CN207050762U - Chip testing jig and chip test system - Google Patents

Abstract

The utility model embodiment, which provides a kind of chip testing jig and chip test system, the chip testing jig, to be included：Cover plate, be provided with chip briquetting on cover plate, chip briquetting is eated dishes without rice or wine in having, in eat dishes without rice or wine in be provided with conducting resinl；First driving means, first driving means and the conductive gemel connection；Control device, control device are arranged in cover plate, and control device is connected with first driving means, and when carrying out functional test to chip to be measured, control device controls conducting resinl to be in contraction state by first driving means；When carrying out pressing test to chip to be measured, control device controls conducting resinl outside to be upheld to what is eated dishes without rice or wine in described by first driving means, contacted with the induction region of chip to be measured, in the utility model embodiment, it can realize that functional test is carried out to chip on a device carries out pressing test again, the risk of chip testing is reduced, improves the efficiency of chip testing, reduces the cost of chip testing.

Description

Chip testing jig and chip test system

Technical field

The utility model embodiment is related to semiconductor test technical field, more particularly to a kind of chip testing jig and chip Test system.

Background technology

More and more fierce now with semicon industry competition, each chip producer increasingly pays close attention to the performance and chip of chip The test of performance, upgrade along with the iteration of chip, it is gradually various to chip test required testing process, test The difficulty of links gradually increases.In the links of existing chip testing, it is higher to press the condition of test request, past Past to need to carry out independent test, therefore, the testing process of chip is broadly divided into two parts of functional test and pressing test, should Test device used in two parts test is different, so when testing chip, it is necessary on two different devices Tested twice, such that testing cost increases, test increased risk.

Utility model content

The utility model embodiment provides a kind of chip testing jig and chip test system, it is possible to achieve in a device On functional test is carried out to chip and pressing is tested, reduce the risk of chip testing, improve the efficiency of chip testing, reduce The cost of chip testing.

First aspect, there is provided a kind of chip testing jig, including cover plate, chip briquetting is provided with the cover plate, it is described Chip briquetting is eated dishes without rice or wine in having, and conducting resinl is provided with being eated dishes without rice or wine in described；First driving means, the first driving means are set In in the cover plate, the first driving means and the conductive gemel connection；Control device, the control device are arranged at described In cover plate, the control device is connected with the first driving means, when carrying out functional test to chip to be measured, the control Device controls the conducting resinl to be in contraction state by the first driving means so that the conducting resinl and the core to be measured Interval between the induction region of piece be present；When carrying out pressing test to the chip to be measured, the control device passes through described First driving means control the conducting resinl to eat dishes without rice or wine in described it is outside uphold, connect with the induction region of the chip to be measured Touch.

In the utility model embodiment, pass through the chip testing jig, absorption, the work(of realizing chip that can be integrated Can test and press test, reduce the risk of chip testing, improve the efficiency of chip testing, reduce chip testing into This.

With reference in a first aspect, in the first implementation of first aspect, two suctions are provided with the chip briquetting Take the sucker of the chip to be measured.

With reference in a first aspect, or first aspect the first implementation, in second of implementation of first aspect, Eat dishes without rice or wine to be arranged symmetrically during described two suckers are relatively described.

In the utility model embodiment, described two suckers are eated dishes without rice or wine to be arranged symmetrically in, can be avoided in core In piece suction process, the warpage of chip is caused, influences the stability of chip pick-up.

With reference in a first aspect, or first aspect any of the first and second implementation, in first aspect The third implementation in, described two suckers are metal aperture.

In the utility model embodiment, it can avoid causing chip during chip pick-up using the design of metal aperture The pollution on surface, ensure the accuracy of chip testing result.

With reference in a first aspect, or first aspect the first any of to the third implementation, in first aspect The 4th kind of implementation in, two breather lines being connected respectively with described two suckers are additionally provided with inside the cover plate.

With reference in a first aspect, or first aspect the first any of to the 4th kind of implementation, in first aspect The 5th kind of implementation in, multiple chip briquettings are provided with the cover plate.

With reference in a first aspect, or first aspect the first any of to the 5th kind of implementation, in first aspect The 6th kind of implementation in, eated dishes without rice or wine in described in the position on the chip briquetting and the chip to be measured when being tested Position correspondence of the induction region in the chip-stored groove.

In the utility model embodiment, in the position eated dishes without rice or wine on the chip briquetting and the sensing of the chip to be measured Position of the region in the chip-stored groove matches, it is ensured that when testing chip, in being removed on chip briquetting The other parts eated dishes without rice or wine will not touch the induction region of chip, ensure that the accuracy of test result.

