CN206799732U - A kind of automatic vacuum-pumping apparatus of coating machine - Google Patents
A kind of automatic vacuum-pumping apparatus of coating machine Download PDFInfo
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- CN206799732U CN206799732U CN201720628262.1U CN201720628262U CN206799732U CN 206799732 U CN206799732 U CN 206799732U CN 201720628262 U CN201720628262 U CN 201720628262U CN 206799732 U CN206799732 U CN 206799732U
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- vacuum
- valve
- pump
- coating machine
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Abstract
Plated film technical field of processing equipment is the utility model is related to, specifically provides a kind of automatic vacuum-pumping apparatus of coating machine, including：The vacuum tube being connected with vacuum chamber of film coating machine；Installed in the high vacuum Pneumatic baffle valve of vacuum tube inlet port；Installed in the cold-trap of vacuum tube outlet port；Diffusion pump below cold-trap；The lobe pump being connected by exhaust tube with diffusion pump；It is connected installed in diffusion pump with lobe pump with the preceding step valve on exhaust tube；Valve is taken out installed in preceding the pre- of step valve upper end；The mechanical pump being connected by pipeline with the lobe pump port of export；The second electromagnetic inflation valve on lobe pump and mechanical pump connecting pipe.This automatic vacuum-pumping apparatus exhaust capacity is strong, good buffer effect, and can improve the stability of high vacuum state in vacuum chamber.
Description
Technical field
It the utility model is related to plated film technical field of processing equipment, and in particular to a kind of automatic vacuum dress of coating machine
Put.
Background technology
In vacuum coating system, to the vacuumize process of each vacuum chamber, efficiency and the plating of each technique process are affected
Film quality.Workpiece enters coating chamber and carries out the front and rear of plated film, be required to first to be sent into pre-vacuum chamber, slightly take out room, that essence takes out the carry out such as room is pre-
Processing or buffered.In traditional vacuum coating system, each vacuum chamber is respectively equipped with the independent unit that vacuumizes, each
It is independent to use.But in actual production, the vacuumizing effect of the vacuum coating system of the structure is unsatisfactory, in particular for thick
Vacuumizing for room is taken out, because the forepumping ability of lobe pump is often poor, interior is slightly taken out and is difficult to reach low pressure state so that
Workpiece takes out interior and is difficult to obtain preferable buffered thick, tends to influence the processing effect of subsequent processing operations；Meanwhile
When being vacuumized to the thick room of taking out, its used time is also grown, therefore also extends the plated film cycle of whole vacuum coating system, plated film effect
Rate is difficult to be improved.
Utility model content
In view of the shortcomings of the prior art, the utility model provides a kind of automatic vacuum-pumping apparatus of coating machine, and this is automatic
Vacuum extractor exhaust capacity is strong, good buffer effect, and can improve the stability of high vacuum state in vacuum chamber.
To realize above-mentioned technical proposal, the utility model provides a kind of automatic vacuum-pumping apparatus of coating machine, including：With
The vacuum tube of vacuum chamber of film coating machine connection；Installed in the high vacuum Pneumatic baffle valve of vacuum tube inlet port；Installed in vacuum tube
The cold-trap of outlet port；Diffusion pump below cold-trap；The lobe pump being connected by exhaust tube with diffusion pump；Installed in expansion
Pump is dissipated to be connected with lobe pump with the preceding step valve on exhaust tube；Pre- installed in preceding step valve upper end takes out valve, and the first of the preceding step valve
The port of export is connected with taking out valve in advance, and the second outlet end of the preceding step valve is directly connected with lobe pump, the pre- port of export for taking out valve
Directly it is connected with lobe pump；The mechanical pump being connected by pipeline with the lobe pump port of export；It is connected installed in lobe pump with mechanical pump
The second electromagnetic inflation valve on pipeline.
