CN207081944U - A kind of real-time alignment device of three axles applied to high-end exposure machine - Google Patents
A kind of real-time alignment device of three axles applied to high-end exposure machine Download PDFInfo
- Publication number
- CN207081944U CN207081944U CN201720812488.7U CN201720812488U CN207081944U CN 207081944 U CN207081944 U CN 207081944U CN 201720812488 U CN201720812488 U CN 201720812488U CN 207081944 U CN207081944 U CN 207081944U
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- China
- Prior art keywords
- axis module
- pusher cylinder
- real
- alignment device
- time alignment
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Abstract
A kind of real-time alignment device of three axles applied to high-end exposure machine,Including bottom plate,For the X-axis module for the slide rail for providing X-direction,For the Y-axis module for the slide rail for providing Y direction,Pusher cylinder,Electric rotating machine and manipulator,Y-axis module is fixed on bottom plate along Y-direction,The X-axis module is set in X direction,And one end end of X-axis module is erected above Y-axis module,With cause X-axis module on Y-axis module it is moveable in the y direction,Pusher cylinder is arranged on the side of X-axis module and can moved in X direction on X-axis module,Electric rotating machine is fixed on pusher cylinder lower end and the movement of Z-direction can be realized under the drive of pusher cylinder,Manipulator is fixed in the rotary shaft of electric rotating machine lower end,To cause manipulator to realize the movement in XYZ directions and the rotation in θ directions,The utility model can realize the motion in XYZ θ directions simultaneously,And meet high-precision contraposition production requirement,Also improve production efficiency,Reduce hand labor intensity.
Description
Technical field
It the utility model is related to machinery equipment field, and in particular to a kind of three axles applied to high-end exposure machine align in real time
Device.
Background technology
The alignment device for being presently used for high-end exposure machine has many kinds, for example, being divided by the mobile number of axle, it includes single shaft
Alignment device and twin shaft alignment device, wherein single shaft alignment device are merely capable of realizing the change in location on a direction, i.e. XYZ
Some in three directions, relatively simple for structure, achievable function is relatively fewer.Twin shaft alignment device uses bimodulus group knot
The displacement of both direction in structure, i.e. XYZ, twin shaft alignment device is mostly used for the mechanical movements such as carrying, but can not meet height
The contraposition demand of precision.
Utility model content
The utility model is in order to solve above mentioned problem existing for prior art, there is provided a kind of applied to high-end exposure machine
The real-time alignment device of three axles, the real-time alignment device of three axles can realize the motion in XYZ θ directions simultaneously, high-precision so as to meet
The contraposition production requirement of degree.
To achieve the above object, the utility model provides a kind of three axles applied to high-end exposure machine and aligns dress in real time
Put, including the Y-axis module of the X-axis module of bottom plate, slide rail for providing X-direction, slide rail for providing Y direction, push away
Take offence cylinder, electric rotating machine and manipulator, the Y-axis module is fixed on bottom plate along Y-direction, and the X-axis module is set in X direction
Put, and one end end of X-axis module is erected above Y-axis module, to cause X-axis module to be moved on Y-axis module along Y-direction
Dynamic, the pusher cylinder is arranged on the side of X-axis module and can moved in X direction on X-axis module, and the electric rotating machine is fixed
The movement of Z-direction can be realized in pusher cylinder lower end and under the drive in pusher cylinder, the manipulator is fixed on electric rotating machine
In the rotary shaft of lower end, to cause manipulator to realize the movement in XYZ directions and the rotation in θ directions.
As further preferred technical scheme of the present utility model, the Y-axis module, which is provided with, to be used to drive X-axis module to move
The first dynamic motor, the X-axis module are provided with the second motor for being used for driving pusher cylinder to move.
As further preferred technical scheme of the present utility model, first motor and the second motor are stepping electricity
Machine.
As further preferred technical scheme of the present utility model, the Y-axis module side is provided with what is be connected with X-axis module
First drag chain, the X-axis module side are provided with the second drag chain being connected with pusher cylinder.
It is provided with as further preferred technical scheme of the present utility model, below first drag chain and is used to support first to drag
First drag chain metal plate of chain, the second drag chain lower section are provided with the second drag chain metal plate for being used for supporting the second drag chain.
