CN206906494U - MEMS surface air electric-field sensors - Google Patents
MEMS surface air electric-field sensors Download PDFInfo
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- CN206906494U CN206906494U CN201720826328.8U CN201720826328U CN206906494U CN 206906494 U CN206906494 U CN 206906494U CN 201720826328 U CN201720826328 U CN 201720826328U CN 206906494 U CN206906494 U CN 206906494U
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Abstract
A kind of MEMS surface airs electric-field sensor, including：Arc top detecting structure and MEMS electric field measurement modules, arc top detecting structure include：Conductive arc top rain-proof shell, top are arc, and bottom is provided with the groove towards top, is conductively connected post, is arranged on the groove top, are electrically connected with the arc top rain-proof shell；Clamped cavity top, it is top seal, the cylinder of bottom opening, is arranged in the groove, the connecting pole runs through clamped cavity its upper top, and is electrically insulated with the clamped cavity top；And clamped cavity bottom, the bottom opening on clamped cavity top is closed, for forming clamped cavity, MEMS electric field measurement modules are arranged in the clamped cavity, for being conductively connected post and conductive arc top rain-proof shell by described to detect external electrical field.
Description
Technical field
It the utility model is related to sensor technical field, and in particular to a kind of MEMS surface airs electric-field sensor.
Background technology
Lightning Disaster is one of ten the Nature disasters that the United Nations announces, and according to incompletely statistics, China is every year because thunderbolt is made
Into casualties reach thousands of people, property loss is huge.Thunder and lightning is also the significant weather factor for directly affecting space launch success or failure,
In Spacecraft Launch specification, atmospheric electric field intensity is classified as one of essential condition that can spacecraft launch.Thunderbolt can
Serious harm, including line tripping, power transmission and transforming equipment failure, circuit unplanned outage etc. are caused to power network, is all directly affected
The safe and stable operation of power network and the security reliability of power consumption.Petroleum chemical industry is removed using largely very quick to thunder and lightning
Outside the electric/electronic device and auxiliary equipment of sense, material and finished product accumulating significant portion all have inflammable and explosive spy in production process
Point, it is one of sensitive industry of Lightning Disaster Frequent Accidents.Using electrostatic field sensor to atmospheric electric field intensity size, polarity etc.
Change is monitored and analyzed, and the atmospheric electric field that may cause lightning risk is changed and identified, in the advance of disaster arriving
Row early warning, lightning protection mitigation is had very important significance, and following meteorological department carries out the disastrous weather forecasts such as thunder and lightning
Development trend.However, the electrostatic field sensor having been commercialized both at home and abroad substantially uses traditional mechanical manufacturing technology, exist
Mechanical part easy to wear, also there are some problems in volume, power consumption and other performance etc., can not extensive use.
Utility model content
In view of above-mentioned technical problem, in order to overcome the above-mentioned deficiencies of the prior art, the utility model proposes a kind of MEMS
Surface air electric-field sensor.
According to one side of the present utility model, there is provided a kind of MEMS surface airs electric-field sensor, including：Visit on arc top
Geodesic structure, including：Conductive arc top rain-proof shell, top are arc, and bottom is provided with the groove towards top, is conductively connected post,
The groove top is arranged on, is electrically connected with the arc top rain-proof shell；Clamped cavity top, it is top seal, bottom opening
Cylinder, be arranged in the groove, the connecting pole runs through clamped cavity its upper top, and with the clamped cavity top electricity
Property insulation；And clamped cavity bottom, the bottom opening on clamped cavity top is closed, for forming clamped cavity, and MEMS
Electric field measurement module, be arranged in the clamped cavity, for by it is described be conductively connected post and conductive arc top rain-proof shell come
Detect external electrical field.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, in addition to：Cavity body structure, set
Below the detecting structure of the arc top, including：Main casing, is top seal, the cylinder of bottom opening, and top sets the first perforate；
And bonnet, the bonnet are used for the bottom opening for closing main casing, the MEMS electric field measurements module is arranged on the cavity knot
In structure.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, the MEMS electric field measurements module
Including：MEMS electric field-sensitive chips, detection external electrical field produce induced-current；Pre-amplification circuit, current signal is converted to
Voltage signal；And driving demodulator circuit, working signal is provided for the MEMS electric field-sensitives chip, and to the voltage signal
Electric field information resolving is carried out, is metal cover board at the top of the encapsulation of the MEMS electric field-sensitives chip.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, the metal cover board is led with described
Electric binding post is electrically connected by wire.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, the clamped cavity bottom is provided with
Second perforate, first perforate and the second perforate pass through for the wire.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, the MEMS electric field measurements module
Also include：Insulated enclosure box, the MEMS electric field-sensitives chip set, pre-amplification circuit are stacked for accommodating order, with
And metal tablet, insulated enclosure box is arranged on the outside of the box wall of the metal cover board of the MEMS electric field-sensitives chip.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, the metal tablet with it is described
Post is conductively connected to electrically connect by wire.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, the insulated enclosure box houses suitable
Sequence stacks the MEMS electric field-sensitives chip set, pre-amplification circuit and driving demodulator circuit.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, in the main casing and bonnet extremely
Few one includes seal groove and/or glue-filling slot, for causing the main casing and bonnet to be tightly connected.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, it is provided with the insulated enclosure box
Drier.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, the clamped cavity top and solid
Branch cavity bottom is made up of metal material or isolation material electroplating surface metal layer.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, the main casing and bonnet are metal
Material or isolation material electroplating surface metal layer are made.
