CN206986269U - A kind of high-speed steel or hard alloy being surface-treated by PVD - Google Patents
A kind of high-speed steel or hard alloy being surface-treated by PVD Download PDFInfo
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- CN206986269U CN206986269U CN201720356978.0U CN201720356978U CN206986269U CN 206986269 U CN206986269 U CN 206986269U CN 201720356978 U CN201720356978 U CN 201720356978U CN 206986269 U CN206986269 U CN 206986269U
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Abstract
A kind of high-speed steel or hard alloy being surface-treated by PVD, it is characterised in that including matrix, be attached to the binder course of matrix surface from inside to outside and be repeated in the modulating layer and functional layer in N number of cycle.Described binder course is AlCr coatings, and its thickness is 0.2 0.3um, and wherein the ratio between Al and Cr amount of material of AlCr coatings is 70: 30;Described modulating layer is AlCr coatings, and its thickness is 0.16 0.20um, and wherein the ratio between amount of Al and Cr material of AlCr coatings is 70: 30;Described functional layer is TiSi coatings, and its thickness is 0.05um, and the ratio between amount of Ti and Si materials is 85: 15 wherein in TiSi coatings.Described is repeated in the modulating layer and functional layer in N number of cycle, and 4≤N≤6, N are natural number.The gross thickness (binder course+modulating layer+functional layer) of film layer is 1.04 1.8um.
Description
Technical field
The utility model belongs to technical field of surface, is related to a kind of surface treatment skill of high-speed steel or hard alloy
Art, more particularly to a kind of high-speed steel or hard alloy being surface-treated by PVD.
Background technology
In order to improve the service life of high-speed steel or hard alloy, at present both at home and abroad frequently with nitriding, metallic cementation, electricity
The methods of plating, chemical plating, strengthens the surface of high-speed steel or hard alloy.But a certain degree of pollution be present in handling process, and
And hardness is low.
Physical vapour deposition (PVD) (PVD, physical Vapor Deposition) be modern physicses, chemistry, materialogy,
The advanced engineering technology to grow up on the basis of electronics etc. is multidisciplinary.It is true by target (plating thin-film material)
Under Altitude, the process on substrate (needing film-coating workpiece) surface is deposited on by physical process.Use physical gas phase deposition technology
It is the focus of Recent study in cheap metal material surface manufacture solid-ceramic coating, is had been achieved with instrument and mould
Successful application, solves the problems, such as the abrasion of cutter and high temperature resistant.Arc ion plating and magnetron sputtering be in PVD methods the most
The coating such as the manufacturing technology of common solid-ceramic coating, TiN, the CrN commonly used at present on cutter and mould is exactly to use electric arc
Ion plating technique manufacture.But its hardness such as ceramic coating such as TiN, CrN of conventional arc ion plating manufacture only has the two of nitriding
Times, friction durability is limited, while does not have greasy property.High-speed steel and carbide surface using when there is great limitation
Property.
Utility model content
In order to solve problem above, the utility model proposes a kind of high-speed steel or hard alloy being surface-treated by PVD.
Using the high-speed steel or hard alloy of the present utility model being surface-treated by PVD, high-speed steel or hard can be effectively lifted
Hardness, wearability and the resistance to elevated temperatures of matter alloy, so as to improve the service life of metal high-speed steel or hard alloy and production
Quality, production efficiency.
It is a kind of by PVD be surface-treated high-speed steel or hard alloy, it is characterised in that including matrix 1, from inside to outside according to
The binder course 2 for being attached to the surface of matrix 1 and the modulating layer 31 for being repeated in N number of cycle and functional layer 32.Described binder course 2 is
AlCr coatings, its thickness are 0.2-0.3um, and wherein the ratio between Al and Cr amount of material of AlCr coatings is 70: 30;Described
Modulating layer 31 is AlCr coatings, and its thickness is 0.16-0.20um, and wherein the ratio between amount of Al and Cr material of AlCr coatings is 70:
30;Described functional layer 32 is TiSi coatings, and its thickness is 0.05um, and wherein the ratio between amount of Ti and Si materials is in TiSi coatings
85∶15.Described is repeated in the modulating layer 31 and functional layer 32 in N number of cycle, and 4≤N≤6, n are natural number.Film layer it is total
Thickness (binder course 2+ modulating layer 31+ functional layers 32) is 1.04-1.8um.
A kind of high-speed steel and hard alloy being surface-treated by PVD, its handling process are as follows:
A, vacuumize, heat:The material of matrix 1 is positioned in vacuum coating equipment first, adjustment equipment vacuum is 6*
10-5Mbar, heating 1h or so so that temperature is increased to 460-480 DEG C.
B, matrix 1 is cleaned:Ions Bombardment, bias voltage 10V, molecular pump running frequency from starting vacuumize when
100% drops to 72%, in a device simultaneously be passed through purity be 99.999% high-purity hydrogen (H) and 99.999% it is high-purity
Argon gas (Ar) is spent, the flow of hydrogen (H) is 50-200sccm, and the flow of argon gas (Ar) is 50sccm, duration of ventilation 20-
30min.Then, bias voltage is set to 200V, is passed through high purity argon (Ar) in a device, and the flow of argon gas (Ar) is
50sccm, duration of ventilation 20-30min.
C, binder course 2 is plated:Molecule pump frequency is 72%, is filled with nitrogen (N) in a device so that the pressure in equipment is
2.5*10-2Mbar, singly open AlCr70/30 targets, arc current 150A, bias voltage 40-120V, coating time period 13-
16min。
D, modulating layer 31 is plated:Molecule pump frequency is 72%, is filled with nitrogen (N) in a device so that the pressure in equipment is
4*10-2Mbar, singly open AlCr70/30 targets, arc current 180A, bias voltage 120V, coating time period 8-12min.
E, functional layer 32 is plated:Molecule pump frequency is 72%, pours nitrogen (N) in a device so that the pressure in equipment is
4*10-2Mbar, singly open TiSi85/15 targets, arc current 200A, bias voltage 40V, coating time period 3min.
F, above-mentioned steps D, step F are one group, the 4-6 cycle of circulation work so that (binder course 2+ is adjusted the gross thickness of film layer
Preparative layer 31+ functional layers 32) it is 1.04-1.8um.
G, temperature is reduced to less than 200 DEG C before finally coming out of the stove.
Using the hardness of the coating of method preparation of the present utility model, adhesion is measured using Rockwell apparatus for 3200V
HF1 standards can be reached, the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 1000 DEG C.
As can be seen here, using the high-speed steel or hard alloy of the present utility model handled by PVD, can effectively be lifted
The hardness of high-speed steel or hard alloy, wearability and resistance to elevated temperatures, so as to improve the use of high-speed steel or hard alloy
Life-span and product quality, production efficiency.
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining
The utility model, it is not used to limit claim of the present utility model.All institutes within the spirit and principles of the utility model
Any modification, equal replacement and improvement for making etc., should be included in the scope of protection of the utility model.
Brief description of the drawings
Fig. 1 is the cross section structure diagram of high-speed steel or hard alloy of the present utility model with PVD coatings.
Main element symbol description:
Matrix | 1 |
Binder course | 2 |
Modulating layer | 31 |
Functional layer | 32 |
Following embodiment will further illustrate the utility model with reference to above-mentioned accompanying drawing.
Embodiment
Case 1 is embodied:
It is a kind of by PVD be surface-treated high-speed steel or hard alloy, it is characterised in that including matrix 1, from inside to outside according to
The binder course 2 for being attached to the surface of matrix 1 and the modulating layer 31 for being repeated in 5 cycles and functional layer 32.Described binder course 2 is
AlCr coatings, its thickness are 0.2um, and wherein the ratio between Al and Cr amount of material of AlCr coatings is 70: 30;Described modulating layer
31 be AlCr coatings, and its thickness is 0.18um, and wherein the ratio between amount of Al and Cr material of AlCr coatings is 70: 30;Described work(
Ergosphere 32 is TiSi coatings, and its thickness is 0.05um, and the ratio between amount of Ti and Si materials is 85: 15 wherein in TiSi coatings.Film layer
Gross thickness (binder course 2+ modulating layer 31+ functional layers 32) be 1.35um.
The hardness of high-speed steel and hard alloy coating by PVD surface treatments is 3200V, and adhesion uses Rockwell hardness
Meter measurement can reach HF1 standards, and the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 1000 DEG C.
Its preparation process is as follows:
A, vacuumize, heat:The material of matrix 1 is positioned in vacuum coating equipment first, adjustment equipment vacuum is 6*
10-5Mbar, heating 1h or so so that temperature is increased to 460-480 DEG C.
B, matrix 1 is cleaned:Ions Bombardment, bias voltage 10V, molecular pump running frequency from starting vacuumize when
100% drops to 72%, is passed through high-purity hydrogen (H) and 99.999% height that purity is 99.999% simultaneously in a device
Purity argon (Ar), the flow of hydrogen (H) is 50-200sccm, and the flow of argon gas (Ar) is 50sccm, duration of ventilation 20-
30min.Then, bias voltage is set to 200V, is passed through high purity argon (Ar) in a device, and the flow of argon gas (Ar) is
50sccm, duration of ventilation 20-30min.
C, binder course 2 is plated:Molecule pump frequency is 72%, is filled with nitrogen (N) in a device so that the pressure in equipment is
2.5*10-2Mbar, singly open AlCr70/30 targets, arc current 150A, bias voltage 40-120V, coating time period 15min.
D, modulating layer 31 is plated:Molecule pump frequency is 72%, is filled with nitrogen (N) in a device so that the pressure in equipment is
4*10-2Mbar, singly open AlCr70/30 targets, arc current 180A, bias voltage 120V, coating time period 10min.
