CN207095826U - For detecting the interference device and its system of any wavelength optical system transmission wavefront - Google Patents
For detecting the interference device and its system of any wavelength optical system transmission wavefront Download PDFInfo
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- CN207095826U CN207095826U CN201721050571.1U CN201721050571U CN207095826U CN 207095826 U CN207095826 U CN 207095826U CN 201721050571 U CN201721050571 U CN 201721050571U CN 207095826 U CN207095826 U CN 207095826U
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Abstract
The utility model provides a kind of interference device for being used to detect any wavelength optical system transmission wavefront, has the feature that, including：Laser generating unit, for producing the LASER Light Source of at least two wavelength；Light source converting unit, for LASER Light Source to be converted into spot light；Collimation unit, spot light is collimated to form collimated light beam；Standard mirror, the part for transmissive parallel or converging beam is irradiated to optical system, and another part of reflected parallel or converging beam forms reference beam；Reflector element, parallel or converging beam the part Jing Guo optical system is reflected to form into test beams；Spectrophotometric unit, transmit spot light and receive reference beam and test beams are reflected；Unit is corrected, the focal position of the light beam of different wave length is corrected；And imaging unit, receive the reference beam of spectrophotometric unit reflection and test beams carry out interference imaging and cause the transmission wavefront of the optical system of any wavelength to carry out interference imaging and detect.
Description
Technical field
It the utility model is related to a kind of optical interferometric devices, and in particular to one kind is saturating for detecting any wavelength optical system
Interference device and its system before ejected wave.
Background technology
Optical system transmission wavefront detects usually using laser interferometer, and laser interferometer can accurately detect specific wavelength
Optical system (Optical System Design wavelength is consistent with interferometer optical source wavelength), according to detection needs, there is different type ripple at present
Long laser interferometer, for detecting the transmission wavefront of different types of optical system.For example, 248nm and 363nm laser interferences
Instrument is used to detect ultraviolet lens combination, and 405nm laser interferometer is used for the lens for detecting dvd pickup storage and audio-visual equipment,
1053nm laser interferometer is used for Study of Laser fusion, fusion etc..
In the prior art, the laser interferometer of only above-mentioned several specific wavelengths, therefore, the optical system of its all band without
Method is detected using laser interferometer, causes the application of laser interferometer smaller.In addition, the research and development difficulty of laser interferometer compared with
Greatly, and special wavelength laser interferometer involves great expense, and therefore, the species of the laser interferometer of existing special wavelength is less.
In addition, existing laser interferometer is typically only capable to produce a kind of wavelength laser, the wavelength corresponding to the wavelength is determined
Optical system, application more limits to.
Utility model content
The utility model is, and it is an object of the present invention to provide a kind of be used to detect any wavelength in order to solving the above problems and carry out
The interference device and its system of optical system transmission wavefront.
The utility model provides a kind of interference device for being used to detect any wavelength optical system transmission wavefront, has this
The feature of sample, including：Laser generating unit, for producing the LASER Light Source of at least two wavelength；Light source converting unit, for inciting somebody to action
LASER Light Source is converted to spot light；Collimation unit, spot light is collimated to form collimated light beam；Standard mirror, for transmissive parallel or
A part for converging beam is irradiated in optical system, and another part of reflected parallel or converging beam forms reference beam；
Reflector element, parallel or converging beam the part Jing Guo optical system is reflected to form into test beams；Spectrophotometric unit, transmission
Spot light simultaneously receives reference beam and test beams are reflected；Unit is corrected, to the focal position of the light beam of different wave length
It is corrected；And imaging unit, the reference beam and test beams for receiving spectrophotometric unit reflection carry out interference imaging.
It is used to detect the interference device of any wavelength optical system transmission wavefront provided by the utility model, can be with
Have the feature that：Wherein, laser generating unit includes at least two long wavelength lasers.
It is used to detect the interference device of any wavelength optical system transmission wavefront provided by the utility model, can be with
Have the feature that：Wherein, laser generating unit is FM laser, and the FM laser is used to produce at least two differences
The LASER Light Source of wavelength.
