CN206862694U - 用于四氯化硅的取样阀 - Google Patents
用于四氯化硅的取样阀 Download PDFInfo
- Publication number
- CN206862694U CN206862694U CN201721139040.XU CN201721139040U CN206862694U CN 206862694 U CN206862694 U CN 206862694U CN 201721139040 U CN201721139040 U CN 201721139040U CN 206862694 U CN206862694 U CN 206862694U
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- sampling
- valve
- channel
- silicon tetrachloride
- passage
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- 238000005070 sampling Methods 0.000 title claims abstract description 167
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 title claims abstract description 69
- 239000005049 silicon tetrachloride Substances 0.000 title claims abstract description 69
- 239000000463 material Substances 0.000 claims abstract description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 9
- 239000010935 stainless steel Substances 0.000 claims abstract description 9
- 239000007769 metal material Substances 0.000 claims abstract description 8
- 239000007789 gas Substances 0.000 claims description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 239000011261 inert gas Substances 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 4
- 239000005341 toughened glass Substances 0.000 claims description 2
- 238000010926 purge Methods 0.000 abstract description 13
- 239000007788 liquid Substances 0.000 abstract description 11
- 238000005260 corrosion Methods 0.000 abstract description 10
- 230000007797 corrosion Effects 0.000 abstract description 10
- 238000010276 construction Methods 0.000 abstract description 3
- 239000000523 sample Substances 0.000 description 41
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- -1 polyethylene Polymers 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920006380 polyphenylene oxide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910021654 trace metal Inorganic materials 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 1
- 239000004425 Makrolon Substances 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- DNJIEGIFACGWOD-UHFFFAOYSA-N ethanethiol Chemical compound CCS DNJIEGIFACGWOD-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 210000000664 rectum Anatomy 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
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- Sampling And Sample Adjustment (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201721139040.XU CN206862694U (zh) | 2017-09-06 | 2017-09-06 | 用于四氯化硅的取样阀 |
Applications Claiming Priority (1)
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CN201721139040.XU CN206862694U (zh) | 2017-09-06 | 2017-09-06 | 用于四氯化硅的取样阀 |
Publications (1)
Publication Number | Publication Date |
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CN206862694U true CN206862694U (zh) | 2018-01-09 |
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CN201721139040.XU Active CN206862694U (zh) | 2017-09-06 | 2017-09-06 | 用于四氯化硅的取样阀 |
Country Status (1)
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CN (1) | CN206862694U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115046802A (zh) * | 2022-08-11 | 2022-09-13 | 稀美资源(广东)有限公司 | 一种乙醇钽取样装置 |
-
2017
- 2017-09-06 CN CN201721139040.XU patent/CN206862694U/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115046802A (zh) * | 2022-08-11 | 2022-09-13 | 稀美资源(广东)有限公司 | 一种乙醇钽取样装置 |
CN115046802B (zh) * | 2022-08-11 | 2022-10-25 | 稀美资源(广东)有限公司 | 一种乙醇钽取样装置 |
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GR01 | Patent grant | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20220208 Address after: 611400 No. 445, Qingyun South Road, Puxing street, Xinjin District, Xinjin County, Chengdu, Sichuan Patentee after: Sichuan mintian Technology Development Co.,Ltd. Address before: 610000 Xincai 18th Road, new material industrial functional zone, Xinjin Industrial Park, Xinjin County, Chengdu City, Sichuan Province Patentee before: CHENGDU SHULING TECHNOLOGY DEVELOPMENT Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240312 Address after: 610000 Xincai 18th Road, new material industrial functional zone, Xinjin Industrial Park, Xinjin County, Chengdu City, Sichuan Province Patentee after: CHENGDU SHULING TECHNOLOGY DEVELOPMENT Co.,Ltd. Country or region after: China Address before: 611400 No. 445, Qingyun South Road, Puxing street, Xinjin District, Xinjin County, Chengdu, Sichuan Patentee before: Sichuan mintian Technology Development Co.,Ltd. Country or region before: China |
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TR01 | Transfer of patent right |