CN207109082U - Evaporation source and evaporation coating device - Google Patents
Evaporation source and evaporation coating device Download PDFInfo
- Publication number
- CN207109082U CN207109082U CN201721108481.3U CN201721108481U CN207109082U CN 207109082 U CN207109082 U CN 207109082U CN 201721108481 U CN201721108481 U CN 201721108481U CN 207109082 U CN207109082 U CN 207109082U
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- Prior art keywords
- crucible
- evaporation source
- sidewall portion
- male
- male structure
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Abstract
The utility model discloses a kind of evaporation source and evaporation coating device, the evaporation source includes：Covered on crucible body and crucible, with the surface that contact is covered on crucible it is first surface in crucible body, it is second surface that the upper surface being in contact with first surface is covered on crucible, male structure is provided with one of first surface and second surface, the position that male structure is corresponded in another one is provided with the recessed structure corresponding with male structure.The technical solution of the utility model in crucible body and crucible by covering the male structure set respectively and recessed structure, male structure carries out male-female engagement with recessed structure, to realize on crucible being tightly fastened for lid and crucible body, so as to effectively prevent occurring relative slip on crucible between lid and crucible body, and then boil-off gas is avoided to leak.
Description
Technical field
Display technology field is the utility model is related to, more particularly to a kind of evaporation source and evaporation coating device.
Background technology
Fig. 1 is the schematic cross-section of linear evaporation source in the prior art, and Fig. 2 is the enlarged diagram of region A in Fig. 1, such as
Shown in Fig. 1 and Fig. 2, the linear evaporation source includes：Lid 2 (containing nozzle 3) in crucible body 1 and crucible, during evaporation, it is necessary to
Lid on crucible 2 is fixed on to the top of crucible body 1, lid 2 is to surround an airtight chamber in crucible body 1 and crucible.
However, find in actual applications, because the surface 40 that both lids 2 are in contact on crucible body 1 and crucible is divided
It is sliding, with pressure increase in airtight chamber during evaporation so that occur sliding relatively between lid 2 in crucible body 1 and crucible
It is dynamic, and gap occur, the problem of so as to cause boil-off gas to leak, influence normal process progress.
Utility model content
The utility model is intended at least solve one of technical problem present in prior art, it is proposed that a kind of evaporation source and
Evaporation coating device.
To achieve the above object, the utility model provides a kind of evaporation source, including：Covered on crucible body and crucible, earthenware
It is first surface with the surface that contact is covered on crucible on crucible body, the upper surface that is in contact with the first surface of lid is on crucible
Second surface, male structure is provided with one of the first surface and the second surface, is corresponded in another one described convex
The position of structure is provided with the recessed structure corresponding with the male structure.
Alternatively, the surface of the male structure and/or the recessed structure is provided with thermal expansion layer, the heat of the thermal expansion layer
The coefficient of expansion is more than the thermal coefficient of expansion of the recessed structure.
Alternatively, the material of the recessed structure includes：Titanium.
Alternatively, the material of the thermal expansion layer includes metallic copper, metallic aluminium or metallic iron.
Alternatively, the thermal coefficient of expansion of the male structure is more than the thermal coefficient of expansion of the recessed structure.
Alternatively, shape of the orthographic projection of the male structure on the first surface along the first surface surrounds one
Week.
Alternatively, the quantity of the male structure is multiple that multiple male structures are nested with layer by layer.
Alternatively, the longitudinal section shape of the male structure is rectangle or triangle.
Alternatively, the crucible body includes：Body bottom portion and the body side of sidewall portion positioned at the body bottom portion side, institute
State the end that first surface is the body side of sidewall portion and towards the surface covered on the crucible；
Lid includes on the crucible：Upper base portion and the upper lid side of sidewall portion positioned at the upper lid bottom side, described second
Surface for the upper lid side of sidewall portion end and towards the surface of the crucible body.
Alternatively, the male structure and the body side of sidewall portion fixed with it or the upper lid side of sidewall portion one into
Type.
Alternatively, in addition to：Fixed screw；
The lateral surface of the body side of sidewall portion is provided with first connecting portion, and the lateral surface of the body side of sidewall portion is provided with
Two connecting portions, first through hole is provided with the first connecting portion, the second through hole is provided with the second connecting portion；
The fixed screw passes through the first through hole and second through hole by the first connecting portion and described second
Connecting portion is fixed.
