CN207165573U - A kind of single photon polarization imaging array with convergence filter function - Google Patents
A kind of single photon polarization imaging array with convergence filter function Download PDFInfo
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- CN207165573U CN207165573U CN201720046956.4U CN201720046956U CN207165573U CN 207165573 U CN207165573 U CN 207165573U CN 201720046956 U CN201720046956 U CN 201720046956U CN 207165573 U CN207165573 U CN 207165573U
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Abstract
The utility model discloses a kind of single photon polarization imaging array with convergence filter function, structure is the Polarization Detection unit of two-dimensional and periodic arrangement, each polarize visits convergence coupled structure of the side unit including single-photon detector group and 4 different polarization directions, and polarization direction is respectively level, 45 degree of Right deviation, vertical and 45 degree of "Left"-deviationist.Convergence coupled structure is by incident light by being for sequence successively：Upper strata metal grating layer, transparent medium convergence-level, metal barrier and lower metal reflect photosphere.The utility model has the advantage of：Integrate polarization simultaneously to differentiate, converge coupling and filtering three zones, and can be highly integrated with various single-photon detectors.This has huge application value to fields such as the polarization encoder in quantum information, single photon polarization imaging technologies.
Description
Technical field
It the utility model is related to single photon detection and polarization imaging field, in particular to a kind of there is convergence filter function
Single photon polarization imaging array.
Background technology
With the development of single-photon detecting survey technology and the continuous expansion of its application field, for high-performance single photon detection skill
The demand of art is increasing, not only the proposition requirements at the higher level to detectivity（When low dark counting, high-quantum efficiency, short shake
Between etc.）, Single Photon Polarization detection is used as limiting snesibility photon measuring polarization state technology, in polarization imaging, quantum information skill
The fields such as art, biomedicine and astronomy have particularly important application value.However, most of traditional single-photon detectors are
Strength investigation, for polarization and it is insensitive.In order to realize that polarization selectivity detects, it usually needs additional in optical detector forehead
A upper polarization beam apparatus or independent polarization polarizer detection, but this method is needed by machinery rotation, it is impossible to obtain in real time
The polarization characteristic of incident light.Detected in order to facilitate real-time polarization, polarizer can be integrated in the surface of detector pixel so that be single
Only the response to a kind of polarization direction is maximum for the pixel of individual photodetector, and minimum to the polarization response in direction normal thereto.
The polarizer in 4 directions is set on 4 detector pixels, the polarization state of incident light is known by mathematical computations.This side
Method adds the detection of polarization state, can reflect polarization information not available in original intensity image, equivalent to increase
The dimension of one detectable signal, while it is maintained to the energy of the real-time direct imaging of original focus planar detector
Power.But current this integrated polarizing piece is typically employed in the lines grid of photodetector pixel surface fabrication cycle（Abbreviation line
Grid）The one-dimensional transmission grating that is formed is realized.Due to the limitation of detector pixel dimension, the size of polarizer is no more than picture
Elemental size is thus also restrained, and the condition of work of one-dimensional wire grid polarizer much deviates the working condition of ideal polarizer.Lead
Send a telegraph incident light of the field perpendicular to grating orientation and cause photoelectric respone in detector pixel, reduce the polarization of integrated polarizing piece
Selectance.
Meanwhile for single photon detection, the collection efficiency and dark counting of light are two extremely important performance parameters.
For superconducting nano-wire single-photon detector, it is generally all made up of a series of extremely narrow Nano-structures, it is difficult to is fabricated to
Large area detector, at present the technique of comparative maturity can only accomplish 10 μm or so of 10 μ m, light receiving area is very limited, leads
Cause light collection efficiency very low；For single-photon avalanche detector（SPAD）For, single carrier with regard to avalanche breakdown can be caused,
The electric current of macroscopic view is formed, so as to realize single photon detection.But its dark counting is generally larger, can subtract to reduce dark counting
Small photosurface size, but this can cause light receiving area to reduce again, cause light collection efficiency to reduce.As can be seen here, coupling convergence
All it is extremely important either to superconducting nano-wire single-photon detector or single-photon avalanche detector.In addition, background ring
Border veiling glare will also result in adverse effect to single photon detection, if can converge couple while effective filter background environment it is miscellaneous
Astigmatism, that will further lift single-photon detector performance.
