CN206992061U - A kind of ceramic substrate locating calibration device - Google Patents
A kind of ceramic substrate locating calibration device Download PDFInfo
- Publication number
- CN206992061U CN206992061U CN201720883975.2U CN201720883975U CN206992061U CN 206992061 U CN206992061 U CN 206992061U CN 201720883975 U CN201720883975 U CN 201720883975U CN 206992061 U CN206992061 U CN 206992061U
- Authority
- CN
- China
- Prior art keywords
- ceramic substrate
- location
- installation plate
- calibration device
- skewback
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of ceramic substrate locating calibration device, and in being horizontally disposed with, bottom surface is used to position fixation location and installation plate, and its top surface, which is set, is oriented to skewback, and the side edge of each ceramic substrate is at least correspondingly arranged a guiding skewback；It is oriented to the spigot surface set on skewback in fore-and-aft tilt, spigot surface is towards ceramic substrate, the direction of the distance between spigot surface that each two is oppositely arranged from top to bottom is tapered, when ceramic substrate is captured by mechanical arm and is placed from the top down, top size is larger, larger error can be allowed, after mechanical arm unclamps, ceramic substrate slide downward under gravity, because spigot surface relative tilt is set, eventually fall in bottommost, it is identical with the size of ceramic substrate at the spacing minimum of bottom, so position of the ceramic substrate on location and installation plate is just now uniquely determined, the accuracy of now manipulator crawl ceramic substrate is improved, compared with directly capturing the Grasp Modes of ceramic substrate, the error of mechanical arm crawl can be substantially reduced.
Description
Technical field
Technical field of manufacturing semiconductors is the utility model is related to, further relates to a kind of ceramic substrate positioning calibration cartridge
Put.
Background technology
Ceramic substrate possesses excellent thermal conductivity and air-tightness, be widely used in power electronic, Electronic Packaging, mixing it is micro-
The field such as electronics and multi-chip module.The width of the carrying magazine of ceramic substrate is slightly larger than the width of ceramic substrate, using brilliant
During disk mechanical arm carries ceramic substrate, the ceramic substrate deposited at random inside magazine can exist in the horizontal direction
2-4mm unilateral position deviation, cause wafer disks mechanical arm crawl position and ceramic substrate relative position it is inconsistent.Such as
Fruit does not make up these deviations, and in next step processing technology, the positional precision of ceramic substrate can not just be protected.
In the prior art, the calibrating installation for circular wafers is only existed, these devices typically use sensor and negative pressure
Adsorbent equipment is calibrated to wafer, does not there is the device to ceramic substrate positioning calibration, so design one kind is used for ceramic substrate
Locating calibration device, be current those skilled in the art's technical issues that need to address.
Utility model content
The utility model provides a kind of ceramic substrate locating calibration device, for being accurately positioned to ceramic substrate, Ke Yi great
The big error for reducing mechanical arm crawl, concrete scheme are as follows：
A kind of ceramic substrate locating calibration device, including：
Location and installation plate, in being horizontally disposed with, bottom surface is used to position fixation；
Skewback is oriented to, is arranged at the top surface of the location and installation plate, the side edge of each ceramic substrate is at least correspondingly arranged
One guiding skewback；Spigot surface in fore-and-aft tilt, the spigot surface direction ceramics are set on each guiding skewback
Substrate；The direction of the distance between described spigot surface that each two is oppositely arranged from top to bottom is tapered, the minimum place of bottom spacing and
The size of ceramic substrate is identical.
Alternatively, the guiding skewback includes vertical plate and level board, and the spigot surface is arranged on the vertical plate, institute
State and bolt hole is opened up on level board, be secured by bolts on the location and installation plate.
Alternatively, kidney-shaped positioning hole is set on the level board, the length direction of the kidney-shaped positioning hole and spigot surface
Incline direction is identical.