In the actual mechanical process of above-mentioned technical proposal, mechanical pump and the second electromagnetic inflation valve are first turned on, is then beaten
Drive diffusion pump, preheated for diffusion pump, after waiting the diffusion pump preheated one-section time, open lobe pump and take out valve in advance, mechanical pump,
Under the cooperation of lobe pump and diffusion pump, it can be realized to the rapid vacuumizing in vacuum chamber of film coating machine, reduced by vacuum pipe
The plated film cycle of whole vacuum coating system, and can effectively be prevented by high vacuum Pneumatic baffle valve in the state of high vacuum
The situation for pipe negative pressure back suction only occur occurs.After the vacuum chamber of coating machine reaches the vacuum of work, closing takes out valve in advance,
Step valve before opening, realize and the stable of vacuum system is maintained.It is special in diffusion pump and pneumatic gear in order to prevent the situation for returning oil from occurring
Cold-trap is installed, cold-trap not only can effectively reduce oil vapour and backflow, can be with the coercibility steam of absorbed portion, can between plate valve
To improve the stability of high vacuum state in vacuum chamber.
Preferably, end socket is provided with the top of the vacuum tube, the first pressure vacuum gauge is installed on the end socket.Pass through
First pressure vacuum gauge can detect the pressure change in vacuum tube in real time, and operating personnel can be according on the first pressure vacuum gauge
Numerical value controlled accordingly.
Preferably, it is also equipped with the first electromagnetic inflation valve on the high vacuum Pneumatic baffle valve.In vacuum chamber and high vacuum
First electromagnetic inflation valve is installed on the pipeline between Pneumatic baffle valve, is advantageous to the unlatching of vacuum chamber.
Preferably, the cold-trap is tower cold-trap, and blast pipe is additionally provided with the cold-trap, can will not by blast pipe
Solidifying steam is quickly discharged, so as to improve the stability of whole vacuum system.
Preferably, the second pressure vacuum gauge, the preceding step valve are installed on the pipeline that the preceding step valve is connected with taking out valve in advance
3rd pressure vacuum gauge is installed on the pipeline being connected with lobe pump.Can by the second pressure vacuum gauge and the 3rd pressure vacuum gauge
To monitor the pressure oscillation in vacuum system in real time, so as to switching of the operating personnel to respective valves.
Relative to prior art, a kind of beneficial effect of the automatic vacuum-pumping apparatus of coating machine provided by the utility model exists
In：The automatic vacuum-pumping apparatus of this coating machine is simple in construction, and automaticity is high, passes through mechanical pump, lobe pump and diffusion pump
Coordinate, it is possible to achieve to the rapid vacuumizing in vacuum chamber of film coating machine, the plated film cycle of whole vacuum coating system is reduced, and
The situation that can effectively prevent pipe negative pressure back suction by high vacuum Pneumatic baffle valve in the state of high vacuum occurs.Together
When not only can effectively reduce oil vapour by installing cold-trap and backflow, be able to can be improved with the coercibility steam of absorbed portion
The stability of high vacuum state in vacuum chamber.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
In figure：1st, vacuum tube；2nd, high vacuum Pneumatic baffle valve；3rd, end socket；4th, the first electromagnetic inflation valve；5th, cold-trap；6th, expand
Dissipate pump；7th, blast pipe；8th, the first pressure vacuum gauge；9th, exhaust tube；10th, preceding step valve；11st, three-way connection；12nd, valve is taken out in advance；13rd,
Two pressure vacuum gauges；14th, the 3rd pressure vacuum gauge；15th, the first bellows；16th, lobe pump；17th, the second electromagnetic inflation valve；18、
Mechanical pump；19th, the second bellows.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clear, complete description, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.The every other embodiment that ordinary people in the field is obtained under the premise of creative work is not made, is belonged to
The scope of protection of the utility model.
Embodiment：A kind of automatic vacuum-pumping apparatus of coating machine.