Publication date is on June 19th, 2013, Publication No. CN103165723A Chinese invention patent document, is disclosed logical
Crossing annular convergence grating can realize that small area detector converges coupling, but without the function of Polarization Detection；Publication date is
On April 30th, 2014, Publication No. CN103762220A Chinese invention patent document, disclosing can realize that infrared band is inclined
Shake detection, but area of raster is big as device area, does not converge coupling, reduces the function of part table.
Utility model content
The purpose of this utility model is to propose a kind of single photon polarization imaging array with convergence filter function, existing inclined
Shake detecting function, there is the optical coupling structure of aggregation feature again, can realize Polarization Detection while improve superconducting nano-wire single photon
The responsiveness of detection, reduce the dark counting of APD detectors, it is significant for polarization single photon image.
The technical solution of the utility model is as follows：
A kind of single photon polarization imaging array with convergence filter function, it is characterised in that：Overall structure is two dimension week
The Polarization Detection unit of phase property arrangement, wherein each polarization spy side unit has difference partially including single-photon detector group and four
Shake the convergence coupled structure in direction, four convergence coupled structures are integrated in single-photon detector group, the adjacent convergence coupling of each two
The polarization direction for closing structure differs 45 degree.
During utility model works, while the optical response signal on four pixels is read, obtained in all directions
Stokes polarized components, then obtain by mathematical computations the polarization state of incident light.Then the incidence four pixels obtained
The signal of light different polarization state synthesizes the signal of a single pixel, then is repeated cyclically arrangement by such one group of quaternary
Two-dimensional array detector directly export imaging, form single photon polarization imaging array.
The single-photon detector group includes four one-to-one single-photon detectors and substrate, single-photon detector bag
Include but be not limited to superconducting nano-wire single photon detection array or single-photon avalanche detector, the material of substrate can be but not limited to
One kind in following material：Silicon, sapphire sheet, indium phosphide, gallium nitride, GaAs.
Four convergences coupled structure is identical structure, and the sequencing passed through by incident light is successively：Upper strata gold
Belong to grating layer, transparent medium convergence-level, metal barrier and lower metal reflect photosphere.The transparent medium convergence-level is located at
Between upper strata metal grating layer and lower metal reflect photosphere, the metal barrier is located at upper strata metal grating layer, transparent
Medium convergence-level and lower metal reflect the two sides of photosphere.The upper strata metal grating layer, transparent medium convergence-level, metal
Barrier layer and lower metal reflect four parts of photosphere and collectively form a micro-cavity structure, and the micro-cavity structure has partially simultaneously
Shake, converge coupling and the function of filtering.
The upper strata metal grating layer is the cycle to bep, cutting width bew、Thickness ish1One Dimension Periodic arrangement metal
Line grating, its material include but is not limited to metal material gold, silver or aluminium.Its cyclep, cutting widthwAnd thicknessh1By managing
Determine that the target for optimizing calculating is incident light wave is compressed into microcavity by the optimum results being calculated.For
Communication band（1550 nm）, theoretical calculation provides the dimensional parameters scope of design of following metal grating：1. the metal grating cyclep
Striped meets functionp=λ/n×N, wherein n is microcavity EFFECTIVE MEDIUM constant,NTo couple series；2. cutting widthwNumerical value be
4th/to five/5ths of cycle；3. the thickness of upper strata metal grating layerh1Value not less than metal grating material become skin depth
Twice of degree.Because without phase interaction between the upper and lower surface electromagnetic field of resonant coupling condition requirement upper strata metal grating layer
With requiring thicknessh1Value be not less than 2 times of skin depth.In near infrared band, the electromagnetic wave that theory provides is in gold
Skin depthd~0.0048·λ1/2, i.e. thicknessh1Not less than subduplicate 0.0096 times of the detection wavelength in units of micron,
The skin depth in ag materiald~0.0064·λ1/2, i.e. thicknessh1Not less than the square root of the detection wavelength in units of micron
0.0128 times.Upper strata metal grating layer has polarization selectivity function, i.e., for particular probe wavelength, only polarizes along gold
The incident light of category grating orientation can be coupled into microcavity, and incident light of the electric field perpendicular to metal grating direction cannot pass through light
Grid enter in microcavity.
