CN204627910U - A kind of vaccum-pumping equipment - Google Patents
A kind of vaccum-pumping equipment Download PDFInfo
- Publication number
- CN204627910U CN204627910U CN201520222525.XU CN201520222525U CN204627910U CN 204627910 U CN204627910 U CN 204627910U CN 201520222525 U CN201520222525 U CN 201520222525U CN 204627910 U CN204627910 U CN 204627910U
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- vacuum
- air inlet
- pumping
- vaccum
- cavity
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Abstract
A kind of vaccum-pumping equipment of the utility model, belongs to vaccum-pumping equipment technical field; The technical problem solved there is provided a kind of vaccum-pumping equipment, improve vacuum system structural design by working practice, increase filter tap, reduce gas interior residue to the impact of high pressure vacuum pumping, add Low vacuum gauge and high vacuum gauge is accurately measured internal system, control apparatus precision, uses many valves serial fashion simultaneously, ensures air inlet stability, select suitable sealing means, improve vacuum system sealing, thus reduce system leak rate, lifting means Safety performance; The technological scheme adopted is: a kind of vaccum-pumping equipment, comprise vacuum cavity, process system, vacuum breaker system, low vacuum system and high vacuum system, each system is connected with vacuum cavity respectively, realizes taking out rough vacuum, pumping high vacuum, the working procedure of processing procedure air inlet and vacuum breaker; The utility model can be widely used in vaccum-pumping equipment technical field.
Description
Technical field
A kind of vaccum-pumping equipment of the utility model, belongs to vaccum-pumping equipment technical field.
Background technique
Along with the high development of modern science and technology, the seal container used in industry, business, science and research institution is increasing, because manufacturing process can not be flawless, seal point is thousands of, seal arrangement unavoidably exists leakage may, in manufacture process, equipment goes wrong in quality of materials of being everlasting, installation, part fatigue and structural design, reduce the sealing of system, cause system to be leaked gas, cause workpiece to be oxidized and scrap, affect industrial production, meanwhile, traditional equipment precision is lower, cannot ensure yield rate.
Model utility content
The utility model overcomes the deficiency that prior art exists, provide a kind of vaccum-pumping equipment, vacuum system structural design is improved by working practice, increase filter tap, reduce gas interior residue to the impact of high pressure vacuum pumping, add Low vacuum gauge and high vacuum gauge is accurately measured internal system, control apparatus precision, use many valves serial fashion simultaneously, ensure air inlet stability, select suitable sealing means, improve vacuum system sealing, thus reduce system leak rate, lifting means Safety performance.
In order to solve the problems of the technologies described above, the technical solution adopted in the utility model is: a kind of vaccum-pumping equipment, comprise vacuum cavity, process system, vacuum breaker system, low vacuum system and high vacuum system, described low vacuum system comprises the first rough vacuum pumping and Low vacuum gauge, described first rough vacuum pumping is all connected with vacuum cavity by pipeline with Low vacuum gauge, be provided with the first solenoid valve between described first rough vacuum pumping and vacuum cavity, between described Low vacuum gauge and vacuum cavity, be provided with the first isolating valve;
Described high vacuum system comprises high vacuum pumping and high vacuum gauge, described high vacuum pumping is all connected with vacuum cavity by pipeline with high vacuum gauge, the second solenoid valve is provided with between described high vacuum pumping and vacuum cavity, be provided with the second isolating valve between described high vacuum gauge and vacuum cavity, between described high vacuum pumping and the first rough vacuum pumping, be provided with the 3rd solenoid valve;
Described process system comprises the second rough vacuum pumping and processing procedure air inlet pipeline, described second rough vacuum pumping is connected by pipeline with vacuum cavity, butterfly valve and the 4th solenoid valve of adjustable valve member aperture is provided with between described second rough vacuum pumping and vacuum cavity, described processing procedure air inlet pipeline is connected with vacuum cavity, and described processing procedure air inlet pipeline is provided with control valve;
Described vacuum breaker system comprises the first air inlet pipeline and the second air inlet pipeline, described first air inlet pipeline is all connected with vacuum cavity with the second air inlet pipeline, described first air inlet pipeline is provided with the first air inlet electromagnetic valve, described second air inlet pipeline is provided with the needle-valve for slow air inlet and the second air inlet electromagnetic valve;
Described vacuum cavity is connected with air pipe line, described air pipe line is provided with the 3rd air inlet electromagnetic valve.