According to a kind of MEMS surface air electric-field sensors of embodiment of the utility model, set in the cavity body structure solid
Device is determined, for fixing the MEMS electric field measurements module.
It can be seen from the above technical proposal that the utility model has the advantages that：
Using the MEMS electric field-sensitive chip technologies of low-power consumption, no motor mechanical part easy to wear, power consumption is reduced, easily
Batch production, and improve the reliability of product.
Using arc top rain-proof shell, its top and surrounding can induction field, increase electric field induction area, improve
The sensitivity of sensor.
Using metal cavity wall structure, improve that sensor is antistatic and electromagnetic interference performance, also reduce dust in air
Influence to electric field measurement.
Using design of Sealing Structure, influence of the ambient humidity to MEMS electric field-sensitive chip packages is avoided, improves electricity
The degree of accuracy of field detection and long-time stability.
Brief description of the drawings
Fig. 1 is a kind of structural representation of MEMS surface airs electric-field sensor of the embodiment of the utility model one.
Fig. 2 is the diagrammatic cross-section of arc top detecting structure in Fig. 1.
Fig. 3 is the diagrammatic cross-section of cavity body structure in Fig. 1.
Fig. 4 is the structural representation of the MEMS electric field measurement modules in the embodiment of the utility model one.
Fig. 5 is the structural representation of the MEMS electric field measurement modules in the utility model another embodiment.
Embodiment
The some embodiments of the utility model will be done with reference to appended accompanying drawing in rear and more comprehensively describe to property, some of but simultaneously
Not all embodiment will be illustrated.In fact, various embodiments of the present utility model can be realized in many different forms, without
Embodiments set forth herein should be construed as limited to；Relatively, there is provided these embodiments cause the utility model to meet to be applicable
Legal requirement.
For the purpose of this utility model, technical scheme and advantage is more clearly understood, below in conjunction with specific embodiment, and
Referring to the drawings, the utility model is further described.
The embodiment of the utility model one provides a kind of MEMS surface airs electric-field sensor, can have metal sealing knot
Structure, Fig. 1 are a kind of structural representation of MEMS surface airs electric-field sensor of the embodiment of the utility model one.As shown in figure 1,
MEMS surface airs electric-field sensor includes arc top detecting structure 1 and MEMS electric field measurements module 3.Fig. 2 is that arc top detects in Fig. 1
The diagrammatic cross-section of structure, as shown in Fig. 2 the shape of arc top detecting structure 1 can be cylinder, elliptical cylinder-shape, cuboid, just
Cube shape or other regular or irregular polygon bodily forms etc., including conductive arc top rain-proof shell 11, be conductively connected post 12, be clamped
Cavity top 13 and clamped cavity bottom 14, the conductive top of arc top rain-proof shell 11 is arc, and bottom is provided with towards top
Groove, be conductively connected post 12 and be arranged on the groove top, electrically connected with the arc top rain-proof shell 11, clamped cavity top
13 be top seal, the cylinder of bottom opening, is arranged in the groove, the connecting pole 12 pushes up through clamped cavity top 13
Portion, and be electrically insulated with the clamped cavity top 13, the bottom opening on clamped cavity top 13 is closed in clamped cavity bottom 14,
For forming clamped cavity, MEMS electric field measurements module can be arranged in the clamped cavity, for being connected by the conduction
Post 12 and conductive arc top rain-proof shell 11 are connect to detect external electrical field.Conductive arc top rain-proof shell 11, it is conductively connected post 12, arc top
Clamped cavity top 13, the clamped cavity bottom 14 in arc top are respectively provided with electric conductivity, can be metal material or isolation material
Inner surface or outer surface or surfaces externally and internally plating metal.Conductive arc top rain-proof shell 11 electrically connects with being conductively connected post 12, for orphan
Vertical conductor, it is conductively connected post 12 and electric isolution, insulation isolation structure material is realized by insulation isolation structure with clamped cavity top 13
Material can be inorganic insulating material, organic insulation or mix insulation material.Between connecting pole 12 and clamped cavity top 13,
It can be screwed between clamped cavity top 13 and clamped cavity bottom 14, other fixed forms can also be used, such as
Welding, bonding etc..