As further preferred technical scheme of the present utility model, the hand of the manipulator is grabbed as sucker.
As further preferred technical scheme of the present utility model, the effective travel of the X-axis module and the Y-axis mould
Photoelectric sensor switch is equipped with left and right is spacing.
Three axles real-time alignment device of the present utility model applied to high-end exposure machine can reach following beneficial effect：
1）Using X-axis and the bimodulus group of Y-axis, and pusher cylinder and electric rotating machine are combined, it is comprehensive that manipulator can be achieved
Mobile and rotation；
2）Visual identity product front and back end is first passed through, and by selecting the direction of cylinder to rotate, manipulator can unite product
One places；
3）Photoelectric sensor switch is installed, it is ensured that pusher cylinder is run in safety travel；
4）The design of the utility model apparatus structure is close, and logic sense is strong, multiple functional, unique novel.
Brief description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and detailed description.
Fig. 1 is that the structure of an example of the real-time alignment device offer of three axles that the utility model is applied to high-end exposure machine is shown
It is intended to.
In figure：1st, bottom plate, 2, Y-axis module, 3, X-axis module, 4, pusher cylinder, 5, electric rotating machine, 6, manipulator, 7, second
Motor, the 8, first motor, 9, photoelectric sensor switch.
The utility model purpose is realized, functional characteristics and advantage will be described further referring to the drawings in conjunction with the embodiments.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described further.In preferred embodiment
Cited such as " on ", " under ", "left", "right", only " centre " and " one " term, understanding for ease of narration, and be not used to
The enforceable scope of the utility model is limited, its relativeness is altered or modified, in the case where changing technology contents without essence, when also
It is considered as the enforceable category of the utility model.
Fig. 1 is that the structure of an example of the real-time alignment device offer of three axles that the utility model is applied to high-end exposure machine is shown
It is intended to, as shown in figure 1, the real-time alignment device of three axles applied to high-end exposure machine includes bottom plate 1, for providing X-direction
The X-axis module 3 of slide rail, the Y-axis module 2 of the slide rail for providing Y direction, pusher cylinder 4, electric rotating machine 5 and manipulator 6,
The Y-axis module 2 is fixed on bottom plate 1 along Y-direction, and the X-axis module 3 is set in X direction, and one end end of X-axis module 3
Be erected at the top of Y-axis module 2, with cause X-axis module 3 on Y-axis module 2 it is moveable in the y direction, the pusher cylinder 4 is set
It can be moved on X-axis module 3 in the side of X-axis module 3 and in X direction, the electric rotating machine 5 is fixed on the lower end of pusher cylinder 4
And the movement of Z-direction can be realized under the drive of pusher cylinder 4, the manipulator 6 is fixed on the rotary shaft of the lower end of electric rotating machine 5
On, to cause manipulator 6 to realize the movement in XYZ directions and the rotation in θ directions.
In specific implementation, the Y-axis module 2 is provided with the first motor 8 for being used for driving X-axis module 3 to move, the X-axis
Module 3 is provided with the second motor 7 for being used for driving pusher cylinder 4 to move, and the motor 7 of the first motor 8 and second is stepping
Motor.
In specific implementation, the side of Y-axis module 2 is provided with the first drag chain being connected with X-axis module 3, the X-axis module 3
Side is provided with the second drag chain being connected with pusher cylinder 4.
The the first drag chain metal plate for being used for supporting the first drag chain is provided with specific implementation, below first drag chain, second drags
The the second drag chain metal plate for being used for supporting the second drag chain is provided with below chain.
In specific implementation, the hand of the manipulator 6 is grabbed as sucker.
Light inductance is equipped with specific implementation, on the left and right of the effective travel of the X-axis module 3 and the Y-axis mould is spacing
Inductive switch 9.
The difference for four parts that the real-time alignment device of three axles that the utility model is applied to high-end exposure machine mainly includes
Function is as follows：
First component, Y-axis module 2, it controls the movement of whole device in the Y direction；
Second component, X-axis module 3, it controls the displacement of pusher cylinder 4, electric rotating machine 5 and manipulator 6 in X-direction；
Third member, pusher cylinder 4, its cylinder promote the displacement that electric rotating machine 5 and manipulator 6 can be achieved in Z-direction；
Part IV, rotary cylinder, its can driving mechanical hand 6 can realize that θ directions rotate, can manipulator 6 place product before,
Product front and back end can be adjusted, to realize that the unified of product is placed.