The transparent medium convergence-level refers to that thickness ish2To transparent medium of the incident wavelength without absorption, composite material bag
Include but be not limited to silica, silicon nitride.Thicknessh2 optimum results obtained by theoretical calculation determine that optimizing the target of calculating is
Make to be coupled into the horizontal standing wave mode that the electromagnetic wave in coupled micro-cavity is formed and reach most strong.According to phasmon microcavity near field
Decoupling calls, thicknessh2It is necessarily less than 5 times of the equivalent optical wavelength of detected incident light（Effective wavelength is the optical wavelength in vacuum
Divided by the refractive index of this layer of material）.Such as the silica transparent medium that refractive index is 1.46, thicknessh2It should be not more than and visit
Survey wavelength 3.4 times.
The metal barrier at the both ends of medium convergence-level, its material include but is not limited to metal material gold, silver or
Aluminium；Its function is revealed in the light in microcavity is limited from both sides.
The lower metal reflects photosphere and referred to is in thicknessh3Metal level in perforate ensure converged light outgoing, its
Material includes but is not limited to metal material gold, silver or aluminium.Thicknessh3Value must not drop below the two of metal material skin depth
Times.Position of opening is gone out among photosphere at each period p/2 in left and right as perforate center, perforate using lower floor's metallic reflection is and metal grating
The consistent bar shaped cuttings of cutting width w of layer.
The utility model has the advantage of：
1）Using the convergence coupled structure being integrated on pixel, traditional wiregrating that integrated on pixel can be substituted to couple this
One main path.Integrate the polarization imaging of wiregrating on traditional pixel, the size of polarizer no more than pixel dimension thus by
Limitation, the condition of work of one-dimensional wire grid polarizer much deviate the working condition of ideal polarizer.Cause electric field perpendicular to grating
The incident light in direction causes photoelectric respone in detector pixel, reduces the polarization selectance of integrated polarizing piece.And converge coupling
The incident light receiving area for closing structure is much larger than pixel dimension, and close to the working condition of ideal polarizer, electric field is perpendicular to light
The incident light of grid bearing is difficult to reflect photosphere by lower metal to reach detection pixel, converges the polarization selectance of coupled structure
Greatly enhanced than the coupling of traditional wiregrating.
2）Convergence coupled structure has converged light function, can be on the premise of incident light energy is not lost by existing monochromatic light
Sub- avalanche probe table top further reduces, to reduce device dark counting.Simultaneously because incident photosensitive area is much larger than pixel
Area, therefore enhance device light collection efficiency.
3）Micro-cavity structure has filter function, while converging and coupling background stray light can be prevented for single-photon detecting
Survey the interference of signal.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation of the convergence coupled structure of the present invention
Fig. 3 is the convergence coupled structure of the present invention and the section schematic diagram of single photon detection.
Fig. 4 is the structural representation of embodiment 1.
Fig. 5 is the grating of embodiment 1 for TM and the transmission spectrum of TE polarized incident lights.
Fig. 6 is the structural representation of embodiment 2.
Embodiment
Embodiment 1
A kind of as shown in figure 1, single photon polarization imaging array with convergence filter function, it is characterised in that：Overall knot
Structure is the Polarization Detection unit of two-dimensional and periodic arrangement, wherein each polarization, which visits side unit, includes single-photon detector group and four
Convergence coupled structure with different polarization direction, four convergence coupled structures are integrated in single-photon detector group, each two
The polarization direction of adjacent convergence coupled structure differs 45 degree.
As shown in figure 4, the single photon polarization imaging array, in particular to one kind with convergence filter function of the present embodiment
The single photon polarization imaging array of based superconductive nano wire.Structure is the Polarization Detection unit of two-dimensional and periodic arrangement, wherein often
Individual polarization visits side unit and is integrated in the convergence coupling knot with different polarization direction thereon including single-photon detector group and 4
Structure, polarization direction are respectively level, 45 degree of Right deviation, vertical and 45 degree of "Left"-deviationist.Convergence coupled structure and single photon detection are shown in Fig. 3,
A length of 1550 nm of probing wave, is described in further detail with reference to accompanying drawing 3 to specific embodiment of the present utility model.
As shown in Fig. 2 convergence coupled structure is specially：Upper strata metal grating layer 41 is the metal wire of One Dimension Periodic arrangement
Grating, its material are gold.Cyclep=1.05 μm one shares 60 screen periods, cutting widthw=0.54 μm, thickness beh1=0.2μ
m.The composite material of transparent medium convergence-level 42 is silica.Its thicknessh2The optimum results obtained by theoretical calculation are 1 μm, this
When the horizontal standing wave mode that is formed of the electromagnetic wave that is coupled into coupled micro-cavity.Metal barrier 43 is in medium convergence-level 42
Both ends, its material are gold, and the light limited in microcavity is revealed from both sides.Lower metal reflects the thickness of photosphere 44h3=0.1 μm
Perforate ensures the outgoing of converged light in metal level, and its material is gold.Lower metal reflects perforate in photosphere 44 and ensures converged light
Outgoing, it is each that position of opening with lower floor's metallic reflection goes out left and right among photospherepIt is perforate center at/2=0.5 μm, perforate is and gold
Belong to the cutting width of grating layer 41w=0.5 μm of consistent bar shaped cutting, silica is filled in cutting.