In another embodiment, as shown in figure 1, MEMS surface airs electric-field sensor can also include cavity body structure 2, institute
State MEMS electric field measurements module 3 to be arranged in the cavity body structure 2, be conductively connected by described outside post 12 and conductive arc top rain-proof
Shell 11 detects external electrical field.Fig. 3 is the diagrammatic cross-section of cavity body structure in Fig. 1, as shown in figure 3, the cavity body structure 2 is main
Including main casing 21, bonnet 22, the shape of cavity body structure 2 can be cylinder, elliptical cylinder-shape, cuboid, the square bodily form or other
Regular or irregular polygon bodily form etc..Wherein main casing 21 is top seal, the cylinder of bottom opening, and top sets the first perforate
211, first perforate 211 can be located at top center 211, can also be in non-central location, for into cavity body structure 2
The wire electrically connected with being conductively connected post is introduced, now closes the bottom opening on clamped cavity top 13 and clamped cavity bottom
14 tops are same to set the second perforates 141, positioned at center or non-central location, be conductively connected wire that post electrically connects according to
It is secondary to pass through the second perforate 141 and the first perforate 211.Bonnet is used for the bottom opening for closing main casing 21.Cavity body structure 2 can design
There are seal groove 24 and/or glue-filling slot 25, be respectively used to place sealing ring and filling and sealing glue, seal groove 24 and/or glue-filling slot 25
It can be arranged at least one in main casing 21 and bonnet 22, for causing the main casing 21 and bonnet 22 to be tightly connected, when
Seal groove 24 or glue-filling slot 25 can not also be so designed, it is directly close in the contact site gluing of seal cavity main casing 21 and bonnet 22
Envelope can be fluorubber, silicon rubber, butadiene acrylonitrile rubber etc., fluid sealant in the canned fluid sealant in the inside of cavity body structure 2, sealing ring material
Can be glass cement, silicon rubber, AB glue, epoxy glue etc..It can also be consolidated between seal cavity main casing 21 and bonnet 22 by screw
It is fixed.It is screwed between other arc top detecting structure 1 and cavity body structure 2, now clamped cavity bottom 14 can set spiral shell
Silk passes through hole 142, and arc top detecting structure 1 can also use other fixed forms with cavity body structure 2, such as welds, is bonded.
Fixed column 23 can also be set in cavity body structure 2, surveyed for MEMS electric field of the fixed support in cavity body structure 2
Module 3 is measured, in one embodiment, fixed column 23 is fixed in bonnet 22, and main casing 21, the bonnet 22 of cavity are respectively provided with fixed column 23
Electric conductivity, can be metal material or isolation material inner surface or outer surface or surfaces externally and internally plating metal.
