CN207139536U - A kind of rubbing head of not ponding - Google Patents
A kind of rubbing head of not ponding Download PDFInfo
- Publication number
- CN207139536U CN207139536U CN201720904612.2U CN201720904612U CN207139536U CN 207139536 U CN207139536 U CN 207139536U CN 201720904612 U CN201720904612 U CN 201720904612U CN 207139536 U CN207139536 U CN 207139536U
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- lid
- rubbing head
- matrix
- clip assemblies
- top cover
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Abstract
The utility model discloses a kind of rubbing head of not ponding, the rubbing head includes：Clip assemblies；Lid, lid are movably mounted on clip assemblies and accommodating chamber are limited between clip assemblies；Matrix, matrix can be arranged on clip assemblies and in accommodating chamber up or down, and matrix is closely coupled with lid；Diaphragm, diaphragm are connected with clip assemblies and matrix respectively, and limit closed chamber.According to the rubbing head of not ponding of the present utility model, gapless between lid and the top of matrix, prevent polishing fluid from entering inside rubbing head, glossing and polishing effect will not be interfered with by extruding polishing fluid inside rubbing head so under the relative motion of clip assemblies and matrix.
Description
Technical field
A kind of chemical-mechanical polisher technical field is the utility model is related to, more particularly, to a kind of not ponding
Rubbing head.
Background technology
Sealed between on the outside of the lid and clip assemblies of polissoir in correlation technique, between having between lid and matrix
Gap, the gap that polishing fluid can be between lid and matrix enter the inside of polissoir, in polishing process, are deposited on polishing and set
Standby interior polishing fluid can outwards overflow, and then influence the polishing effect of the substrate of polissoir.
Utility model content
The utility model is intended at least solve one of technical problem present in prior art.Therefore, the utility model carries
Go out a kind of rubbing head of not ponding, the rubbing head can avoid polishing fluid from entering inside rubbing head and then influence polishing effect.
Included according to the rubbing head of not ponding of the present utility model：Clip assemblies；Lid, the lid are moveably mounted
Accommodating chamber is limited on the clip assemblies and between the clip assemblies；Matrix, described matrix can pacify up or down
On clip assemblies and in the accommodating chamber, described matrix and the lid are closely coupled；Diaphragm, the diaphragm difference
It is connected with the clip assemblies and described matrix, and limits closed chamber.
According to the rubbing head of not ponding of the present utility model, by the way that matrix and lid are in close contact so that lid and base
Gapless between the top of body, prevent polishing fluid from entering inside rubbing head, so under the relative motion of clip assemblies and matrix
Glossing and polishing effect will not be interfered with by extrusion polishing fluid inside rubbing head.
According to one embodiment of the present utility model, described matrix and the inner roof wall face of the lid are connected.
Alternatively, described matrix includes：Middle shaft part, the axis hole penetrate the middle shaft part, the lid along the vertical direction
Center be provided with through hole, the upper end of the middle shaft part passes through the through hole；Outer portion, the outer portion are set around the middle shaft part
Put, the outer portion is connected with the lid by bolt.
According to an optional example of the present utility model, the upper surface of the clip assemblies is provided with the second groove and part
Gland in the lid, the lid when moving up and down with the gland is at least part of coincides.
According to the further example of the utility model, the first sealing ring is provided between the gland and the clip assemblies.
Alternatively, one in the inner top surface of the upper surface of the outer portion and the lid is provided with the second sealing ring.
Alternatively, the internal perisporium of the outer peripheral face of the middle shaft part and the through hole is brought into close contact.
Alternatively, the lid includes：Top cover, described matrix are closely coupled in the diaphragm and the top cover；Coaming plate, institute
Coaming plate is stated to set around the top cover and extend downwardly from the periphery of top cover edge.
According to the optional example of the utility model, the top cover is horizontally disposed with.
According to the optional example of the utility model, it is connected between the top cover and the coaming plate by arc sections.
According to the optional example of the utility model, it is connected between the top cover and the coaming plate by rake.