The suction port of described high vacuum pumping and air outlet are provided with the filter tap for filtering gas.
Described processing procedure air inlet pipeline is one or two.
Each pipeline described all adopts arc transition.
Seamless welding is adopted to connect between each pipeline described.
Described vacuum cavity internal surface does polishing treatment.
The beneficial effect that the utility model compared with prior art has is:
1, in vacuum system, add Low vacuum gauge and high vacuum gauge, monitor pressure in vacuum chamber when taking out rough vacuum and pumping high vacuum respectively, guarantee the precision of equipment.
2, in process system, adopt butterfly valve and solenoid valve cascaded structure, by the control of butterfly valve, carry out control apparatus rate of air sucked in required.
3, in vacuum breaker system, adopt needle-valve and solenoid valve cascaded structure, needle-valve makes nitrogen slowly to enter in vacuum cavity, has suddenly a large amount of gas to enter damage internal unit under avoiding high vacuum.
4, high vacuum pumping air inlet with go out mouth all filter tap be set, avoid because gas interior residue is trapped in high vacuum pumping.
5, each pipeline all adopts arc transition, does not stay dead angle, makes gas open without hindrance, be conducive to polishing and cleaning cleaning, meanwhile, adopt seamless welding to carry out connection between each pipeline and make gas unobstructed, the leak rate of reduction system, the Safety performance of lifting means.
6, polishing vacuum cavity internal surface, makes its surface-brightening as mirror, and the brighter more not easily gas absorption in surface, more easily obtains vacuum.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the utility model is described further.
Fig. 1 is structural representation of the present utility model.
In figure, 1 is vacuum cavity, 2 is process system, 3 is vacuum breaker system, 4 is low vacuum system, 5 is high vacuum system, 6 is air pipe line, 21 the second rough vacuum pumpings, 22 processing procedure air inlet pipelines, 23 is butterfly valve, 24 is the 4th solenoid valve, 25 is control valve, 31 is the first air inlet pipeline, 32 is the second air inlet pipeline, 33 is the first air inlet electromagnetic valve, 34 is needle-valve, 35 is the second air inlet electromagnetic valve, 41 is the first rough vacuum pumping, 42 is Low vacuum gauge, 43 is the first solenoid valve, 44 is the first isolating valve, 51 is high vacuum pumping, 52 is high vacuum gauge, 53 is the second solenoid valve, 54 is the second isolating valve, 55 is the 3rd solenoid valve, 56 is filter tap, 61 is the 3rd air inlet electromagnetic valve.
Embodiment
As shown in Figure 1, a kind of vaccum-pumping equipment of the utility model, comprise vacuum cavity 1, process system 2, vacuum breaker system 3, low vacuum system 4 and high vacuum system 5, described low vacuum system 4 comprises the first rough vacuum pumping 41 and Low vacuum gauge 42, described first rough vacuum pumping 41 is all connected with vacuum cavity 1 by pipeline with Low vacuum gauge 42, be provided with the first solenoid valve 43 between described first rough vacuum pumping 41 and vacuum cavity 1, between described Low vacuum gauge 42 and vacuum cavity 1, be provided with the first isolating valve 44;
Described high vacuum system 5 comprises high vacuum pumping 51 and high vacuum gauge 52, described high vacuum pumping 51 is all connected with vacuum cavity 1 by pipeline with high vacuum gauge 52, the second solenoid valve 53 is provided with between described high vacuum pumping 51 and vacuum cavity 1, be provided with the second isolating valve 54 between described high vacuum gauge 52 and vacuum cavity 1, between described high vacuum pumping 51 and the first rough vacuum pumping 41, be provided with the 3rd solenoid valve 55;
Described process system 2 comprises the second rough vacuum pumping 21 and processing procedure air inlet pipeline 22, described second rough vacuum pumping 21 is connected by pipeline with vacuum cavity 1, butterfly valve 23 and the 4th solenoid valve 24 of adjustable valve member aperture is provided with between described second rough vacuum pumping 21 and vacuum cavity 1, described processing procedure air inlet pipeline 22 is connected with vacuum cavity 1, and described processing procedure air inlet pipeline 22 is provided with control valve 25;
Described vacuum breaker system 3 comprises the first air inlet pipeline 31 and the second air inlet pipeline 32, described first air inlet pipeline 31 is all connected with vacuum cavity 1 with the second air inlet pipeline 32, described first air inlet pipeline 31 is provided with the first air inlet electromagnetic valve 33, described second air inlet pipeline 32 is provided with the needle-valve 34 for slow air inlet and the second air inlet electromagnetic valve 35;
Described vacuum cavity is connected with air pipe line 6, on described air pipe line, 6 are provided with the 3rd air inlet electromagnetic valve 61.