E, functional layer 32 is plated:Molecule pump frequency is 72%, pours nitrogen (N) in a device so that the pressure in equipment is
4*10-2Mbar, singly open TiSi85/15 targets, arc current 200A, bias voltage 40V, coating time period 3min.
F, above-mentioned steps D, step F are one group, 5 cycles of circulation work so that (binder course 2+ is modulated the gross thickness of film layer
Layer 31+ functional layers 32) it is 1.35um.
G, temperature is reduced to less than 200 DEG C before finally coming out of the stove.
Case 2 is embodied:
It is a kind of by PVD be surface-treated high-speed steel or hard alloy, it is characterised in that including matrix 1, from inside to outside according to
The binder course 2 for being attached to the surface of matrix 1 and the modulating layer 31 for being repeated in 4 cycles and functional layer 32.Described binder course 2 is
AlCr coatings, its thickness are 0.3um, and wherein the ratio between Al and Cr amount of material of AlCr coatings is 70: 30;Described modulating layer
31 be AlCr coatings, and its thickness is 0.16um, and wherein the ratio between amount of Al and Cr material of AlCr coatings is 70: 30;Described work(
Ergosphere 32 is TiSi coatings, and its thickness is 0.05um, and the ratio between amount of Ti and Si materials is 85: 15 wherein in TiSi coatings.Film layer
Gross thickness (binder course 2+ modulating layer 31+ functional layers 32) be 1.14um.
The hardness of high-speed steel and hard alloy coating by PVD surface treatments is 3200V, and adhesion uses Rockwell hardness
Meter measurement can reach HF1 standards, and the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 1000 DEG C.
Specific preparation process referring again to specific implementation case 1, is not described further in detail herein.
Case 3 is embodied:
It is a kind of by PVD be surface-treated high-speed steel or hard alloy, it is characterised in that including matrix 1, from inside to outside according to
The binder course 2 for being attached to the surface of matrix 1 and the modulating layer 31 for being repeated in 6 cycles and functional layer 32.Described binder course 2 is
AlCr coatings, its thickness are 0.25um, and wherein the ratio between Al and Cr amount of material of AlCr coatings is 70: 30;Described modulation
Layer 31 is AlCr coatings, and its thickness is 0.19um, and wherein the ratio between amount of Al and Cr material of AlCr coatings is 70: 30;Described
Functional layer 32 is TiSi coatings, and its thickness is 0.05um, and the ratio between amount of Ti and Si materials is 85: 15 wherein in TiSi coatings.Film
The gross thickness (binder course 2+ modulating layer 31+ functional layers 32) of layer is 1.69um.
The hardness of high-speed steel and hard alloy coating by PVD surface treatments is 3200V, and adhesion uses Rockwell hardness
Meter measurement can reach HF1 standards, and the friction coefficient of friction with metal is 0.2, and heat resisting temperature is 1000 DEG C.
Specific preparation process referring again to specific implementation case 1, is not described further in detail herein.
Embodiment described above, its description is more specific and detailed, but therefore can not be interpreted as to the utility model
The limitation of the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, the utility model structure is not being departed from
On the premise of think of, various modifications and improvements can be made, these belong to the scope of protection of the utility model.Therefore, this reality
It should be determined by the appended claims with the protection domain of new patent.
Claims (1)
1. a kind of high-speed steel or hard alloy being surface-treated by PVD, it is characterised in that including matrix, from inside to outside depend on
Binder course and the modulating layer and functional layer that are repeated in N number of cycle in matrix surface, described binder course is AlCr coatings, its
Thickness is 0.2-0.3um;Described modulating layer is AlCr coatings, and its thickness is 0.16-0.20um;Described functional layer is TiSi
Coating, its thickness are 0.05um;Described is repeated in the modulating layer and functional layer in N number of cycle, and 4≤N≤6, N are nature
Number, the gross thickness of binder course, modulating layer and functional layer is 1.04-1.8um.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111378926A (en) * | 2018-12-29 | 2020-07-07 | 苏州星蓝纳米技术有限公司 | Novel H coating |
CN111378929A (en) * | 2018-12-29 | 2020-07-07 | 苏州星蓝纳米技术有限公司 | Novel P coating |
CN112458410A (en) * | 2019-09-09 | 2021-03-09 | 苏州吉恒纳米科技有限公司 | Superhard silicon-based coating |
-
2017
- 2017-04-07 CN CN201720356978.0U patent/CN206986269U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111378926A (en) * | 2018-12-29 | 2020-07-07 | 苏州星蓝纳米技术有限公司 | Novel H coating |
CN111378929A (en) * | 2018-12-29 | 2020-07-07 | 苏州星蓝纳米技术有限公司 | Novel P coating |
CN112458410A (en) * | 2019-09-09 | 2021-03-09 | 苏州吉恒纳米科技有限公司 | Superhard silicon-based coating |
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Granted publication date: 20180209 Termination date: 20190407 |
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