It is used to detect the interference device of any wavelength optical system transmission wavefront provided by the utility model, can be with
Have the feature that：Wherein, correction unit is arranged between spectrophotometric unit and collimation unit at spectrophotometric unit, for mending
Repay colimated light system different wave length spot light position and correct the reference beam of different wave length and the focal position of test beams.
It is used to detect the interference device of any wavelength optical system transmission wavefront provided by the utility model, can be with
Have the feature that：Wherein, correction unit is arranged between spectrophotometric unit and imaging unit at imaging unit, for school
The focal position of positive reference beam and test beams, and make the focal position of different wave length light beam and the generation position shape of spot light
Into conjugation.
It is used to detect the interference device of any wavelength optical system transmission wavefront provided by the utility model, can be with
Have the feature that：Wherein, it is two to correct unit, is separately positioned between spectrophotometric unit and imaging unit and is divided and be single
Between member and light source converting unit, it is respectively used to compensate colimated light system different wave length spot light position, and correct different wave length
The focal position of reference beam and test beams.
It is used to detect the interference device of any wavelength optical system transmission wavefront provided by the utility model, can be with
Have the feature that：Wherein, correcting unit includes positive lens and the one to multiple kind in negative lens.
It is used to detect the interference device of any wavelength optical system transmission wavefront provided by the utility model, can be with
Have the feature that：Wherein, correcting unit includes expanding component and the one to multiple kind in shrink beam component.
It is used to detect the interference device of any wavelength optical system transmission wavefront provided by the utility model, can be with
Have the feature that：Wherein, correction unit includes the one to multiple kind of different-thickness flat board.
The utility model additionally provides a kind of interference system for being used to detect any wavelength optical system transmission wavefront, has
Such feature, including：Interference device, the wavelength for producing at least two carry out interference imaging to the optical system of any wavelength；
And computing terminal, the interference coefficient of wavelength is calculated according to the interference imaging of interference device and then obtains the interference wave of any wavelength
Before, wherein, interference device is above-mentioned interference device.
The effect of utility model and effect
A kind of interference device for being used to detect any wavelength optical system transmission wavefront according to involved by the utility model,
Because employ laser generating unit, light source converting unit, collimation unit, spectrophotometric unit, correction unit and imaging unit, institute
So that interference device of the present utility model can produce the LASER Light Source of at least two wavelength, and collimation formation is carried out to LASER Light Source
Collimated light beam, the speculum after reference mirror and optical system to be measured are reflected back spectrophotometric unit and form reference beam and test light
Beam, interference imaging is carried out on imaging unit under the correction of correction unit, it is therefore, of the present utility model to be used to detect any ripple
The laser that the interference device of the transmission wavefront of long optical system can produce multi-wavelength enters to optical system progress interference imaging
Row detection so that the transmission wavefront of the optical system of any wavelength can carry out interference imaging, have wide applicability, separately
Outside, interference imaging is carried out to the optical system of any wavelength by interference device of the present utility model, according to Zernike multinomials
The transmission wavefront of the optical system can be calculated with the relation of function of wavelength.
Brief description of the drawings
Fig. 1 is the interference system for being used to detect the transmission wavefront of any wavelength optical system in embodiment one of the present utility model
The structural representation of system；
Fig. 2 is the interference dress for being used to detect the transmission wavefront of any wavelength optical system in embodiment one of the present utility model
The structural representation put；
Fig. 3 is the interference system for being used to detect the transmission wavefront of any wavelength optical system in embodiment two of the present utility model
The structural representation of system；
Fig. 4 is the interference dress for being used to detect the transmission wavefront of any wavelength optical system in embodiment two of the present utility model
The structural representation put；
Fig. 5 is the interference system for being used to detect the transmission wavefront of any wavelength optical system in embodiment three of the present utility model
The structural representation of system；
Fig. 6 is the interference dress for being used to detect the transmission wavefront of any wavelength optical system in embodiment three of the present utility model
The structural representation put.
Embodiment
In order that technological means, creation characteristic, reached purpose and effect that the utility model is realized are easy to understand, with
Lower embodiment combination accompanying drawing to the utility model be used for detect any wavelength optical system transmission wavefront interference device and its
System is specifically addressed.