According to the optional example of the utility model, the top cover along therefrom at the heart to the direction at the coaming plate gradually to
Under obliquely set.
Additional aspect and advantage of the present utility model will be set forth in part in the description, partly by from following description
In become obvious, or by it is of the present utility model practice recognize.
Brief description of the drawings
Of the present utility model above-mentioned and/or additional aspect and advantage will in the description from combination accompanying drawings below to embodiment
Become obvious and be readily appreciated that, wherein：
Fig. 1 is the schematic diagram according to the rubbing head of the utility model embodiment；
Fig. 2 is the schematic diagram according to the rubbing head of the utility model embodiment；
Fig. 3 is the schematic diagram according to the rubbing head of the utility model another embodiment；
Fig. 4 is the schematic diagram according to the rubbing head of the utility model embodiment；
Fig. 5 is the schematic diagram according to the rubbing head of the utility model another embodiment；
Fig. 6 is the schematic diagram according to the rubbing head of the utility model embodiment.
Reference：
100：Rubbing head；
10：Clip assemblies；11：Middle pivot；12：Second groove；13：3rd groove；14：Retaining ring；
20：Lid；20a：Accommodating chamber；21：Top cover；22：Coaming plate；23：Arc sections；24：Rake；
30：Matrix；30a：Axis hole；31：Middle shaft part；32：Outer portion；321：First groove；322：Pressure ring；
40：Diaphragm；
50：Gland；
60：First sealing ring；
70：Second sealing ring.
Embodiment
Embodiment of the present utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning
Same or similar element is represented to same or similar label eventually or there is the element of same or like function.Below by ginseng
The embodiment for examining accompanying drawing description is exemplary, is only used for explaining the utility model, and it is not intended that to of the present utility model
Limitation.
In description of the present utility model, it is to be understood that term " " center ", " on ", " under ", " vertical ", " level ",
The orientation or position relationship of the instruction such as " top ", " bottom " " interior ", " outer ", " axial direction ", " radial direction ", " circumference " are based on shown in the drawings
Orientation or position relationship, it is for only for ease of description the utility model and simplifies description, rather than indicates or imply signified dress
Put or element there must be specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to the utility model
Limitation.In addition, " first " is defined, the feature of " second " can be expressed or implicitly includes one or more spy
Sign.In description of the present utility model, unless otherwise indicated, " multiple " are meant that two or more.
, it is necessary to which explanation, unless otherwise clearly defined and limited, term " are pacified in description of the present utility model
Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integratedly
Connection；Can be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
Concrete meaning of the language in the utility model.
Rubbing head 100 below with reference to Fig. 1-Fig. 6 descriptions according to the not ponding of the utility model embodiment.
As shown in figure 1, clip assemblies 10, lid 20, matrix 30 are included according to the rubbing head 100 of the utility model embodiment
With diaphragm 40.
Wherein, lid 20 is arranged on clip assemblies 10, and can be moved (such as Fig. 1 and Fig. 2 institutes relative to clip assemblies 10
Show, lid 20 moves up and down relative to clip assemblies 10), accommodating chamber 20a, matrix are limited between lid 20 and clip assemblies 10
30 are arranged on clip assemblies 10 and can be moved up and down relative to clip assemblies 10, and matrix 30 is located in accommodating chamber 20a, matrix
30 is closely coupled with lid 20；Diaphragm 40 is connected with clip assemblies 10 and matrix 30 respectively, diaphragm 40 respectively with clip assemblies
10 are connected with matrix 30, and limit closed chamber, and gapless between matrix 30 and lid 20, diaphragm 40 is in clip assemblies 10
There is cushioning effect in relative motion with matrix 30.
According to the rubbing head 100 of the utility model embodiment, by the way that matrix 30 and lid 20 is closely coupled, lid ensure that
Sealing between body 20 and the top of matrix 30, avoiding polishing fluid from entering in accommodating chamber 20a causes polishing fluid in accommodating chamber 20a
Deposition, will not be by extruding polishing fluid so in matrix 30 and during snip 10 relative motion of component in accommodating chamber 20a, therefore will not shadow
Polishing effect and glossing are rung, the stability and good polishing effect that guarantee rubbing head 100 uses.
