CN206969684U - Blanking device - Google Patents

Abstract

The utility model proposes a kind of blanking device, for carrying out blanking to the workpiece in vacuum processing apparatus.Blanking device includes hermatic door, three-way pipe, material fetching mechanism and cutting agency, three-way pipe includes the first cavity and the second cavity, first cavity includes first chamber, first port and second port, hermatic door covers first port and discharging opening, second cavity includes second chamber and the feed opening being connected with first chamber, material fetching mechanism includes feeding actuator and holder, cutting agency includes fixed mount, blanking actuator, seal and pressure pin, seal is mobile towards feed opening under the driving of blanking actuator and covers feed opening, after opening hermatic door, holder enters in vacuum processing apparatus to grip workpiece and put workpiece to pressure pin in be driven through first chamber and the hermatic door of feeding actuator, after closing hermatic door, blanking actuator drives seal away from feed opening.Above-mentioned blanking device is easy to operate and can ensure the vacuum environment of vacuum processing apparatus.

Description

Blanking device

Technical field

A kind of blanking device is the utility model is related to, it is particularly a kind of to be used to carry out down the workpiece in vacuum processing apparatus The blanking device of material.

Background technology

When finished product is taken out in the vacuum chamber of vacuum processing apparatus, vacuum chamber is easily by vacuum breaker.In order to prevent vacuum chamber quilt Vacuum breaker, vacuum tank is typically installed on vacuum chamber.Vacuum tank includes housing and seal, and the bottom surface of housing is provided with water Flat sealing surface, seal are installed vertically in housing, and the sealing direction of seal and the plane perpendicular of housing are set.So And when taking out finished product, it is bad that cumbersome and finished product drop easily causes greatly finished product fracture etc..

Utility model content

In view of above-mentioned condition, it is necessary to provide workpiece a kind of simple to operate and that taking-up can be ensured blanking without damage Device.

A kind of blanking device, in vacuum processing apparatus workpiece carry out blanking, the blanking device include hermatic door, Three-way pipe, material fetching mechanism and cutting agency, the hermatic door are connected between the three-way pipe and the discharging opening of the vacuum processing apparatus, The hermatic door can be opened so that the three-way pipe is connected with the vacuum processing apparatus, and the material fetching mechanism and the cutting agency are set In on the three-way pipe, the three-way pipe includes the first cavity and the second cavity being arranged on first cavity, the first cavity bag First chamber, first port and second port are included, one end that first cavity has the first port is arranged on the discharging opening, The seal door is placed in the first port, and second cavity includes second chamber and feed opening, the second chamber with this first Chamber is connected, and the material fetching mechanism includes feeding actuator and holder, and the feeding actuator is sealingly arranged in second end On mouth, the holder is connected with the feeding actuator and in the first chamber, and the cutting agency includes fixed mount, blanking Actuator, seal and pressure pin, the fixed mount setting are set on second cavity and close to the feed opening, the blanking actuator In the fixed mount, the seal is connected with the blanking actuator, and the pressure pin is set on the seal, and the seal is in the blanking Towards feed opening movement and the feed opening can be covered under the driving of actuator.

Further, the material fetching mechanism also includes sealing flange, and the sealing flange is covered in the second port, the feeding Actuator is arranged on the sealing flange.

Further, the material fetching mechanism also includes pallet, and the holder can clamp or discharge the pallet, and the pallet is used for Hold the workpiece.

Further, the pressure pin includes the body of rod and holding unit, and the body of rod sets the seal away from the blanking actuator On side, the holding unit is arranged at the one end of the body of rod away from the seal to prop up the pallet.

Further, the fixed mount takes the shape of the letter U.

Further, the fixed mount includes support member and two parallel connectors, and two connectors are the support member Both ends extend vertically and form towards the same side of the support member, two one end of the connector away from the support member are arranged at this On the periphery wall of second cavity, the blanking actuator is arranged on the support member.

Further, the support member is in long strip-board shape.

Further, the feeding actuator is straight line cylinder.

Further, the blanking actuator is straight line cylinder.

Above-mentioned blanking device between three-way pipe and the discharging opening of vacuum processing apparatus by setting hermatic door, and by close Sealing is mobile towards feed opening under the driving of blanking actuator and covers feed opening to ensure to carry out feeding after opening hermatic door When vacuum processing apparatus vacuum environment.Meanwhile holder is driven through first chamber and hermatic door in feeding actuator To grip workpiece and stably put workpiece to pressure pin in into vacuum processing apparatus, make workpiece not subject to damage, improve The quality of blanking.

Brief description of the drawings

Fig. 1 is the schematic perspective view of the blanking device of the embodiment of the utility model one.

Fig. 2 is the perspective exploded view of the blanking device shown in Fig. 1.

Fig. 3 is the diagrammatic cross-section along III-III lines of the blanking device shown in Fig. 1.

Main element symbol description

Following embodiment will further illustrate the utility model with reference to above-mentioned accompanying drawing.

Embodiment

Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out Clearly and completely describe, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole realities Apply example.Based on the embodiment in the utility model, those of ordinary skill in the art institute under the premise of creative work is not made The every other embodiment obtained, belong to the scope of the utility model protection.

It should be noted that when a component is considered as " connection " another component, it can make to be directly connected to separately One component may be simultaneously present the component being centrally located.When a component is considered as " being arranged on " another component, It can make to be set directly on another component or may be simultaneously present the component being centrally located.

Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to technology of the present utility model The implication that the technical staff in domain is generally understood that is identical.It is simply in term used in the description of the present utility model herein The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein " and/or " include The arbitrary and all combination of one or more related Listed Items.

It is referring to Fig. 1, provided by the utility model a kind of for the work in vacuum processing apparatus 200 (being illustrated as part) Part (not shown) carries out the blanking device 100 of blanking.Blanking device 100 include hermatic door 10, three-way pipe 20, material fetching mechanism 30 and Cutting agency 40.Hermatic door 10 is connected between three-way pipe 20 and the discharging opening 210 of vacuum processing apparatus 200.The energy of hermatic door 10 It is enough to open so that three-way pipe 20 is connected with vacuum processing apparatus 200 and ensures the vacuum state of vacuum processing apparatus 200.Threeway Pipe 20 is arranged on the discharging opening 210 of vacuum processing apparatus 200 in order to the smooth blanking of workpiece.Material fetching mechanism 30 is arranged at threeway Workpiece is taken out and put to cutting agency 40 to enter vacuum processing apparatus 200 by three-way pipe 20 on pipe 20.Cutting agency 40 pairs of workpiece carry out blanking.In the present embodiment, vacuum processing apparatus 200 is vacuum casting device, but not limited to this, vacuum are processed Equipment 200 can also be ion sputtering device, vacuum deposition apparatus etc..

Please refer to Fig. 2 and Fig. 3, three-way pipe 20 is substantially t-shaped, and it includes the first cavity 21 and is arranged at the first cavity The second cavity 22 on 21.First cavity 21 includes first chamber 211, first port 212 and second port 213.First chamber 211 through being opened on the first cavity 21.First port 212 and second port 213 are located at the both ends of first chamber 211 respectively. One end that first cavity 21 has first port 212 is arranged on the discharging opening 210 of vacuum processing apparatus 200, and hermatic door 10 It is covered in first port 212.Second cavity 22 includes second chamber 221 and feed opening 222.The chamber of second chamber 221 and first Room 211 is connected.Feed opening 222 is located at the one end of the second cavity 22 away from the first cavity 21.

Material fetching mechanism 30 includes sealing flange 31, feeding actuator 32, holder 33 and pallet 34.Sealing flange 31 covers In in the second port 213 of the first cavity 21.Feeding actuator 32 is arranged on sealing flange 31.Holder 33 drives with feeding Part 32 is connected and in first chamber 211.Holder 33 it is mobile under the driving of feeding actuator 32 and can clamp or Person discharges pallet 34.Pallet 34 can hold the workpiece in vacuum processing apparatus 200.In the present embodiment, feeding actuator 32 is Straight line cylinder, but not limited to this.

Cutting agency 40 includes fixed mount 41, blanking actuator 42, seal 43 and pressure pin 44.Fixed mount 41 is arranged at On two cavitys 22 and close to feed opening 222.Fixed mount 41 is substantially u-shaped, and it includes support member 411 and two parallel connectors 412.Support member 411 is substantially in long strip-board shape.Two connectors 412 for support member 411 both ends towards the same of support member 411 Side, which extends vertically, to be formed.The periphery wall that two one end of connector 412 away from support member 411 are arranged at the second cavity 22 (is not marked Show) on.

Blanking actuator 42 is arranged on the support member 411 of fixed mount 41 and positioned at the substantial middle position of support member 411. Seal 43 is connected with blanking actuator 42 and between two connector 412.Seal 43 is substantially in the form of annular discs.Sealing Part 43 can be moved under the driving of blanking actuator 42 towards the feed opening 222 of the second cavity 22 with cover feed opening 222 or Person is away from feed opening 222 to open feed opening 222.Pressure pin 44 includes the body of rod 441 and holding unit 442.The body of rod 441 sets seal On 43 sides away from blanking actuator 42 and positioned at the substantial middle position of seal 43.Holding unit 442 is arranged at the body of rod 441 One end away from seal 43 is to prop up pallet 34.Pressure pin 44 can go deep into second chamber 221 under the drive of seal 43 To prop up pallet 34 so that the workpiece of production is put as on pressure pin 44.In the present embodiment, blanking actuator 42 is straight line cylinder, But not limited to this.

Please refer to Fig. 1 to Fig. 3, during assembling, one end that the first cavity 21 has first port 212 is arranged at vacuum On the discharging opening 210 of process equipment 200, and by hermatic door 10 be connected to three-way pipe 20 first port 212 and vacuum processing set Between standby 200 discharging opening 210.Sealing flange 31 is covered in the second port 213 of the first cavity 21, and feeding is driven Part 32 is arranged on sealing flange 31.Holder 33 is connected with feeding actuator 32 simultaneously holding tray 34.By two connections The one end of part 412 away from support member 411 is arranged on the periphery wall (not indicating) of the second cavity 22, and blanking actuator 42 is set It is placed on the support member 411 of fixed mount 41 and positioned at the substantial middle position of support member 411.By seal 43 and blanking actuator 42 are connected and between two connectors 412, and the body of rod 441 is set into side of the seal 43 away from blanking actuator 42 Upper and holding unit 442 is arranged at the one end of the body of rod 441 away from seal 43, completes the assembling to whole blanking device 100.