<Embodiment one>
Fig. 1 is the interference system for being used to detect the transmission wavefront of any wavelength optical system in embodiment one of the present utility model
The structural representation of system, Fig. 2 are the transmission wavefronts for being used to detect any wavelength optical system in embodiment one of the present utility model
Interference device structural representation.
As shown in Figure 1, 2, the interference system 100 of the transmission wavefront for detecting any wavelength optical system is used to detect and appointed
The transmission wavefront of meaning wavelength optical system, including interference device 10, optical system 20 and computing terminal 30.
Interference device 10 is used to carry out optical system 20 interference imaging, including the conversion of laser generating unit 11, light source is single
Member 12, collimation unit 13, standard mirror 14, reflector element 15, spectrophotometric unit 16, correction unit 17 and imaging unit 18.
Laser generating unit 11 is three kinds of lasers, and it is respectively λ to produce wavelength1、λ2、λ3Three kinds of LASER Light Sources, wherein λ1
＜ λ2＜ λ3。
Light source converting unit 12 is microcobjective, for LASER Light Source to be converted into spot light.
Collimation unit 13 is collimater, and spot light is collimated to form collimated light beam.
Standard mirror 14 is standard flat mirror, and the part for transmissive parallel light beam is irradiated to optical system 20, and instead
The another part for penetrating collimated light beam forms reference beam.
Reflector element 15 is reflecting spherical mirror, and a part for the converging beam Jing Guo optical system 20 is reflected to form into test
Light beam.
Spectrophotometric unit 16 is spectroscope, and for transmission point light beam of light source, and reception reference beam and test beams are gone forward side by side
Row reflection.
Correction unit 17 is arranged between spectrophotometric unit 16 and collimation unit 13 at spectrophotometric unit 16, for correcting not
The focal position of the light beam of co-wavelength.Correction unit 17 is runner, is provided with three through holes on the runner, in one of through hole
Positive meniscus lens is provided with, diverging meniscus lens is provided with another through hole, an also through hole does not place lens.When wavelength is
λ1When, runner is changed to diverging meniscus lens, works as wavelength X2When, runner is changed to the through hole for not placing lens, works as wavelength X3
When, runner is changed to diverging meniscus lens.
Imaging unit 18 is imager, receives the reference beam reflected by spectrophotometric unit 16 and test beams are done
Relate to imaging.
Computing terminal 30 is computer, is inside preset with interference calculation procedure, is connected with imaging unit 18, is utilized according to imaging
Interference calculation procedure obtains Zernike multinomials, and the relation calculating optical system based on Zernike multinomials and function of wavelength
20 transmission wavefront.
The course of work for the interference system 100 for the transmission wavefront for detecting any wavelength optical system is：Laser produces
It is respectively λ that unit 11, which produces wavelength,1、λ2、λ3Three kinds of LASER Light Sources, wherein λ1＜ λ2＜ λ3, light source converting unit 12 is by laser
Light source is converted to spot light, and collimation unit 13 collimates spot light to form collimated light beam, and collimated light beam first passes through spectrophotometric unit
16 and correction unit 17, spectrophotometric unit 16 is directly through when by spectrophotometric unit 16 and without light splitting, then should
A part for collimated light beam is irradiated in optical system 20 through standard flat mirror 14, and another part reflects to form reference beam simultaneously
Return on spectrophotometric unit 16, a part for the collimated light beam Jing Guo optical system 20 is reflected to form test light by reflector element 15
Beam is simultaneously returned on spectrophotometric unit 16, and correction unit 17 corrects the focusing position of the light beam of different wave length by way of rotating quasi- wheel
Put, imaging unit 18 receives carries out interference imaging, computing terminal 30 by the reference beam and test beams of spectrophotometric unit 16
It is λ that optical system 20, which is respectively obtained, in wavelength1、λ2And λ3Zernike multinomials Z1(λ1)、Z2(λ1)、……Zk(λ1)、Z1
(λ2)、Z2(λ2)、……Zk(λ2) and Z1(λ3)、Z2(λ3)、……Zk(λ3)。
In wavelength it is λ by obtained optical system1、λ2And λ3Zernike multinomials substitute into formula：
In formula, i=1,2,3 ..., k, k≤37, m=1 or 2 or 3,1≤X1≤ 2,3≤X2≤4。
Calculating parameter A1i、A2iAnd A3iValue.
