CN203281546U - Silicon wafer bubble washing device - Google Patents
Silicon wafer bubble washing device Download PDFInfo
- Publication number
- CN203281546U CN203281546U CN2013203126924U CN201320312692U CN203281546U CN 203281546 U CN203281546 U CN 203281546U CN 2013203126924 U CN2013203126924 U CN 2013203126924U CN 201320312692 U CN201320312692 U CN 201320312692U CN 203281546 U CN203281546 U CN 203281546U
- Authority
- CN
- China
- Prior art keywords
- silicon wafer
- breather pipe
- tube connector
- air pump
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model provides a silicon wafer bubble washing device which comprises a washing tank, a tray, a vent pipe, a connecting pipe, a check valve and an air pump. Annular protrusions are arranged on the inner wall of the washing tank, the tray is arranged on the annular protrusions, the vent pipe is arranged at the bottom of the washing tank and is wound into a spiral shape, vent holes are formed in the surface of the vent pipe, one end of the vent pipe is sealed, the other end of the vent pipe is connected with the connecting pipe, the connecting pipe is connected with the air pump, and the check valve is connected to the connecting pipe in series. The silicon wafer bubble washing device is good in washing effect and high in efficiency, shortens washing time, reduces the usage amount of water, and can prevent impurities from entering in the washing process.
Description
Technical field
The utility model relates to a kind of silicon chip cleaning device, particularly a kind of silicon wafer bubbling cleaning device.
Background technology
In silicon substrate manufacture of solar cells process, need to use the matrix material of silicon chip as battery,, in order to increase the absorption to solar energy, need to carry out matte to silicon chip surface and process, thereby namely utilize Acidic Liquid or alkalies to corrode and form matte silicon chip surface.After matte forms, also need silicon chip surface is cleaned, traditional cleaning device cleaning performance is poor, and easily impurity is brought into.
The utility model content
The technical problem that (one) will solve
The technical problems to be solved in the utility model is to provide the good and difficult silicon wafer bubbling cleaning device that impurity is brought into of a kind of cleaning performance.
(2) technical scheme
for solving the problems of the technologies described above, the utility model provides a kind of silicon wafer bubbling cleaning device, comprise rinse bath 1, pallet 2, breather pipe 5, tube connector 7, check-valves 8 and air pump 10, the inwall of described rinse bath 1 is provided with annular protrusion 3, described pallet 2 is arranged on described annular protrusion 3, described breather pipe 5 is arranged on the bottom of described rinse bath 1, described breather pipe 5 spirally-wounds, the surface of described breather pipe 5 offers passage 6, one end sealing and the other end of described breather pipe 5 connect described tube connector 7, described tube connector 7 connects described air pump 10, described check-valves 8 is serially connected on described tube connector 7.
Further, also comprise filter 9, described filter 9 is serially connected on described tube connector 7, and described filter 9 is between described air pump 10 and described check-valves 8.
Further, the diameter of described passage 6 is more than or equal to 2mm and less than or equal to 3mm.
(3) beneficial effect
The utility model silicon wafer bubbling cleaning device, cleaning performance is good and efficiency is high, has reduced scavenging period, has saved the use amount of water, and can prevent that in cleaning process impurity from entering.
Description of drawings
Fig. 1 is the structural representation of the utility model silicon wafer bubbling cleaning device;
Fig. 2 is the structural representation of the breather pipe of the utility model silicon wafer bubbling cleaning device.
The specific embodiment
consult Fig. 1～Fig. 2, the utility model provides a kind of silicon wafer bubbling cleaning device, comprise rinse bath 1, pallet 2, breather pipe 5, tube connector 7, check-valves 8 and air pump 10, inwall at rinse bath 1 is provided with annular protrusion 3, pallet 2 is arranged on annular protrusion 3, breather pipe 5 is arranged on the bottom of rinse bath 1, these breather pipe 5 spirally-wounds, offer passage 6 on the surface of breather pipe 5, in the present embodiment, the diameter of this passage 6 is more than or equal to 2mm and less than or equal to 3mm, 2.5mm preferably, one end sealing and the other end of breather pipe 5 connect tube connector 7, tube connector 7 connects air pump 10, check-valves 8 is serially connected on tube connector 7, in order to prevent that impurity from entering, also comprise filter 9 in the present embodiment, this filter 9 is serially connected on tube connector 7, and between air pump 10 and check-valves 8.
The utility model silicon wafer bubbling cleaning device, cleaning performance is good and efficiency is high, has reduced scavenging period, has saved the use amount of water, and can prevent that in cleaning process impurity from entering.
The above is only preferred embodiment of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (3)
1. silicon wafer bubbling cleaning device, it is characterized in that: comprise rinse bath (1), pallet (2), breather pipe (5), tube connector (7), check-valves (8) and air pump (10), the inwall of described rinse bath (1) is provided with annular protrusion (3), described pallet (2) is arranged on described annular protrusion (3), described breather pipe (5) is arranged on the bottom of described rinse bath (1), described breather pipe (5) spirally-wound, the surface of described breather pipe (5) offers passage (6), one end sealing and the other end of described breather pipe (5) connect described tube connector (7), described tube connector (7) connects described air pump (10), described check-valves (8) is serially connected on described tube connector (7).
