CN206920272U - A kind of device for measuring carbon monoxide transmitance - Google Patents

A kind of device for measuring carbon monoxide transmitance Download PDF

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Publication number
CN206920272U
CN206920272U CN201720863514.9U CN201720863514U CN206920272U CN 206920272 U CN206920272 U CN 206920272U CN 201720863514 U CN201720863514 U CN 201720863514U CN 206920272 U CN206920272 U CN 206920272U
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specimen holder
conductance
sample
carbon monoxide
test chamber
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CN201720863514.9U
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赵永建
张向平
朱红亮
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Jinhua Polytechnic
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Jinhua Polytechnic
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Abstract

It the utility model is related to gas permeation rate testing field,A kind of device for measuring carbon monoxide transmitance,Including air accumulator I,Air accumulator II,Barometer,Valve I,Valve II,Conductance unit,Pass sample chamber,Sample transmission rod,Pneumatic operated valve,High-pressure area,Sample,Specimen holder,Test zone,Mass spectrum,Test chamber,Vavuum pump and tracheae,High-pressure area,Sample,Specimen holder,Test zone is respectively positioned in test chamber,Specimen holder can separate test chamber as high-pressure area and test zone,It is with porous material inside conductance unit,Certain gas during the conductance unit by having specific molecular conductance under certain temperature conditions,The characteristic having by the molecular flow of conductance unit is,Molecular conductance keeps constant under different air pressure conditions,Molecular conductance is reciprocal directly proportional to the evolution of gas molecule quality,Molecular conductance is directly proportional to the evolution of temperature,Residual gas analyzer is mounted in high-pressure area and the test zone,For measuring partial pressure.

