CN206920273U - A kind of device for measuring methane transmitance - Google Patents
A kind of device for measuring methane transmitance Download PDFInfo
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- CN206920273U CN206920273U CN201720863601.4U CN201720863601U CN206920273U CN 206920273 U CN206920273 U CN 206920273U CN 201720863601 U CN201720863601 U CN 201720863601U CN 206920273 U CN206920273 U CN 206920273U
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Abstract
It the utility model is related to gas permeation rate testing field, a kind of device for measuring methane transmitance, including the micro- leakage device of helium, air accumulator, barometer, valve I, valve II, slide valve, pass sample chamber, sample transmission rod, pneumatic operated valve, high-pressure area, sample, specimen holder, test zone, mass spectrum, test chamber, vavuum pump and tracheae, high-pressure area, sample, specimen holder, test zone is respectively positioned in test chamber, the leak rate of the micro- leakage device of helium helium at a certain temperature is controllable, and have been subjected to calibration, residual gas analyzer is mounted in the high-pressure area and the test zone, for measuring partial pressure；There is polylith baffle plate inside the slide valve, respectively there is a various sizes of hole on different baffle plates, can be under conditions of vacuum environment not be destroyed, with gas circuit in the different baffle device, to change the cross-sectional area of gas circuit, so that for different gas, stabilization is attained by different air pressure conditions downstreams, improves measurement accuracy.
Description
Technical field
The utility model is related to gas permeation rate testing field, particularly one kind can improve measurement accuracy, can calibrate
A kind of device of measurement methane transmitance of gas with various.
Background technology
In the existing method for measuring gas permeation rate (transmission rate), such as mass-spectrometer measurement gas permeation is used
The method of rate, usually used in the prior art is mass flowmenter to measure the amount of gas of being passed through, and accuracy is relatively low, for
The situation of some low-down samples of gas permeation rate, for example methane gas is in the transmission feelings of some industrial organic protective films
Condition, test usually requires the long period, therefore can cause larger error, further, since the dynamic volume of methane molecule is generally not
The gases such as the relatively stable helium of chemical property, nitrogen are same as, which results in the measurement of mass flowmenter bigger error, causes
Data precision declines, and a kind of device for measuring methane transmitance can solve problem.
Utility model content
In order to solve the above problems, the utility model carrys out calibration gas using the micro- leakage device of helium by calibration and passed through
Rate, measurement accuracy, and the slide valve with particular design are improved, different gas can be calibrated.
Technical scheme is used by the utility model：
A kind of device for measuring methane transmitance mainly includes the micro- leakage device of helium, air accumulator, barometer, valve I, valve
II, slide valve, pass sample chamber, sample transmission rod, pneumatic operated valve, high-pressure area, sample, specimen holder, test zone, mass spectrum, test chamber, vacuum
Pump and tracheae, the high-pressure area, sample, specimen holder, test zone are respectively positioned in the test chamber, and the specimen holder is installed to
The test chamber can be separated during test chamber as the high-pressure area and the test zone, the specimen holder center, which has, to be passed through
The opening worn, when specimen holder is installed to test chamber, the opening is unique between the high-pressure area and the test zone
Gas circuit, the test zone outer end is provided with the mass spectrum, and the mass spectrum entrance in the test zone, use by the sample
Vacuum it is gluing on the specimen holder be located at the high-pressure area one side and the opening at the specimen holder center is completely covered,
The biography sample chamber connects the test chamber by the pneumatic operated valve, and the biography sample chamber has the sample transmission rod and can be by described in
Specimen holder transmits between the biography sample chamber and test chamber, and the test chamber is connected with the vavuum pump；Stored up in the air accumulator
There is a methane gas, is respectively provided with valve at the micro- leakage device of the helium and reservoir outlet, the micro- leakage device of the helium and gas storage
Tank is connected by tracheae and this section of tracheae connecting place has the barometer, and then transtracheal connects gas circuit I and gas circuit respectively
II, then tracheae are connected to the high-pressure area of the test chamber, and the valve II, slide valve, institute are sequentially connected with the gas circuit I
Stating has the valve I on gas circuit II, the leak rate of the micro- leakage device of helium helium at a certain temperature is controllable, and is had been subjected to
Calibrate, residual gas analyzer is mounted in the high-pressure area and the test zone, for measuring partial pressure；It is described
There is polylith baffle plate inside slide valve, respectively there is a various sizes of hole on different baffle plates, vacuum environment can not destroyed
Under conditions of, with gas circuit in the different baffle device, to change the cross-sectional area of gas circuit so that for different gas
Body, stabilization is attained by different air pressure conditions downstreams, improves measurement accuracy.