2. silicon wafer bubbling cleaning device as claimed in claim 1, it is characterized in that: also comprise filter (9), described filter (9) is serially connected on described tube connector (7), and described filter (9) is positioned between described air pump (10) and described check-valves (8).
3. silicon wafer bubbling cleaning device as claimed in claim 1, it is characterized in that: the diameter of described passage (6) is more than or equal to 2mm and less than or equal to 3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203126924U CN203281546U (en) | 2013-05-31 | 2013-05-31 | Silicon wafer bubble washing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203126924U CN203281546U (en) | 2013-05-31 | 2013-05-31 | Silicon wafer bubble washing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203281546U true CN203281546U (en) | 2013-11-13 |
Family
ID=49537920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013203126924U Expired - Fee Related CN203281546U (en) | 2013-05-31 | 2013-05-31 | Silicon wafer bubble washing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203281546U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103878141A (en) * | 2014-03-24 | 2014-06-25 | 安徽安芯电子科技有限公司 | Semiconductor wafer washing device |
| CN105195476A (en) * | 2015-09-09 | 2015-12-30 | 瓮福达州化工有限责任公司 | Phase separation tank cleaning device and method |
| CN107470260A (en) * | 2017-09-27 | 2017-12-15 | 界首市皖俊轴承有限公司 | A kind of bearing soaking and washing device based on bearing mnanufacture |
| CN107838111A (en) * | 2016-09-21 | 2018-03-27 | 苏州润桐专利运营有限公司 | A kind of bubbling rinsing device of engine cylinder cover |
| CN108246704A (en) * | 2018-03-13 | 2018-07-06 | 成都菲斯普科技有限公司 | A kind of medical vessels cleaning and sterilizing equipment |
| CN110773505A (en) * | 2019-10-31 | 2020-02-11 | 西安奕斯伟硅片技术有限公司 | Silicon wafer cleaning device and method |
-
2013
- 2013-05-31 CN CN2013203126924U patent/CN203281546U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103878141A (en) * | 2014-03-24 | 2014-06-25 | 安徽安芯电子科技有限公司 | Semiconductor wafer washing device |
| CN105195476A (en) * | 2015-09-09 | 2015-12-30 | 瓮福达州化工有限责任公司 | Phase separation tank cleaning device and method |
| CN105195476B (en) * | 2015-09-09 | 2018-08-14 | 瓮福达州化工有限责任公司 | A kind of split-phase tub cleaning method |
| CN107838111A (en) * | 2016-09-21 | 2018-03-27 | 苏州润桐专利运营有限公司 | A kind of bubbling rinsing device of engine cylinder cover |
| CN107470260A (en) * | 2017-09-27 | 2017-12-15 | 界首市皖俊轴承有限公司 | A kind of bearing soaking and washing device based on bearing mnanufacture |
| CN108246704A (en) * | 2018-03-13 | 2018-07-06 | 成都菲斯普科技有限公司 | A kind of medical vessels cleaning and sterilizing equipment |
| CN110773505A (en) * | 2019-10-31 | 2020-02-11 | 西安奕斯伟硅片技术有限公司 | Silicon wafer cleaning device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203281546U (en) | Silicon wafer bubble washing device | |
| CN203265136U (en) | Energy-saving cleaning machine | |
| CN203960940U (en) | A kind of rainwater-collecting filter | |
| CN203812898U (en) | Internal circulation type graphite boat cleaning device | |
| CN200986942Y (en) | Electrolysing solution intrinsic cycle mechanism | |
| CN204768008U (en) | Flashback tank | |
| CN204424294U (en) | A kind of fluff making device of solar battery sheet | |
| CN202973059U (en) | Novel periodic blowdown flash tank | |
| CN202136819U (en) | Recovery unit for recovering alcohol dissolved in propolis | |
| CN201056732Y (en) | Automatic pollution discharging device | |
| CN203123834U (en) | Immersed support aerating device for membrane module | |
| CN203292152U (en) | Flushing structure of flexible water tank | |
| CN204029835U (en) | A kind of back of the body burnishing device of crystal silicon solar batteries | |
| CN202643918U (en) | Chemical treatment tank device for silicon wafer texturization | |
| CN201999842U (en) | Novel special overflow system for anaerobic digester | |
| CN202268375U (en) | Fluff making device for solar battery silicon chip | |
| CN206313029U (en) | One kind exempts from intubation acid adding kettle | |
| CN204167273U (en) | A kind of circulation cleaning washing trough | |
| CN203265110U (en) | Solar silicon wafer cleaning fluid conduit | |
| CN203200836U (en) | Water-saving type wall with functions of recovering, storing and utilizing secondary water | |
| CN202762254U (en) | Sulfonated tail gas absorbing device | |
| CN208517159U (en) | A kind of sewage recycling device of office building | |
| CN203783655U (en) | Drain recovery device for steam turbine | |
| CN102423588A (en) | Water type air filter for wind power industry | |
| CN202850125U (en) | Circulation water tank |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131113 Termination date: 20170531 |