It should be further stated that the upper end of rotary drive mechanism (not shown) and rubbing head 100 is fixed, and drive throwing
Shaven head rotation, substrate (not shown) are pressed together between polishing pad (not shown) and the clip assemblies on polishing disk (not shown).Throw
CD rotates under drive mechanism drive, is moved forward and backward along planned orbit while 100 autobiography of rubbing head, substrate and polishing pad it
Between supply appropriate polishing fluid, so, chemistry, machinery comprehensive function under, realize the polishing effect to substrate.
In polishing process, the supply period of supply and polishing fluid for polishing fluid is respectively provided with strictly rubbing head 100
It is required that by matrix 30 and lid 20 it is closely coupled when, polishing fluid can not be deposited on inside rubbing head 100, efficiently avoid base
The phenomenon of the polishing fluid of extrusion deposition occurs with the relative motion of clip assemblies 10 for body 30, only suitable when being polished to substrate
The polishing fluid of amount supply is sprinkled upon on substrate, and the period for supplying polishing fluid also complies with glossing, does not interfere with the throwing to substrate
Light effect.
Alternatively, the inner roof wall face of matrix 30 and lid 20 is connected, and prevents polishing fluid from entering from the top of lid 20
Inside rubbing head 100, matrix 30 is avoided to extrude the polishing fluid being deposited on inside rubbing head 100 when moving up and down, and then
Influence polishing effect.
According to one embodiment of the present utility model, the center of clip assemblies 10 has the middle pivot 11 upwardly extended, in
Pivot 11 is fixed in the axis hole 30a on matrix 30, has the axis hole 30a being engaged with middle pivot 11 at the center of matrix 30,
Middle pivot 11 can be stretched into axis hole 30a, so as to realize the mating connection of matrix 30 and clip assemblies 10.
Alternatively, matrix 30 includes middle shaft part 31 and outer portion 32, and axis hole 30a penetrates middle shaft part 31 in the vertical direction,
Through hole is provided with lid 20, and the external diameter of middle shaft part 31 is equal with the diameter of through hole, the upper end of the middle shaft part 31 of matrix 30 can
Through the through hole of lid 20, being closely connected for matrix 30 and lid 20 is realized.
The outer portion 32 of matrix 30 is set around middle shaft part 31, and diaphragm 40 has cushioning effect, outer portion to outer portion 32
32 upper surface and the internal face of lid 20 are closely coupled so that keep being closely connected between outer portion 32 and lid 20,
Specifically, matrix 30 can be bolted with outer portion 32 so that connected between matrix 30 and lid 20 it is even closer, can
Lean on, it is closely overall to ensure that matrix 30 is connected formation one with lid 20.
In addition, after passing through through hole in the upper end of middle shaft part 31, between middle shaft part 31 and through hole, lid 20 and outer portion 32 it
Between be bolted, the two for be fitted close so that accommodating chamber 20a formed one closing cavity, effectively prevent from polishing
Liquid enters in accommodating chamber 20a the deposition for causing polishing fluid, avoids because matrix 30 and the relative motion of snip component 10 extrusion polish
Liquid influences polishing effect, ensures the smooth execution of glossing.
It should be noted that by being provided with through hole on matrix 30, the vacuum of chamber is controlled by external gas source, it is real
Existing clip assemblies 10 and the relative motion of matrix 30, wherein matrix 30 is fixed, inflates and causes into chamber when external gas source
When malleation is formed in chamber, clip assemblies 10 move (as shown in Figure 2) towards the direction away from matrix 30, when external gas source is from chamber
When interior pumping to be formed negative pressure in chamber, the direction of clip assemblies 10 to close matrix 30 is moved until (such as Fig. 1 that sets back
It is shown).