The A that will be obtained1i、A2iAnd A3iSubstitute into again in above-mentioned formula.Calculating wavelength is λnOptical system
Zernike multinomials Zk(λn).Wherein, 200nm≤λ1≠λ2≠λ3≠λn≤2000nm。
According to obtained λnOptical system Zernike multinomials Zk(λn) fitting wavelength is λnOptical system it is saturating
Before ejected wave.
<Embodiment two>
Fig. 3 is the interference system for being used to detect the transmission wavefront of any wavelength optical system in embodiment two of the present utility model
The structural representation of system, Fig. 4 are the transmission wavefronts for being used to detect any wavelength optical system in embodiment two of the present utility model
Interference device structural representation.
As shown in Figure 3,4, the interference system 100 ' of the transmission wavefront for detecting any wavelength optical system is used to detect
The transmission wavefront of any wavelength optical system, including interference device 10 ', optical system 20 ' and computing terminal 30 '.
Interference device 10 ' is used to carry out optical system 20 ' interference imaging, including the conversion of laser generating unit 11 ', light source
Unit 12 ', collimation unit 13 ', standard mirror 14 ', reflector element 15 ', spectrophotometric unit 16 ', correction unit 17 ' and imaging unit
18’。
Laser generating unit 11 ' is three kinds of lasers, and it is respectively λ to produce wavelength1’、λ2’、λ3' three kinds of LASER Light Sources, its
Middle λ1' ＜ λ2' ＜ λ3’。
Light source converting unit 12 ' is microcobjective, for LASER Light Source to be converted into spot light.
Collimation unit 13 ' is collimater, and spot light is collimated to form collimated light beam.
Standard mirror 14 ' is standard spherical mirror, and the part for transmiting converging beam is irradiated to optical system 20, and instead
The another part for penetrating converging beam forms reference beam.
Reflector element 15 ' is plane of reflection mirror, and a part for the collimated light beam Jing Guo optical system 20 is reflected to form into survey
Try light beam.
Spectrophotometric unit 16 ' is spectroscope, and for transmission point light beam of light source, and reception reference beam and test beams are gone forward side by side
Row reflection.
Correction unit 17 ' is arranged between spectrophotometric unit 16 ' and imaging unit 18 ' close to the place of imaging unit 18 ', for school
The focal position of positive light beam, and the focal position of light beam and the generation position of spot light is formed and is conjugated.Unit 17 ' is corrected to turn
Take turns, be provided with three through holes on the runner, be provided with one of through hole and expand component, shrink beam is provided with another through hole
Component, also a through hole do not place lens.When wavelength is λ1' when, runner is changed to expanding at component, works as wavelength X2' when, turn
Rotation shifts to the through hole for not placing lens, works as wavelength X3' when, runner is changed to shrink beam component.
Imaging unit 18 ' is imager, receives the reference beam reflected by spectrophotometric unit 16 ' and test beams are carried out
Interference imaging.
Computing terminal 30 ' is computer, is inside preset with interference calculation procedure, is connected with imaging unit 18 ', according to imaging profit
Zernike multinomials, and the relation calculating optical system based on Zernike multinomials and function of wavelength are obtained with interference calculation procedure
The transmission wavefront of system 20 '.
<Embodiment three>
Fig. 5 is the interference system for being used to detect the transmission wavefront of any wavelength optical system in embodiment three of the present utility model
The structural representation of system, Fig. 6 are the transmission wavefronts for being used to detect any wavelength optical system in embodiment three of the present utility model
Interference device structural representation.
As shown in Figure 5,6, the interference system 100 " of the transmission wavefront for detecting any wavelength optical system is used to detect
The transmission wavefront of any wavelength optical system, including interference device 10 ", optical system 20 " and computing terminal 30 ".
Interference device 10 " is used to carry out optical system 20 " interference imaging, including the conversion of laser generating unit 11 ", light source
Unit 12 ", collimation unit 13 ", standard mirror 14 ", reflector element 15 ", spectrophotometric unit 16 ", correction unit 17 " and imaging unit
18”。
Laser generating unit 11 " is three kinds of lasers, and it is respectively λ to produce wavelength1”、λ2”、λ3" three kinds of LASER Light Sources, its
Middle λ1" ＜ λ2" ＜ λ3”。
Light source converting unit 12 " is microcobjective, for LASER Light Source to be converted into spot light.
