CN207133226U - A kind of QCM humidity sensors of high stability low humidity detection - Google Patents
A kind of QCM humidity sensors of high stability low humidity detection Download PDFInfo
- Publication number
- CN207133226U CN207133226U CN201720938098.4U CN201720938098U CN207133226U CN 207133226 U CN207133226 U CN 207133226U CN 201720938098 U CN201720938098 U CN 201720938098U CN 207133226 U CN207133226 U CN 207133226U
- Authority
- CN
- China
- Prior art keywords
- humidity
- metal electrode
- qcm
- high stability
- sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
The utility model discloses a kind of QCM humidity sensors of high stability low humidity detection, including piezoelectric chip, metal electrode and humidity sensitive film layer；The piezoelectric chip surface is provided with metal electrode, and surface of metal electrode is provided with humidity sensitive film layer；It is characterized in that：The metal electrode is provided with least one hole.The metal electrode of the utility model QCM humidity sensors has pore space structure, and high-sensitivity detection low humidity can be reached under conditions of a small amount of adsorbed water molecule；The stability of sensor is very high simultaneously；And cost is low, Humidity Detection scope is big, high sensitivity, to respond fast, reproducible and manufacture craft simple, can be widely applied to low humidity detection and high-precision Humidity Detection field.
Description
Technical field
A kind of humidity sensor is the utility model is related to, particularly a kind of QCM humidity of high stability low humidity detection passes
Sensor.
Background technology
Humidity sensor is permitted as a kind of important sensor in military affairs, meteorology, agricultural, Industry Control, medicine equipment etc.
It is multi-field to have a wide range of applications.QCM (QCM) humidity sensor is the one kind to receive much concern in the late two decades
Novel humidity sensor, QCM humidity sensors are made up of humidity sensitive film layer, piezoelectric chip and metal electrode, metal electrode
The two sides of piezoelectric chip is arranged on, humidity sensitive material is arranged on two surface of metal electrode, as shown in Figure 1；QCM humidity sensors
The operation principle of device is based on following relational expression,
Wherein f0For the intrinsic fundamental frequency (unit Hz) of piezoelectric chip, A is metal electrode area (unit cm2), ρq、μq
The respectively density and modulus of shearing of piezoelectric chip, ρL、μLThe respectively density of humidity sensitive film layer and damping.
On the one hand the humidity sensitive film adsorbed water molecule being deposited on metal electrode causes the increase of sensitive thin film quality, separately
On the one hand cause the damping of humidity sensitive film to increase, so as to produce a frequency shift (FS) related to adsorbed water molecule amount, reach
To the purpose of Humidity Detection.QCM humidity sensors have accuracy of detection Gao ﹑ response time Kuai ﹑ real-time digitals rate-adaptive pacemakers etc. excellent
Gesture.
Existing QCM humidity sensors (0-10%RH) detection sensitivity in the range of low humidity is not generally high, because
The content of moisture in air is very low in this humidity range, and this directly results in the moisture being adsorbed onto in humidity sensitive film
Quantum count is also seldom；In order to increase detection sensitivity of the QCM humidity sensors in low humidity scope, industry personnel have used
Photosensitivity-enhancing method has：(1) humidity-sensitive material with nanostructured is used to increase the specific surface area of material；(2) compound wet sensitive is used
Material is with the water-wet behavior of reinforcing material；(3) heavy dose of humidity-sensitive material is used to increase Water Molecular Adsorption point.It is but above-mentioned
Photosensitivity-enhancing method of three kinds of QCM humidity sensors in the range of low humidity is all based on sensitive material and adsorbs more hydrone numbers
On the premise of obtain；And the Water Molecular Adsorption of a large amount of numbers can be deposited on humidity on QCM humidity sensor metal electrodes
Sensitive thin film viscosity greatly increases, abnormal existing so as to cause the output frequency of QCM humidity sensors unusual fluctuations, failure of oscillation etc. occur
As the stability of sensor is greatly reduced, and this accuracy of detection to sensor is totally unfavorable.
Utility model content
Goal of the invention of the present utility model is：For above-mentioned problem, there is provided one kind has high stability, width wet
The QCM humidity sensors of the humidity sensor sensing element of journey measurement capability are measured, its electrode is the metal with pore space structure
Electrode, quality, damping and change in dielectric constant after humidity sensitive film layer adsorbed water molecule can cause QCM humidity sensors
Frequency response sensitivity is produced, so as to reach high-sensitivity detection low humidity under conditions of a small amount of adsorbed water molecule, and
Strengthen the stability of sensor.
The technical solution adopted in the utility model is as follows：
A kind of QCM humidity sensors of high stability low humidity detection of the utility model, including piezoelectric chip, metal electrode
With humidity sensitive film layer；The piezoelectric chip surface is provided with metal electrode, and surface of metal electrode is provided with humidity sensitive film layer；
The metal electrode is provided with least one hole.
Further preferably, described hole size is less than metal electrode size.
Further preferably, the metal electrode uses gold electrode.
Further preferably, in addition to metal adsorption layer；The metal adsorption layer is located between piezoelectric chip and metal electrode.
Further preferably, the metal adsorption layer is chromium adsorption layer.
Further preferably, the piezoelectric chip uses piezoelectric quartz crystal plate；The piezoelectric chip is AT cut types.
Further preferably, the basic resonance frequency of the piezoelectric chip is 5-20MHz.
Further preferably, the metal electrode is circular or rectangle；Metal electrode size is less than piezoelectric chip size.
Further preferably, the humidity sensitive film layer is humidity of media sensitive thin film layer.
Further preferably, humidity sensitive film layer is filled with the hole on the metal electrode.
In summary, by adopting the above-described technical solution, the beneficial effects of the utility model are：
1st, the metal electrode of the QCM humidity sensors obtained by the present invention has pore space structure, and humidity sensitive film layer is inhaled
Quality, damping and change in dielectric constant after attached water molecule can cause QCM humidity sensors to produce frequency response sensitivity, from
And the purpose of high-sensitivity detection low humidity can be reached under conditions of a small amount of adsorbed water molecule；Meanwhile humidity sensitive film layer
Change in dielectric constant after adsorbed water molecule will not cause the stability of humidity sensor to decline, thus can strengthen sensor
Stability.
2nd, the QCM humidity sensors obtained by the present invention have cost is low, Humidity Detection scope big (0.1-100%RH),
High sensitivity, response is fast, reproducible, manufacture craft is simple, can be widely applied to low humidity detection and the inspection of high-precision humidity
Survey field.
Brief description of the drawings
Fig. 1 is the front view of existing QCM humidity sensors.
Fig. 2 is the profile of existing QCM humidity sensors.
Fig. 3 is a kind of top view of the QCM humidity sensors of high stability low humidity detection of the utility model.
Fig. 4 is a kind of profile of the QCM humidity sensors of high stability low humidity detection of the utility model.
Fig. 5 is the profile of the QCM humidity sensors that high stability low humidity detects in embodiment three.
Fig. 6 is the equivalent circuit diagram of existing QCM humidity sensors.
Fig. 7 is a kind of equivalent circuit diagram of the QCM humidity sensors of high stability low humidity detection of the present invention.
Marked in figure：1 is piezoelectric chip, and 2 be metal electrode, and 3 be humidity sensitive film layer, and 4 be hole, and 5 be that metal is inhaled
Attached layer.
Embodiment
Below in conjunction with the accompanying drawings, the utility model is described in detail.
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining this
Utility model, it is not used to limit the utility model.
As depicted in figs. 1 and 2, existing QCM humidity sensors, including piezoelectric chip 1, metal electrode 2 and humidity sensitive are thin
Film layer 3；The surface of piezoelectric chip 1 is provided with metal electrode 2, and the surface of metal electrode 2 is provided with humidity sensitive film layer 3；Metal electricity
Pole 2 separates humidity sensitive film layer 3 and piezoelectric chip 1；The connecting wire of metal electrode 2, by wire by piezoelectric chip 1
Caused frequency signal outflow.