To achieve the above object, the utility model additionally provides a kind of evaporation coating device, including evaporation source described above.
The utility model has the advantages that：
The utility model provides a kind of evaporation source and evaporation coating device, and the evaporation source includes：Covered on crucible body and crucible,
It is first surface to be used in crucible body with the surface that contact is covered on crucible, is used for what is be in contact with first surface on lid on crucible
Surface is second surface, and male structure is provided with one of first surface and second surface, male structure is corresponded in another one
Position is provided with the recessed structure corresponding with male structure.The technical solution of the utility model in crucible body and crucible by covering
The upper male structure set respectively and recessed structure, male structure carry out male-female engagement with recessed structure, to realize lid and crucible sheet on crucible
Body is tightly fastened, and so as to effectively prevent occurring relative slip on crucible between lid and crucible body, and then avoids boil-off gas
Leak.
Brief description of the drawings
Fig. 1 is the schematic cross-section of linear evaporation source in the prior art；
Fig. 2 is the enlarged diagram of region A in Fig. 1；
Fig. 3 is a kind of longitudinal cross-section schematic diagram for evaporation source that the utility model embodiment one provides；
Fig. 4 is the enlarged diagram of a-quadrant in Fig. 3；
Fig. 5 is the upward view covered in Fig. 3 on crucible；
Fig. 6 is the top view of crucible body in Fig. 3；
Schematic diagram when Fig. 7 is recessed structure and male structure generation thermal expansion；
Fig. 8 is a kind of longitudinal cross-section schematic diagram for evaporation source that the utility model embodiment two provides；
Fig. 9 is the enlarged diagram of a-quadrant in Fig. 8；
Figure 10 is schematic diagram when thermal expansion occurs for thermal expansion layer, recessed structure and male structure；
Figure 11 is a kind of schematic cross-section for evaporation source that the utility model embodiment one provides；
Figure 12 is the enlarged diagram of a-quadrant in Figure 11；
Figure 13 is the upward view covered in Figure 11 on crucible；
Figure 14 is the top view of crucible body in Figure 11.
Embodiment
To make those skilled in the art more fully understand the technical solution of the utility model, below in conjunction with the accompanying drawings to this reality
It is described in detail with a kind of evaporation source and evaporation coating device of new offer.
Fig. 3 is a kind of longitudinal cross-section schematic diagram for evaporation source that the utility model embodiment one provides, and Fig. 4 is Tu3Zhong A areas
The enlarged diagram in domain, as shown in Figure 3 and Figure 4, the evaporation source include：Lid 2 in crucible body 1 and crucible, in crucible body 1 with
The surface that lid 2 contacts on crucible is first surface 103, and the surface being in contact on crucible on lid 2 with first surface 103 is the second table
Face 203, male structure 5 is provided with one of first surface 103 and second surface 203, the position of male structure 5 is corresponded in another one
Install and be equipped with the recessed structure 6 corresponding with male structure 5.
First surface 103 is located at male structure 5 in the present embodiment, recessed structure 6 carries out example exemplified by being located at second surface 203
Type explanation.Wherein, male structure 5 is to be arranged at the projection of first surface 103, and recessed structure 6 is to be arranged at the recessed of second surface 203
Groove.
When carrying out evaporation process, lid on crucible 2 is placed in the top of crucible body 1, and it is convex in crucible body 1
Structure 5 carries out male-female engagement with the recessed structure 6 on the lid 2 on the crucible, to realize the close of lid 2 and crucible body 1 on crucible
It is fixed, so as to effectively prevent occurring relative slip on crucible between lid 2 and crucible body 1, and then avoid boil-off gas from letting out
Leakage.
Preferably, the quantity of male structure 5 is multiple in the utility model, sets multiple male structures 5 further to be lifted
Compactness fixed between lid 2 and crucible body 1 on crucible.
In embodiment, crucible body 1 includes：Body bottom portion 101 and the body side of sidewall portion positioned at the side of body bottom portion 101
102, lid 2 includes on crucible：Upper base portion 201 and the upper lid side of sidewall portion 202 positioned at the side of body bottom portion 101, body side of sidewall portion
102 end and the end of upper lid side of sidewall portion 202 are oppositely arranged.Now, first surface 103 is specially body side of sidewall portion 102
End and towards the surface of upper lid side of sidewall portion 202, second surface 203 are specially the end of upper lid side of sidewall portion 202 and towards body
The surface of side of sidewall portion 102.
