CN206986270U - A kind of new PVD coatings - Google Patents

A kind of new PVD coatings Download PDF

Info

Publication number
CN206986270U
CN206986270U CN201720357006.3U CN201720357006U CN206986270U CN 206986270 U CN206986270 U CN 206986270U CN 201720357006 U CN201720357006 U CN 201720357006U CN 206986270 U CN206986270 U CN 206986270U
Authority
CN
China
Prior art keywords
coatings
functional layer
binder course
thickness
hard alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201720357006.3U
Other languages
Chinese (zh)
Inventor
吴伟亮
黄国伟
涂建军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Star Nano Technology Co Ltd
Original Assignee
Suzhou Star Nano Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Star Nano Technology Co Ltd filed Critical Suzhou Star Nano Technology Co Ltd
Priority to CN201720357006.3U priority Critical patent/CN206986270U/en
Application granted granted Critical
Publication of CN206986270U publication Critical patent/CN206986270U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

A kind of new PVD coatings, it is characterised in that including hard alloy substrate, be attached to the binder course and functional layer of matrix surface from inside to outside.Described binder course is Ti coatings, and its thickness is 0.009 0.011um;Described functional layer is AlTi coatings, and its thickness is 1.0 1.4um, and the ratio between Al and Ti amount of material is 67: 33 in AlTi coatings.The gross thickness of the gross thickness (binder course+functional layer) of described coating is 1.009 1.411um.