Further, the first groove 321 is provided with the lower surface of outer portion 32, the first groove 321 penetrates the outer of matrix 30
Side face, i.e. lower surface of the first groove 321 along outer portion 32 circumferentially extends to form first annular groove, in the lower surface of outer portion 32
Neighboring at be provided with pressure ring 322, one end of diaphragm 40 is pressed into the first groove 321 by pressure ring 322 so that diaphragm 40
One end be closely connected with outer portion 32, to ensure cushioning effect of the diaphragm 40 to matrix 30.
According to the further example of the utility model, the upper surface of clip assemblies 10 is provided with the second groove 12, is pressing from both sides in addition
Gland 50 is additionally provided with piece component 10, and the part of gland 50 is located in lid 20, the other end of diaphragm 40 is compressed by gland 50
In the second groove 12, circumference of second groove 12 along clip assemblies 10 is formed as the second annular groove, by the another of diaphragm 40
Side pressure enters in the second annular groove so that the connection between clip assemblies 10 and diaphragm 40 is reliable, it is ensured that matrix 30 and lid 20
In the cushioning effect of diaphragm 40, and diaphragm 40 is without departing from clip assemblies 10.
Alternatively, when lid 20 moves up and down, and gland 50 is at least part of overlaps, and can both avoid covering
Body 20 departs from gland 50, it is also ensured that the inside of rubbing head 100 is closed cavity.
According to one optional example of the utility model, the first sealing ring 60 is provided between gland 50 and clip assemblies 10,
First sealing ring 60 is used for the gap between the lower surface of sealing gland 50 and clip assemblies 10, avoids polishing fluid by gland 50 and folder
Gap between piece component 10 enters the inside of rubbing head 100, it is ensured that the sealing between gland 50 and clip assemblies 10.
Gland 50 is internally provided with fourth annular groove, and the fourth annular groove of gland 50 is arranged on the top of clip assemblies 10
On annular boss, gland 50 is arranged on the top of matrix 30, and the manhole at the middle part of lid 20 is arranged on the top of matrix 30, lid
The top of body 20 and matrix 30 is provided with the second sealing ring 70, there is one between the internal face of lid 20 and the outside wall surface of gland 50
Fixed gap, to ensure that the adaptivity that the gland 50 on lid 20 and the opposing clip component 10 of matrix 30 is done along the vertical direction is moved
It is dynamic.
Alternatively, the second sealing ring 70 is provided between the upper surface of outer portion 32 and the inner roof wall face of lid 20, is passed through
The gap that second sealing ring 70 comes between the inner roof wall face of sealing cover body 20 and the upper surface of outer portion 32, it is ensured that lid 20 and outer portion
Sealing between 32, prevent polishing fluid from being entered by the gap between lid 20 and outer portion 32 in accommodating chamber 20a, effectively keep away
Exempt from polishing process because being extruded for polishing fluid causes polishing effect not good enough.
Alternatively, the internal perisporium of the outer peripheral face of middle shaft part 31 and through hole is fitted close, it is to be understood that middle pivot 11
Outside dimension is equal with the diameter of through hole so that the just tight fit of middle pivot 11 and through hole, pivot 11 and lid in guarantee
Sealing between 20.
According to another embodiment of the present utility model, the 3rd groove 13 is provided with the lower surface of clip assemblies 10, the 3rd
The periphery of lower surface of the groove 13 along clip assemblies 10 circumferentially extends to form the 3rd annular groove, i.e. the 3rd annular groove insertion intermediate plate
The outer peripheral face of component 10, retaining ring 14 is provided with the 3rd groove 13, to prevent rubbing head 100 to be thrown out of in operation process,
There is fixation to rubbing head 100.
As shown in figure 1, according to the utility model optional embodiment, lid 20 includes top cover 21 and coaming plate 22, matrix 30
Diaphragm 40 with top cover 21 is closely coupled connects, be in close contact between the lower wall surface and matrix 30 of top cover 21, coaming plate 22 surrounds top cover
21 circularize setting and from the periphery of top cover 21 along extending downwardly, and top cover 21 and the collective effect of coaming plate 22 close accommodating chamber 20a
Get up, form a closed cavity, avoid polishing fluid by entering in accommodating chamber 20a.