Optional in the present embodiment, the longitudinal section shape of male structure 5 is rectangle, correspondingly, the cross sectional shape of recessed structure 6
For rectangle.The cross sectional shape of recessed structure 6 and male structure 5 is designed as rectangle, can on crucible is avoided lid 2 and crucible body 1 it
Between while there is relative slide, facilitate lid 2 and the binding operation of crucible body 1 and lock out operation on crucible.It should be noted that
The cross sectional shape of male structure 5 in the utility model can also be other shapes, such as triangle, semicircle.It is suitable for other
For the cross sectional shape of male structure in the utility model 5, no longer illustrate one by one herein.
Fig. 5 is the upward view covered in Fig. 3 on crucible, and Fig. 6 is the top view of crucible body in Fig. 3, as shown in Figure 5 and Figure 6,
Shape (square shape) of orthographic projection of the male structure 5 (recessed structure 6) on first surface 103 along first surface 103 surrounds one week,
Even if now lid 2 is jacked up by internal high pressure on crucible, the end of upper lid side of sidewall portion 202 separates with the end of body side of sidewall portion 102,
End yet with upper lid side of sidewall portion 202 and the male structure 5 around one week between the end of body side of sidewall portion 102 be present, this
Male structure 5 can stop that boil-off gas leaks at the gap between both ends, i.e., processing chamber can maintain sealing state.
It should be noted that the end of body side of sidewall portion 102 is in the situation of square shape in accompanying drawing, exemplary work is only played
With it will not produce limitation to the technical solution of the utility model, and the end of body side of sidewall portion 102 can also in the utility model
Besieged city other shapes, such as circular, triangle.
In addition, orthographic projection of the male structure 5 (recessed structure 6) on first surface 103 is along first surface 103 in the present embodiment
Shape surround the situation of one week, be a kind of preferred scheme in the utility model, can the end of upper lid side of sidewall portion 202 with
Boil-off gas is effectively avoided to be leaked at the gap between both ends during the end separation of side wall portion 102, it will not be to this reality
Limitation is produced with new technical scheme, and the male structure 5 in the utility model can also be other shapes, such as vertical bar shape, bulk.
In the present embodiment, it is preferable that male structure 5 is integrally formed with body side of sidewall portion 102, can effectively be lifted male structure 5 with
The fastness connected between body side of sidewall portion 102.
It should be noted that above-mentioned male structure 5 is located at the first surface 103 of the end of body side of sidewall portion 102, recessed structure 6
Situation positioned at the second surface 203 of upper lid side of sidewall portion 202 only plays exemplary effect；In the utility model or
Recessed structure 6 is located at the first surface 103 of the end of body side of sidewall portion 102, and male structure 5 is located at the second table of upper lid side of sidewall portion 202
Face 203, it also can effectively avoid the problem of boil-off gas leaks occur during evaporation, and such a situation is no longer retouched in detail
State.
Preferably, the lateral surface of body side of sidewall portion 102 is provided with first connecting portion, and the lateral surface of body side of sidewall portion 102 is set
Second connecting portion is equipped with, first through hole is provided with first connecting portion, the second through hole, fixed screw are provided with second connecting portion
First connecting portion and second connecting portion are fixed through first through hole and the second through hole.In the utility model, pass through fixed screw
The connecting portion in the outside of fixed body side of sidewall portion 102 and upper lid side of sidewall portion 202, can be to body side of sidewall portion 102 and upper lid side of sidewall portion
202 further fix, to prevent body side of sidewall portion 102 and upper lid side of sidewall portion 202 from being relatively moved during evaporation.
The utility model embodiment one provides lid 2 on a kind of evaporation source, including crucible body 1 and crucible, crucible body 1
Including：Body bottom portion 101 and the body side of sidewall portion 102 positioned at the side of body bottom portion 101, lid 2 includes on crucible：Upper base portion
201 and the upper lid side of sidewall portion 202 positioned at the side of body bottom portion 101, the end of body side of sidewall portion 102 and upper lid side of sidewall portion 202
End is oppositely arranged, the end of body side of sidewall portion 102 and towards the surface of upper lid side of sidewall portion 202 be first surface 103, upper lid side
The end of wall portion 202 and towards the surface of body side of sidewall portion 102 be second surface 203；First surface 103 and second surface 203
One of on be provided with male structure 5, the position that male structure 5 is corresponded in another one is provided with the recessed knot corresponding with male structure 5
Structure 6.The technical solution of the utility model is recessed by that can be carried out in the end set of upper lid side of sidewall portion 202 and body side of sidewall portion 102
The male female structure 5 of convex cooperation, can be effective so as to effectively prevent from occurring relative slip on crucible between lid 2 and crucible body 1
Boil-off gas is avoided to leak.