Fig. 4 is the structural representation of the MEMS electric field measurement modules in the embodiment of the utility model one, as shown in figure 4, setting
The MEMS electric field measurements module 3 being placed in clamped cavity or cavity body structure 2 mainly includes MEMS electric field-sensitives chip 31, preceding storing
Big circuit 32 and driving demodulator circuit 33, its shape can be circle, ellipse, rectangle, square or polygon etc.,
MEMS electric field measurements module 3 can install one in clamped cavity or cavity body structure 2, can also install multiple.The MEMS
Bucking electrode periodic vibration modulation induction electrode in electric field-sensitive chip 31 produces induced-current, MEMS electric field-sensitive chips
31 encapsulation bases are insulating materials, and top is metal cover board；Pre-amplification circuit 32 realizes that field current signal is converted to voltage
Signal；Drive the two-way differential signal needed for the normal work of the generation MEMS electric field-sensitives of demodulator circuit 33 chip 31 and to preceding storing
The voltage signal that big circuit 32 exports realizes the resolving of electric field information.In one embodiment, MEMS electric field-sensitives chip 31, preposition
Amplifying circuit 32 and the driving stacked arrangement of demodulator circuit 33, are fixed in the fixed column 23 of cavity body structure 2, in other embodiments
Can also horizontally disposed or tile vertically arrangement etc..The metal cover board at the encapsulation of MEMS electric field-sensitives chip 31 top is by leading
Line electrically connects with the post 12 that is conductively connected of arc top detecting structure 1, and final realize electrically connects with arc top rain-proof shell 11, the wire
Can be plain conductor, shielded conductor, high-frequency radio frequency line, half soft radio frequency line of half steel etc..Using this kind of MEMS electric field measurement module,
The operation principle of MEMS surface air electric-field sensors is as follows：Due to sensor arc top rain-proof shell 11 and MEMS electric field-sensitive cores
Electrically connected between the metal cover board of the chip of piece 31, when DC electric field E be present in the external world, sensor arc top rain-proof shell 11 and metal
Cover plate produces charge inducing and, the charge inducing generation electric field E of metal cover board linearly related with DC electric field Eg, then EgWith direct current
Electric field E is linearly related, and MEMS electric field-sensitives chip 31 is by measuring electric field EgRealization measures the big of extraneous DC electric field E indirectly
It is small.
With reference to shown in Fig. 2, when MEMS electric field measurements module 3 is arranged in cavity body structure 2, its power cable and signal transmission
Cable by seal cavity body structure bonnet 22 set the 3rd perforate 222 draw, the 3rd perforate 222 can be centre bore or
Decentralised hole.Using said structure MEMS electric field measurement modules 3 when, for housing the cavity knot of MEMS electric field measurements module 3
Structure 2 is sealed using foregoing sealing ring or fluid sealant, and the 3rd perforate 222 of bonnet 22 pass through cable after need spin coating
Fluid sealant realizes that cavity seals, and the wire electrically connected with being conductively connected post 12 passes through first perforate at the top of seal cavity main casing 21
211 and clamped cavity bottom 14 the second perforate 141 after need spin coating fluid sealant to realize the integral sealing of cavity body structure 2.
In one embodiment, when above-mentioned MEMS electric field measurements module 3 is arranged in clamped cavity, clamped cavity top 13
With clamped cavity bottom 14 form clamped cavity need also exist for sealed set, can in both synapsis spin coating fluid sealants, or
The direct canning sealing glue in clamped cavity, fluid sealant can be glass cement, silicon rubber, AB glue, epoxy glue etc., now due to leading
The metal cover board of the chip of electric binding post 12 and MEMS electric field-sensitives chip 31 is closer to the distance, can be corresponding conductive on metal cover board
Connecting pole 12 induces electric charge, and the metal cover board for being conductively connected post 12 with the chip of MEMS electric field-sensitives chip 31 can electrically connect,
It can not also electrically connect.
Fig. 5 is the structural representation of the MEMS electric field measurement modules in the utility model another embodiment, is specially：Such as figure
Shown in 5, compared with the embodiment shown in Fig. 4, MEMS electric field measurements module 3 also includes an insulated enclosure box 34, stacked arrangement
MEMS electric field-sensitives chip 31 is first put into an insulated enclosure box 34 with pre-amplification circuit 32, and the top of sealed box body 341 has
One metal tablet 342, metal tablet 342 are fixedly connected with sealed box body 341, and the shape of insulated enclosure box 34 can be circle
Cylindricality, elliptical cylinder-shape, cuboid, the square bodily form or other regular or irregular polygon bodily forms etc., sealed box body 341 can be with
It is made up of inorganic insulating material, organic insulation or mix insulation material；Insulated enclosure box 34 and the driving heap of demodulator circuit 33
Laying up is put, and the signal connecting line of driving demodulator circuit 33 and pre-amplification circuit 32 passes the signal output interface of edge seal box 34
Sealing is realized to the signal output spin coating fluid sealant afterwards, driving demodulator circuit 33 can also be with electric field-sensitive chip 31 with before
Amplifying circuit 32 is put to be arranged in together in insulated enclosure box 34.Different from the metal cover board of MEMS electric field-sensitives chip 31 in Fig. 4
With the electrical connection scheme of arc top rain-proof shell 11, the program only needs metal tablet 342 to pass through wire with arc top rain-proof shell 11
Electrical connection.The wire can be plain conductor, shielded conductor, high-frequency radio frequency line, half soft radio frequency line of half steel etc..
