CN206990057U - A kind of liquid sensor based on photonic crystal - Google Patents

A kind of liquid sensor based on photonic crystal Download PDF

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Publication number
CN206990057U
CN206990057U CN201720807793.7U CN201720807793U CN206990057U CN 206990057 U CN206990057 U CN 206990057U CN 201720807793 U CN201720807793 U CN 201720807793U CN 206990057 U CN206990057 U CN 206990057U
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China
Prior art keywords
monocrystalline silicon
photonic crystal
utility
liquid sensor
model
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Expired - Fee Related
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CN201720807793.7U
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Chinese (zh)
Inventor
李伟
蔡正杰
赖明聪
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China Electronics Technology Group Corp CETC
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China Electronics Technology Group Corp CETC
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Priority to CN201720807793.7U priority Critical patent/CN206990057U/en
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Abstract

It the utility model is related to technical field of liquid detection, there is provided a kind of liquid sensor based on photonic crystal, it is h to include thickness2Monocrystalline silicon layer 2;Monocrystalline silicon layer 2 extends upward the monocrystalline silicon cylinder 1 of several periodic arrangements, and the thickness of monocrystalline silicon cylinder 1 is h1, radius r, level interval is a between horizontally adjacent monocrystalline silicon cylinder, and the vertical interval between vertically-adjacent monocrystalline silicon cylinder is b;It is h that the lower surface of monocrystalline silicon layer 2, which is fixed with thickness,3Silver-colored substrate 3, and h3> > h1、h2.Liquid sensor provided by the utility model has high sensitivity to surrounding medium, can carry out high accuracy, nondestructive measurement.

Description

A kind of liquid sensor based on photonic crystal
Technical field
It the utility model is related to technical field of liquid detection, specially a kind of liquid sensor based on photonic crystal.
Background technology
It is frequently necessary to measure liquid in the industrial production, the sensor of traditional detection liquid is a kind of by certain Liquid volume fraction changes into the converter of corresponding electric signal, but in signal conversion process, noise pollution and useful letter be present Number loss, so as to cause signal to noise ratio to decline, its stability, sensitivity are also in urgent need to be improved in addition.
Photonic crystal is forbidden photon band material, has the engineer of periodic dielectric structures and the crystal of manufacture, is based on The liquid sensor of photonic crystal just overcomes the defects of conventional method, has high precision and stability to measurement result.
Utility model content
The purpose of this utility model is to provide a kind of liquid sensor based on photonic crystal, to solve above-mentioned background skill The problem of in art.
The technical problem that the utility model solves is realized using following technical scheme:A kind of liquid based on photonic crystal Body sensor, it is h to include thickness2Monocrystalline silicon layer, monocrystalline silicon layer extends upward the monocrystalline silicon of several periodic arrangements Cylinder, the thickness of monocrystalline silicon cylinder is h1, and it is h that monocrystalline silicon layer lower surface, which is fixed with thickness,3Silver-colored substrate, and h3> > h1、 h2
On the basis of such scheme, the periodic arrangement mode of the monocrystalline silicon cylinder is rectangular arranged, hexagonal array, One kind in square arrangement.
Compared with disclosed technology, there is advantages below in the utility model:Compared with traditional liquid sensor device, the base Small, the forbidden photon band of photonic crystal, local surface plasma resonance and method promise in the liquid sensor size of photonic crystal Resonance is strong to incidence wave frequency selectivity, sensitive to the dielectric constant of liquid, so obtained measurement result has high precision. Liquid sensor based on photonic crystal does not have the null offset of traditional liquid sensor and section drifting problem, has more preferable Stability.
Brief description of the drawings
Fig. 1 is liquid sensor structure chart of the utility model based on photonic crystal.
Fig. 2 is the monocrystalline silicon cylindrical structure plane of structure schematic diagram of the utility model periodic arrangement.
Fig. 3 is the utility model embodiment structural representation.
Fig. 4 is the spectral reflection comparison diagram before and after the optimization of the utility model liquid sensor.
Embodiment
In order that technological means of the present utility model, creation characteristic, workflow, application method reached purpose and effect are easy Understand in understanding, below in conjunction with the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out it is clear, It is fully described by, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole implementation Example.Based on the embodiment in the utility model, those of ordinary skill in the art are obtained under the premise of creative work is not made The every other embodiment obtained, belong to the scope of the utility model protection.
As shown in Figure 1-2, a kind of liquid sensor based on photonic crystal, it is h to include thickness2Monocrystalline silicon layer 2;It is single Crystal silicon layer 2 extends upward the monocrystalline silicon cylinder 1 of several periodic arrangements, and the thickness of monocrystalline silicon cylinder 1 is h1, radius For r, level interval is a between horizontally adjacent monocrystalline silicon cylinder, and the vertical interval between vertically-adjacent monocrystalline silicon cylinder is b;It is h that the lower surface of monocrystalline silicon layer 2, which is fixed with thickness,3Silver-colored substrate 3, and h3> > h1、h2.Wherein, the week of monocrystalline silicon cylinder 1 Phase arrangement mode is one kind in rectangular arranged, hexagonal array, square arrangement, and this place selects rectangular arranged.
Processing is optimized to said structure referring concurrently to Fig. 3:Optimize adjacent single crystalline silicon cylinder level interval a, vertically Spacing b, periodic structure is obtained, photonic crystal reflecting spectrum forbidden photon band is present, causes reflected energy pole in the range of forbidden band Big enhancing;Optimize monocrystalline silicon cylinder radius r, realize local surface plasma resonance under certain frequency, make incident electromagnetic wave Coupling occurs with local surface plasma ripple, causes reflected energy to strengthen;Optimize monocrystalline silicon cylinder thickness h 1, it is single Crystal silicon thickness h2So that the effect of intercoupling between local surface plasmon ripple under certain frequency, realize that method promise is resonated, enhancing is anti- Ejected wave energy.
The liquid sensor operating procedure based on photonic crystal being not optimised:
Testing liquid is filled with liquid sensor of the utility model based on photonic crystal, fully contacts the monocrystalline silicon circle Damaged surface, the surrounding medium for making photonic crystal upper surface is testing liquid, continues to adjust laser incident angle so that broadband Laser pulse injected above photonic crystal, because photon crystal structure is not optimised, electromagnetic wave and photon crystal structure can not Generation local surface plasma resonance and method promise resonance, a small number of electromagnetic wave energies are absorbed by material, and most electromagnetic waves are in photon Crystal structure upper surface is reflected.Receiver detection reflection electromagnetic wave above photon crystal structure, and draw out frequency spectrum Figure, such as Fig. 4.
The liquid sensor operating procedure based on photonic crystal of optimization:
Testing liquid is filled with liquid sensor of the utility model based on photonic crystal, fully contacts the monocrystalline silicon circle Damaged surface, the surrounding medium for making photonic crystal upper surface is testing liquid, continues to adjust laser incident angle so that broadband Laser pulse injected above photonic crystal, because photon crystal structure has been optimized, liquid sensor is periodic arrangement Photon crystal structure, in the range of a band frequency, there is forbidden photon band, reflectivity enhancing;Meanwhile structure optimization causes at certain In one frequency range, incident electromagnetic wave and photon crystal coupled effect, local surface etc. occurs from resonance body;And multiple locals The effect of intercoupling between surface plasmon resonance mould, method promise resonance is generated, has been ultimately resulted in a certain frequency range, Reflected energy greatly enhances.Receiver detection reflection electromagnetic wave above photon crystal structure, and spectrogram is drawn out, Such as Fig. 4.
The advantages of general principle and principal character of the present utility model and the utility model has been shown and described above.One's own profession The technical staff of industry is it should be appreciated that the utility model is not restricted to the described embodiments, described in above-described embodiment and specification Simply illustrate principle of the present utility model, on the premise of the spirit and scope of the utility model is not departed from, the utility model is also Various changes and modifications are had, these changes and improvements are both fallen within claimed the scope of the utility model.The utility model Claimed scope by appended claims and its equivalent thereof.

Claims (2)

  1. A kind of 1. liquid sensor based on photonic crystal, it is characterised in that:It is h to include thickness2Monocrystalline silicon layer, monocrystalline silicon Layer extends upward the monocrystalline silicon cylinder of several periodic arrangements, and the thickness of monocrystalline silicon cylinder is h1, under monocrystalline silicon layer It is h that surface, which is fixed with thickness,3Silver-colored substrate, and h3> > h1、h2
  2. 2. the liquid sensor based on photonic crystal as claimed in claim 1, it is characterised in that:The monocrystalline silicon cylinder Periodic arrangement mode is one kind in rectangular arranged, hexagonal array, square arrangement.
CN201720807793.7U 2017-07-05 2017-07-05 A kind of liquid sensor based on photonic crystal Expired - Fee Related CN206990057U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720807793.7U CN206990057U (en) 2017-07-05 2017-07-05 A kind of liquid sensor based on photonic crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720807793.7U CN206990057U (en) 2017-07-05 2017-07-05 A kind of liquid sensor based on photonic crystal

Publications (1)

Publication Number Publication Date
CN206990057U true CN206990057U (en) 2018-02-09

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Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109884064A (en) * 2019-04-24 2019-06-14 金华伏安光电科技有限公司 A kind of data acquisition device of liquid sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109884064A (en) * 2019-04-24 2019-06-14 金华伏安光电科技有限公司 A kind of data acquisition device of liquid sensor

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Granted publication date: 20180209

Termination date: 20210705