As shown in figure 1, according to the optional example of the utility model, top cover 21 is horizontally disposed, and the surface of top cover 21 is in level
Face arrangement, convenient formation.
As shown in figure 1, in some specific examples of the present utility model, pass through arc sections 23 between top cover 21 and coaming plate 22
It is connected so that the transition between top cover 21 and coaming plate 22 is naturally, good appearance.
Fig. 2 is the schematic diagram of the extreme position of the example shown in Fig. 1, that is, pressure ring 322 and the intermediate plate being arranged on matrix 30
There is maximal clearance in the top of component 10, now, the coaming plate 22 on the vertical direction of lid 20 has one section mutually with gland 50
The position of coincidence, in CMP process, the polishing fluid of splashing can glide along the top of lid 20, be dropped in polishing disk
On (not shown), so it is possible to prevente effectively from polishing fluid enters the inside of rubbing head 100, prevent polishing fluid in matrix 30 and intermediate plate
It is extruded during 10 relative motion of component and then influences polishing effect.
As shown in figure 3, in other specific examples of the present utility model, pass through rake between top cover 21 and coaming plate 22
24 are connected, and so, falling the polishing fluid on lid 20 can be glided along top cover 21 by rake 24, be advantageous to polishing fluid
Downslide is dropped on polishing disk.
Fig. 4 is the schematic diagram of the extreme position of the example shown in Fig. 3, that is, pressure ring 322 and the intermediate plate being arranged on matrix 30
There is maximal clearance in the top of component 10, now, the coaming plate 22 of the vertical direction of lid 20 has one section with gland 50 and overlaps position
Put, the polishing fluid of splashing can glide along the top of lid 20, be dropped on polishing disk, so effectively can prevent polishing fluid from entering
The inside of rubbing head 100, prevent polishing fluid to be extruded and then influence polishing effect.
Reference picture 5, according to optional example of the present utility model, top cover 21 is along therefrom at the heart to the direction at coaming plate 22
Obliquely set gradually downward, the surface of top cover 21 is formed as taper surface, top cover 21 and 22 direct transition and linkage of coaming plate, so flies
The polishing fluid splashed is splashed down when on top cover 21, can downwards be slid along taper, is prevented polishing fluid from accumulating on top cover 21, most
It is dropped in eventually on polishing disk.
Fig. 6 is the schematic diagram of the extreme position of the example shown in Fig. 5, that is, pressure ring 322 and the intermediate plate being arranged on matrix 30
There is maximal clearance in the top of component 10, now, the coaming plate 22 on the vertical direction of lid 20 overlaps with gland 50 in the presence of one section
Position, the polishing fluid of splashing can glide along the taper surface of lid 20, be dropped on polishing disk, so can effectively prevent polishing fluid
Into the inside of rubbing head 100, prevent polishing fluid to be extruded in the course of work of rubbing head 100 and then influence polishing effect.
Alternatively, lid 20, gland 50, the second sealing ring 70 and the first sealing ring 60 collectively form a rubbing head 100
Protector, can effectively prevent polishing fluid from entering the inside of rubbing head 100, while meet the adaptivity of rubbing head 100
It is required that.
It is general for this area according to other compositions of the rubbing head 100 of the not ponding of the utility model embodiment and operation
All it is known for logical technical staff, is not detailed herein.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " illustrative examples ",
The description of " example ", " specific example " or " some examples " etc. means to combine specific features, the knot that the embodiment or example describe
Structure, material or feature are contained at least one embodiment or example of the present utility model.In this manual, to above-mentioned art
The schematic representation of language is not necessarily referring to identical embodiment or example.Moreover, description specific features, structure, material or
Person's feature can combine in an appropriate manner in any one or more embodiments or example.
While there has been shown and described that embodiment of the present utility model, it will be understood by those skilled in the art that：
These embodiments can be carried out with a variety of changes, modification in the case where not departing from principle and objective of the present utility model, replaced
And modification, the scope of the utility model are limited by claim and its equivalent.