It is as follows using this kind of MEMS electric field measurement module, the operation principle of MEMS surface air electric-field sensors：Due to passing
Sensor arc top rain-proof shell 11 electrically connects with the metal tablet 342 of the top of sealed box body 341, and metal tablet 342 and core
Capacitance structure is formd between the metal cover board of piece MEMS electric field-sensitive chips again, then when DC electric field E be present in the external world, gold
Category cover plate will also produce charge inducing, and the charge inducing produces electric field Ed, EdLinearly related, the MEMS electric field-sensitives with DC electric field E
Chip 31 is by measuring electric field EdRealize the size for measuring extraneous DC electric field E indirectly.
Using this kind of MEMS electric field measurements module 3, the clamped cavity or cavity body structure of the accommodating MEMS electric field measurements module 3
2 can be with blow-by.
In MEMS surface air electric-field sensors in one embodiment, inside the cavity body structure 2 of the sealing, insulation it is close
The clamped inside cavity of the inside of jacket 34 or sealing can place the hygroscopic material of drier or other species to ensure sealing ring
The drying in border, protect the component of MEMS electric field measurement modules not to be corroded, ensure its service behaviour.
In one embodiment, MEMS surface airs electric-field sensor, which may be also secured at, carries out atmospheric electric field on metallic support
Measurement, such as be arranged on by the mounting hole 223 of the bottom of cavity body structure 2 on metallic support, metallic support is electrically connected with cavity body structure 2
Connect, metallic support can be grounded, and avoid cavity body structure 2 from gathering multi-charge.Metallic support can be with earth-free, and support can also
It is other material supports, such as wood, plastics etc., support can not also be used in other embodiments, be directly installed on some
On device or it is placed on ground and carries out electric field measurement.
MEMS surface airs electric-field sensor in the utility model embodiment can also be applied in addition to measuring atmospheric electric field
In Lightning Warning, industrial staticelectricity measurement, power network DC electric field measurement and associated electrostatic field measurement device.
It should be noted that the shape and size of each part do not reflect actual size and ratio in accompanying drawing, and only illustrate this practicality new
The content of type embodiment.
The direction term mentioned in embodiment, such as " on ", " under ", "front", "rear", "left", "right" etc., only it is with reference to attached
The direction of figure, not it is used for limiting the scope of protection of the utility model.And above-described embodiment can be based on design and reliability
Consider, the collocation that is mixed with each other uses using or with other embodiment mix and match, i.e., the technical characteristic in different embodiments can be with
Freely form more embodiments.
It should be noted that in accompanying drawing or specification text, the implementation that does not illustrate or describe is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the above-mentioned definition to each element and method is simultaneously
Various concrete structures, shape or the mode mentioned in embodiment are not limited only to, those of ordinary skill in the art can carry out letter to it
Singly change or replace.
Particular embodiments described above, the purpose of this utility model, technical scheme and beneficial effect are carried out to enter one
Step describes in detail, it should be understood that the foregoing is only specific embodiment of the utility model, is not limited to this reality
It is all within the spirit and principles of the utility model with new, any modification, equivalent substitution and improvements done etc., it all should include
Within the scope of protection of the utility model.
Claims (13)
- A kind of 1. MEMS surface airs electric-field sensor, it is characterised in that including：Arc top detecting structure (1), including：Conductive arc top rain-proof shell (11), top are arc, and bottom is provided with the groove towards top,Post (12) is conductively connected, is arranged on the groove top, is electrically connected with the arc top rain-proof shell (11)；Clamped cavity top (13), it is top seal, the cylinder of bottom opening, is arranged in the groove, the connecting pole (12) at the top of clamped cavity top (13), and it is electrically insulated with the clamped cavity top (13)；AndClamped cavity bottom (14), the bottom opening of clamped cavity top (13) is closed, for forming clamped cavity, andMEMS electric field measurements module (3), it is arranged in the clamped cavity, for being conductively connected post (12) and conduction by described Arc top rain-proof shell (11) detects external electrical field.
- 2. MEMS surface airs electric-field sensor according to claim 1, it is characterised in that also include：Cavity body structure (2), it is arranged on below arc top detecting structure (1), including：Main casing (21), is top seal, the cylinder of bottom opening, and top sets the first perforate (211)；AndBonnet (22), the bonnet are used for the bottom opening for closing main casing (21),Wherein, the MEMS electric field measurements module (3) is arranged in the cavity body structure (2).
