CN207068895U - Solar energy diffusion facilities offgas duct gas circuit preventing clogging up device - Google Patents

Abstract

The utility model relates to the field of solar cell production, in particular to a device for blocking the exhaust pipe of solar energy diffusion equipment. The anti-blocking device of the exhaust pipe of solar energy diffusion equipment, the air inlet pipe on the left side of the container is connected to the gas outlet of the quartz boat, the outlet pipe on the right side of the container is connected to the exhaust pipe, the container is filled with water, and the water surface is far from the outlet pipe or the inlet pipe The minimum distance is 2‑5cm. There is a water inlet pipe on the upper side wall of the container to connect to the external water source through the first valve. There is an outlet pipe on the lower side wall of the container to connect to the waste liquid collection barrel through the second valve. There is a pressure on the side wall of the liquid bottom. count. The beneficial effect of the utility model is that: the problem of the blockage of the diffusion tail gas pipeline is completely solved.

Description

Anti-clogging device for exhaust pipe gas path of solar diffusion equipment

technical field

The utility model relates to the field of solar cell production, in particular to a device for blocking the tail gas pipe of solar energy diffusion equipment.

Background technique

In the production process of solar cells (silicon wafers), the p-n junction is formed by the diffusion process, which belongs to the key process section of cell production. Therefore, the diffusion process is very important. During the diffusion process, a quartz boat is used. Usually, after using a new boat or a cleaned quartz boat, the quartz boat will be saturated to ensure that the square resistance of the produced cells is normal. However, within a period of time when the saturation process is carried out, there will be a problem that the tail gas pipeline will be blocked by white substances. First, it will cause the furnace tube pressure alarm; secondly, it will increase the cleaning times of the tail gas pipeline and the liquid collection bottle; finally, the phosphorus pentoxide produced will corrode the nozzle of the tail gas pipe and the furnace tube, reducing the service life of the equipment and increasing the cost consumption.

Utility model content

The technical problem to be solved by the utility model is: how to place the blockage of the tail gas pipeline in the diffusion process of the quartz boat.

The technical scheme adopted by the utility model is: the anti-blocking device of the exhaust pipe gas path of the solar energy diffusion equipment, the air inlet pipe on the left side wall of the container is connected to the gas outlet of the quartz boat, the gas outlet pipe is connected to the exhaust gas pipe on the right side wall of the container, and the container is installed There is water, the water surface is 2-5cm away from the air outlet pipe or the air inlet pipe, the water inlet pipe on the upper side wall of the container is connected to the external water source through the first valve, and the outlet pipe on the lower side wall of the container is connected to the waste liquid collection barrel through the second valve , with a pressure gauge on the side wall at the bottom of the liquid.

The beneficial effects of the utility model are: avoiding the blockage of the exhaust gas pipeline, reducing the cleaning times and time of the exhaust pipeline and the liquid collection bottle, increasing the service life of the exhaust gas pipe and the glass furnace tube, saving costs, and Completely solve the problem of blockage of the diffusion exhaust pipeline.

Description of drawings

Fig. 1 is a structural representation of the utility model;

Wherein, 1. air inlet pipe, 2. container, 3. water inlet pipe, 4. first valve, 5. air outlet pipe, 6. water, 7. second valve, 8. water outlet pipe, 9. pressure gauge.

Detailed ways

As shown in Figure 1, the utility model is installed on the gas outlet of the quartz boat through the air inlet pipe. During the diffusion process, the waste gas coming out from the gas outlet of the quartz boat contains nitrogen, oxygen, chlorine, and phosphorus pentoxide. Phosphorus pentoxide is white powder after cooling, which is easy to block the pipeline. When the exhaust gas enters the container through the intake pipe, because phosphorus pentoxide has strong hydrophilicity, it can absorb water in the air and deliquesce quickly, from The tail gas discharged from the outlet pipe does not contain phosphorus pentoxide, so it will not block the tail gas pipe anymore, and there is a pressure gauge at the bottom of the container. During the diffusion process, the density of water that absorbs phosphorus pentoxide becomes larger, and the pressure of the pressure gauge gradually increases. When the pressure gauge detects that the pressure reaches the rated pressure (preset), the second valve opens to discharge the water in the container to the waste liquid collection bucket, and then refills the container with water through the first valve. The first valve, the second valve and the pressure gauge are commonly connected to a control chip, and the control chip coordinates the opening and closing of the first valve and the second valve.

Claims (1)

1. solar energy diffusion facilities offgas duct gas circuit preventing clogging up device, it is characterised in that：Container left side wall Shang You air inlet pipe UNICOM The gas outlet of quartz boat, container right side wall Shang You escape pipes UNICOM exhaust pipe, container are equipped with water, water surface distance escape pipe or The distance of air inlet pipe is 2-5cm, has water inlet pipe to connect external source by the first valve on container upper side wall, in container lower wall There is outlet pipe to connect waste collection bucket by the second valve, have pressure gauge in the side wall of liquid bottom.