Single-photon detector 11 is NbN superconducting nano-wire single photon detections, is grown on substrate 13, substrate material MgO.
NbN superconducting nano-wires photosurface forms rectangle by NbN superconducting nano-wire serpentine windings, and size is 4 × 10 μm.Due to need to be by superconduction
Nano wire reflects photosphere 44 with lower metal and completely cut off, therefore grows layer of transparent medium isolation layer in superconducting nano-wire
12, material is silica, thickness 200nm.
Fig. 5 is coupling aggregation infrastructure for TM and the transmission spectrum of TE polarized incident lights.It can be seen that for detecting wavelength
1550nm, polarization selection is than up to 94%, light transmission rate reaches 70%.Single photon signal enters the coupling that area is 63 × 10 μm
After structure, the only TM light near 1550nm passes through, and is accumulated the superconducting nano-wire photosurface that size is 4 × 10 μm
On, its convergence intensification factor is：63 4 × 70%=11 times of ÷.
Embodiment 2
As shown in fig. 6, the single photon polarization imaging array with convergence filter function of the present embodiment, specifically refers to one
Single photon polarization imaging array of the kind based on single-photon avalanche detector.Structure is the Polarization Detection list of two-dimensional and periodic arrangement
Member, wherein each polarization is visited, side unit includes single-photon detector group and 4 are integrated in the remittance thereon with different polarization direction
Poly- coupled structure, polarization direction are respectively level, 45 degree of Right deviation, vertical and 45 degree of "Left"-deviationist.Converge coupled structure and single-photon detecting
Fig. 3, a length of 1550 nm of probing wave are shown in survey, and specific embodiment of the present utility model is made further specifically with reference to accompanying drawing
It is bright.
As shown in Fig. 2 convergence coupled structure is specially：Upper strata metal grating layer 41 is the metal wire of One Dimension Periodic arrangement
Grating, its material are gold.Cyclep=1.05 μm one shares 80 screen periods, cutting widthw=0.54 μm, thickness beh1=0.2μ
m.The composite material of transparent medium convergence-level 42 is silica.Its thicknessh2The optimum results obtained by theoretical calculation are 1 μm, this
When the horizontal standing wave mode that is formed of the electromagnetic wave that is coupled into coupled micro-cavity.Metal barrier 43 is in medium convergence-level 42
Both ends, its material are gold, and the light limited in microcavity is revealed from both sides.Lower metal reflects the thickness of photosphere 44h3=0.1 μm
Perforate ensures the outgoing of converged light in metal level, and its material is gold.Lower metal reflects perforate in photosphere 44 and ensures converged light
Outgoing, it is each that position of opening with lower floor's metallic reflection goes out left and right among photospherepIt is perforate center at/2=0.5 μm, perforate is and gold
Belong to the cutting width of grating layer 41w=0.5 μm of consistent bar shaped cutting, silica is filled in cutting.
Single-photon detector 11 is the incident single-photon avalanche detector of the back of the body, and on the substrate 12, substrate material is indigo plant for growth
Jewel piece.Single-photon avalanche detector mesa dimensions are 15 × 10 μm.
After single photon signal enters the coupled structure that area is 84 × 10 μm, the only TM light near 1550nm is saturating
Cross, and be accumulated on the single-photon avalanche detector table top that size is 4 × 10 μm, be 65% calculating according to transmitance, it is converged
Intensification factor is：84 4 × 65%=13.7 times of ÷.
Claims (10)
- A kind of 1. single photon polarization imaging array with convergence filter function, it is characterised in that：Overall structure is two-dimension periodic Property arrangement Polarization Detection unit, wherein each polarization, which visits side unit, includes single-photon detector group（1）It is and individual with different inclined Shake the convergence coupled structure in direction（2）、（3）、（4）、（5）, the polarization direction of the adjacent convergence coupled structure of each two differs 45 degree.