With reference in a first aspect, or first aspect the first any of to the 6th kind of implementation, in first aspect The 7th kind of implementation in, the first driving means are cylinder.

In the utility model embodiment, pass through the chip testing jig, it is possible to achieve chip pick-up, functional test and The integration operation of pressing test, reduces the risk of chip testing, improves the efficiency of chip testing, reduce chip testing Cost.

Second aspect, there is provided a kind of chip test system, including testing host, test table and as in first aspect Chip testing jig described in any implementation, wherein, the testing host is arranged on the test table, described At least one chip-stored groove is provided with chip testing mainboard.

With reference to second aspect, in the first implementation of second aspect, the chip test system also includes second Drive device, second drive device are connected with the control device, and the measurement jig is driven by the control device Draw or press the chip to be measured.

With reference to the first implementation of second aspect, or second aspect, in second of implementation of second aspect, institute Stating chip test system also includes fixture, and the fixture is arranged on the test table, the fixture be used for pair Chip briquetting in the chip testing jig is fixed.

In the utility model embodiment, pass through the chip test system, it is possible to achieve chip pick-up, functional test and The integration operation of pressing test, reduces the risk of chip testing, improves the efficiency of chip testing, reduce chip testing Cost.

Brief description of the drawings

Fig. 1 is the schematic diagram according to the chip testing jig of the utility model embodiment.

Fig. 2 is the schematic diagram according to the chip test system of the utility model embodiment.

Embodiment

Below in conjunction with accompanying drawing, the technical scheme in the application is described.

Fig. 1 show a kind of schematic diagram of chip testing jig of the utility model embodiment, as shown in figure 1, The chip testing jig includes cover plate 101, chip briquetting 102, in eat dishes without rice or wine 103, conducting resinl 104, first driving means are (in Fig. 1 It is not shown), control device (not shown in figure 1), the chip briquetting 102 is arranged on cover plate 101, and can be with the cover plate 101 One chip briquetting 102 is set, multiple chip briquettings 102 can also be set, sets multiple chip briquettings 102 to be somebody's turn to do in order to use Chip testing jig is tested multiple chips to be measured simultaneously.

It should be understood that in order to directly perceived, structure chart the looking up for the chip testing jig of the chip testing jig shown in Fig. 1 Figure, during real work should overturning to structure shown in Fig. 1, i.e., cover plate 101 is in the top position of chip briquetting 102.

Further, 103 are eated dishes without rice or wine in this on chip briquetting 102, eated dishes without rice or wine in this 103 area and the sense of chip to be measured Answer the area in region identical or the area of induction region slightly larger than chip to be measured, thereby may be ensured that and carried out to chip to be measured Other regions in addition to 103 of being eated dishes without rice or wine during test, on chip briquetting 102 in will not touch the induction region of chip to be measured, protect Demonstrate,prove the accuracy of test result.

Further, 103 are eated dishes without rice or wine in this in the position on chip briquetting 102 and the induction zone of chip to be measured when being tested Position of the domain in chip-stored groove matches, that is to say, that when testing chip to be measured, in eat dishes without rice or wine 103 in chip Position of the position with the induction region of chip to be measured in chip-stored groove on briquetting 102 is corresponding so that conducting resinl 104 from In when eating dishes without rice or wine to stretch out in 103, the induction region of chip to be measured can be touched.

Further, conducting resinl 104 is eated dishes without rice or wine in being arranged in 103, can eat dishes without rice or wine to be stretched in 103 in, in conduction Glue 104 therefrom eats dishes without rice or wine 103 when outwards upholding, and conducting resinl 104 can touch the induction region of chip to be measured, and to chip to be measured Induction region apply a certain size pressure.

It should be understood that it is to simulate human finger to chip to be measured that conducting resinl 104 is set in the utility model embodiment The operation that is pressed of induction region, so as to carry out pressing test to chip to be measured.

It should also be understood that pressing test is used for needing carrying dynamics to realize the test of the chip of corresponding function, example Such as, fingerprint chip, when testing fingerprint chip, the basic function of test fingerprint chip internal is not only needed, due to referring to Line chip, which needs to press by human finger, obtains the data messages such as fingerprint, so also needing to carry out pressing survey to the fingerprint chip Examination.

Further, first driving means are arranged in cover plate 101, are connected with conducting resinl 104, and the first driving means can Think that cylinder, hydraulic cylinder etc. can drive conducting resinl 104 to eat dishes without rice or wine to carry out flexible device in 103 in, the utility model is implemented Example only illustrates by taking cylinder as an example to first driving means, but the utility model embodiment is not limited to this.

Further, the control device is arranged in cover plate 101, is connected with first driving means, is entered to chip to be measured During row functional test, the control device controls conducting resinl 104 to be eated dishes without rice or wine in 103 in contraction-like by first driving means State, not the induction region with chip to be measured contact, to chip to be measured carry out pressing test when, the control device pass through first drive Dynamic device control conducting resinl 104 therefrom eats dishes without rice or wine outwards to uphold in 103, is contacted with the induction region of chip to be measured.

Further, the control device can also control conducting resinl 104 to press chip to be measured by first driving means The pressure size of induction region, when needing to test different chips, it is necessary to which difference presses the pressure of chip to be measured, this When can apply different size of pressure to conducting resinl 104 by first driving means using control device, to meet different cores The demand of the pressure size of the pressing test of piece.

Further, as shown in figure 1, being additionally provided with two suckers 105 on the surface of the chip briquetting 102, the sucker 105 For drawing chip to be measured.

It should be understood that in the utility model embodiment, multiple suckers can also be set on the chip briquetting 102, this is more The number of individual sucker 105 should be even number, and even number sucker 105 eats dishes without rice or wine 103 to be arranged symmetrically in, to ensure sucker 105 will not make chip to be measured produce warpage when drawing chip to be measured, and the utility model embodiment is only with the table of chip briquetting 102 Illustrated on face exemplified by two suckers of setting, but the utility model embodiment is not limited to this.

Further, sucker 105 can be vacuum sucking holes, and chip testing jig 100 can be treated by the vacuum sucking holes Survey chip to be drawn, and the chip after absorption is placed in chip-stored groove.

Further, two suckers 105 set on chip briquetting eat dishes without rice or wine 103 to be arranged symmetrically in, using should , can because sucker 105 eats dishes without rice or wine 103 to be arranged symmetrically in when chip testing jig 100 is drawn to chip to be measured It is unstable so as to reduce the absorption that the warpage of chip to be measured brings so as to draw to prevent chip to be measured from warpage occurs It is more firm during chip to be measured.

Further, sucker 105 can be metal aperture, because the existing device drawn to chip uses plastics more The structure of suction nozzle, when using plastics suction nozzle absorption chip, the surface of chip to be measured may be polluted in suction process, Therefore, the utility model embodiment uses the structure of metal sucker, can avoid the contaminated risk in surface of chip to be measured, make It is more accurate to obtain test result.

It should be understood that sucker 105 can be the hole directly set on chip briquetting 102, the chip briquetting 102 is metal material Matter.

Further, two relatively independent breather lines, one end of the breather line can also be set inside cover plate 101 It is connected with sucker 105, the other end is connected with the exit of sucker 105 can be made to produce the device of negative pressure or malleation, and this can make The exit of sucker 105 produces device device such as can be vacuum generating device of malleation or negative pressure, the breather line with Sucker 105 is mutually corresponding, due to being mutually independent between each breather line, so the control that breather line can be independent that This corresponding sucker 105 so that each sucker is independent of each other independently of one another when drawing chip to be measured.

It should be understood that the number of the breather line is corresponding with the number of sucker on chip briquetting 102, the utility model only with It is provided with chip briquetting 102 exemplified by two suckers 105, therefore, the utility model embodiment also has two each accordingly Independent breather line, but the utility model embodiment is not limited to this.

It should also be understood that when testing chip to be measured, the chip to be measured can be integrated circuit (Integrated Circuit, IC) chip or other kinds of chip, the utility model embodiment be not construed as limiting to this.

The utility model embodiment can be caused when testing chip by the chip testing jig, be realized and be inhaled The integration operation of coring piece, the functional test of chip and the pressing test of chip, when can avoid testing chip, Need to place chip and carry out functional test and pressing test respectively on a different device, improve the efficiency of test, reduce Testing cost.

Fig. 2 show a kind of schematic diagram of chip test system 200 of the utility model embodiment, such as Fig. 2 institutes Show, the chip test system 200 include Fig. 1 shown in chip testing jig 100, testing host 201, test table 202 with And second drive device (not shown in Fig. 2), as shown in Fig. 2 when being tested, testing host 201 and test table 202 are located at the lower section of chip testing jig 100.

Further, testing host 201 is arranged on test table 202, and multiple use are provided with the testing host 201 In the chip-stored groove of chip placement, it is possible to achieve once multiple chips are detected.