In use, blanking actuator 42 drives seal 43 to be moved towards feed opening 222, seal 43 covers feed opening 222 and open hermatic door 10.Meanwhile the holding unit 442 of pressure pin 44 under the drive of the seal 43 enter second chamber 221 and Close to first chamber 211.Feeding actuator 32 drives holder 33 to drive pallet 34 to enter through first chamber 211 and hermatic door 10 Enter in vacuum processing apparatus 200 to collect workpiece and put pallet 34 to the holding unit 442 of pressure pin 44.Close hermatic door 10 Afterwards, blanking actuator 42 drives seal 43 away from feed opening 222 so as to which the workpiece in pallet 34 is taken away into second chamber 221, complete the blanking to workpiece.

Material fetching mechanism 30 includes sealing flange 31, feeding actuator 32, holder 33 and pallet 34, but not limited to this, close Envelope flange 31 and pallet 34 can be removed, and feeding actuator 32 is directly sealingly arranged in second port 213, and holder 33 is straight Gripping workpiece is connect, feeding actuator 32 is had no effect on and drives holder 33 to move and pick and place workpiece.

Blanking device 100 between three-way pipe 20 and the discharging opening 210 of vacuum processing apparatus 200 by setting hermatic door 10, and moved by seal 43 under the driving of blanking actuator 42 towards feed opening 222 and cover feed opening 222 to ensure The vacuum environment of vacuum processing apparatus 200 during feeding is carried out after opening hermatic door 10.Meanwhile holder 33 is in feeding actuator 32 Be driven through first chamber 211 and hermatic door 10 enter in vacuum processing apparatus 200 to grip workpiece and workpiece is stable Ground is put to pressure pin 44, makes workpiece not subject to damage, improves the quality of blanking.

In addition, those skilled in the art can also do other changes in the utility model spirit, certainly, these are according to this reality The change made of new spirit, it should all be included in the utility model scope claimed.

Claims (9)

1. a kind of blanking device, for carrying out blanking to the workpiece in vacuum processing apparatus, the blanking device includes hermatic door, three Siphunculus, material fetching mechanism and cutting agency, the hermatic door are connected between the three-way pipe and the discharging opening of the vacuum processing apparatus, should Hermatic door can be opened so that the three-way pipe is connected with the vacuum processing apparatus, and the material fetching mechanism and the cutting agency are arranged at On the three-way pipe, it is characterised in that：The three-way pipe includes the first cavity and the second cavity for being arranged on first cavity, and this One cavity includes first chamber, first port and second port, and one end that first cavity has the first port is arranged at this On discharging opening, the seal door is placed in the first port, and second cavity includes second chamber and feed opening, the second chamber It is connected with the first chamber, the material fetching mechanism includes feeding actuator and holder, and the feeding actuator is sealingly arranged in In the second port, the holder is connected with the feeding actuator and in the first chamber, and the cutting agency includes solid Determine frame, blanking actuator, seal and pressure pin, the fixed mount setting is on second cavity and close to the feed opening, the blanking Actuator is arranged at the fixed mount, and the seal is connected with the blanking actuator, and the pressure pin is set on the seal, the sealing Part can be mobile towards the feed opening under the driving of the blanking actuator and covers the feed opening.

2. blanking device as claimed in claim 1, it is characterised in that：The material fetching mechanism also includes sealing flange, the Sealing Method Orchid is covered in the second port, and the feeding actuator is arranged on the sealing flange.

3. blanking device as claimed in claim 1, it is characterised in that：The material fetching mechanism also includes pallet, and the holder can Clamp or discharge the pallet, the pallet is used to hold the workpiece.

4. blanking device as claimed in claim 3, it is characterised in that：The pressure pin includes the body of rod and holding unit, and the body of rod is set On side of the seal away from the blanking actuator, the holding unit is arranged at the one end of the body of rod away from the seal to prop up The pallet.

5. blanking device as claimed in claim 1, it is characterised in that：The fixed mount takes the shape of the letter U.

6. blanking device as claimed in claim 5, it is characterised in that：The fixed mount includes support member and two parallel connections Part, two connectors are extended vertically towards the same side of the support member for the both ends of the support member and formed, two connectors One end away from the support member is arranged on the periphery wall of second cavity, and the blanking actuator is arranged on the support member.

7. blanking device as claimed in claim 6, it is characterised in that：The support member is in long strip-board shape.

8. blanking device as claimed in claim 1, it is characterised in that：The feeding actuator is straight line cylinder.

9. blanking device as claimed in claim 1, it is characterised in that：The blanking actuator is straight line cylinder.