- 2. the single photon polarization imaging array with convergence filter function according to claim 1, it is characterised in that：It is described Single-photon detector group（1）Including four single-photon detectors（11）And four corresponding substrates（12）, each single photon Detector（11）It is arranged at substrate（12）Interior or bottom.
- 3. the single photon polarization imaging array with convergence filter function according to claim 2, it is characterised in that：It is described Each single-photon detector（11）Including superconducting nano-wire single photon detection array or single-photon avalanche detector, substrate（12）'s Material is any one in silicon, sapphire sheet, indium phosphide, gallium nitride, GaAs.
- 4. the single photon polarization imaging array with convergence filter function according to claim 1, it is characterised in that：It is described Converge coupled structure（2）、（3）、（4）、（5）Polarization direction be respectively level, 45 degree of Right deviation, vertical and 45 degree of "Left"-deviationist.
- 5. the single photon polarization imaging array with convergence filter function according to claim 1, it is characterised in that：It is described Converge coupled structure（2）、（3）、（4）、（5）It is identical structure, each convergence coupled structure includes upper strata metal grating Layer（41）, transparent medium convergence-level（42）, metal barrier（43）Photosphere is reflected with lower metal（44）；The transparent medium Convergence-level（42）Positioned at upper strata metal grating layer（41）Photosphere is reflected with lower metal（44）Between, the metal barrier （43）Positioned at upper strata metal grating layer（41）, transparent medium convergence-level（42）Photosphere is reflected with lower metal（44）Both sides Face.
- 6. the single photon polarization imaging array with convergence filter function according to claim 5, it is characterised in that：It is described Upper strata metal grating layer（41）It is for line widths、Cycle isp, thickness beh1One Dimension Periodic arrangement metal wire grating, its material Matter is metal material gold or silver or aluminium.
- 7. the single photon polarization imaging array with convergence filter function according to claim 5, it is characterised in that：It is described Transparent medium convergence-level（42）For for transparent medium of the incident wavelength without absorption, material is silica or silicon nitride.
- 8. the single photon polarization imaging array with convergence filter function according to claim 5, it is characterised in that：It is described Metal barrier（43）Material be metal material gold, Huo Zheyin, or aluminium.
- 9. the single photon polarization imaging array with convergence filter function according to claim 5, it is characterised in that：It is described Lower metal reflects photosphere（44）It is to be in thicknessh3Metal level in offer light hole, the lower metal reflecting light Layer（44）Material for metal material gold or silver or aluminium；The lower metal reflects photosphere（44）Light hole gold Belong to width of fringe and upper strata metal grating layer（41）WidthsClose, light hole is coupling cavity direction along grating orientation.
- 10. the single photon polarization imaging array with convergence filter function according to claim 5, it is characterised in that：Institute State upper strata metal grating layer（41）CyclepNumerical value for detection wavelength half to 10/10ths, line widthsNumerical value be The a quarter of wavelength is detected between half, thicknessh1And thicknessh3Value be equal to or more than spy in units of micron Survey wavelength subduplicate 0.0096 times.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783905A (en) * | 2017-01-16 | 2017-05-31 | 中国工程物理研究院电子工程研究所 | A kind of single photon polarization imaging array with convergence filter function |
| CN109405972A (en) * | 2018-11-29 | 2019-03-01 | 天津津航技术物理研究所 | A kind of EO-1 hyperion polarized imaging system |
| CN111430396A (en) * | 2020-03-11 | 2020-07-17 | 中国科学院上海微系统与信息技术研究所 | Superconducting nanowire-based single photon polarization detection device and implementation device thereof |
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2017
- 2017-01-16 CN CN201720046956.4U patent/CN207165573U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783905A (en) * | 2017-01-16 | 2017-05-31 | 中国工程物理研究院电子工程研究所 | A kind of single photon polarization imaging array with convergence filter function |
| CN109405972A (en) * | 2018-11-29 | 2019-03-01 | 天津津航技术物理研究所 | A kind of EO-1 hyperion polarized imaging system |
| CN111430396A (en) * | 2020-03-11 | 2020-07-17 | 中国科学院上海微系统与信息技术研究所 | Superconducting nanowire-based single photon polarization detection device and implementation device thereof |
| CN111430396B (en) * | 2020-03-11 | 2024-06-11 | 中国科学院上海微系统与信息技术研究所 | Single photon polarization detection device based on superconductive nanowire and implementation device thereof |
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