Shown in reference picture 1, a kind of automatic vacuum-pumping apparatus of coating machine, including：The vacuum being connected with vacuum chamber of film coating machine
Pipe 1；Installed in the high vacuum Pneumatic baffle valve 2 of the inlet port of vacuum tube 1；Installed in the cold-trap 5 of the outlet port of vacuum tube 1；Peace
Diffusion pump 6 mounted in the lower section of cold-trap 5；The lobe pump 16 being connected by exhaust tube 9 with diffusion pump 6；Installed in diffusion pump 6 and Roots
Preceding step valve 10 of the connection of pump 16 on exhaust tube 9；Pre- installed in the preceding upper end of step valve 10 takes out valve 12, and the first of the preceding step valve 10
The port of export is connected with taking out valve 12 in advance, and the second outlet end of the preceding step valve 10 is directly connected by three-way connection 11 with lobe pump 16
Connect, the pre- port of export for taking out valve 12 is directly connected with lobe pump 16；The machinery being connected by pipeline with the port of export of lobe pump 16
Pump 18；The second electromagnetic inflation valve 17 on lobe pump 16 and the connecting pipe of mechanical pump 18.
Operation principle of the present utility model is：The electromagnetic inflation valve 17 of mechanical pump 18 and second is first turned on, then opens and expands
Pump 6 is dissipated, is preheated for diffusion pump 6, after waiting the preheated one-section time of diffusion pump 6, lobe pump 16 is opened and takes out valve 12 in advance, in machinery
Under the cooperation of pump 18, lobe pump 16 and diffusion pump 6, it can be realized to quickly taking out in vacuum chamber of film coating machine by vacuum pipe 1
Vacuum, reduces the plated film cycle of whole vacuum coating system, and passes through high vacuum Pneumatic baffle valve 2 in the state of high vacuum
The situation that pipe negative pressure back suction can effectively be prevented occurs.After the vacuum chamber of coating machine reaches the vacuum of work,
Close and take out valve 12 in advance, step valve 10 before opening, realize and the stable of vacuum system is maintained.It is special in order to prevent the situation for returning oil from occurring
Cold-trap 5 is installed between diffusion pump 6 and Pneumatic baffle valve, cold-trap 5 not only can effectively reduce oil vapour and backflow, can also adsorb
Partial coercibility steam, the stability of high vacuum state in vacuum chamber can be improved.
Shown in reference picture 1, the top of the vacuum tube 1 is provided with end socket 3, and the first vacuum pressure is provided with the end socket 3
Power table 8.The pressure change in vacuum tube 1 can be detected in real time by the first pressure vacuum gauge 8, operating personnel can be according to first
Numerical value on pressure vacuum gauge 8 is controlled accordingly.
Shown in reference picture 1, the first electromagnetic inflation valve 4 is also equipped with the high vacuum Pneumatic baffle valve 2, it is true in coating machine
First electromagnetic inflation valve 4 is installed on the pipeline between empty room and high vacuum Pneumatic baffle valve 2, is advantageous to the unlatching of vacuum chamber.
Shown in reference picture 1, the cold-trap 5 is tower cold-trap, is additionally provided with blast pipe 7 on the cold-trap 5, passes through blast pipe
7, which can will not coagulate steam, quickly discharges, so as to improve the stability of whole vacuum system.
Shown in reference picture 1, the second pressure vacuum gauge 13 is installed on the pipeline that the preceding step valve 10 is connected with taking out valve 12 in advance,
The 3rd pressure vacuum gauge 14 is installed on the pipeline that the preceding step valve 10 is connected with lobe pump 16.Pass through the second pressure vacuum gauge 13
The pressure oscillation in vacuum system can be monitored in real time with the 3rd pressure vacuum gauge 14, so that operating personnel cut to respective valves
Change.
Shown in reference picture 1, the interface end of lobe pump 16 is provided with the first bellows 15, and the second electromagnetic inflation valve 17 passes through
Two bellowss 19 are connected with lobe pump 16.It can be vibrated when operation in view of mechanical pump 18 and lobe pump 16, therefore
When designing backing line, corrugated pipe pipeline should be selected, to ensure the stability of whole vacuum system.