Alternatively, multiple rows of bolt hole is set by the size of ceramic substrate on the location and installation plate, each guiding is tiltedly
The corresponding row of block, to adjust the distance between two described guiding skewbacks being oppositely arranged.
Alternatively, the angle between the spigot surface and the location and installation plate top surface is 60~80 degree.
Alternatively, step surface is set on the guiding skewback, each step surface water being oriented on skewback
It is flat highly identical, for support ceramic substrate；The spigot surface is in be vertically arranged close to the part of the step surface.
Alternatively, the bottom surface of the location and installation plate is fixedly connected with the top of support bar, and the bottom of the support bar is set
Support base, the support base have horizontal component, are bolted.
Alternatively, the location and installation plate is bolted with the support bar, and the center of the location and installation plate is set
Bolt hole is put, the mounting hole using the bolt hole at center to set arc-shaped on the center of circle, the location and installation plate, passes through adjustment bolt
The angle of location and installation plate described in fine position in the mounting hole.
Alternatively, the angle of the mounting hole circular arc is 45 degree.
The utility model provides a kind of ceramic substrate locating calibration device, including location and installation plate and guiding skewback, fixed
In being horizontally disposed with, bottom surface is used to position fixation position installing plate, and its top surface, which is set, is oriented to skewback, and the side edge of each ceramic substrate is extremely
Be correspondingly arranged less one guiding skewback, for the position of each side of ceramic substrate carry out be oriented to and it is spacing；It is oriented on skewback
Spigot surface in fore-and-aft tilt is set, and spigot surface, for being oriented to ceramic substrate, adjusts ceramic substrate towards ceramic substrate
The distance between horizontal level, the spigot surface that each two is oppositely arranged direction from top to bottom it is tapered, when ceramic substrate is by machine
When tool arm is captured and placed from the top down, the top for being oriented to skewback is first reached, top size is larger, can allow larger mistake
Difference, after mechanical arm unclamps, ceramic substrate slide downward under gravity, because spigot surface relative tilt is set, finally fall
It is identical with the size of ceramic substrate at bottom spacing minimum to bottommost, so position of the ceramic substrate on location and installation plate
Just it is now uniquely determined, and because the bottom surface of location and installation plate is fixed, the position of location and installation plate and mechanical arm is just unique
It is determined that the accuracy of now manipulator crawl ceramic substrate is improved, with taking out grabbing for ceramic substrate directly from packing box
Take mode to compare, the error of mechanical arm crawl can be substantially reduced.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, is not paying the premise of creative work
Under, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is a kind of structure chart of specific embodiment of ceramic substrate locating calibration device provided by the utility model；
Fig. 2 is the detonation configuration axonometric drawing of various pieces；
Fig. 3 is the detonation configuration figure of positive apparent direction；
Fig. 4 is the structure chart for being oriented to skewback.
Including：
Location and installation plate 1, mounting hole 11, it is oriented to skewback 2, vertical plate 21, level board 22, step surface 23, support bar 3, branch
Support base 4.
Embodiment
Core of the present utility model is to provide a kind of ceramic substrate locating calibration device, for accurately fixed to ceramic substrate
Position, the error of mechanical arm crawl can be substantially reduced.
In order that those skilled in the art more fully understands the technical solution of the utility model, below in conjunction with accompanying drawing and
Specific embodiment, explanation is described in detail to ceramic substrate locating calibration device of the present utility model.
