CN206828627U - A kind of rotatable thickness amending plates mechanism - Google Patents
A kind of rotatable thickness amending plates mechanism Download PDFInfo
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- CN206828627U CN206828627U CN201720438557.2U CN201720438557U CN206828627U CN 206828627 U CN206828627 U CN 206828627U CN 201720438557 U CN201720438557 U CN 201720438557U CN 206828627 U CN206828627 U CN 206828627U
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- amending plates
- thickness
- blade
- rotatable
- evaporation source
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- DHHWJAMBRKOYRI-OHFYBLQUSA-N CC(C)(C)/C(/C)=N\C(\C)=C\C Chemical compound CC(C)(C)/C(/C)=N\C(\C)=C\C DHHWJAMBRKOYRI-OHFYBLQUSA-N 0.000 description 1
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Abstract
Technical field of vacuum plating is the utility model is related to, especially a kind of rotatable thickness amending plates mechanism, it is characterised in that：The rotatable thickness amending plates mechanism includes rotary part, connection member, amending plates blade and fixed component；Wherein described rotary part is connected via the connection member with the amending plates blade, the amending plates blade is between the evaporation source and the film-plating umbrella stand, the rotary part drives the amending plates blade to horizontally rotate by the connection member, with realize the amending plates blade to the evaporation source block or exposure.The utility model has the advantages that：Multiple thickness amending plates can be set on same evaporation source position, to meet to carry out the demand of the different a variety of coating materials plated films of evaporation characteristic on same evaporation source position.
Description
Technical field
Technical field of vacuum plating is the utility model is related to, especially a kind of rotatable thickness amending plates mechanism.
Background technology
In vacuum coating equipment, thickness amending plates block characteristic to change the spatial distribution spy of evaporation coating materials by it
Property, make it that each film plating substrate reaches certain thickness homogeneity in whole film-plating umbrella stand.In general, rotatable coating umbrella
Frame is arranged on the top of vacuum coating chamber, and evaporation source is arranged on the bottom of vacuum coating chamber, and thickness amending plates are then arranged on
Between evaporation source and film-plating umbrella stand.In order to carry out Effective Regulation to the evaporation characteristic of evaporation source, thickness amending plates are generally arranged at
Directly over evaporation source and its near；Also, lifting type can be set in thickness amending plates, in order to be turned on and off in good time.Herein
Lifting refers to：When amending plates are turned on and off, the bottom surface of the vacuum film coating chamber where the working face and evaporation source of amending plates it
Between angle change.When amending plates are opened, the bottom surface of the vacuum film coating chamber where the working face and evaporation source of amending plates
Close to parallel, amending plates be located at evaporation source surface and its near；When amending plates are closed, the working face of amending plates and evaporation
Close to vertically, amending plates are affixed in the side wall of vacuum film coating chamber for the bottom surface of vacuum film coating chamber where source.
When needing a variety of coating materials plated films or thicker plated film, rotatable more crucible positions evaporation device is generally required,
After the completion of the coating materials use in a crucible, another crucible can be moved to the photograph of electron gun electron beam in time
Penetrate position.When needing a variety of coating materials plated films, if the evaporation characteristic difference of different coating materials is larger, in same electron gun electronics
Set a kind of thickness amending plates will by the thickness homogeneity for being likely to meet a variety of coating materials film forming simultaneously on beam irradiation position
Ask.In this case, it is necessary to which multiple thickness amending plates are set to correct the thickness homogeneity of multiple coating materials film forming.
Under normal circumstances, thickness amending plates are arranged on the side wall of vacuum coating chamber by flange.In view of above evaporation source
Space finite sum thickness amending plates generally have certain width, therefore, multiple liftable thickness are set above an evaporation source
Amending plates will likely cause multiple thickness amending plates heave amplitudes and lifting order to be restricted.
The content of the invention
The purpose of this utility model is according to above-mentioned the deficiencies in the prior art, there is provided a kind of rotatable thickness correction trigger
Structure, amending plates blade is driven to horizontally rotate in vacuum coating room by rotatable thickness amending plates mechanism, so as to evaporation
Source is blocked or exposed, while realizes the resigning to lifting type amending plates, so as to further realize that multiple thickness amending plates are come
Correct the thickness homogeneity of multiple coating materials film forming.