Collimation unit 13 " is collimater, and spot light is collimated to form collimated light beam.
Standard mirror 14 " is standard spherical mirror, and the part for transmiting converging beam is irradiated to optical system 20, and instead
The another part for penetrating converging beam forms reference beam.
Reflector element 15 " is plane of reflection mirror, and a part for the collimated light beam Jing Guo optical system 20 " is reflected to form into survey
Try light beam.
Spectrophotometric unit 16 " is spectroscope, and for transmission point light beam of light source, and reception reference beam and test beams are gone forward side by side
Row reflection.
It is two to correct unit 17 ", is separately positioned between spectrophotometric unit 16 " and imaging unit 18 " close to imaging unit
Between 18 " places and spectrophotometric unit 16 " and light source converting unit 12 ", for correcting the focal position of light beam, and make the poly- of light beam
Burnt position and the generation position of spot light, which are formed, to be conjugated.
Two correction units 17 " are runner, and three through holes are provided with the runner, thickness is provided with one of through hole
Larger flat board mirror is spent, the less flat board mirror of thickness is provided with another through hole, an also through hole does not place lens.Work as ripple
A length of λ1" when, runner is changed to there is the larger flat board Jing Chu of thickness, works as wavelength X2" when, runner is changed to not placing the logical of lens
At hole, work as wavelength X3" when, runner is changed to the less flat board Jing Chu of thickness.
Imaging unit 18 " is imager, receives the reference beam reflected by spectrophotometric unit 16 " and test beams are carried out
Interference imaging.
Computing terminal 30 " is computer, is inside preset with interference calculation procedure, is connected with imaging unit 18 ", according to imaging profit
Zernike multinomials, and the relation calculating optical system based on Zernike multinomials and function of wavelength are obtained with interference calculation procedure
The transmission wavefront of system 20 ".
The effect of embodiment and effect
A kind of interference device for being used to detect any wavelength optical system transmission wavefront in above-described embodiment, because
Laser generating unit, light source converting unit, collimation unit, spectrophotometric unit, correction unit and imaging unit are employed, so,
Interference device of the present utility model can produce the LASER Light Source of at least two wavelength, LASER Light Source is carried out collimation formed it is parallel
Light beam, the speculum after reference mirror and optical system to be measured are reflected back spectrophotometric unit and form reference beam and test beams,
Correct and interference imaging is carried out on imaging unit under the correction of unit, it is therefore, of the present utility model to be used to detect any wavelength light
The laser that the interference device of the transmission wavefront of system can produce multi-wavelength is examined to optical system progress interference imaging
To survey so that the transmission wavefront of the optical system of any wavelength can carry out interference imaging, have wide applicability, in addition,
Interference imaging is carried out to the optical system of any wavelength by interference device of the present utility model, according to Zernike multinomials with
The transmission wavefront of the optical system can be calculated in the relation of function of wavelength.
In addition, in the above-described embodiments, laser generating unit produces the LASER Light Source of 3 kinds of wavelength, and in actual applications, production
Raw two or more wavelength can be detected.
In addition, in above-described embodiment, collimation unit is collimater, and in practical application, collimation unit can also be achromatism
Lens, when collimation unit is achromatic lens, interference device can be not provided with correcting unit, that is, correct unit and collimation unit
For same optics.
Above-mentioned embodiment is preferred case of the present utility model, is not intended to limit the scope of protection of the utility model.
Claims (10)
- A kind of 1. interference device for being used to detect the transmission wavefront of any wavelength optical system, for any wavelength optical system Carry out interference imaging, it is characterised in that including：Laser generating unit, for producing the LASER Light Source of at least two wavelength；Light source converting unit, for the LASER Light Source to be converted into spot light；Collimation unit, the spot light is collimated to form collimated light beam；Standard mirror, optical system is irradiated to for transmiting described parallel or converging beam a part, and reflected described parallel Or another part of converging beam forms reference beam；Reflector element, described parallel or converging beam the part Jing Guo the optical system is reflected to form into test beams；Spectrophotometric unit, transmit the spot light and receive the reference beam and the test beams are reflected；Unit is corrected, the focal position of the light beam of different wave length is corrected；AndImaging unit, the reference beam and the test beams for receiving the spectrophotometric unit reflection carry out interference imaging.