30 microns to 150 microns of the diameter in the hole on the slide valve interior panelling, the mass spectrum entrance to sample away from
From for 20 millimeters to 50 millimeters；The mass spectrum entrance is 5 millimeters to 30 millimeters of capillary form and length, and 0.3 millimeter of internal diameter is extremely
1 millimeter；The opening shape at the specimen holder center is the circle of 1 millimeter to 5 millimeters of diameter, can also be 1 millimeter of the length of side to 3 millis
The square of rice；The thickness of the sample is 200 microns to 2 millimeters；The sealing structure of the specimen holder and test chamber is rubber
Circle sealing, can also be copper band sealing.
Using it is described it is a kind of measure methane transmitance the method and step that measures of device be：
One, opens the pneumatic operated valve, is taken the specimen holder to the biography sample chamber with the sample transmission rod, opens the valve I
With valve II, open the vavuum pump and device is vacuumized；
Two, close the pneumatic operated valve, close the valve I, open the micro- leakage device of the helium, make helium with constant leak rate
Enter the test chamber after the slide valve, open the mass spectrum, start calibration process；
Three, obtain the relation curve and helium partial pressure and helium between vacuum and helium leak rate after system is stable
Relation curve between leak rate；
Four, measure the helium partial pressure of the high-pressure area and the helium partial pressure of the test zone, and by above-mentioned known
Helium partial pressure under the conditions of certain leak rate, to estimate cascading water, and records the mass spectrographic gas current, obtains mass spectrographic gas current
With the relation curve of cascading water；
Five, calculate collision rate of the helium atom within the unit interval with unit area surfaceI.e. unit when
Between Collision Number in unit area, wherein, p is air pressure, and m is molecular mass, and k is Boltzmann constant, and T is temperature, the lock
Plate valve baffle plate perforated area is obtained by the cascading water obtained in step 4 than upper collision rate；
Six, test process, the micro- leakage device of the helium is closed, close the valve II, with the sample transmission rod by the sample
Frame is taken to the test chamber, and the test chamber is separated as the high-pressure area and the test zone, opens the gas storage
Tank, the valve I is opened, transmission measurement is carried out to methane, the gas current that the mass spectrum obtains and above-mentioned steps four are obtained
Helium calibration data contrast, and school is carried out to the partial pressure of the obtained high-pressure area of measurement and the methane of test zone
It is accurate；
Seven, calculate methane at sample from the high-pressure area to the leak rate of the test zone
Wherein A is the gained flashboard valve guard perforated area, P in step 51And P2Institute after the calibration respectively obtained in step 6
State the partial pressure of the methane of high-pressure area and test zone, d is the thickness of sample, Q is infiltration system of the methane in specimen material
Number；
Leak rate of the methane obtained in eight, step 7 at sample is multiplied by the partial pressure of the methane of test zone, that is, obtains first
Transmitance of the alkane in the sample.
The beneficial effects of the utility model are：
It is different according to mean free path of the gas with various molecule under different air pressure conditions, and vavuum pump is to gas with various
The pumping speed of molecule is different, therefore the slide valve of the utility model particular design can provide the cross-sectional area of different gas circuits so that
For different gas, stabilization is attained by different air pressure conditions downstreams；The utility model uses the helium by calibration
The micro- leakage device of gas carrys out calibration gas transmitance, improves measurement accuracy, and calibrates and measure and can disposably complete, in addition, having
The slide valve of particular design, different gas can be just calibrated in the case of the vacuum system without device for opening.
Brief description of the drawings
Further illustrated with reference to figure of the present utility model：
Fig. 1 is the utility model schematic diagram.
In figure, the micro- leakage device of 1. helium, 2. air accumulators, 3. barometers, 4. valve I, 5. valve II, 6. slide valves, 7. pass sample chamber,
8. sample transmission rod, 9. pneumatic operated valves, 10. high-pressure areas, 11. samples, 12. specimen holders, 13. test zones, 14. mass spectrums, 15. tests
Chamber, 16. vavuum pumps.
