provided with block piece in cushion chamber, the block piece can hide for it
The gas outlet kept off in protection board, to stop that the particulate matter for entering cushion chamber from the gas outlet reaches cover plate, cover plate is prevented to be contaminated,
So as to improve the service life of equipment.Pre-cleaning cavity provided by the utility model, it is carried by using the utility model
The above-mentioned admission gear supplied, the service life of equipment can be improved.
Brief description of the drawings
Fig. 1 is the structure chart of existing upper air mechanism；
Fig. 2 is the upward view of Tu1Zhong upper airs mechanism；
Fig. 3 is the partial sectional view of Tu1Zhong upper airs mechanism；
Fig. 4 is the schematic diagram that pollutant enters center-aisle；
Fig. 5 is the sectional view for the admission gear that the utility model first embodiment provides；
The upward view for the admission gear that Fig. 6 the utility model first embodiment provides；
Fig. 7 is the enlarged drawing in I regions in Fig. 5；
Fig. 8 is the sectional view for the admission gear that the utility model second embodiment provides；
Fig. 9 A are the superstructure figure for the block piece that the utility model second embodiment uses；
Fig. 9 B are the lower junction composition for the block piece that the utility model second embodiment uses；
Figure 10 is the distribution schematic diagram of pollutant；
Figure 11 is the sectional view for the admission gear that the utility model 3rd embodiment provides；
Figure 12 is the upward view for the guard member that the utility model 3rd embodiment uses；
Figure 13 is the structure chart for the pre-cleaning cavity that the utility model embodiment provides.
Embodiment
To make those skilled in the art more fully understand the technical solution of the utility model, come below in conjunction with the accompanying drawings to this
The admission gear and pre-cleaning cavity that utility model provides are described in detail.
Embodiment 1
The admission gear provided also referring to Fig. 5~Fig. 7, the present embodiment, it is located at the top of process cavity, and including lid
Plate 6 and the protection board 7 for being arranged on the bottom of cover plate 6, the two is fixedly connected by multiple screws 11, as shown in fig. 6, multiple screws
11 is symmetrical along the circumference of cover plate 6.Also, as shown in figure 5, be provided with inlet channel 61 in cover plate 6, the inlet channel 61
Inlet end 611 extend at the bottom margin of cover plate 6, and be connected with source of the gas (not shown)；The outlet of inlet channel 61
End extends to the center position of cover plate 6.Cushion chamber 9 is provided between cover plate 6 and protection board 7.Also, in the protection board 7
In be provided with gas outlet 71, the gas outlet 71 is similarly positioned in the center position of cover plate 6.The process gas that above-mentioned source of the gas provides according to
It is secondary that process cavity is entered by inlet channel 61, cushion chamber 9 and gas outlet 71.Preferably, as shown in fig. 7, gas outlet 71 is taper
Through hole, one end that the radial section area of the conical through-hole is larger are set towards process cavity, i.e. are set, gone out certainly with increase down
The range of scatter for the gas that gas port 71 sprays, so as to improve the distributing homogeneity of gas.
Moreover, as shown in fig. 7, being provided with block piece 8 in above-mentioned cushion chamber 9, the block piece 8 can block gas outlet
71, to stop that the particulate matter for entering cushion chamber from gas outlet 71 reaches cover plate 6, prevent that cover plate 6 is contaminated, set so as to improve
Standby service life.The structure of above-mentioned block piece 8 should meet while gas outlet 71 are blocked, to make the gas entered in cushion chamber
By, and enter gas outlet 71.
Specifically, in the present embodiment, block piece 8 includes plate-like body, wherein, have between the plate-like body and cover plate 6
There is first passage, i.e. the horizontal clearance between the roof of the upper surface of plate-like body and cushion chamber 9；In plate-like body with delaying
Rushing between the side wall of chamber 9 has second channel, i.e. the annular gap between the side wall of the side of plate-like body and cushion chamber 9；
There is third channel, i.e. the water between the lower surface of plate-like body and the bottom wall of cushion chamber 9 between plate-like body and protection board 7
Flat gap.Process gas passes sequentially through inlet channel 61, above-mentioned first passage, second channel, third channel and gas outlet 71 and entered
Enter process cavity.Thus, the structure of above-mentioned block piece 8 meets while gas outlet 71 are blocked, and makes the gas entered in cushion chamber
By, and enter gas outlet 71.