- 3. MEMS surface airs electric-field sensor according to claim 1 or 2, it is characterised in that the MEMS electric fields are surveyed Amount module (3) includes：MEMS electric field-sensitives chip (31), detection external electrical field produce induced-current；Pre-amplification circuit (32), voltage signal is converted to by current signal；AndDemodulator circuit (33) is driven, working signal is provided for the MEMS electric field-sensitives chip (31), and to the voltage signal Electric field information resolving is carried out,Wherein, it is metal cover board at the top of the encapsulation of the MEMS electric field-sensitives chip (31).
- 4. MEMS surface airs electric-field sensor according to claim 3, it is characterised in that：The metal cover board with it is described Post (12) is conductively connected to electrically connect by wire.
- 5. MEMS surface airs electric-field sensor according to claim 4, it is characterised in that：The clamped cavity bottom (14) the second perforate (141) is provided with, the first perforate (211) and the second perforate (141) pass through for the wire.
- 6. MEMS surface airs electric-field sensor according to claim 3, it is characterised in that the MEMS electric field measurements mould Block (3) also includes：Insulated enclosure box (34), the MEMS electric field-sensitives chip (31) set, preposition amplification electricity are stacked for accommodating order Road (32), andMetal tablet (342), it is arranged on metal cover of the insulated enclosure box (34) close to the MEMS electric field-sensitives chip (31) On the outside of the box wall of plate.
- 7. MEMS surface airs electric-field sensor according to claim 6, it is characterised in that：The metal tablet (342) electrically connected with the post (12) that is conductively connected by wire.
- 8. MEMS surface airs electric-field sensor according to claim 6, it is characterised in that：The insulated enclosure box houses Order stacks the MEMS electric field-sensitives chip (31) set, pre-amplification circuit (32) and driving demodulator circuit (33).
- 9. MEMS surface airs electric-field sensor according to claim 2, it is characterised in that the main casing (21) and bonnet (22) at least one in is including seal groove (24) and/or glue-filling slot (25), for causing the main casing (21) and bonnet (22) It is tightly connected.
- 10. MEMS surface airs electric-field sensor according to claim 6, it is characterised in that the insulated enclosure box (34) drier is provided with.
- 11. MEMS surface airs electric-field sensor according to claim 1, it is characterised in that the clamped cavity top (13) it is made up with clamped cavity bottom (14) of metal material or isolation material electroplating surface metal layer.
- 12. MEMS surface airs electric-field sensor according to claim 2, it is characterised in that the main casing (21) and after Lid (22) is made up of metal material or isolation material electroplating surface metal layer.
- 13. MEMS surface airs electric-field sensor according to claim 2, it is characterised in that in the cavity body structure (2) Fixing device is set, for fixing the MEMS electric field measurements module (3).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720629407X | 2017-05-31 | ||
| CN201720629407 | 2017-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206906494U true CN206906494U (en) | 2018-01-19 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107300642A (en) * | 2017-05-31 | 2017-10-27 | 北京中科飞龙传感技术有限责任公司 | MEMS surface air electric-field sensors |
| CN109884411A (en) * | 2019-03-28 | 2019-06-14 | 赵青 | A kind of MEMS space electrical field sensor and measuring system and method |
-
2017
- 2017-07-10 CN CN201720826328.8U patent/CN206906494U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107300642A (en) * | 2017-05-31 | 2017-10-27 | 北京中科飞龙传感技术有限责任公司 | MEMS surface air electric-field sensors |
| WO2018219002A1 (en) * | 2017-05-31 | 2018-12-06 | 北京中科飞龙传感技术有限责任公司 | Mems ground atmospheric electric field sensor |
| EP3441776A4 (en) * | 2017-05-31 | 2019-08-14 | Beijing Tflying Transducer Technology Co., Ltd. | Mems ground atmospheric electric field sensor |
| US10718802B2 (en) | 2017-05-31 | 2020-07-21 | Beijing Tflying Transducer Technology Co., Ltd. | MEMS-based atmospheric electric field sensor on the ground |
| CN107300642B (en) * | 2017-05-31 | 2023-11-07 | 北京中科飞龙传感技术有限责任公司 | MEMS ground atmosphere electric field sensor |
| CN109884411A (en) * | 2019-03-28 | 2019-06-14 | 赵青 | A kind of MEMS space electrical field sensor and measuring system and method |
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