Described above is preferred embodiment of the present utility model, but the utility model should not be limited to the embodiment and
Accompanying drawing disclosure of that, so every do not depart from the lower equivalent or modification completed of spirit disclosed in the utility model, all fall
Enter the scope of the utility model protection.
Claims (5)
- A kind of 1. automatic vacuum-pumping apparatus of coating machine, it is characterised in that including：The vacuum tube (1) being connected with vacuum chamber of film coating machine；Installed in the high vacuum Pneumatic baffle valve (2) of vacuum tube (1) inlet port；Installed in the cold-trap (5) of vacuum tube (1) outlet port；Diffusion pump (6) below cold-trap (5)；The lobe pump (16) being connected by exhaust tube (9) with diffusion pump (6)；It is connected installed in diffusion pump (6) with lobe pump (16) with the preceding step valve (10) on exhaust tube (9)；Pre- installed in preceding step valve (10) upper end takes out valve (12), and the first exit end of the preceding step valve (10) takes out valve (12) even with pre- Connect, the second outlet end of the preceding step valve (10) is directly connected with lobe pump (16), it is described it is pre- take out valve (12) the port of export it is direct It is connected with lobe pump (16)；The mechanical pump (18) being connected by pipeline with lobe pump (16) port of export；The second electromagnetic inflation valve (17) on lobe pump (16) and mechanical pump (18) connecting pipe.
- 2. the automatic vacuum-pumping apparatus of coating machine as claimed in claim 1, it is characterised in that：The top of the vacuum tube (1) End socket (3) is provided with, the first pressure vacuum gauge (8) is installed on the end socket (3).
- 3. the automatic vacuum-pumping apparatus of coating machine as claimed in claim 1, it is characterised in that：The high vacuum Pneumatic baffle valve (2) the first electromagnetic inflation valve (4) is also equipped with.
- 4. the automatic vacuum-pumping apparatus of coating machine as claimed in claim 1, it is characterised in that：The cold-trap (5) is tower cold Trap, blast pipe (7) is additionally provided with the cold-trap (5).
- 5. the automatic vacuum-pumping apparatus of coating machine as claimed in claim 1, it is characterised in that：The preceding step valve (10) with taking out in advance The second pressure vacuum gauge (13), the pipe that the preceding step valve (10) is connected with lobe pump (16) are installed on the pipeline of valve (12) connection 3rd pressure vacuum gauge (14) is installed on road.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720628262.1U CN206799732U (en) | 2017-06-01 | 2017-06-01 | A kind of automatic vacuum-pumping apparatus of coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720628262.1U CN206799732U (en) | 2017-06-01 | 2017-06-01 | A kind of automatic vacuum-pumping apparatus of coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206799732U true CN206799732U (en) | 2017-12-26 |
Family
ID=60744567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720628262.1U Expired - Fee Related CN206799732U (en) | 2017-06-01 | 2017-06-01 | A kind of automatic vacuum-pumping apparatus of coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206799732U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109267033A (en) * | 2018-12-07 | 2019-01-25 | 沈阳爱科斯科技有限公司 | Evaporation coating device and coating system |
| CN116949414A (en) * | 2023-09-05 | 2023-10-27 | 安徽其芒光电科技有限公司 | Vacuum coating equipment and exhaust system thereof |
-
2017
- 2017-06-01 CN CN201720628262.1U patent/CN206799732U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109267033A (en) * | 2018-12-07 | 2019-01-25 | 沈阳爱科斯科技有限公司 | Evaporation coating device and coating system |
| CN116949414A (en) * | 2023-09-05 | 2023-10-27 | 安徽其芒光电科技有限公司 | Vacuum coating equipment and exhaust system thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171226 Termination date: 20210601 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |