CN207036049U - A kind of grating automatic measurement microscope mobile platform - Google Patents

A kind of grating automatic measurement microscope mobile platform Download PDF

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Publication number
CN207036049U
CN207036049U CN201621482262.7U CN201621482262U CN207036049U CN 207036049 U CN207036049 U CN 207036049U CN 201621482262 U CN201621482262 U CN 201621482262U CN 207036049 U CN207036049 U CN 207036049U
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CN
China
Prior art keywords
mobile platform
axis mobile
grating
leading screw
automatic measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201621482262.7U
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Chinese (zh)
Inventor
魏玉伟
操九英
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Observe Microelectronics Technology Co Ltd
Original Assignee
Shanghai Observe Microelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN201621482262.7U priority Critical patent/CN207036049U/en
Application granted granted Critical
Publication of CN207036049U publication Critical patent/CN207036049U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of grating automatic measurement microscope mobile platform, including X-axis mobile platform, Y-axis mobile platform and grating scale, wherein, X-axis mobile platform is by baffle plate, bottom plate, limiting plate, leading screw, guide rod, nut seat and motor composition, one baffle plate is respectively installed and forms understructure in bottom plate both ends, motor is fixed on one end of base, leading screw and guide rod are connected between two baffle plates, nut seat and limiting plate are installed on leading screw and guide rod, limiting plate is located at nut seat side, Y-axis mobile platform is consistent from the structure of X-axis mobile platform and size is different, Y-axis mobile platform is installed with X-axis mobile platform criss-cross construction, X, grating scale is fitted with Y-axis mobile platform.The utility model is installed grating scale on platform, objective table is accurately positioned by grating scale during mobile platform moves, the accuracy of measurement is greatly improved by the mobile platform of the setting criss-cross construction below microscope carrier.