As shown in figure 1, it is a kind of structure of specific embodiment of ceramic substrate locating calibration device provided by the utility model
Figure, Fig. 2 are the detonation configuration axonometric drawing of various pieces, and Fig. 3 is the detonation configuration figure of positive apparent direction.It mainly includes location and installation
Plate 1 and guiding skewback 2, location and installation plate 1, in being horizontally disposed with, bottom surface is used to position fixation, and bottom surface is connected to ground or a certain
On fixed structure, make the plate face keep level of whole location and installation plate 1, keep fixed static.It is oriented to skewback 2 and is arranged at positioning peace
The top surface of loading board 1, the side edge of each ceramic substrate are at least correspondingly arranged a guiding skewback 2, and ceramic substrate is led by multiple
Support is provided to skewback 2, places ceramic substrate keep level.It is each to be oriented to the spigot surface set on skewback 2 in fore-and-aft tilt,
Spigot surface is towards ceramic substrate, under gravity can be to the component of another Slideslip if ceramic substrate is pressed on spigot surface；Often
The direction of the distance between two spigot surfaces being oppositely arranged from top to bottom is tapered, generally rectangular cross-section for ceramic substrate,
That is two groups of relative guiding skewbacks 2 should be at least set, one group of relative spigot surface limits its width, and another group relative
Spigot surface limits its length, identical with the size of ceramic substrate at bottom spacing minimum, that is to say, that when ceramic substrate is slipped to
After bottommost, the clamping of skewback 2 is directed to just, limits the location of its completely, and existing error is minimum.
During operation, mechanical arm takes out ceramic substrate from magazine, and ceramic substrate is positioned over to the sky for being oriented to skewback 2 and being surrounded
Between among, ceramic substrate is equipped with larger error in magazine middle position, but is not more than the spacing for being oriented to skewback 2 the top, pine
The spacing position for being issued to bottommost of skewback 2, error existing for diminution can be oriented to afterwards by holding ceramic substrate.Now again by machine
Tool arm takes out ceramic substrate vertically, and precision is greatly improved.
Specifically, the guiding skewback 2 in the utility model includes vertical plate 21 and level board 22, vertical plate 21 and level board
22 are mutually perpendicular to, and spigot surface is arranged on vertical plate 21, and the top half of vertical plate 21 is similar to trapezoidal or triangle, level board
Bolt hole is opened up on 22, is secured by bolts on location and installation plate 1, the bottom surface of level board 22 is fitted on location and installation plate 1,
Its position is fixed by bolt.
In order to adjust the position for being oriented to skewback 2 on location and installation plate 1, kidney-shaped positioning hole is set on level board 22,
The length direction of kidney-shaped positioning hole is identical with the incline direction of spigot surface, enables one group of relative adjustable range of guiding skewback 2
Distance.As shown in figure 1, the utility model is provided with three groups of totally six guiding skewbacks 2, the space of rectangle is surrounded, can be limited
The position of rectangular ceramic substrate.Being oriented to the location of skewback 2 needs to be set according to the concrete shape of ceramic substrate, odd number bar side
Situation also should be included in the scope of protection of the utility model within.
Multiple rows of bolt hole is set by the size of ceramic substrate on location and installation plate 1, it is each to be oriented to the corresponding row of skewback 2, with
Adjust be oppositely arranged two it is described be oriented to the distance between skewbacks, by be directed to skewback 2 be fixed on different bolts hole with
The various sizes of ceramic substrate of Corresponding matching.
Preferably, the angle between the utility model spigot surface and the top surface of location and installation plate 1 is 60~80 degree, including both ends
Point value.Angle is excessive, and to cause ceramic substrate to fall too fast, and impact is larger, is easily damaged, angle too small can cause frictional force
Increase, in fact it could happen that situation about being stuck on spigot surface.
In order to carry out support to ceramic substrate, the utility model sets step surface 23 on skewback 2 is oriented to, as shown in figure 4,
To be oriented to the structure chart of skewback 2, the level height of step surface 23 being each oriented on skewback 2 is identical, and ceramic substrate is limited into water
In plane, step surface intersects with being oriented to, supported when falling on bottommost under ceramic substrate by step surface in level；Spigot surface
Close to the part of step surface 23 in being vertically arranged, this section of vertical portion is at the spacing minimum of spigot surface, and the height of vertical section should
More than the thickness of ceramic substrate, ceramic substrate is limited by vertical section completely, positioningly accurate higher.
In any of the above-described technical scheme and its on the basis of being mutually combined, the bottom surface of location and installation plate 1 in the utility model
The top of support bar 3 is fixedly connected with, support bar 3 is in being vertically arranged, and top connection location and installation plate 1, bottom sets support base
4, support base 4 has horizontal component, and bottom surface is horizontal plane, can be bolted on ground or on other horizontal planes.
Make the keep level of location and installation plate 1.
Location and installation plate 1 is bolted with support bar 3, the centrally disposed bolt hole of location and installation plate 1, with center
Bolt hole is the center of circle, the mounting hole 11 of arc-shaped is set on location and installation plate 1, and mounting hole 11 with leading to respectively in the bolt hole at center
Cross bolt to be fixedly connected, if desired adjust the angle of location and installation plate 1, need to only unclamp the spiral shell in centre bolt hole and mounting hole 11
Bolt, by location and installation plate 1 around center bolt hole rotate, in place after bolt is fixed again, in mounting hole 11 bolt with
The position of support bar 3 remains stationary as, and passes through the angle of fine position location and installation plate 1 of the adjustment bolt in mounting hole 11.
Preferably, the angle of the circular arc of mounting hole 11 is 45 degree in the utility model, it is of course also possible to be arranged to other angles
Degree, the utility model do not limit specifically herein.
The foregoing description of the disclosed embodiments, professional and technical personnel in the field are enable to realize or new using this practicality
Type.A variety of modifications to these embodiments will be apparent for those skilled in the art, determine herein
The General Principle of justice, can be realized in other embodiments in the case where not departing from spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (9)
- A kind of 1. ceramic substrate locating calibration device, it is characterised in that including：Location and installation plate (1), in being horizontally disposed with, bottom surface is used to position fixation；Skewback (2) is oriented to, is arranged at the top surface of the location and installation plate (1), the side edge of each ceramic substrate is at least corresponding to be set Put a guiding skewback (2)；Spigot surface in fore-and-aft tilt, the spigot surface are set on each guiding skewback (2) Towards ceramic substrate；The direction of the distance between described spigot surface that each two is oppositely arranged from top to bottom is tapered, bottom spacing It is identical with the size of ceramic substrate at minimum.
- 2. ceramic substrate locating calibration device according to claim 1, it is characterised in that the guiding skewback (2) includes Vertical plate (21) and level board (22), the spigot surface are arranged on the vertical plate (21), are opened up on the level board (22) Bolt hole, it is secured by bolts on the location and installation plate (1).
- 3. ceramic substrate locating calibration device according to claim 2, it is characterised in that set on the level board (22) Kidney-shaped positioning hole, the length direction of the kidney-shaped positioning hole are identical with the incline direction of spigot surface.
- 4. ceramic substrate locating calibration device according to claim 2, it is characterised in that on the location and installation plate (1) By the size of ceramic substrate, multiple rows of bolt hole, each corresponding row of guiding skewback (2), to adjust be oppositely arranged two are set The distance between individual described guiding skewback.
- 5. ceramic substrate locating calibration device according to claim 1, it is characterised in that the spigot surface and the positioning Angle between installing plate (1) top surface is 60~80 degree.
- 6. ceramic substrate locating calibration device according to claim 1, it is characterised in that set on the guiding skewback (2) Step surface (23) is put, the step surface (23) level height on each guiding skewback (2) is identical, for support ceramic base Plate；The spigot surface is in be vertically arranged close to the part of the step surface (23).
- 7. the ceramic substrate locating calibration device according to any one of claim 1 to 6, it is characterised in that the positioning peace The bottom surface of loading board (1) is fixedly connected with the top of support bar (3), and the bottom of the support bar (3) sets support base (4), described Support base (4) has horizontal component, is bolted.
- 8. ceramic substrate locating calibration device according to claim 7, it is characterised in that the location and installation plate (1) with The support bar (3) is bolted, the centrally disposed bolt hole of the location and installation plate (1), using the bolt hole at center as The mounting hole (11) of arc-shaped is set on the center of circle, the location and installation plate (1), by adjustment bolt in the mounting hole (11) Fine position described in location and installation plate (1) angle.
- 9. ceramic substrate locating calibration device according to claim 8, it is characterised in that mounting hole (11) circular arc Angle is 45 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720883975.2U CN206992061U (en) | 2017-07-19 | 2017-07-19 | A kind of ceramic substrate locating calibration device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720883975.2U CN206992061U (en) | 2017-07-19 | 2017-07-19 | A kind of ceramic substrate locating calibration device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206992061U true CN206992061U (en) | 2018-02-09 |
Family
ID=61415579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720883975.2U Active CN206992061U (en) | 2017-07-19 | 2017-07-19 | A kind of ceramic substrate locating calibration device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206992061U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107195574A (en) * | 2017-07-19 | 2017-09-22 | 广东工业大学 | A kind of ceramic substrate locating calibration device |
| CN112839504A (en) * | 2021-02-04 | 2021-05-25 | 深圳信息职业技术学院 | Circuit board positioning device |
-
2017
- 2017-07-19 CN CN201720883975.2U patent/CN206992061U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107195574A (en) * | 2017-07-19 | 2017-09-22 | 广东工业大学 | A kind of ceramic substrate locating calibration device |
| CN112839504A (en) * | 2021-02-04 | 2021-05-25 | 深圳信息职业技术学院 | Circuit board positioning device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206992061U (en) | A kind of ceramic substrate locating calibration device | |
| US9543253B2 (en) | Method for shaping a laminate substrate | |
| US8535956B2 (en) | Chip attach frame | |
| TWI716570B (en) | Transfer system for flipping and multiple checking of electronic devices | |
| US20030140476A1 (en) | Substrate alignment method and apparatus | |
| US20130323345A1 (en) | Fixture for shaping a laminate substrate | |
| KR101445123B1 (en) | Apparatus for bonding chip on wafer precisely | |
| CN107195574A (en) | A kind of ceramic substrate locating calibration device | |
| CN104764569B (en) | Vehicle lamp air tightness detection system | |
| KR102509642B1 (en) | Conductive ball attaching apparatus | |
| CN1791978A (en) | Interconnection pattern design | |
| CN209102024U (en) | A kind of plate detection device | |
| CN207447794U (en) | Joint tool | |
| CN210325731U (en) | Battery piece bears box | |
| CN214621023U (en) | Automatic wafer guide machine | |
| CN212905012U (en) | Protection device of chip test fixture | |
| CN108436872B (en) | Material box for automatic glass production | |
| CN107316827B (en) | For receiving the article reception device of article and chip testing sorting machine | |
| CN219106113U (en) | Supporting bench suitable for high-pin DIP sample | |
| CN217600837U (en) | Silicon wafer self-positioning film coating carrier plate for PECVD (plasma enhanced chemical vapor deposition) equipment | |
| CN114234865B (en) | Seal position detection clamp and detection method | |
| CN216067194U (en) | Auxiliary device for assembling photovoltaic module and feeding equipment | |
| CN216868021U (en) | Platform levelness adjustment mechanism reaches micro-assembly that includes it and turns over and pastes transfer device | |
| CN216719910U (en) | Calibration device for silicon wafer handover posture | |
| CN202142513U (en) | Alignment device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221018 Address after: 528225 Room B507, Block B, Phase I, Nanhai Industrial Think Tank City, Taoyuan Road, Software Park, Shishan Town, Nanhai District, Foshan City, Guangdong Province (application for residence) Patentee after: GUANGDONG ADA INTELLIGENT EQUIPMENT Co.,Ltd. Address before: 510062 courtyard 729, Dongfeng East Road, Yuexiu District, Guangzhou, Guangdong Patentee before: GUANGDONG University OF TECHNOLOGY |
|
| TR01 | Transfer of patent right |