It should be understood that the chip-stored groove on the testing host 201 can also be one, but in order to improve testing efficiency, The chip-stored groove could be arranged to it is multiple, chip-stored groove for it is multiple when, the number of the chip-stored groove should be with chip The number of chip briquetting 102 in measurement jig 100 is corresponding, and position of the chip-stored groove on testing host also should be with core Position of the piece briquetting 102 on cover plate 101 is corresponding.

Further, test table 202 can carry out different tests to chip to be measured, for example, passing through different journeys Sequence is controlled, and functional test, pressing test or other tests can be carried out to chip to be measured.

Further, as shown in Fig. 2 the chip test system 200 also includes fixture 203, the fixture 203 is arranged on On test table 202, for when testing test chip, entering to the chip briquetting 102 on chip testing jig 100 Row is fixed so that chip briquetting 102 more smoothly compresses chip to be measured, so as to ensure the accuracy of chip testing.

Specifically, the fixture 203 is relative to symmetrical two parts of chip-stored groove, it is downward in chip testing jig Mobile compress is stored in after the chip to be measured in chip-stored groove, and fixture 203 can be same from both sides on test table When to center move, so as to fix the chip briquetting 102 for compressing chip to be measured.

Further, the second drive device is connected with control device, right by control device driving chip measurement jig 100 Chip to be measured is drawn or pressed.

Specifically, after absorption chip, the in the vertical direction of the second drive device driving chip measurement jig 100 is to moving down It is dynamic, chip to be measured is placed on the chip-stored groove on testing host 201, when testing chip to be measured (including work( Can test or press test), second drive device continues in the vertical direction and moved down, by being removed on chip briquetting 102 In other regions for eating dishes without rice or wine outside 103 compress chip to be measured, due to eated dishes without rice or wine in being set on chip briquetting 102 103 area etc. In or slightly larger than chip to be measured induction region area, therefore, in the second drive device driving chip measurement jig 100 perpendicular Nogata moves down upwards when compressing chip to be measured, and other regions eated dishes without rice or wine on chip briquetting 102 in addition to 103 will not be with treating Survey chip induction region contact, the damage of the induction region of chip will not be caused, at the same do not interfere with yet chip is carried out by The accuracy of test result during pressure test.

Below so that chip to be measured is IC chip as an example, the test process of IC chip is described in detail.

First, chip testing jig 100 draws chip to be measured, and the chip testing jig includes two chip briquettings, can be with Once draw two IC chips.

When being drawn to chip to be measured, the exit that can make sucker 105 being connected with breather line one end produces The device of malleation or negative pressure (this is sentenced exemplified by vacuum generator) drives it each right respectively by each independent breather line The sucker 105 answered so that the exit of sucker 105 produces negative pressure, and IC chip to be measured is lifted, in chip testing jig and test After chip-stored groove alignment on mainboard 201, vacuum generator is put down by breather line corresponding with 105 respective independence of sucker Steady inflates to sucker 105 so that the exit of sucker 105 is changed into zero-pressure or malleation from negative pressure, and IC chip to be measured is stable It is placed in the chip-stored groove of testing host 201.

Secondly, chip testing jig 100 compresses to IC chip to be measured, realizes the fixation of IC chip to be measured.

After IC chip to be measured is placed on the chip-stored groove of testing host 201, the second drive device driving chip The in the vertical direction of measurement jig 100 moves down, and is pressed by other regions eated dishes without rice or wine on chip briquetting 102 in addition to 103 Tight chip to be measured, now, conducting resinl 104 eat dishes without rice or wine to be in contraction state in 103 in, and conducting resinl 104 will not touch core to be measured The induction region of piece, and in eat dishes without rice or wine 103 area be more than or equal to chip to be measured induction region area, so chip briquetting Other regions in addition to 103 of being eated dishes without rice or wine on 102 in will not also touch the induction region of chip to be measured, so as to ensure chip testing Accuracy.

3rd step, functional test is carried out to IC chip to be measured.

When chip briquetting 102 compresses chip to be measured and conducting resinl 104 is in contraction state, chip briquetting 102 is to be measured Pressure caused by IC chip causes the pin of IC chip to be measured to be contacted with the probe on testing host 201, is surveyed by programme-control Try workbench 202 and conventional functional test is carried out to chip, i.e., the basic function of chip internal is tested.

When functional test fails, vacuum generator produces negative pressure by the exit of breather line sucker 105, inhales IC chip to be measured is taken, after IC chip to be measured is drawn, the in the vertical direction of the second drive device driving chip measurement jig 100 Move up, IC chip to be measured is taken out from the chip-stored groove of testing host 201.

After functional test success, continue pressing test.

4th step, pressing test is carried out to IC chip to be measured.