Embodiment one：
As shown in Figure 3 and Figure 4, a kind of QCM humidity sensors of high stability low humidity detection of the utility model, including pressure
Electric chip 1, metal electrode 2 and humidity sensitive film layer 3；The surface of piezoelectric chip 1 is provided with metal electrode 2, the table of metal electrode 2
Face is provided with humidity sensitive film layer 3；The metal electrode 2 is provided with least one hole 4.
Embodiment two：
Compared with other embodiment, the present embodiment also discloses：The size of described hole 4 is less than metal electrode size；Due to
Hole 4 is on metal electrode 2, so the size of hole 4 is less than the size of metal electrode 2.
Embodiment three：
Compared with other embodiment, the present embodiment also discloses：The metal electrode 2 uses gold electrode；Also include metal
Adsorption layer 5；The metal adsorption layer 5 is located between piezoelectric chip 1 and metal electrode 2.The setting of metal adsorption layer 5 can be by gold
Electrode is fixed on piezoelectric chip 1, prevents to move；The metal adsorption layer 5 is chromium adsorption layer, can strengthen the adhesion of gold
Ability.When electrode is gold electrode, it is necessary to increase chromium adsorption layer, prevent gold electrode from easily being come off on quartz；If silver electrode
Metal adsorption layer is not needed.
Example IV：
Compared with other embodiment, the present embodiment also discloses：The piezoelectric chip 1 uses piezoelectric quartz crystal plate；It is described
Piezoelectric chip 1 is AT cut types.
Embodiment five：
Compared with other embodiment, the present embodiment also discloses：The basic resonance frequency of the piezoelectric chip 1 is 5-
20MHz。
Embodiment six：
Compared with other embodiment, the present embodiment also discloses：The metal electrode 2 is using gold electrode, silver electrode or aluminium
Electrode.They have good electric conductivity, are splendid electrode materials.
Embodiment eight：
Compared with other embodiment, the present embodiment also discloses：The metal electrode 2 is circular or rectangle；Metal
The size of electrode 2 is less than the size of piezoelectric chip 1.The shape of metal electrode 2 can be set according to the selection of user, but general circular
It is preferable with rectangle.
Embodiment nine：
Compared with other embodiment, the present embodiment also discloses：The humidity sensitive film layer 3 is that humidity of media sensitivity is thin
Film layer.
Embodiment ten：
Compared with other embodiment, the present embodiment also discloses：Humidity sensitive film layer 3 by gas blowout, or spin coating, or
Person's drop coating method is formed on the surface of metal electrode 2, and part humidity sensitive film layer 3 is filled in the inside of hole 4 of metal electrode 2.
The operation principle of the present invention：(0-10%RH) detection spirit in the range of low humidity for existing QCM humidity sensors
The shortcomings that sensitivity is not generally high, is modified the metal electrode of QCM humidity sensors, shape by photoetching process and etching process
Into the metal electrode with certain amount hole, so as to the shape at the tow sides metal electrode hole edge of QCM humidity sensors
Into fringe field, entirely it is covered in due to humidity sensitive film above the metal electrode of QCM humidity sensors, part humidity sensitive
Film is filled in inside metal electrode hole, and the humidity sensitive film being filled in inside metal electrode hole can be with tow sides
Field coupling effect occurs for the fringe field that metal electrode is formed, and produces an equivalent capacity CL.And existing QCM humidity sensors
Equivalent circuit as shown in figure 3, in figure component resistance (R), inductance (L) and electric capacity (C) reflect respectively QCM mechanical loss,
Inertia mass and crystal elasticity, electric capacity (C0) reflect the natural capacity that QCM wafer metals electrode is formed.Wherein, QCM humidity sensors
The sensitive thin film layer adsorbed water molecule meeting QCM of device inertia mass (L parameters) and sensitive thin film damping (R parameter) increase, so as to
Produce a frequency shift (FS) related to adsorbed water molecule amount；Existing sensor output frequency expression formula isDeng
Imitate electric capacity CLFormed and be connected in series with the equivalent circuit of existing QCM humidity sensors, as shown in figure 4, inventive sensor is defeated
Going out frequency expression isCompared with existing QCM humidity sensors, output frequency of the present invention increases
It is big；QCM humidity sensors of the present invention are by introducing the equivalent capacity C related to humidity sensitive film dielectric constantL, quite
Once amplified in the output response sensitivity to existing QCM humidity sensors.