Claims (12)
- A kind of 1. rubbing head of not ponding, it is characterised in that including：Clip assemblies；Lid, the lid are movably mounted on the clip assemblies and receiving are limited between the clip assemblies Chamber；Matrix, described matrix can be arranged on clip assemblies and in the accommodating chamber up or down, described matrix and institute It is closely coupled to state lid；Diaphragm, the diaphragm are connected with the clip assemblies and described matrix respectively, and limit closed chamber.
- 2. the rubbing head of not ponding according to claim 1, it is characterised in that described matrix and the inner roof wall of the lid Face is connected.
- 3. the rubbing head of not ponding according to claim 2, it is characterised in that described matrix includes：Middle shaft part, axis hole penetrate the middle shaft part along the vertical direction, and the center of the lid is provided with through hole, the middle shaft part it is upper Hold through the through hole；Outer portion, the outer portion are set around the middle shaft part, and the outer portion is connected with the lid by bolt.
- 4. the rubbing head of not ponding according to claim 1, it is characterised in that the upper surface of the clip assemblies is provided with the The gland of two grooves and part in the lid, the lid when moving up and down with least part of phase of the gland Overlap.
- 5. the rubbing head of not ponding according to claim 4, it is characterised in that between the gland and the clip assemblies Provided with the first sealing ring.
- 6. the rubbing head of not ponding according to claim 3, it is characterised in that the upper surface of the outer portion and the lid One in the inner top surface of body is provided with the second sealing ring.
- 7. the rubbing head of not ponding according to claim 3, it is characterised in that the outer peripheral face of the middle shaft part leads to described The internal perisporium in hole is brought into close contact.
- 8. the rubbing head of the not ponding according to any one of claim 1-7, it is characterised in that the lid includes：Top cover, described matrix and the top cover are closely coupled；Coaming plate, the coaming plate set around the top cover and extended downwardly from the periphery of top cover edge.
- 9. the rubbing head of not ponding according to claim 8, it is characterised in that the top cover is horizontally disposed with.
- 10. the rubbing head of not ponding according to claim 9, it is characterised in that lead between the top cover and the coaming plate Arc sections are crossed to be connected.
- 11. the rubbing head of not ponding according to claim 9, it is characterised in that lead between the top cover and the coaming plate Rake is crossed to be connected.
- 12. the rubbing head of not ponding according to claim 8, it is characterised in that the top cover is along therefrom at the heart to institute The direction at coaming plate is stated obliquely to set gradually downward.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720904612.2U CN207139536U (en) | 2017-07-24 | 2017-07-24 | A kind of rubbing head of not ponding |
| PCT/CN2018/096003 WO2019019941A1 (en) | 2017-07-24 | 2018-07-17 | Polishing head capable of preventing water accumulation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720904612.2U CN207139536U (en) | 2017-07-24 | 2017-07-24 | A kind of rubbing head of not ponding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207139536U true CN207139536U (en) | 2018-03-27 |
Family
ID=61676678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720904612.2U Active CN207139536U (en) | 2017-07-24 | 2017-07-24 | A kind of rubbing head of not ponding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207139536U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107253134A (en) * | 2017-07-24 | 2017-10-17 | 清华大学 | A kind of rubbing head of not ponding |
-
2017
- 2017-07-24 CN CN201720904612.2U patent/CN207139536U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107253134A (en) * | 2017-07-24 | 2017-10-17 | 清华大学 | A kind of rubbing head of not ponding |
| CN107253134B (en) * | 2017-07-24 | 2024-01-12 | 清华大学 | Polishing head without accumulated water |
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Address after: 100084 Beijing City, Haidian District Tsinghua Yuan Co-patentee after: Huahaiqingke Co.,Ltd. Patentee after: TSINGHUA University Address before: 100084 Beijing City, Haidian District Tsinghua Yuan Co-patentee before: TSINGHUA University Patentee before: TSINGHUA University |