It should be noted that in the present embodiment, admission gear is located at the top of process cavity, but the utility model is not
This is confined to, in actual applications, admission gear may be located on other optional positions of process cavity, such as the one of process cavity
Side.
Embodiment 2
Also referring to Fig. 8~Figure 10, compared with above-mentioned first embodiment, it is distinguished for the admission gear that the present embodiment provides
It is only that：The structure of block piece 8 is different.
Specifically, block piece 8 includes plate-like body, and the plate-like body takes the inner space of whole cushion chamber 9, also,
There is first passage, as shown in Fig. 9 A, the first passage includes being arranged in plate-like body between plate-like body and cover plate 6
First recess 81, first recess 81 is located at the upper surface of plate-like body, and is formed with the roof of cushion chamber 9 on the other side
State first passage.In actual applications, the first recess 81 can also be not provided with, but the second recess is set on cover plate 6, this
Two recesses are located at the lower surface of cover plate 6, and form above-mentioned first passage with plate-like body on the other side.Or can also be same
When above-mentioned first recess and the second recess are set, the two docking forms above-mentioned first passage.
In the present embodiment, there is second channel in plate-like body, as shown in Fig. 9 A and Fig. 9 B, the second channel is
The through hole 82 set along plate-like body thickness direction, and through hole 82 deviates the position relative with gas outlet 71.In the present embodiment
In, gas outlet 71 is corresponding with the center of plate-like body, and through hole 82 is multiple, and multiple through holes 82 are with the center of plate-like body
Enclosed for center of circle distribution at least one, so that process gas can be flowed into gas outlet 71 by each through hole 82 simultaneously.
In the present embodiment, there is third channel, the third channel includes being arranged on plate between plate-like body and protection board 7
The 3rd recess 83 on shape body, the 3rd recess 83 are located at the lower surface of plate-like body, and with cushion chamber 9 on the other side
Bottom wall forms above-mentioned third channel.In actual applications, the 3rd recess 83 can also be not provided with, but is set on protection board 7
4th recess, the 4th recess is located at the upper surface of protection board 7, and forms above-mentioned threeway with plate-like body on the other side
Road.Or above-mentioned 3rd recess and the 4th recess can also be set simultaneously, the two docking forms above-mentioned third channel.
Preferably, above-mentioned 3rd recess 83 includes multiple recessed channel, and one end of multiple recessed channel is (close to block piece 8 in Fig. 9 B
The one end at center) opening position corresponding with gas outlet 71 is converged in, the other end of multiple recessed channel is (close to block piece 8 in Fig. 9 B
Edge one end) be connected correspondingly with multiple through holes 82.So, into the space limited by above-mentioned first recess 81
In gas, each recessed channel is respectively enterd by each through hole 82, then converged to by each recessed channel corresponding with gas outlet 71
Opening position, eventually enter into gas outlet 71.As shown in Figure 10, because recessed channel is narrower, the pollutant entered from gas outlet 71 can not
Through recessed channel, so as to further enhance the barrier effect to pollutant.
In the present embodiment, the first groove and second are respectively formed with two relative surfaces of cover plate 6 and protection board 7
Groove, the two docking form above-mentioned cushion chamber 9.The plate-like body of air inlet component 8 takes the inner space of whole cushion chamber 9,
That is, the shape of the global shape of plate-like body and above-mentioned cushion chamber 9 fits like a glove, to ensure the barrier effect to pollutant.When
So, in actual applications, only can also be formed on the lower surface of cover plate 6 (that is, the surface relative with protection board 7) it is fluted,
The upper surface (that is, the surface relative with cover plate 6) of the groove and protection board 7 forms above-mentioned cushion chamber 9.Or can also only it exist
Fluted, the above-mentioned cushion chamber 9 of lower surface composition of the groove and cover plate 6 is formed on the upper surface of protection board 7.