Description

A kind of grating automatic measurement microscope mobile platform
Technical field
It the utility model is related to a kind of technical field of microscopic structure, more particularly to a kind of grating automatic measurement microscope Mobile platform.
Background technology
Present measuring microscope is all the movement by controlling dividing head to carry out objective table, similar to the knot of micrometer Structure, reading visually easily cause error, the positioning to objective table is not accurate enough, can cause the deviation of measurement structure by naked eyes.
Utility model content
In view of this, it is above-mentioned common to solve the utility model proposes a kind of grating automatic measurement microscope mobile platform The problem of microscope inaccurately easily causes error by dividing head positioning.
To reach above-mentioned purpose, what the technical solution of the utility model was realized in:
A kind of grating automatic measurement microscope mobile platform, including X-axis mobile platform, Y-axis mobile platform and grating scale, its In, the X-axis mobile platform is made up of baffle plate, bottom plate, limiting plate, leading screw, guide rod, nut seat and motor, the bottom plate two Each installation is held one baffle plate and to form understructure, the motor is fixed on one end of the base, between two baffle plates The leading screw and the guide rod are connected, the nut seat and the limiting plate, institute are installed on the leading screw and the guide rod State limiting plate and be located at the nut seat side, the Y-axis mobile platform is consistent with the structure of the X-axis mobile platform and size not Together, the Y-axis mobile platform is installed with the X-axis mobile platform criss-cross construction, is all installed on the X, Y-axis mobile platform There is grating scale.
Above-mentioned grating automatic measurement microscope mobile platform, wherein, silk is installed between the nut seat and the leading screw Mother, the screw match with the screw structure.
Above-mentioned grating automatic measurement microscope mobile platform, wherein, connected between the bottom plate and the baffle plate by bolt Connect.
Above-mentioned grating automatic measurement microscope mobile platform, wherein, the grating scale includes scale and dynamic chi, the scale Consistent in vertical direction with the position of the dynamic chi, the dynamic chi can slidably reciprocate on the scale.
Above-mentioned grating automatic measurement microscope mobile platform, wherein, the dynamic chi is fixed on the nut seat.
Above-mentioned grating automatic measurement microscope mobile platform, wherein, the motor passes through shaft coupling and described leading screw one end Connection, the other end of the leading screw runs through the baffle plate, and is fixed on by nut in the baffle plate.
Above-mentioned grating automatic measurement microscope mobile platform, wherein, the guide rod quantity is two, and the guide rod passes through The limiting plate is worn, the limiting plate is located at the motor side, and between having between the baffle plate of described motor one end Gap.
The utility model is as a result of above-mentioned technology, caused good effect:
The utility model is pacified by the mobile platform of the setting criss-cross construction below microscope carrier on platform Grating scale is filled, objective table is accurately positioned by grating scale during mobile platform moves, survey is greatly improved The accuracy of amount.
Brief description of the drawings
Form a part of accompanying drawing of the present utility model to be used for providing further understanding to of the present utility model, this practicality is new The schematic description and description of type is used to explain the utility model, does not form to improper restriction of the present utility model. In accompanying drawing:
Fig. 1 is the structural representation of grating automatic measurement microscope mobile platform of the present utility model;
Fig. 2 is the structural representation of another angle of grating automatic measurement microscope mobile platform of the present utility model.
Embodiment
The utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings, but not as of the present utility model Limit.
Embodiment
Incorporated by reference to shown in Fig. 1 and Fig. 2, a kind of grating automatic measurement microscope mobile platform of the present utility model, including X-axis Mobile platform 1, Y-axis mobile platform 2 and grating scale, wherein, X-axis mobile platform 1 by baffle plate 3, bottom plate 11, limiting plate 6, leading screw 5, Guide rod 4, nut seat 7 and motor 8 form, and the both ends of bottom plate 11 one baffle plate 3 of orthogonal each installation simultaneously forms understructure, electricity Machine 8 is fixed on one end of base, can be fixed on by screws bolts on the outside of the baffle plate 3 of base one end, connecting filament between two baffle plates 3 Thick stick 5 and guide rod 4, leading screw 5 and guide rod 4 run through the baffle plate 3 on both sides and are fixed in baffle plate 3, pacify on leading screw 5 and guide rod 4 Nut seat 7 and limiting plate 6 are filled, limiting plate 6 is located at the side of nut seat 7 and is moved with X-axis flat close to motor 8, Y-axis mobile platform 2 The structure of platform 1 is consistent and size is different, and Y-axis mobile platform 2 is installed with the criss-cross construction of X-axis mobile platform 1, specific Y-axis Mobile platform 2 is fixed on the nut seat 7 of X-axis mobile platform, and grating scale is fitted with X, Y-axis mobile platform.
The utility model also has implementation below on the basis of the above, continuing with referring to shown in Fig. 1 and Fig. 2,
In further embodiment of the present utility model, screw (not shown), screw are installed between nut seat 7 and leading screw 5 With the structure matching of leading screw 5, engaged by screw with leading screw 5 and may be such that nut seat 7 is done and move back and forth action.
In further embodiment of the present utility model, connected between bottom plate 11 and baffle plate 3 by bolt or other connectors.
In further embodiment of the present utility model, grating scale includes the position of scale 9 and dynamic chi 10, scale 9 and dynamic chi 10 Put consistent in vertical direction, dynamic chi 10 can slidably reciprocate on scale 9.
In further embodiment of the present utility model, dynamic chi 10 is fixed on nut seat 7, moves chi 10 and nut seat 7 simultaneously It is mobile.
In further embodiment of the present utility model, motor 8 is connected by shaft coupling (not shown) with the one end of leading screw 5, electricity Arbor drives leading screw 5 to rotate, and the other end of leading screw 5 runs through baffle plate 3, and is fixed on by nut in baffle plate 3.
In further embodiment of the present utility model, the quantity of guide rod 4 is two, and guide rod 4 runs through limiting plate 6, is oriented to Bar 4 is oriented to when nut seat 7 moves, and limiting plate 6 is located at the side of motor 8, and between having between the baffle plate 3 of the one end of motor 8 Gap, limiting plate 6 prevent nut seat 7 to be excessively moved to leading screw 5 and motor shaft connection place damage leading screw 5 and motor 8.
User can illustrate further insight characteristic of the present utility model and function according to following,
In use, microscopical objective table can be fixed on the nut seat of Y-axis mobile platform, by microscope slide The mobile platform of criss-cross construction is set below platform, grating scale is installed on two mobile platforms, in mobile platform movement During moved by grating scale in X-axis and Y-axis, objective table is accurately positioned, measurement is greatly improved Accuracy.
The foregoing is only the utility model preferred embodiment, not thereby limit embodiment of the present utility model and Protection domain, to those skilled in the art, it should can appreciate that all with the utility model specification and diagram Hold the scheme obtained by made equivalent substitution and obvious change, should be included in protection model of the present utility model In enclosing.

Claims (7)

1. a kind of grating automatic measurement microscope mobile platform, including X-axis mobile platform, Y-axis mobile platform and grating scale, it is special Sign is that the X-axis mobile platform is made up of baffle plate, bottom plate, limiting plate, leading screw, guide rod, nut seat and motor, the bottom Plate both ends respectively install a baffle plate and form understructure, and the motor is fixed on one end of the base, two baffle plates Between connect the leading screw and the guide rod, the nut seat and described spacing is installed on the leading screw and the guide rod Plate, the limiting plate are located at the nut seat side, the Y-axis mobile platform it is consistent with the structure of the X-axis mobile platform and Size is different, and the Y-axis mobile platform is installed with the X-axis mobile platform criss-cross construction, on the X, Y-axis mobile platform It is fitted with grating scale.
2. grating automatic measurement microscope mobile platform according to claim 1, it is characterised in that the nut seat and institute State and screw is installed between leading screw, the screw matches with the screw structure.
3. grating automatic measurement microscope mobile platform according to claim 1, it is characterised in that the bottom plate and described It is bolted between baffle plate.
4. grating automatic measurement microscope mobile platform according to claim 1, it is characterised in that the grating scale includes Scale and dynamic chi, the scale is consistent in vertical direction with the position of the dynamic chi, and the dynamic chi can be in next on the scale Return and slide.
5. grating automatic measurement microscope mobile platform according to claim 4, it is characterised in that the dynamic chi is fixed on On the nut seat.
6. grating automatic measurement microscope mobile platform according to claim 1, it is characterised in that the motor passes through connection Axle device is connected with described leading screw one end, and the other end of the leading screw runs through the baffle plate, and is fixed on the baffle plate by nut In.
7. grating automatic measurement microscope mobile platform according to claim 1, it is characterised in that the guide rod quantity For two, the guide rod runs through the limiting plate, and the limiting plate is located at the motor side, and with described motor one end There is gap between the baffle plate.
CN201621482262.7U 2016-12-30 2016-12-30 A kind of grating automatic measurement microscope mobile platform Expired - Fee Related CN207036049U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621482262.7U CN207036049U (en) 2016-12-30 2016-12-30 A kind of grating automatic measurement microscope mobile platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621482262.7U CN207036049U (en) 2016-12-30 2016-12-30 A kind of grating automatic measurement microscope mobile platform

Publications (1)

Publication Number Publication Date
CN207036049U true CN207036049U (en) 2018-02-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201621482262.7U Expired - Fee Related CN207036049U (en) 2016-12-30 2016-12-30 A kind of grating automatic measurement microscope mobile platform

Country Status (1)

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CN (1) CN207036049U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110281211A (en) * 2019-06-19 2019-09-27 武汉纺织大学 A kind of microscope multidimensional automatic displacement platform positioning device based on capacitive grating scale
CN111504885A (en) * 2020-04-04 2020-08-07 电子科技大学 Full-automatic blood smear morphological analysis device based on machine vision
CN112630951A (en) * 2020-11-28 2021-04-09 中国航空工业集团公司洛阳电光设备研究所 Ball screw fixing part with high-reliability limiting device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110281211A (en) * 2019-06-19 2019-09-27 武汉纺织大学 A kind of microscope multidimensional automatic displacement platform positioning device based on capacitive grating scale
CN111504885A (en) * 2020-04-04 2020-08-07 电子科技大学 Full-automatic blood smear morphological analysis device based on machine vision
CN111504885B (en) * 2020-04-04 2022-03-15 电子科技大学 Analysis method of full-automatic blood smear morphological analysis device based on machine vision
CN112630951A (en) * 2020-11-28 2021-04-09 中国航空工业集团公司洛阳电光设备研究所 Ball screw fixing part with high-reliability limiting device

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CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180223

Termination date: 20211230