Schematic diagram when Fig. 7 is recessed structure and male structure generation thermal expansion, as shown in fig. 7, in the production process of reality
It was found that with the rise of the temperature of lid 2 on crucible body 1 and crucible, thermal expansion can occur for male structure 5 and recessed structure 6.Wherein,
When thermal expansion deformation occurs, uniform thermal expansion deformation can occur male structure 5 for its each position；And recessed structure 6 is swollen in generation heat
When bulging becomes, by recessed itself stress influence of structure 6, the expansion deformation quantity of its opening is more than the expansion deformation quantity of its bottom.
Now, opening of the male structure 5 only with recessed structure 6 is brought into close contact, and other positions are not bonded, so as to gap 8 occur.
In order to solve the above technical problems, the utility model embodiment two provides a kind of evaporation source.Fig. 8 is the utility model
A kind of longitudinal cross-section schematic diagram for evaporation source that embodiment two provides, Fig. 9 are the enlarged diagram of a-quadrant in Fig. 8, and Figure 10 is heat
Expanding layer, schematic diagram when thermal expansion occurs for recessed structure and male structure, as shown in Fig. 8 to Figure 10, with above-described embodiment one not
With in the surface of male structure 5 and recessed structure 6 setting thermal expansion layer 7, the thermal coefficient of expansion of thermal expansion layer 7 in the present embodiment
More than the thermal coefficient of expansion of recessed structure 6, to cause the thermal expansion deformation quantity of the thermal expansion layer 7 during evaporation to be more than recessed structure 6
Thermal expansion deformation quantity, to be filled to the gap between male structure 5 and recessed structure 6, effectively boil-off gas can be avoided to occur
Leakage.
Table 1 is metallic copper, aluminium, iron, the thermal coefficient of expansion of titanium and fusing point table, as shown in table 1 below.
The metallic copper of table 1., aluminium, iron, the thermal coefficient of expansion of titanium and fusing point table
In actual applications, the environment temperature in evaporation source is about 400 DEG C, and the material of lid 2 is Titanium on crucible, gold
The thermal coefficient of expansion for belonging to titanium is 10.8, therefore when selecting the material of hot thermal expansion layer 7, need to cause the material of thermal expansion layer 7
Thermal coefficient of expansion need to be more than 10.8, and fusing point is more than 400 DEG C.Based on above-mentioned requirements, the material of thermal expansion layer 7 can in the present embodiment
Selected from one of metallic copper, metallic aluminium, metallic iron.
It should be noted that the above-mentioned situation that thermal expansion layer 7 is respectively provided with the surface of male structure 5 and recessed structure 6 is this reality
With a kind of alternative in new, those skilled in the art are it should also be understood that only need to be in male structure 5 in the utility model
Above-mentioned thermal expansion layer 7 is set with least one of recessed structure 6 surface, you can effectively to the seam between recessed structure 6 and male structure 5
Gap is filled.
As another alternative in the utility model, the thermal coefficient of expansion of male structure 5 is more than the hot swollen of recessed structure 6
Swollen coefficient, to cause the thermal expansion deformation quantity of the male structure 5 during evaporation to be more than the thermal expansion deformation quantity of recessed structure 6.Now,
In recessed structure 6, male structure 5 can be filled up completely with recessed structure 6, and male structure 5 and recessed structure 6 in the case where that need not apply external force
Between produce the active force mutually extruded, so as to effectively avoid the appearance in gap.
Figure 11 is a kind of schematic cross-section for evaporation source that the utility model embodiment one provides, and Figure 12 is A areas in Figure 11
The enlarged diagram in domain, Figure 13 are the upward view covered in Figure 11 on crucible, and Figure 14 is the top view of crucible body in Figure 11, is such as schemed
Shown in 11 to Figure 14, unlike above-described embodiment one, orthographic projection in the present embodiment on first surface 103 is along
The shape on one surface 103 is multiple around the quantity of the male structure 5 of one week, and multiple male structures 5 are nested with layer by layer.Multiple male structures 5
It is nested with layer by layer, can further lifts the sealing between the end of body side of sidewall portion 102 and the end of upper lid side of sidewall portion 202.