- 2. the interference device according to claim 1 for being used to detect the transmission wavefront of any wavelength optical system, its feature It is：Wherein, the laser generating unit includes at least two lasers.
- 3. the interference device according to claim 1 for being used to detect the transmission wavefront of any wavelength optical system, its feature It is：Wherein, the laser generating unit is FM laser, and the FM laser is used to produce at least two different wave lengths LASER Light Source.
- 4. the interference device according to claim 1 for being used to detect the transmission wavefront of any wavelength optical system, its feature It is：Wherein, the correction unit is arranged between the spectrophotometric unit and the collimation unit at the spectrophotometric unit, For compensating colimated light system different wave length spot light position and correcting the reference beam of different wave length and the focusing position of test beams Put.
- 5. the interference device according to claim 1 for being used to detect the transmission wavefront of any wavelength optical system, its feature It is：Wherein, the correction unit is arranged between the spectrophotometric unit and the imaging unit at the imaging unit, For correcting the focal position of reference beam and test beams, and make the generation of the focal position and spot light of different wave length light beam Position forms conjugation.
- 6. the interference device according to claim 1 for being used to detect the transmission wavefront of any wavelength optical system, its feature It is：Wherein, the correction unit is two, is separately positioned between the spectrophotometric unit and the imaging unit and described Between spectrophotometric unit and the light source converting unit, it is respectively used to compensate colimated light system different wave length spot light position, and correct The reference beam of different wave length and the focal position of test beams.
- 7. the interference device according to claim 1 for being used to detect the transmission wavefront of any wavelength optical system, its feature It is：Wherein, the correction unit includes positive lens and the one to multiple kind in negative lens.
- 8. the interference device according to claim 1 for being used to detect the transmission wavefront of any wavelength optical system, its feature It is：Wherein, the correction unit includes expanding component with reducing the one to multiple kind of component.
- 9. the interference device according to claim 1 for being used to detect the transmission wavefront of any wavelength optical system, its feature It is：Wherein, the correction unit includes the one to multiple kind of different-thickness flat board.
- A kind of 10. interference system for being used to detect the transmission wavefront of any wavelength optical system, for detecting the light of any wavelength The transmission wavefront of system, it is characterised in that including：Interference device, the wavelength for producing at least two carry out interference imaging to the optical system of any wavelength；AndComputing terminal, the interference coefficient of the wavelength is calculated according to the interference imaging of the interference device and then obtained described any Before the interference wave of wavelength,Wherein, the interference device is the interference device in claim 1~9.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110307962A (en) * | 2019-06-28 | 2019-10-08 | 苏州维纳仪器有限责任公司 | The method of any wavelength transmission wavefront of detection optical system |
| CN113624456A (en) * | 2021-08-05 | 2021-11-09 | 苏州维纳仪器有限责任公司 | Multi-wavelength laser interference device |
| CN114858291A (en) * | 2022-07-05 | 2022-08-05 | 中国工程物理研究院激光聚变研究中心 | Laser link segmented wavefront detection method and device based on point diffraction |
-
2017
- 2017-08-22 CN CN201721050571.1U patent/CN207095826U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110307962A (en) * | 2019-06-28 | 2019-10-08 | 苏州维纳仪器有限责任公司 | The method of any wavelength transmission wavefront of detection optical system |
| CN110307962B (en) * | 2019-06-28 | 2020-10-27 | 苏州维纳仪器有限责任公司 | Method for detecting any wavelength transmission wavefront of optical system |
| CN113624456A (en) * | 2021-08-05 | 2021-11-09 | 苏州维纳仪器有限责任公司 | Multi-wavelength laser interference device |
| CN114858291A (en) * | 2022-07-05 | 2022-08-05 | 中国工程物理研究院激光聚变研究中心 | Laser link segmented wavefront detection method and device based on point diffraction |
| CN114858291B (en) * | 2022-07-05 | 2022-09-20 | 中国工程物理研究院激光聚变研究中心 | Laser link segmented wavefront detection method and device based on point diffraction |
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