In this case, after QCM humidity sensors adsorbed water molecule, its inertia mass, sensitive thin film damping and dielectric are normal
Number increases, i.e. L parameters, R parameter and CLIncrease.QCM humidity sensors are ultimately resulted in except producing the inertia mass with QCM
It is extra to produce one and humidity sensitive film dielectric constant phase outside the frequency shift (FS) of (L parameters) and sensitive thin film damping (R parameter)
The frequency shift (FS) of pass, it is finally reached the purpose of increase transducer sensitivity.
Because the humidity sensitive film electrology characteristic change being deposited on metal electrode will not cause the frequency of qcm sensor
Stability declines, thus this sensitivity increase method is especially suitable for low humidity detection field, i.e., in a small amount of adsorbed water molecule
Under the conditions of, on the premise of frequency response sensitivity caused by Water Molecular Adsorption quality increase is retained, by introducing humidity
Another frequency response sensitivity that sensitive thin film change in dielectric constant is brought, so as to reach HIGH SENSITIVITY AND HIGH PRECISION detection low humidity
Purpose.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model
Protection domain within.
Claims (10)
1. a kind of QCM humidity sensors of high stability low humidity detection, including piezoelectric chip, metal electrode and humidity sensitive are thin
Film layer；The piezoelectric chip surface is provided with metal electrode, and surface of metal electrode is provided with humidity sensitive film layer；It is characterized in that：
The metal electrode is provided with least one hole.
A kind of 2. QCM humidity sensors of high stability low humidity detection according to claim 1, it is characterised in that：Institute
State bore hole size and be less than metal electrode size.
A kind of 3. QCM humidity sensors of high stability low humidity detection according to claim 1, it is characterised in that：Institute
State metal electrode and use gold electrode.
A kind of 4. QCM humidity sensors of high stability low humidity detection according to claim 3, it is characterised in that：Also
Including metal adsorption layer；The metal adsorption layer is located between piezoelectric chip and metal electrode.
A kind of 5. QCM humidity sensors of high stability low humidity detection according to claim 4, it is characterised in that：Institute
It is chromium adsorption layer to state metal adsorption layer.
A kind of 6. QCM humidity sensors of high stability low humidity detection according to claim 1, it is characterised in that：Institute
State piezoelectric chip and use piezoelectric quartz crystal plate；The piezoelectric chip is AT cut types.
A kind of 7. QCM humidity sensors of high stability low humidity detection according to claim 6, it is characterised in that：Institute
The basic resonance frequency for stating piezoelectric chip is 5-20 MHz.
A kind of 8. QCM humidity sensors of high stability low humidity detection according to claim 1 or 3, it is characterised in that：
The metal electrode is circular or rectangle；Metal electrode size is less than piezoelectric chip size.
A kind of 9. QCM humidity sensors of high stability low humidity detection according to claim 1, it is characterised in that：Institute
It is humidity of media sensitive thin film layer to state humidity sensitive film layer.