Embodiment
If Fig. 1 is the utility model schematic diagram, mainly include the micro- leakage device 1 of helium, air accumulator 2, barometer 3, valve I4, valve
II5, slide valve 6, pass sample chamber 7, sample transmission rod 8, pneumatic operated valve 9, high-pressure area 10, sample 11, specimen holder 12, test zone 13, matter
Spectrum 14, test chamber 15, vavuum pump 16 and tracheae, the high-pressure area 10, sample 11, specimen holder 12, test zone 13 are respectively positioned on
In the test chamber 15, the test chamber 15 can be separated when the specimen holder 12 is installed to test chamber 15 as the higher-pressure region
Domain 10 and the test zone 13, the center of specimen holder 12 has the opening run through, when specimen holder 12 is installed to test chamber 15
When, opening unique gas circuit, outer end of test zone 13 between the high-pressure area 10 and the test zone 13
The mass spectrum 14 is installed, for the entrance of mass spectrum 14 in the test zone 13, the sample 11 is gluing in described with vacuum
It is located at the one side of the high-pressure area 10 on specimen holder 12 and the opening at the center of specimen holder 12, the biography sample is completely covered
Chamber 7 connects the test chamber 15 by the pneumatic operated valve 9, and the biography sample chamber 7 has the sample transmission rod 8 and can be by the sample
Product frame 12 transmits between the biography sample chamber 7 and test chamber 15, and the test chamber 15 is connected with the vavuum pump 16；The gas storage
Store methane gas in tank 2, the micro- leakage device 1 of the helium and the exit of air accumulator 2 are respectively provided with valve, the micro- neglected loading of helium
Put 1 with air accumulator 2 by tracheae to be connected and this section of tracheae connecting place has the barometer 3, then transtracheal connects gas respectively
Road I and gas circuit II, then tracheae are connected to the high-pressure area 10 of the test chamber 15, are sequentially connected with the gas circuit I described
Valve II5, slide valve 6, there is the valve I4 on the gas circuit II.The leakage of the micro- leakage device 1 of helium helium at a certain temperature
Rate is controllable, and has been subjected to calibration, and rga is mounted in the high-pressure area 10 and the test zone 13
Instrument, for measuring partial pressure；The inside of slide valve 6 has polylith baffle plate, respectively has a different sizes on different baffle plates
Hole, can be under conditions of vacuum environment not be destroyed, with gas circuit in the different baffle device, to change gas circuit
Cross-sectional area so that for different gas, be attained by stabilization in different air pressure conditions downstreams, improve measurement accuracy.
30 microns to 150 microns of the diameter in the hole on the interior panelling of slide valve 6, the entrance of mass spectrum 14 to sample 11
Distance be 20 millimeters to 50 millimeters；The entrance of mass spectrum 14 is 5 millimeters to 30 millimeters of capillary form and length, internal diameter 0.3
Millimeter is to 1 millimeter；The opening shape at the center of specimen holder 12 is the circle of 1 millimeter to 5 millimeters of diameter, can also be the length of side 1
The square of millimeter to 3 millimeters；The thickness of the sample 11 is 200 microns to 2 millimeters；The specimen holder 12 and test chamber 15
Sealing structure is seal with elastometic washer, can also be copper band sealing.
The utility model carrys out calibration gas transmitance using the micro- leakage device of helium by calibration, improves measurement accuracy,
And calibration and measurement can be completed disposably, in addition, the slide valve with particular design, in the vacuum system without device for opening
In the case of can just calibrate different gas.