Description

A kind of device for measuring carbon monoxide transmitance
Technical field
Gas permeation rate testing field is the utility model is related to, particularly one kind calibrates mass spectrum, Neng Gou using argon gas To a kind of device of measurement carbon monoxide transmitance of mass spectrum calibrated in situ in test.
Background technology
In the existing method for measuring gas permeation rate (gas permeability), such as mass-spectrometer measurement gas permeation rate is used Method, its defect is that the measured value to carbon monoxide transmitance is simultaneously unreliable, because mass spectrographic output signal is ion-conductance Stream is, it is necessary to be calibrated, and the mass spectrum used in the prior art is typically to be calibrated with such as nitrogen, argon gas, helium inert gas , the data deficiencies of sensitivity of the mass spectrum to carbon monoxide, cause data precision to decline.It is in addition, usually used in the prior art Be mass flowmenter to measure the amount of gas of being passed through, accuracy is relatively low, for the low-down sample of some gas permeation rates Situation, for example CO gas, in the transmission situation of some industrial organic protective films, test usually requires the long period, Therefore larger error can be caused, and because the dynamic volume of carbon monoxide molecule is typically different than the relatively stable helium of chemical property The gases such as gas, nitrogen, which results in the measurement of mass flowmenter bigger error, also causes data precision to decline, described one kind The device of measurement carbon monoxide transmitance can solve problem.
Utility model content
In order to solve the above problems, the utility model is used as by a conductance unit refers to conductance (reference Conductance mass spectrum), and using argon gas is calibrated, adds the reliability of measurement, can be in testing to mass spectrum original position school It is accurate.
Technical scheme is used by the utility model:
It is described it is a kind of measure carbon monoxide transmitance device, mainly include air accumulator I, air accumulator II, barometer, valve I, Valve II, conductance unit, pass sample chamber, sample transmission rod, pneumatic operated valve, high-pressure area, sample, specimen holder, test zone, mass spectrum, test chamber, Vavuum pump and tracheae, the high-pressure area, sample, specimen holder, test zone are respectively positioned in the test chamber, the specimen holder peace The test chamber can be separated when being attached to test chamber as the high-pressure area and the test zone, the specimen holder center tool There is the opening run through, when specimen holder is installed to test chamber, the opening is between the high-pressure area and the test zone Unique gas circuit, the test zone outer end are provided with the mass spectrum, and the mass spectrum entrance is in the test zone, the sample Product vacuum is gluing in the one side for being located at the high-pressure area on the specimen holder, and opening for the specimen holder center is completely covered Mouthful, the biography sample chamber connects the test chamber by the pneumatic operated valve, and the biography sample chamber has the sample transmission rod and can be by institute State specimen holder to transmit between the biography sample chamber and test chamber, the test chamber is connected with the vavuum pump;In the air accumulator I High-purity argon gas is stored, carbon monoxide is stored in the air accumulator II, air accumulator I and air accumulator the II exit is respectively provided with Valve, the air accumulator I is connected with air accumulator II by tracheae and this section of tracheae connecting place has the barometer, Ran Houjing Tracheae connects gas circuit I and gas circuit II respectively, then tracheae is connected to the high-pressure area of the test chamber, on the gas circuit I according to It is secondary to be connected with the valve II, conductance unit, there is the valve I on the gas circuit II, the mass spectrographic output signal is gas current Calibration data for argon gas is known.
It is with porous material inside the conductance unit, certain gas is passing through the stream under certain temperature conditions There is specific molecular conductance when leading unit, the characteristic having by the molecular flow of the conductance unit is that molecular conductance is not Keep constant under same air pressure conditions, molecular conductance is reciprocal directly proportional to the evolution of gas molecule quality, molecular conductance and temperature The evolution of degree is directly proportional, residual gas analyzer is mounted in the high-pressure area and the test zone, for measuring gas Body partial pressure.
0.5 micron to 1 micron of the aperture of porous material inside the conductance unit, the mass spectrum entrance to sample away from From for 10 millimeters to 50 millimeters;The mass spectrum entrance is 5 millimeters to 30 millimeters of capillary form and length, and 0.3 millimeter of internal diameter is extremely 1 millimeter;The opening shape at the specimen holder center is the circle of 1 millimeter to 5 millimeters of diameter, can also be 1 millimeter of the length of side to 4 millis The square of rice;The thickness of the sample is 200 microns to 2 millimeters;The sealing structure of the specimen holder and test chamber is rubber Circle sealing, can also be copper band sealing.
Using it is described it is a kind of measure carbon monoxide transmitance the method and step that measures of device be:
One, opens the pneumatic operated valve, is taken the specimen holder to the biography sample chamber with the sample transmission rod, opens the valve I With valve II, open the vavuum pump and device is vacuumized;
Two, close the pneumatic operated valve, shutoff valve I, open air accumulator I, argon gas stream is entered test after conductance unit Chamber, mass spectrum is opened, start calibration process;
Three, calibrate conductance unit at different temperatures for the molecular conductance C of argon gasAr2:By the temperature that argon gas is altered in steps Spend so that its molar flow Q by conductance unit is altered in stepsAr2, and corresponding mass spectrographic gas current, Ran Hougen are recorded simultaneously According to the known mass spectrographic calibration data for argon gas, to determine molar flow QAr2Peak value corresponding with argon gas in mass spectrometric data The relation curve of increment;
Four, close air accumulator I, open air accumulator II, keep valve II openings, keep valve I closed modes, make an oxidation Carbon enters test chamber after the conductance unit and eventually enters into the mass spectrum, by the temperature of carbon monoxide is altered in steps with The molar flow Q of carbon monoxide is altered in stepsCO, and corresponding mass spectrographic gas current is recorded simultaneously, so as to obtain carbon monoxide Molar flow QCOWith the relation curve between mass spectrographic gas current;