After functional test success, control device controls conducting resinl 104 therefrom to eat dishes without rice or wine in 103 by first driving means Stretch out, contacted with the induction region of chip to be measured, and a certain size pressure is applied to the induction region of chip to be measured, treating After the induction region of survey IC chip is pressed, programme-control test table 202 starts pressing test, to IC chip to be measured Carry out pressing test.

The control device can also control conducting resinl 104 press chip to be measured induction region dynamics, so as to realize not Pressing with pressure requirements is tested.

After pressing test has been carried out, control device controls conducting resinl 104 to be eated dishes without rice or wine in retracting by first driving means In 103, then vacuum generator is negative by being produced with the exit of each self-corresponding breather line sucker 105 of sucker 105 Pressure, the chip tested after completing is drawn out from chip-stored groove, is placed on chip rack, terminates whole chip Test.

In the utility model embodiment, by the chip test system 200, chip pick-up, chip functions can be completed Test and the whole process of chip pressing test, and the whole process is that once property is completed on a device, it is not necessary to Functional test is carried out respectively on a different device to same chip and pressing is tested, so as to reduce the test of chip testing Risk, the testing efficiency of chip testing is improved, reduce the testing cost of chip testing.

It should be understood that in the utility model embodiment, the chip test system can both carry out independent functional test, also may be used Individually to carry out pressing test, or functional test and pressing test are carried out successively, and the utility model embodiment is not made to this Limit.

For example, when chip to be measured is that need not carry out pressing the chip of test, can also be implemented using the utility model Chip test system in example carries out functional test, and after testing is complete, chip testing jig will directly test the core completed Piece is drawn；When chip to be measured only needs to carry out pressing test, it is hollow that first driving means can drive conducting resinl to stretch out Mouthful, carry out pressing test.

In several embodiments provided herein, it should be understood that disclosed systems, devices and methods, can be with Realize by another way.For example, device embodiment described above is only schematical, for example, the unit Division, only a kind of division of logic function, can there is other dividing mode, such as multiple units or component when actually realizing Another system can be combined or be desirably integrated into, or some features can be ignored, or do not perform.It is another, it is shown or The mutual coupling discussed or direct-coupling or communication connection can be the indirect couplings by some interfaces, device or unit Close or communicate to connect, can be electrical, mechanical or other forms.

It is described above, only specific embodiment of the present utility model, but the scope of protection of the utility model is not limited to In this, any one skilled in the art can readily occur in change in the technical scope that the utility model discloses Or replace, it should all cover within the scope of protection of the utility model.Therefore, the scope of protection of the utility model should be described with power The protection domain that profit requires is defined.

Claims (8)

1. a kind of chip testing jig, it is characterised in that the chip testing jig includes：

Cover plate, chip briquetting is provided with the cover plate, the chip briquetting is eated dishes without rice or wine in having, is provided with and leads in being eated dishes without rice or wine in described Electric glue；

First driving means, the first driving means are arranged in the cover plate, the first driving means and the conduction Gemel connection；

Control device, the control device are arranged in the cover plate, and the control device is connected with the first driving means, When carrying out functional test to chip to be measured, the control device controls the conducting resinl to be in by the first driving means Contraction state, make interval between the conducting resinl and the chip to be measured be present；When carrying out pressing test to the chip to be measured When, the control device by the first driving means control the conducting resinl to eat dishes without rice or wine in described it is outside uphold, with institute State the induction region contact of chip to be measured.

2. chip testing jig according to claim 1, it is characterised in that two absorptions are provided with the chip briquetting The sucker of the chip to be measured.

3. chip testing jig according to claim 2, it is characterised in that eated dishes without rice or wine during described two suckers are relatively described pair Claim arrangement.

4. the chip testing jig according to Claims 2 or 3, it is characterised in that described two suckers are metal aperture.

5. chip testing jig according to claim 4, it is characterised in that two ventilations are additionally provided with inside the cover plate Pipeline, described two suckers have each self-corresponding breather line.

6. chip testing jig according to claim 5, it is characterised in that multiple chips are provided with the cover plate Briquetting.

A kind of 7. chip test system, it is characterised in that the chip test system includes testing host, test table and Chip testing jig as any one of claim 1 to 6.

Wherein, the testing host is arranged on the test table, and it is described to be measured that placement is provided with the testing host The chip-stored groove of chip.

8. chip test system according to claim 7, it is characterised in that the chip test system also includes second and driven Dynamic device, second drive device are connected with the control device, and second drive device controls in the control device The chip to be measured is drawn or pressed to the lower driving chip testing jig.