The utility model purpose is realized and completed by following technical scheme：
A kind of rotatable thickness amending plates mechanism, it is arranged in vacuum coating room and is used to correct thickness homogeneity, it is described
Evaporation source and film-plating umbrella stand are provided with vacuum coating room, workpiece to be coated is carried in the film-plating umbrella stand, it is characterised in that：
The rotatable thickness amending plates mechanism includes rotary part, connection member, amending plates blade and fixed component；It is wherein described
Rotary part is connected via the connection member with the amending plates blade, and the amending plates blade is located at the evaporation source and institute
Between stating film-plating umbrella stand, the rotary part drives the amending plates blade to horizontally rotate by the connection member, to realize
The amending plates blade to the evaporation source block or exposure, one end of the fixed component is fixedly connected on vacuum coating
Room, for the rotatable thickness amending plates mechanism to be fixed on into the vacuum film coating chamber.
The rotary part includes revolving cylinder, shaft coupling and rotary shaft, and the both ends of the shaft coupling connect described respectively
Revolving cylinder and the rotary shaft, the other end of the rotary shaft connect the connection member.
The periphery of the shaft coupling is provided with coupling guard.
The connection member includes linking axes, contiguous block and connecting rod, and the both ends of the contiguous block connect the chain respectively
Spindle and the connecting rod, the linking axes connect the rotating part perpendicular to the connecting rod, the other end of the linking axes
Part, the other end of the connecting rod set the amending plates blade.
In any of the above-described kind of rotatable thickness amending plates mechanism, the fixed component is flange.
The utility model has the advantages that：Multiple thickness amending plates can be set on same evaporation source position, to meet
The demand of the different a variety of coating materials plated films of evaporation characteristic is carried out on same evaporation source position.
Brief description of the drawings
Fig. 1 is vacuum coating chamber top view in the utility model（Rotatable thickness amending plates are in idle state, can
The thickness amending plates of lifting are in use state）；
Fig. 2 is vacuum coating chamber top view in the utility model（Rotatable thickness amending plates are in use state, can
The thickness amending plates of lifting are in idle state）；
Fig. 3 is the structural representation of rotatable thickness amending plates mechanism in the utility model.
Embodiment
The utility model feature and other correlated characteristics are described in further detail by embodiment below in conjunction with accompanying drawing,
In order to the understanding of technical staff of the same trade：
As Figure 1-3,1-13 is expressed as in figure：Vacuum coating chamber 1, evaporation source 2, the correction of liftable thickness
Plate leaf piece 3, liftable thickness amending plates mounting flange 4, rotatable thickness amending plates blade 5, revolving cylinder 6, shaft coupling
7th, coupling guard 8, rotatable thickness amending plates mounting flange 9, rotary shaft 10, linking axes 11, contiguous block 12, connecting rod
13。
Embodiment：As shown in figure 1, in the present embodiment rotatable thickness amending plates mechanism be arranged on vacuum film coating chamber 1 it
In, evaporation source 2, liftable thickness amending plates blade 3, rotatable thickness amending plates are provided with vacuum coating chamber 1
Blade 5, wherein evaporation source 2 are used to carry out plated film to the workpiece to be coated being carried in film-plating umbrella stand.Liftable thickness correction
Plate leaf piece 3 is fixed on the side wall of vacuum coating chamber 1 by liftable thickness amending plates mounting flange 4, and liftable thickness is mended
Positive plate 3 can rise or decline in vacuum film coating chamber 1.As shown in figure 1, when liftable thickness amending plates blade 3, it is located at
Directly over evaporation source 2 and it is located at film-plating umbrella stand（Not shown in figure）Lower section, now, liftable thickness amending plates blade 3 is right
Evaporation source 2 is blocked, so as to correct the evaporation characteristic of evaporation source 2.Rotatable thickness amending plates blade 5 away from evaporation source 2,
In idle state.
Fig. 2 is also the top view of vacuum coating chamber 1 in the utility model, and Fig. 2 and Fig. 1 difference are：It is rotatable
Thickness amending plates blade 5 has been rotated horizontally to evaporation source 2, and in use state, it is located at evaporation source 2 and film-plating umbrella stand
Between, rotatable thickness amending plates blade 5 blocks to evaporation source 2, so as to correct the evaporation characteristic of evaporation source 2.Now,
Rotation drops to the adjacent sidewalls of vacuum coating chamber 1 to liftable thickness amending plates blade 3 vertically, no longer blocks evaporation source 2,
In idle state.
With reference to shown in Fig. 1 and Fig. 2, the evaporation source 2 in the present embodiment both can individually be hidden by liftable thickness amending plates 3
Gear, can also individually be blocked, and the position of two thickness amending plates mutually avoids, Bu Huifa by rotatable thickness amending plates 5
Raw mutual occupy-place influences；Therefore, can be in same evaporation source position（Such as the location of evaporation source 2）Upper carry out evaporation characteristic
The demand of different a variety of coating materials plated films.