Preferably, in order to avoid there is spark phenomenon, it usually needs cover plate 6 is grounded, in such a situation it is preferred to,
First is provided between block piece 8 and cover plate 6 and lures electric coil 24, to strengthen the electric conductivity between block piece 8 and cover plate 6, so as to
Improve the earthing effect of block piece 8.It is similar therewith, second is provided between cover plate 6 and protection board 7 and lures electric coil 10,
To strengthen the electric conductivity between protection board 7 and cover plate 6, so as to improve the earthing effect of protection board 7.
It should also be noted that, in the present embodiment, above-mentioned cushion chamber 9 is located at the center position of cover plate 6, but this reality
It is not limited thereto with new, in actual applications, above-mentioned cushion chamber 9 can also be located off appointing for the center of cover plate 6
Meaning position, and the position of the outlet side 612 of inlet channel 61 and gas outlet 71 should be corresponding with the position of the cushion chamber 9.
Embodiment 3
Also referring to Figure 11 and Figure 12, the present embodiment provide upper air mechanism compared with above-mentioned first embodiment, its
Differ only in：Cushion chamber 9 is multiple.
Specifically, multiple cushion chambers 9 are located at the marginal position and center position of cover plate 6 respectively, and positioned at cover plate 6
Circumference of the multiple cushion chambers 9 along cover plate 6 at marginal position is symmetrical.Above-mentioned block piece 8 is provided with each cushion chamber 9.
Also, the quantity of the outlet side 612 of inlet channel 61 is corresponding with the quantity of above-mentioned cushion chamber 9, and each inlet channel 61
Outlet side 612 be connected correspondingly with each cushion chamber 9；As shown in figure 12, gas outlet 71 is multiple that its quantity is with delaying
It is corresponding to rush the quantity of chamber 9, and each gas outlet 71 is connected with each cushion chamber 9 correspondingly.
Certainly, in actual applications, multiple cushion chambers 9 can also be only located at the marginal position of cover plate 6, and along cover plate 6
It is circumferential symmetrical.Or the arrangement mode of multiple cushion chambers 9 according to different needs, can also be freely set, and air inlet is led to
The outlet side 612 in road 61 and the position of gas outlet 71 are corresponding with the position of cushion chamber 9.
In summary, admission gear provided by the utility model, it in cushion chamber by being provided with block piece, the stop
Part can block the gas outlet in protection board, to stop that the particulate matter for entering cushion chamber from the gas outlet reaches cover plate, prevent from covering
Plate is contaminated, so as to improve the service life of equipment.
As another technical scheme, as shown in figure 13, the utility model embodiment also provides a kind of pre-cleaning cavity
201, the pre-cleaning cavity 201 includes cavity and the admission gear 202 being arranged on cavity roof.The admission gear 202 uses
The admission gear that the above-mentioned each embodiment of the utility model provides, for conveying process gas into pre-cleaning cavity 201.
Moreover, in the present embodiment, medium cylinder 203 is provided with the cavity wall of above-mentioned pre-cleaning cavity 201, and
Radio-frequency coil 204 is surrounded with around the medium cylinder 203, it is electrically connected by upper adaptation 207 and upper radio-frequency power supply 208
Connect, upper radio-frequency power supply 208 is used to load radio-frequency power to radio-frequency coil 204, and electromagnetic field can lead to as caused by radio-frequency coil 204
Cross medium cylinder 203 to be fed into pre-cleaning cavity 201, to excite the process gas in pre-cleaning cavity 201 to form plasma.
Also, pedestal 205 is additionally provided with pre-cleaning cavity 201, it is electrically connected by lower adaptation 209 and lower radio-frequency power supply 208
Connect, lower radio-frequency power supply 208 is used to load radio frequency back bias voltage to pedestal 205, to attract plasma etching substrate surface.
The pre-cleaning cavity that the utility model embodiment provides, it is carried by using the above-mentioned each embodiment of the utility model
The above-mentioned admission gear supplied, the service life of equipment can be improved.
It is understood that embodiment of above is merely to illustrate that principle of the present utility model and used exemplary
Embodiment, but the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case of the spirit and essence of utility model, various changes and modifications can be made therein, and these variations and modifications are also considered as this reality
With new protection domain.
Claims (10)
1. a kind of admission gear, including cover plate and protection board, wherein, inlet channel, the air inlet are provided with the cover plate
Passage is connected with source of the gas；Cushion chamber is provided between the cover plate and the protection board；It is provided with out in the protection board
Gas port；The process gas that the source of the gas provides passes sequentially through the inlet channel, the cushion chamber and the gas outlet and enters work
Skill chamber, it is characterised in that
The admission gear also includes block piece, and the block piece is arranged in the cushion chamber, and can block the outlet
Mouthful, to stop that the particulate matter for entering the cushion chamber from the gas outlet reaches the cover plate, prevent the cover plate to be contaminated.
2. admission gear according to claim 1, it is characterised in that the block piece includes plate-like body, wherein,
There is first passage between the plate-like body and the cover plate；
There is second channel in the plate-like body, or have second between the plate-like body and the side wall of the cushion chamber
Passage；
There is third channel between the plate-like body and the protection board；
The process gas pass sequentially through the inlet channel, the first passage, the second channel, the third channel and
The gas outlet enters the process cavity.
3. admission gear according to claim 2, it is characterised in that the first passage includes：
The first recess being arranged in the plate-like body, and/or the second recess being arranged on the cover plate；Wherein,
First recess and second recess are respectively arranged on the plate-like body surface relative with the cover plate.
4. admission gear according to claim 3, it is characterised in that there is second channel in the plate-like body；
The second channel is the through hole set along the plate-like body thickness direction, and the through hole deviates and the gas outlet
Relative position.
5. admission gear according to claim 4, it is characterised in that the third channel includes：
The 3rd recess being arranged in the plate-like body, and/or the 4th recess being arranged on the protection board；Wherein,
3rd recess and the 4th recess are respectively arranged on the plate-like body surface relative with the protection board.
6. admission gear according to claim 5, it is characterised in that
The gas outlet is corresponding with the center of the plate-like body；
The through hole is multiple, and multiple through holes are using the center of the plate-like body as the circle of center of circle distribution at least one.
7. admission gear according to claim 6, it is characterised in that the 3rd recess includes a plurality of recessed channel；Wherein,
One end of a plurality of recessed channel converges in the opening position corresponding with the gas outlet；
The other end of a plurality of recessed channel extends to opening position corresponding with multiple through holes correspondingly, and corresponding
The through hole connection.
8. admission gear according to claim 1, it is characterised in that the gas outlet is conical through-hole, and the taper is led to
The larger one end of the radial section area in hole is towards the process cavity.
9. according to the admission gear described in claim any one of 1-8, it is characterised in that the cover plate and the protection board it
Between include multiple cushion chambers and multiple gas outlets, multiple cushion chambers are corresponded with multiple gas outlets and set
Put, and the block piece is provided with each cushion chamber.
10. a kind of pre-cleaning cavity, including cavity and the admission gear that is arranged on cavity wall, it is characterised in that the air inlet
Mechanism is using any described admission gears of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720714993.8U CN207183208U (en) | 2017-06-19 | 2017-06-19 | A kind of admission gear and pre-cleaning cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720714993.8U CN207183208U (en) | 2017-06-19 | 2017-06-19 | A kind of admission gear and pre-cleaning cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207183208U true CN207183208U (en) | 2018-04-03 |
Family
ID=61734073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720714993.8U Withdrawn - After Issue CN207183208U (en) | 2017-06-19 | 2017-06-19 | A kind of admission gear and pre-cleaning cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207183208U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107248492A (en) * | 2017-06-19 | 2017-10-13 | 北京北方华创微电子装备有限公司 | A kind of admission gear and pre-cleaning cavity |
-
2017
- 2017-06-19 CN CN201720714993.8U patent/CN207183208U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107248492A (en) * | 2017-06-19 | 2017-10-13 | 北京北方华创微电子装备有限公司 | A kind of admission gear and pre-cleaning cavity |
| CN107248492B (en) * | 2017-06-19 | 2019-07-05 | 北京北方华创微电子装备有限公司 | A kind of admission gear and pre-cleaning cavity |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180403 Effective date of abandoning: 20190705 |