Although the foregoing describing specific embodiment of the present utility model, those skilled in the art should manage
Solution, these are merely illustrative of, and various changes or modifications can be made to present embodiment, without departing from original of the present utility model
Reason and essence, the scope of protection of the utility model are only limited by the claims that follow.
Claims (7)
1. a kind of real-time alignment device of three axles applied to high-end exposure machine, it is characterised in that including bottom plate, for providing X-axis
Y-axis module, pusher cylinder, electric rotating machine and the manipulator of the X-axis module of the slide rail in direction, the slide rail for providing Y direction,
The Y-axis module is fixed on bottom plate along Y-direction, and the X-axis module is set in X direction, and one end end of X-axis module is set up
Above Y-axis module, with cause X-axis module on Y-axis module it is moveable in the y direction, the pusher cylinder is arranged on X-axis module
Side and can be moved in X direction on X-axis module, the electric rotating machine is fixed on pusher cylinder lower end and can be in pusher cylinder
Drive under realize the movement of Z-direction, the manipulator is fixed in the rotary shaft of electric rotating machine lower end, to cause manipulator can
Realize the movement in XYZ directions and the rotation in θ directions.
2. according to the real-time alignment device of three axles applied to high-end exposure machine described in claim 1, it is characterised in that the Y
Axle mould group is provided with the first motor for being used for driving X-axis module to move, and the X-axis module, which is provided with, to be used to drive pusher cylinder to move
The second dynamic motor.
3. according to the real-time alignment device of three axles applied to high-end exposure machine described in claim 2, it is characterised in that described
One motor and the second motor are stepper motor.
4. according to the real-time alignment device of three axles applied to high-end exposure machine described in claim 3, it is characterised in that the Y
Axle mould group side is provided with the first drag chain being connected with X-axis module, and the X-axis module side is provided with second to be connected with pusher cylinder
Drag chain.
5. according to the real-time alignment device of three axles applied to high-end exposure machine described in claim 4, it is characterised in that described
The the first drag chain metal plate for being used for supporting the first drag chain is provided with below one drag chain, is provided with below the second drag chain and is used to support the second drag chain
The second drag chain metal plate.
6. according to the real-time alignment device of three axles applied to high-end exposure machine described in claim 1, it is characterised in that the machine
The hand of tool hand is grabbed as sucker.
7. according to the real-time alignment device of three axles applied to high-end exposure machine described in any one of claim 1 to 6, its feature exists
Photoelectric sensor switch is equipped with the left and right of, the effective travel of the X-axis module and the Y-axis mould is spacing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720812488.7U CN207081944U (en) | 2017-07-06 | 2017-07-06 | A kind of real-time alignment device of three axles applied to high-end exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720812488.7U CN207081944U (en) | 2017-07-06 | 2017-07-06 | A kind of real-time alignment device of three axles applied to high-end exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207081944U true CN207081944U (en) | 2018-03-09 |
Family
ID=61427141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720812488.7U Expired - Fee Related CN207081944U (en) | 2017-07-06 | 2017-07-06 | A kind of real-time alignment device of three axles applied to high-end exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207081944U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109773772A (en) * | 2019-04-01 | 2019-05-21 | 无锡丹尼克尔自动化科技有限公司 | A kind of multi-spindle machining hand component and multi-spindle machining hand |
| CN110004770A (en) * | 2019-05-24 | 2019-07-12 | 四川锐立文物保护科技有限公司 | A kind of paper deacidification Twin-shaft machinery arm |
-
2017
- 2017-07-06 CN CN201720812488.7U patent/CN207081944U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109773772A (en) * | 2019-04-01 | 2019-05-21 | 无锡丹尼克尔自动化科技有限公司 | A kind of multi-spindle machining hand component and multi-spindle machining hand |
| CN110004770A (en) * | 2019-05-24 | 2019-07-12 | 四川锐立文物保护科技有限公司 | A kind of paper deacidification Twin-shaft machinery arm |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180309 Termination date: 20200706 |