A kind of 10. QCM humidity sensors of high stability low humidity detection according to claim 1, it is characterised in that：Institute
State and humidity sensitive film layer is filled with the hole on metal electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720938098.4U CN207133226U (en) | 2017-07-31 | 2017-07-31 | A kind of QCM humidity sensors of high stability low humidity detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720938098.4U CN207133226U (en) | 2017-07-31 | 2017-07-31 | A kind of QCM humidity sensors of high stability low humidity detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207133226U true CN207133226U (en) | 2018-03-23 |
Family
ID=61640573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720938098.4U Expired - Fee Related CN207133226U (en) | 2017-07-31 | 2017-07-31 | A kind of QCM humidity sensors of high stability low humidity detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207133226U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107290392A (en) * | 2017-07-31 | 2017-10-24 | 成都信息工程大学 | A kind of QCM humidity sensors of high stability low humidity detection and preparation method thereof |
| CN111474217A (en) * | 2020-04-23 | 2020-07-31 | 歌尔微电子有限公司 | Humidity sensor and humidity testing method |
| CN113311031A (en) * | 2021-07-01 | 2021-08-27 | 北京航天微电科技有限公司 | Double-sided capacitive humidity sensor and preparation method thereof |
| CN118316414A (en) * | 2024-06-05 | 2024-07-09 | 西安电子科技大学 | Quartz crystal resonator with rectangular double-ring electrode structure |
-
2017
- 2017-07-31 CN CN201720938098.4U patent/CN207133226U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107290392A (en) * | 2017-07-31 | 2017-10-24 | 成都信息工程大学 | A kind of QCM humidity sensors of high stability low humidity detection and preparation method thereof |
| CN111474217A (en) * | 2020-04-23 | 2020-07-31 | 歌尔微电子有限公司 | Humidity sensor and humidity testing method |
| CN113311031A (en) * | 2021-07-01 | 2021-08-27 | 北京航天微电科技有限公司 | Double-sided capacitive humidity sensor and preparation method thereof |
| CN118316414A (en) * | 2024-06-05 | 2024-07-09 | 西安电子科技大学 | Quartz crystal resonator with rectangular double-ring electrode structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207133226U (en) | A kind of QCM humidity sensors of high stability low humidity detection | |
| US10942048B2 (en) | Sensor chip used for multi-physical quantity measurement and preparation method thereof | |
| Zhao et al. | A fully packaged CMOS interdigital capacitive humidity sensor with polysilicon heaters | |
| Huang et al. | A passive wireless hydrogen surface acoustic wave sensor based on Pt-coated ZnO nanorods | |
| CN107290241A (en) | A kind of QCM humidity sensors and preparation method thereof | |
| CN104990968B (en) | Moisture sensor device based on FBAR | |
| CN102393264B (en) | Pressure sensor based on nano-piezoelectric fiber | |
| CN107290392A (en) | A kind of QCM humidity sensors of high stability low humidity detection and preparation method thereof | |
| CN108896623B (en) | digital frequency type humidity sensor for measuring relative humidity of gas | |
| CN203940940U (en) | A kind of sensor chip for many physical quantities | |
| CN206557139U (en) | QCM humidity sensors | |
| CN108627413A (en) | Detecting element and detection device | |
| CN107389229A (en) | A kind of ceramic capacitive pressure sensors | |
| CN206891622U (en) | A kind of ceramic capacitive pressure sensors | |
| CN207133149U (en) | A kind of QCM humidity sensors | |
| Dong et al. | Highly sensitive and fast-response humidity sensor based on saw resonator and mos 2 for human activity detection | |
| CN116793210B (en) | Nano composite film, strain sensor and application thereof | |
| CN207585759U (en) | Piezoelectric acceleration sensor | |
| CN209486025U (en) | A kind of dew point hygrometer | |
| CN205920087U (en) | Piezo electric crystal gas sensor with two mode | |
| CN109187737A (en) | A kind of carbon monoxide transducer and its density calculating method based on SAW device | |
| GB2568196A (en) | Capacitive gas sensor | |
| CN109406576A (en) | A kind of dew point hygrometer and dew-point measuring method | |
| CN107884457B (en) | A kind of humidity sensor based on metamaterial structure | |
| CN206772887U (en) | A kind of high temperature-resistant polymer Humidity-Sensitive Capacitance Sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180323 Termination date: 20180731 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |