CN206986266U - A kind of new PVD coatings - Google Patents
A kind of new PVD coatings Download PDFInfo
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- CN206986266U CN206986266U CN201720356970.4U CN201720356970U CN206986266U CN 206986266 U CN206986266 U CN 206986266U CN 201720356970 U CN201720356970 U CN 201720356970U CN 206986266 U CN206986266 U CN 206986266U
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Abstract
A kind of new PVD coatings, it is characterised in that including hard alloy substrate, be attached to the binder course and functional layer of matrix surface from inside to outside.Described binder course is Ti coatings, and its thickness is 0.07 0.09um；Described functional layer is TiAl coatings, and its thickness is 0.09 0.11um, and the ratio between Ti and Al amount of material is 50: 50 in TiAl coatings.The gross thickness of the gross thickness (binder course+functional layer) of described coating is 0.16 0.2um.
Description
Technical field
The utility model belongs to technical field of surface, is related to the process for treating surface of high-speed steel and hard alloy, special
It is not the PVD coating technologies for being related to a kind of nanostructured.
Background technology
Physical vapour deposition (PVD) (PVD, physical Vapor DeposiCron) be modern physicses, chemistry, materialogy,
The advanced engineering technology to grow up on the basis of electronics etc. is multidisciplinary.It is true by target (plating thin-film material)
Under Altitude, the process on substrate (needing film-coating workpiece) surface is deposited on by physical process.Use physical gas phase deposition technology
It is the focus of Recent study in cheap metal material surface manufacture solid-ceramic coating.
The workpiece or mould of high-speed steel and hard alloy, applied widely in machining, and in general is at a high speed
The workpiece or mould of steel and hard alloy because abrasion, high temperature resistant and the problems such as lubricity, cause its service life very big
Decline.
Utility model content
In order to solve problem above, the utility model proposes a kind of new PVD coatings.Using PVD of the present utility model
Coating, can effectively lift the hardness, wearability and resistance to elevated temperatures of high-speed steel and hard alloy, so as to improve high-speed steel and
Service life and product quality, the production efficiency of hard alloy.
A kind of new PVD coatings, it is characterised in that including hard alloy substrate 1, be attached to the table of matrix 1 from inside to outside
The binder course 2 and functional layer 3 in face.Described binder course 2 is Ti coatings, and its thickness is 0.07-0.09um；Described functional layer 3
For TiAl coatings, its thickness is 0.09-0.11um, and the ratio between Ti and Al amount of material is 50: 50 in TiAl coatings.Described
The gross thickness of the gross thickness (binder course+functional layer) of coating is 0.16-0.2um.
A kind of new PVD coatings, its handling process are as follows：
A, vacuumize, heat：The material of matrix 1 is positioned in vacuum coating equipment first, adjustment equipment vacuum is 6*
10-5Mbar, heating 1h or so so that temperature is increased to 460-480 DEG C.
B, matrix 1 is cleaned：Ions Bombardment, bias voltage 10V, molecular pump running frequency from starting vacuumize when
100% drops to 72%, is passed through high-purity hydrogen (H) and 99.999% height that purity is 99.999% simultaneously in a device
Purity argon (Ar), the flow of hydrogen (H) is 50-200sccm, and the flow of argon gas (Ar) is 50sccm, duration of ventilation 20-
30min.Then, bias voltage is set to 200V, is passed through high purity argon (Ar) in a device, and the flow of argon gas (Ar) is
50sccm, duration of ventilation 20-30min.
C, binder course 2 is plated：Molecule pump frequency is 72%, is filled with nitrogen (N) in a device so that the pressure in equipment is
2.0*10-2Mbar, singly open Ti targets, arc current 150A, bias voltage 40V, coating time period 4-6min.
D, functional layer 3 is plated：Molecule pump frequency is 72%, pours nitrogen (N) in a device so that the pressure in equipment is
4.0*10-2Mbar, singly open TiAl50/50 targets, arc current 180A, bias voltage 40V, coating time period 4-6min.
E, temperature is reduced to less than 200 DEG C before finally coming out of the stove.
Using the hardness of the coating of method preparation of the present utility model, adhesion is measured using Rockwell apparatus for 3000V
HF1 standards can be reached, the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 700 DEG C.
As can be seen here, using the hard alloy of the present utility model handled by PVD, hard alloy can effectively be lifted
Hardness, wearability and resistance to elevated temperatures, so as to improve hard alloy workpiece or mold use life-span and product quality, production
Efficiency.
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining
The utility model, it is not used to limit claim of the present utility model.All institutes within the spirit and principles of the utility model
Any modification, equal replacement and improvement for making etc., should be included in the scope of protection of the utility model.
Brief description of the drawings
Fig. 1 is the cross section structure diagram of the hard alloy of the present utility model with PVD coatings.
Main element symbol description：
| Matrix | 1 |
| Binder course | 2 |
| Functional layer | 3 |
Following embodiment will further illustrate the utility model with reference to above-mentioned accompanying drawing.
Embodiment
Case 1 is embodied：
A kind of new PVD coatings, it is characterised in that including matrix 1, be attached to the combination on the surface of matrix 1 from inside to outside
Layer 2 and functional layer 3.Described binder course 2 is Ti coatings, and its thickness is 0.08um；Described functional layer 3 is TiAl coatings, its
Thickness is 0.1um, and the ratio between Ti and Al amount of material is 50: 50 in TiAl coatings.Described coating gross thickness (with reference to
Layer+functional layer) gross thickness be 0.18um.
A kind of new PVD coatings, its handling process are as follows：
A, vacuumize, heat：The material of matrix 1 is positioned in vacuum coating equipment first, adjustment equipment vacuum is 6*
10-5Mbar, heating 1h or so so that temperature is increased to 460-480 DEG C.
B, matrix 1 is cleaned：Ions Bombardment, bias voltage 10V, molecular pump running frequency from starting vacuumize when
100% drops to 72%, is passed through high-purity hydrogen (H) and 99.999% height that purity is 99.999% simultaneously in a device
Purity argon (Ar), the flow of hydrogen (H) is 50-200sccm, and the flow of argon gas (Ar) is 50sccm, duration of ventilation 20-
30min.Then, bias voltage is set to 200V, is passed through high purity argon (Ar) in a device, and the flow of argon gas (Ar) is
50sccm, duration of ventilation 20-30min.
C, binder course 2 is plated：Molecule pump frequency is 72%, is filled with nitrogen (N) in a device so that the pressure in equipment is
2.0*10-2Mbar, singly open Ti targets, arc current 150A, bias voltage 40V, coating time period 5min.
D, functional layer 3 is plated：Molecule pump frequency is 72%, pours nitrogen (N) in a device so that the pressure in equipment is
4.0*10-2Mbar, singly open TiAl50/50 targets, arc current 180A, bias voltage 40V, coating time period 5min.
E, temperature is reduced to less than 200 DEG C before finally coming out of the stove.
Using the hardness of the coating of method preparation of the present utility model, adhesion is measured using Rockwell apparatus for 3500V
HF1 standards can be reached, the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 900 DEG C.
Case 2 is embodied：
A kind of new PVD coatings, it is characterised in that including matrix 1, be attached to the combination on the surface of matrix 1 from inside to outside
Layer 2 and functional layer 3.Described binder course 2 is Ti coatings, and its thickness is 0.07um；Described functional layer 3 is TiAl coatings, its
Thickness is 0.11um, and the ratio between Ti and Al amount of material is 50: 50 in TiAl coatings.Gross thickness (the knot of described coating
Close layer+functional layer) gross thickness be 0.18um.
The hardness of hard alloy cutter coating by PVD surface treatments is 3000V, and adhesion is measured using Rockwell hardness
Amount can reach HF1 standards, and the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 700 DEG C.
Specific preparation process referring again to specific implementation case 1, is not described further in detail herein.
Case 3 is embodied：
A kind of new PVD coatings, it is characterised in that including matrix 1, be attached to the combination on the surface of matrix 1 from inside to outside
Layer 2 and functional layer 3.Described binder course 2 is Ti coatings, and its thickness is 0.09um；Described functional layer 3 is TiAl coatings, its
Thickness is 0.09um, and the ratio between Ti and Al amount of material is 50: 50 in TiAl coatings.Gross thickness (the knot of described coating
Close layer+functional layer) gross thickness be 0.18um.
The hardness of hard alloy cutter coating by PVD surface treatments is 3000V, and adhesion is measured using Rockwell hardness
Amount can reach HF1 standards, and the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 700 DEG C.
Specific preparation process referring again to specific implementation case 1, is not described further in detail herein.
Embodiment described above, its description is more specific and detailed, but therefore can not be interpreted as to the utility model
The limitation of the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, the utility model structure is not being departed from
On the premise of think of, various modifications and improvements can be made, these belong to the scope of protection of the utility model.Therefore, this reality
It should be determined by the appended claims with the protection domain of new patent.
Claims (1)
1. a kind of new PVD coatings, it is characterised in that including hard alloy substrate, be attached to matrix surface from inside to outside
Binder course and functional layer, described binder course are Ti coatings, and its thickness is 0.07-0.09um；Described functional layer applies for TiAl
Layer, its thickness are 0.09-0.11um, and the gross thickness of described binder course and functional layer is 0.16-0.2um.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720356970.4U CN206986266U (en) | 2017-04-07 | 2017-04-07 | A kind of new PVD coatings |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720356970.4U CN206986266U (en) | 2017-04-07 | 2017-04-07 | A kind of new PVD coatings |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206986266U true CN206986266U (en) | 2018-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720356970.4U Expired - Fee Related CN206986266U (en) | 2017-04-07 | 2017-04-07 | A kind of new PVD coatings |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206986266U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110157989A (en) * | 2018-03-15 | 2019-08-23 | 莱芜职业技术学院 | A kind of PVD carburization titanium steel-bonded cemented carbide die and its preparation |
-
2017
- 2017-04-07 CN CN201720356970.4U patent/CN206986266U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110157989A (en) * | 2018-03-15 | 2019-08-23 | 莱芜职业技术学院 | A kind of PVD carburization titanium steel-bonded cemented carbide die and its preparation |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180209 Termination date: 20190407 |