As shown in figure 3, the mechanism for driving rotatable thickness amending plates blade 5 to be rotated horizontally in the present embodiment includes
Rotary part, connection member and rotatable thickness amending plates mounting flange 9；Wherein, rotary part includes revolving cylinder 6, connection
Axle device 7 and rotary shaft 10；The periphery of shaft coupling 7 is provided with coupling guard 8.The both ends of shaft coupling 7 connect rotation vapour respectively
Cylinder 6 and rotary shaft 10, the other end connection connection member of rotary shaft 10.Connection member includes linking axes 11, contiguous block 12 and connected
Extension bar 13；Linking axes 11 is connected by contiguous block 12 with connecting rod 13, and the other end of connecting rod 13 makes corrections with rotatable thickness
Plate leaf piece 5 connects.Rotatable thickness amending plates mechanism is fixed on vacuum coating by rotatable thickness amending plates mounting flange 9
The bottom of chamber 1.
In the specific implementation, revolving cylinder 6 is driven rotary shaft 10, linking axes 11 by shaft coupling 7, connected the present embodiment successively
Connect block 12, connecting rod 13 rotates, so as to cause horizontally rotating for rotatable thickness amending plates blade 5.
Although the design to the utility model purpose and embodiment elaborate above-described embodiment referring to the drawings,
But those skilled in the art will realize that in the case where limiting the precondition of scope without departing from claim, still may be used
To make various modifications and variations to the utility model, such as：It is the specific type of drive of rotatable thickness amending plates rotation, specific
The kind of drive and rotatable thickness amending plates do not repeat one by one herein in fixed form of vacuum film coating chamber, etc..
Claims (5)
1. a kind of rotatable thickness amending plates mechanism, it is arranged in vacuum coating room and is used to correct thickness homogeneity, it is described true
Evaporation source and film-plating umbrella stand are provided with empty coating chamber, workpiece to be coated is carried in the film-plating umbrella stand, it is characterised in that：Institute
Stating rotatable thickness amending plates mechanism includes rotary part, connection member, amending plates blade and fixed component；Wherein described rotation
Rotation member is connected via the connection member with the amending plates blade, the amending plates blade be located at the evaporation source with it is described
Between film-plating umbrella stand, the rotary part drives the amending plates blade to horizontally rotate by the connection member, to realize
State amending plates blade to the evaporation source block or exposure, one end of the fixed component is fixedly connected on vacuum film coating chamber,
For the rotatable thickness amending plates mechanism to be fixed on into the vacuum film coating chamber.
A kind of 2. rotatable thickness amending plates mechanism according to claim 1, it is characterised in that：The rotary part bag
Revolving cylinder, shaft coupling and rotary shaft are included, the both ends of the shaft coupling connect the revolving cylinder and the rotary shaft, institute respectively
The other end for stating rotary shaft connects the connection member.
A kind of 3. rotatable thickness amending plates mechanism according to claim 2, it is characterised in that：Outside the shaft coupling
Enclose and be provided with coupling guard.
A kind of 4. rotatable thickness amending plates mechanism according to claim 1, it is characterised in that：The connection member bag
Linking axes, contiguous block and connecting rod are included, the both ends of the contiguous block connect the linking axes and the connecting rod, the chain respectively
Spindle connects the rotary part perpendicular to the connecting rod, the other end of the linking axes, and the other end of the connecting rod is set
Put the amending plates blade.
A kind of 5. rotatable thickness amending plates mechanism according to claim 1, it is characterised in that：The fixed component is
Flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720438557.2U CN206828627U (en) | 2017-04-25 | 2017-04-25 | A kind of rotatable thickness amending plates mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720438557.2U CN206828627U (en) | 2017-04-25 | 2017-04-25 | A kind of rotatable thickness amending plates mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206828627U true CN206828627U (en) | 2018-01-02 |
Family
ID=60769865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720438557.2U Active CN206828627U (en) | 2017-04-25 | 2017-04-25 | A kind of rotatable thickness amending plates mechanism |
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| CN (1) | CN206828627U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109023244A (en) * | 2018-07-18 | 2018-12-18 | 东莞华清光学科技有限公司 | A kind of cover board grey NCVM plated film preparation process |
-
2017
- 2017-04-25 CN CN201720438557.2U patent/CN206828627U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109023244A (en) * | 2018-07-18 | 2018-12-18 | 东莞华清光学科技有限公司 | A kind of cover board grey NCVM plated film preparation process |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190626 Address after: 523838 Room 101, Building 2, Yanwu Longyuan Road, Dalingshan Town, Dongguan City, Guangdong Province Patentee after: Dongguan Huichi Vacuum Manufacturing Co., Ltd. Address before: 2004 No. 267 Yinlu, Baoshan City Industrial Park, Baoshan District, Shanghai Patentee before: Optorun (Shanghai) Co.,Ltd. |