Description

A kind of new PVD coatings
Technical field
The utility model belongs to technical field of surface, is related to the process for treating surface of hard alloy, more particularly to A kind of PVD coating technologies of nanostructured.
Background technology
Physical vapour deposition (PVD) (PVD, physical Vapor DeposiCron) be modern physicses, chemistry, materialogy, The advanced engineering technology to grow up on the basis of electronics etc. is multidisciplinary.It is true by target (plating thin-film material) Under Altitude, the process on substrate (needing film-coating workpiece) surface is deposited on by physical process.Use physical gas phase deposition technology It is the focus of Recent study in cheap metal material surface manufacture solid-ceramic coating.
The workpiece or mould of hard alloy, applied widely in machining, and the work of in general hard alloy Part or mould because abrasion or high temperature problem, cause its service life greatly to fail.
Utility model content
In order to solve problem above, the utility model proposes a kind of new PVD coatings.Using PVD of the present utility model Coating, the hardness, wearability and resistance to elevated temperatures of hard alloy can be effectively lifted, so as to improve the use longevity of hard alloy Life and product quality, production efficiency.
A kind of new PVD coatings, it is characterised in that including hard alloy substrate 1, be attached to the table of matrix 1 from inside to outside The binder course 2 and functional layer 3 in face.Described binder course 2 is Ti coatings, and its thickness is 0.009-0.011um;Described function Layer 3 is AlTi coatings, and its thickness is 1.0-1.4um, and the ratio between Al and Ti amount of material is 67: 33 in AlTi coatings.It is described The gross thickness of gross thickness (binder course+functional layer) of coating be 1.009-1.411um.
A kind of new CrN coatings, its handling process are as follows:
A, vacuumize, heat:The material of matrix 1 is positioned in vacuum coating equipment first, adjustment equipment vacuum is 6* 10-5Mbar, heating 1h or so so that temperature is increased to 460-480 DEG C.
B, matrix 1 is cleaned:Ions Bombardment, bias voltage 10V, molecular pump running frequency from starting vacuumize when 100% drops to 72%, is passed through high-purity hydrogen (H) and 99.999% height that purity is 99.999% simultaneously in a device Purity argon (Ar), the flow of hydrogen (H) is 50-200sccm, and the flow of argon gas (Ar) is 50sccm, duration of ventilation 20- 30min.Then, bias voltage is set to 200V, is passed through high purity argon (Ar) in a device, and the flow of argon gas (Ar) is 50sccm, duration of ventilation 20-30min.
C, binder course 2 is plated:Molecule pump frequency is 72%, is filled with nitrogen (N) in a device so that the pressure in equipment is 2.5*10-2Mbar, singly open Ti targets, arc current 150A, bias voltage 200V, coating time period 3min.
D, functional layer 3 is plated:Molecule pump frequency is 72%, pours nitrogen (N) in a device so that the pressure in equipment is 4* 10-2Mbar, singly open AlTi67/33 targets, arc current 130A, bias voltage 40V, coating time period 60-80min.
E, temperature is reduced to less than 200 DEG C before finally coming out of the stove.
Using the hardness of the coating of method preparation of the present utility model, adhesion is measured using Rockwell apparatus for 3500V HF1 standards can be reached, the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 900 DEG C.
As can be seen here, using the hard alloy of the present utility model handled by PVD, hard alloy can effectively be lifted Hardness, wearability and resistance to elevated temperatures, so as to improve hard alloy workpiece or mold use life-span and product quality, production Efficiency.
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining The utility model, it is not used to limit claim of the present utility model.All institutes within the spirit and principles of the utility model Any modification, equal replacement and improvement for making etc., should be included in the scope of protection of the utility model.
Brief description of the drawings
Fig. 1 is the cross section structure diagram of the hard alloy of the present utility model with PVD coatings.
Main element symbol description:
Hard alloy substrate 1
Binder course 2
Functional layer 3
Following embodiment will further illustrate the utility model with reference to above-mentioned accompanying drawing.
Embodiment
Case 1 is embodied:
A kind of new PVD coatings, it is characterised in that including hard alloy substrate 1, be attached to the table of matrix 1 from inside to outside The binder course 2 and functional layer 3 in face.Described binder course 2 is Ti coatings, and its thickness is 0.01um;Described functional layer 3 is AlTi coatings, its thickness are 1.2um, and the ratio between Al and Ti amount of material is 67: 33 in AlTi coatings.Described coating it is total The gross thickness of thickness (binder course+functional layer) is 1.21um.
A kind of new CrN coatings, its handling process are as follows:
A, vacuumize, heat:The material of matrix 1 is positioned in vacuum coating equipment first, adjustment equipment vacuum is 6* 10-5Mbar, heating 1h or so so that temperature is increased to 460-480 DEG C.
B, matrix 1 is cleaned:Ions Bombardment, bias voltage 10V, molecular pump running frequency from starting vacuumize when 100% drops to 72%, is passed through high-purity hydrogen (H) and 99.999% height that purity is 99.999% simultaneously in a device Purity argon (Ar), the flow of hydrogen (H) is 50-200sccm, and the flow of argon gas (Ar) is 50sccm, duration of ventilation 20- 30min.Then, bias voltage is set to 200V, is passed through high purity argon (Ar) in a device, and the flow of argon gas (Ar) is 50sccm, duration of ventilation 20-30min.
C, binder course 2 is plated:Molecule pump frequency is 72%, is filled with nitrogen (N) in a device so that the pressure in equipment is 2.5*10-2Mbar, singly open Ti targets, arc current 150A, bias voltage 200V, coating time period 3min.
D, functional layer 3 is plated:Molecule pump frequency is 72%, pours nitrogen (N) in a device so that the pressure in equipment is 4* 10-2Mbar, singly open AlTi67/33 targets, arc current 130A, bias voltage 40V, coating time period 70min.
E, temperature is reduced to less than 200 DEG C before finally coming out of the stove.
Using the hardness of the coating of method preparation of the present utility model, adhesion is measured using Rockwell apparatus for 3500V HF1 standards can be reached, the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 900 DEG C.
Case 2 is embodied:
A kind of new PVD coatings, it is characterised in that including hard alloy substrate 1, be attached to the table of matrix 1 from inside to outside The binder course 2 and functional layer 3 in face.Described binder course 2 is Ti coatings, and its thickness is 0.009um;Described functional layer 3 is AlTi coatings, its thickness are 1.35um, and the ratio between Al and Ti amount of material is 67: 33 in AlTi coatings.Described coating The gross thickness of gross thickness (binder course+functional layer) is 1.359um.
The hardness of hard alloy cutter coating by PVD surface treatments is 3500V, and adhesion is measured using Rockwell hardness Amount can reach HF1 standards, and the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 900 DEG C.
Specific preparation process referring again to specific implementation case 1, is not described further in detail herein.
Case 3 is embodied:
A kind of new PVD coatings, it is characterised in that including hard alloy substrate 1, be attached to the table of matrix 1 from inside to outside The binder course 2 and functional layer 3 in face.Described binder course 2 is Ti coatings, and its thickness is 0.011um;Described functional layer 3 is AlTi coatings, its thickness are 1.1um, and the ratio between Al and Ti amount of material is 67: 33 in AlTi coatings.Described coating it is total The gross thickness of thickness (binder course+functional layer) is 1.111um.
The hardness of hard alloy cutter coating by PVD surface treatments is 3500V, and adhesion is measured using Rockwell hardness Amount can reach HF1 standards, and the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 900 DEG C.
Specific preparation process referring again to specific implementation case 1, is not described further in detail herein.
Embodiment described above, its description is more specific and detailed, but therefore can not be interpreted as to the utility model The limitation of the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, the utility model structure is not being departed from On the premise of think of, various modifications and improvements can be made, these belong to the scope of protection of the utility model.Therefore, this reality It should be determined by the appended claims with the protection domain of new patent.

Claims (1)

1. a kind of new PVD coatings, it is characterised in that including hard alloy substrate, be attached to matrix surface from inside to outside Binder course and functional layer, described binder course are Ti coatings, and its thickness is 0.009-0.011um;Described functional layer is AlTi Coating, its thickness are 1.0-1.4um, and the gross thickness of described binder course and functional layer is 1.009-1.411um.
CN201720357006.3U 2017-04-07 2017-04-07 A kind of new PVD coatings Expired - Fee Related CN206986270U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720357006.3U CN206986270U (en) 2017-04-07 2017-04-07 A kind of new PVD coatings

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720357006.3U CN206986270U (en) 2017-04-07 2017-04-07 A kind of new PVD coatings

Publications (1)

Publication Number Publication Date
CN206986270U true CN206986270U (en) 2018-02-09

Family

ID=61422864

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720357006.3U Expired - Fee Related CN206986270U (en) 2017-04-07 2017-04-07 A kind of new PVD coatings

Country Status (1)

Country Link
CN (1) CN206986270U (en)

Similar Documents

Publication Publication Date Title
CN103668095B (en) A kind of high power pulse plasma enhancing combined magnetic-controlled sputter deposition apparatus and using method thereof
CN107227441B (en) A kind of TiAlSiN coating production based on reactive sputtering hesitation
CN105239039B (en) A kind of multi-layer nano composite coating diel and preparation method thereof
CN103522627B (en) The composite coating on a kind of valve sealing element surface and preparation method thereof
CN101518935A (en) PVD nano composite ceramic coating screw and method for manufacturing same
CN105671499B (en) A kind of wear-and corrosion-resistant CrAlSiN composite coatings and preparation method thereof
CN104325738B (en) A kind of hard coat of cold rolling disc flying shear and preparation method thereof
CN108070857A (en) Super thick DLC coatings
CN103921498B (en) Stainless steel products with hard film layer and preparation method thereof
CN101746091A (en) Composite coating for abrasion-resistance and anti-corrosion treatments on surface of machine components and preparation method
CN206986269U (en) A kind of high-speed steel or hard alloy being surface-treated by PVD
CN105420673A (en) Diamond-like micro-nano coating for rubber mold and preparation method
TW201344762A (en) Surface treatment method for diamond-like carbon layer and product manufactured by the method
CN110863182A (en) Method for strengthening surface coating of gear cold extrusion die
CN103009697B (en) Self-lubricating gradient composite superhard film and preparation method thereof
CN107513690B (en) A kind of diamond-like/cubic boron nitride multi-layer composite coatings and preparation method thereof
CN105385997B (en) A kind of Cr2O3Thin film system and preparation method thereof
CN206986266U (en) A kind of new PVD coatings
CN206986270U (en) A kind of new PVD coatings
CN206986271U (en) A kind of new CrN coatings
CN206986267U (en) A kind of high-speed steel being surface-treated by PVD
CN104593737A (en) Preparation process for high-silicon super-hard PVD coating
CN207278191U (en) A kind of drill bit with PVD coatings
CN206986268U (en) A kind of new TiN coatings
CN110904413A (en) Method for processing superhard coating on surface of aluminum alloy section hot extrusion die

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180209

Termination date: 20190407

CF01 Termination of patent right due to non-payment of annual fee