It should be noted that the situation that whole male structures 5 are respectively positioned in crucible body 1 in accompanying drawing is only in the utility model
A kind of alternative, part male structure 5 can be also arranged in crucible body 1 in the utility model, part male structure 5 is set
In on lid on crucible 2, it falls within the scope of protection of the utility model.
The utility model embodiment four provides a kind of evaporation coating device, including evaporation source, and the evaporation source uses above-mentioned implementation
Any one evaporation source provided in one~embodiment of example three, particular content can be found in one~embodiment of above-described embodiment three
Description, here is omitted.
It is understood that embodiment of above is merely to illustrate that principle of the present utility model and used exemplary
Embodiment, but the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case of the spirit and essence of utility model, various changes and modifications can be made therein, and these variations and modifications are also considered as this reality
With new protection domain.
Claims (12)
- A kind of 1. evaporation source, it is characterised in that including：Cover on crucible body and crucible, contacted in crucible body with lid on crucible Surface be first surface, the upper surface that is in contact with the first surface of lid is second surface on crucible, the first surface Be provided with male structure on one of the second surface, corresponded in another one the male structure position be provided with it is described The corresponding recessed structure of male structure.
- 2. evaporation source according to claim 1, it is characterised in that the surface of the male structure and/or the recessed structure is set Thermal expansion layer is equipped with, the thermal coefficient of expansion of the thermal expansion layer is more than the thermal coefficient of expansion of the recessed structure.
- 3. evaporation source according to claim 2, it is characterised in that the material of the recessed structure includes：Titanium.
- 4. evaporation source according to claim 3, it is characterised in that the material of the thermal expansion layer includes metallic copper, metal Aluminium or metallic iron.
- 5. evaporation source according to claim 1, it is characterised in that the thermal coefficient of expansion of the male structure is more than the recessed knot The thermal coefficient of expansion of structure.
- 6. evaporation source according to claim 1, it is characterised in that the orthographic projection of the male structure on the first surface Surrounded one week along the shape of the first surface.
- 7. evaporation source according to claim 6, it is characterised in that the quantity of the male structure is multiple, multiple male structures It is nested with layer by layer.
- 8. evaporation source according to claim 1, it is characterised in that the longitudinal section shape of the male structure is rectangle or three It is angular.
- 9. evaporation source according to claim 1, it is characterised in that the crucible body includes：Body bottom portion and positioned at institute State the body side of sidewall portion of body bottom portion side, the first surface for the body side of sidewall portion end and towards on the crucible The surface of lid；Lid includes on the crucible：Upper base portion and the upper lid side of sidewall portion positioned at the upper lid bottom side, the second surface End for the upper lid side of sidewall portion and towards the surface of the crucible body.
- 10. evaporation source according to claim 9, it is characterised in that the male structure and the body fixed with it Side of sidewall portion or the upper lid side of sidewall portion are integrally formed.
- 11. evaporation source according to claim 9, it is characterised in that also include：Fixed screw；The lateral surface of the body side of sidewall portion is provided with first connecting portion, and the lateral surface of the body side of sidewall portion is provided with the second company Socket part, first through hole is provided with the first connecting portion, the second through hole is provided with the second connecting portion；The fixed screw connects the first connecting portion and described second through the first through hole and second through hole Portion is fixed.
- 12. a kind of evaporation coating device, it is characterised in that including the evaporation source as described in any in above-mentioned claim 1-11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721108481.3U CN207109082U (en) | 2017-08-31 | 2017-08-31 | Evaporation source and evaporation coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721108481.3U CN207109082U (en) | 2017-08-31 | 2017-08-31 | Evaporation source and evaporation coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207109082U true CN207109082U (en) | 2018-03-16 |
Family
ID=61574336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721108481.3U Active CN207109082U (en) | 2017-08-31 | 2017-08-31 | Evaporation source and evaporation coating device |
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|---|---|
| CN (1) | CN207109082U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115522167A (en) * | 2022-09-22 | 2022-12-27 | 京东方科技集团股份有限公司 | Evaporation source equipment |
-
2017
- 2017-08-31 CN CN201721108481.3U patent/CN207109082U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115522167A (en) * | 2022-09-22 | 2022-12-27 | 京东方科技集团股份有限公司 | Evaporation source equipment |
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