Five, are by the molar flow Q that is obtained in step 3Ar2The relation of peak value increment corresponding with argon gas in mass spectrometric data is bent Line, molar flow of the carbon monoxide by the conductance unit is calculatedIts Middle CAr2It is argon molecules conductance, M in conductance unitAr2And MCOIt is the molecular weight of argon gas and carbon monoxide, pRIt is in air accumulator II Air pressure, R is gas constant, and T is the temperature in air accumulator II, T in step 40It is the temperature in step 3 in air accumulator I;
The obtained molar flow Q of carbon monoxide is measured in six, comparison steps fourCOWith the pass between mass spectrographic gas current It is curve, the molar flow gauge that the carbon monoxide that the measured value and step 5 that step 4 is obtained obtain passes through the conductance unit Calculation value QCOCompare, obtain the proportionate relationship between measured value and calculated value under condition of different temperatures, so far calibration process terminates;
The transmission measurement of seven, carbon monoxide in the sample, the specimen holder is taken to the test with the sample transmission rod Chamber, and the test chamber is separated as the high-pressure area and the test zone, pneumatic operated valve is closed, opens the air accumulator II, opens the valve I, records corresponding mass spectrographic gas current, and according to the measured value and calculated value obtained in step 6 it Between proportionate relationship, carbon monoxide is calibrated by the molar flow of the conductance unit, the stream after being calibrated Lead the molar flow of unit;
Eight, calculate the transmission of carbon monoxide according to the molar flow of the conductance unit after the calibration obtained in step 7 RateWherein A is the area of sample part in gas circuit.
The beneficial effects of the utility model are:
The utility model is used as by a conductance unit refers to conductance (reference conductance), and uses Argon gas calibrates mass spectrum, adds the reliability of measurement, can calibrate matter using argon gas in testing to mass spectrum calibrated in situ Spectrum, can be in testing to mass spectrum calibrated in situ.
Brief description of the drawings
Further illustrated with reference to figure of the present utility model:
Fig. 1 is the utility model schematic diagram.
In figure, 1. air accumulator I, 2. air accumulator II, 3. barometers, 4. valve I, 5. valve II, 6. conductance units, 7. pass sample chamber, 8. sample transmission rod, 9. pneumatic operated valves, 10. high-pressure areas, 11. samples, 12. specimen holders, 13. test zones, 14. mass spectrums, 15. tests Chamber, 16. vavuum pumps.
Embodiment
If Fig. 1 is the utility model schematic diagram, mainly include air accumulator I1, air accumulator II2, barometer 3, valve I4, valve II5, conductance unit 6, pass sample chamber 7, sample transmission rod 8, pneumatic operated valve 9, high-pressure area 10, sample 11, specimen holder 12, test zone 13, Mass spectrum 14, test chamber 15, vavuum pump 16 and tracheae, the high-pressure area 10, sample 11, specimen holder 12,13 equal position of test zone In in the test chamber 15, the test chamber 15 can be separated when the specimen holder 12 is installed to test chamber 15 as the high pressure Region 10 and the test zone 13, the center of specimen holder 12 has the opening run through, when specimen holder 12 is installed to test chamber When 15, opening unique gas circuit between the high-pressure area 10 and the test zone 13, outside the test zone 13 End is provided with the mass spectrum 14, and for the entrance of mass spectrum 14 in the test zone 13, the sample 11 is gluing in institute with vacuum The one side for being located at the high-pressure area 10 on specimen holder 12 is stated, the opening at the center of specimen holder 12, the biography sample is completely covered Chamber 7 connects the test chamber 15 by the pneumatic operated valve 9, and the biography sample chamber 7 has the sample transmission rod 8 and can be by the sample Product frame 12 transmits between the biography sample chamber 7 and test chamber 15, and the test chamber 15 is connected with the vavuum pump 16;The gas storage High-purity argon gas is stored in tank I1, carbon monoxide is stored in the air accumulator II2, the air accumulator I1 and air accumulator II2 go out Valve is respectively provided with mouthful, the air accumulator I1 is connected with air accumulator II2 by tracheae and this section of tracheae connecting place has the gas Pressure meter 3, then transtracheal connects gas circuit I and gas circuit II respectively, then tracheae is connected to the high-pressure area of the test chamber 15 The valve II5, conductance unit 6 are sequentially connected with 10, the gas circuit I, there is the valve I4, the mass spectrum 14 on the gas circuit II Output signal be that gas current is known for the calibration data of argon gas.
The inside of conductance unit 6 is that certain gas is by described under certain temperature conditions with porous material There is specific molecular conductance during conductance unit, the characteristic having by the molecular flow of the conductance unit 6 is that molecular conductance exists Keep constant under different air pressure conditions, molecular conductance is reciprocal directly proportional to the evolution of gas molecule quality, molecular conductance with The evolution of temperature is directly proportional, is mounted on residual gas analyzer in the high-pressure area 10 and the test zone 13, is used for Measure partial pressure.
0.5 micron to 1 micron of the aperture of porous material inside the conductance unit 6, the entrance of mass spectrum 14 to sample 11 distance is 10 millimeters to 50 millimeters;The entrance of mass spectrum 14 is 5 millimeters to 30 millimeters of capillary form and length, internal diameter 0.3 millimeter to 1 millimeter;The opening shape at the center of specimen holder 12 is the circle of 1 millimeter to 5 millimeters of diameter, can also be side Long 1 millimeter to 4 millimeters square;The thickness of the sample 11 is 200 microns to 2 millimeters;The specimen holder 12 and test chamber 15 sealing structure is seal with elastometic washer, can also be copper band sealing.
The utility model adjusts the method for argon gas molar flow to calibrate mass spectrum using a conductance unit by alternating temperature, The precision of calibration can be improved to mass spectrum calibrated in situ, and carbon monoxide Transmissivity measurement is disposably completed, both Save the time reduces disturbing factor so as to add the reliability of carbon monoxide Transmissivity measurement again.