Claims (9)
1. a kind of device for measuring methane transmitance, mainly includes the micro- leakage device of helium (1), air accumulator (2), barometer (3), valve
I (4), valve II (5), slide valve (6), biography sample chamber (7), sample transmission rod (8), pneumatic operated valve (9), high-pressure area (10), sample (11), sample
Product frame (12), test zone (13), mass spectrum (14), test chamber (15), vavuum pump (16) and tracheae, the high-pressure area (10),
Sample (11), specimen holder (12), test zone (13) are respectively positioned in the test chamber (15), and the specimen holder (12) is installed to survey
Try the test chamber (15) can be separated as the high-pressure area (10) and the test zone (13), the sample during chamber (15)
Product frame (12) center has the opening run through, and when specimen holder (12) is installed to test chamber (15), the opening is the high pressure
Unique gas circuit between region (10) and the test zone (13), test zone (13) outer end are provided with the mass spectrum
(14), for mass spectrum (14) entrance in the test zone (13), the sample (11) is gluing in the specimen holder with vacuum
(12) it is located at the one side of the high-pressure area (10) on and the opening at the specimen holder (12) center is completely covered, the biography sample
Chamber (7) connects the test chamber (15) by the pneumatic operated valve (9), and the biography sample chamber (7) has the sample transmission rod (8) and energy
Enough to transmit the specimen holder (12) between the biography sample chamber (7) and test chamber (15), test chamber (15) connection is
State vavuum pump (16)；Methane gas, the micro- leakage device of helium (1) and air accumulator (2) outlet are stored in the air accumulator (2)
Place is respectively provided with valve, and the micro- leakage device of helium (1) is connected with air accumulator (2) by tracheae and this section of tracheae connecting place has
The barometer (3), then transtracheal connects gas circuit I and gas circuit II respectively, then tracheae is connected to the institute of the test chamber (15)
High-pressure area (10) is stated, the valve II (5), slide valve (6) are sequentially connected with the gas circuit I, is had on the gas circuit II described
Valve I (4),
It is characterized in that：The leak rate of the micro- leakage device of helium (1) helium at a certain temperature is controllable, and has been subjected to calibration,
Residual gas analyzer is mounted in the high-pressure area (10) and the test zone (13), for measuring partial pressure；
There is polylith baffle plate inside the slide valve (6), respectively there is a various sizes of hole on different baffle plates, can not destroy very
Under conditions of Altitude, with gas circuit in the different baffle device, to change the cross-sectional area of gas circuit so that for not
Same gas, stabilization is attained by different air pressure conditions downstreams, improves measurement accuracy.
2. a kind of device for measuring methane transmitance according to claim 1, it is characterized in that：The slide valve (6) is internal
30 microns to 150 microns of the diameter in the hole on baffle plate.
3. a kind of device for measuring methane transmitance according to claim 1, it is characterized in that：Mass spectrum (14) entrance arrives
The distance of sample (11) is 20 millimeters to 50 millimeters.
4. a kind of device for measuring methane transmitance according to claim 1, it is characterized in that：Mass spectrum (14) entrance is
5 millimeters to 30 millimeters of capillary form and length, 0.3 millimeter to 1 millimeter of internal diameter.
5. a kind of device for measuring methane transmitance according to claim 1, it is characterized in that：Specimen holder (12) center
Opening shape be 1 millimeter to 5 millimeters of diameter circle.
6. a kind of device for measuring methane transmitance according to claim 1, it is characterized in that：Specimen holder (12) center
Opening shape be 1 millimeter to 3 millimeters of the length of side square.
7. a kind of device for measuring methane transmitance according to claim 1, it is characterized in that：The thickness of the sample (11)
For 200 microns to 2 millimeters.
8. a kind of device for measuring methane transmitance according to claim 1, it is characterized in that：The specimen holder (12) is with surveying
The sealing structure for trying chamber (15) is seal with elastometic washer.
9. a kind of device for measuring methane transmitance according to claim 1, it is characterized in that：The specimen holder (12) is with surveying
The sealing structure of examination chamber (15) is copper band sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720863601.4U CN206920273U (en) | 2017-07-07 | 2017-07-07 | A kind of device for measuring methane transmitance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720863601.4U CN206920273U (en) | 2017-07-07 | 2017-07-07 | A kind of device for measuring methane transmitance |
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| Publication Number | Publication Date |
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| CN206920273U true CN206920273U (en) | 2018-01-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720863601.4U Active CN206920273U (en) | 2017-07-07 | 2017-07-07 | A kind of device for measuring methane transmitance |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107167399A (en) * | 2017-07-07 | 2017-09-15 | 金华职业技术学院 | A kind of device for measuring methane transmitance |
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2017
- 2017-07-07 CN CN201720863601.4U patent/CN206920273U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107167399A (en) * | 2017-07-07 | 2017-09-15 | 金华职业技术学院 | A kind of device for measuring methane transmitance |
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