Claims (9)

1. it is a kind of measure carbon monoxide transmitance device, mainly include air accumulator I (1), air accumulator II (2), barometer (3), Valve I (4), valve II (5), conductance unit (6), biography sample chamber (7), sample transmission rod (8), pneumatic operated valve (9), high-pressure area (10), sample (11), specimen holder (12), test zone (13), mass spectrum (14), test chamber (15), vavuum pump (16) and tracheae, the higher-pressure region Domain (10), sample (11), specimen holder (12), test zone (13) are respectively positioned in the test chamber (15), the specimen holder (12) The test chamber (15) can be separated as the high-pressure area (10) and the test zone when being installed to test chamber (15) (13), specimen holder (12) center has the opening run through, when specimen holder (12) is installed to test chamber (15), the opening Unique gas circuit between the high-pressure area (10) and the test zone (13), test zone (13) outer end are provided with The mass spectrum (14), for mass spectrum (14) entrance in the test zone (13), the sample (11) is gluing in institute with vacuum The one side for being located at the high-pressure area (10) on specimen holder (12) is stated, the opening at the specimen holder (12) center, institute is completely covered State biography sample chamber (7) and the test chamber (15) is connected by the pneumatic operated valve (9), the biography sample chamber (7) has the sample transmission rod (8) and the specimen holder (12) can be transmitted between the biography sample chamber (7) and test chamber (15), the test chamber (15) It is connected with the vavuum pump (16);High-purity argon gas is stored in the air accumulator I (1), one is stored in the air accumulator II (2) Carbonoxide, the air accumulator I (1) and air accumulator II (2) exit are respectively provided with valve, the air accumulator I (1) and air accumulator II (2) it is connected by tracheae and this section of tracheae connecting place has the barometer (3), then it is gentle connects gas circuit I respectively for transtracheal Road II, then tracheae are connected to the high-pressure area (10) of the test chamber (15), and the valve II is sequentially connected with the gas circuit I (5), conductance unit (6), there is the valve I (4) on the gas circuit II, the output signal of the mass spectrum (14) is gas current pair Be in the calibration data of argon gas it is known,
It is characterized in that:It is that certain gas is logical under certain temperature conditions with porous material inside the conductance unit (6) There is specific molecular conductance when crossing the conductance unit, the characteristic having by the molecular flow of the conductance unit (6) is to divide Subflow is led keeps constant under different air pressure conditions, and molecular conductance is reciprocal directly proportional to the evolution of gas molecule quality, point Subflow is led directly proportional to the evolution of temperature, and residual gas is mounted in the high-pressure area (10) and the test zone (13) Analyzer, for measuring partial pressure.
2. a kind of device for measuring carbon monoxide transmitance according to claim 1, it is characterized in that:The conductance unit (6) 0.5 micron to 1 micron of the aperture of internal porous material.
3. a kind of device for measuring carbon monoxide transmitance according to claim 1, it is characterized in that:The mass spectrum (14) enters The distance of mouth to sample (11) is 10 millimeters to 50 millimeters.
4. a kind of device for measuring carbon monoxide transmitance according to claim 1, it is characterized in that:The mass spectrum (14) enters Mouthful it is 5 millimeters to 30 millimeters of capillary form and length, 0.3 millimeter to 1 millimeter of internal diameter.
5. a kind of device for measuring carbon monoxide transmitance according to claim 1, it is characterized in that:The specimen holder (12) The opening shape at center is the circle of 1 millimeter to 5 millimeters of diameter.
6. a kind of device for measuring carbon monoxide transmitance according to claim 1, it is characterized in that:The specimen holder (12) The opening shape at center is the square of 1 millimeter to 4 millimeters of the length of side.
7. a kind of device for measuring carbon monoxide transmitance according to claim 1, it is characterized in that:The sample (11) Thickness is 200 microns to 2 millimeters.
8. a kind of device for measuring carbon monoxide transmitance according to claim 1, it is characterized in that:The specimen holder (12) Sealing structure with test chamber (15) is seal with elastometic washer.
9. a kind of device for measuring carbon monoxide transmitance according to claim 1, it is characterized in that:The specimen holder (12) Sealing structure with test chamber (15) is copper band sealing.
CN201720863514.9U 2017-07-07 2017-07-07 A kind of device for measuring carbon monoxide transmitance Active CN206920272U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107219149A (en) * 2017-07-07 2017-09-29 金华职业技术学院 A kind of device for measuring carbon monoxide transmitance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107219149A (en) * 2017-07-07 2017-09-29 金华职业技术学院 A kind of device for measuring carbon monoxide transmitance

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