The suction port of described high vacuum pumping and air outlet are provided with the filter tap 56 for filtering gas.
Described processing procedure air inlet pipeline 22 is one or two.
Each pipeline described all adopts arc transition.
Seamless welding is adopted to connect between each pipeline described.
Described vacuum cavity 1 internal surface does polishing treatment.
Specific works process:
Workpiece is put into vacuum cavity 1, open low vacuum system 4, start the first rough vacuum pumping 41, open the first solenoid valve 43, gas is extracted out from vacuum cavity 1, opens the first isolating valve 44 and makes Low vacuum gauge 42 show the air pressure of cavity; After cavity enters low vacuum state, open high vacuum system 5, close the first solenoid valve 43, open the 3rd solenoid valve 55, start high vacuum pumping 51, open the second solenoid valve 53, pumping high vacuum is carried out to vacuum chamber 1, opening the second isolating valve 54 makes high vacuum gauge 52 show cavity air pressure, so far, completes process cavity being evacuated to high vacuum by rough vacuum; Close the first solenoid valve 43 and the second solenoid valve 53, open process system 2, start the second rough vacuum pumping 21, open butterfly valve 23 and the 4th solenoid valve 24, carry out processing procedure bleed to vacuum cavity 1, adjustment control valve 25 pairs of cavity internal air pressures regulate; After processing procedure completes, close process system 2, close the first isolating valve 44 and the second isolating valve 54, start vacuum breaker system 3, open needle-valve 34 and the second air inlet electromagnetic valve 35, nitrogen is slowly passed in vacuum cavity 1, air inlet, after 5 to 10 seconds, is opened the first air inlet electromagnetic valve 33 and completes vacuum breaker.
Equipment is provided with air pipe line 6, when needs inject air in system, opening the 3rd air inlet electromagnetic valve 61 can enter air in vacuum cavity 1.
By reference to the accompanying drawings embodiment of the present utility model is explained in detail above, but the utility model is not limited to above-described embodiment, in the ken that those of ordinary skill in the art possess, various change can also be made under the prerequisite not departing from the utility model aim.
Claims (6)
1. a vaccum-pumping equipment, it is characterized in that: comprise vacuum cavity (1), process system (2), vacuum breaker system (3), low vacuum system (4) and high vacuum system (5), described low vacuum system (4) comprises the first rough vacuum pumping (41) and Low vacuum gauge (42), described first rough vacuum pumping (41) is all connected with vacuum cavity (1) by pipeline with Low vacuum gauge (42), the first solenoid valve (43) is provided with between described first rough vacuum pumping (41) and vacuum cavity (1), the first isolating valve (44) is provided with between described Low vacuum gauge (42) and vacuum cavity (1),
Described high vacuum system (5) comprises high vacuum pumping (51) and high vacuum gauge (52), described high vacuum pumping (51) is all connected with vacuum cavity (1) by pipeline with high vacuum gauge (52), the second solenoid valve (53) is provided with between described high vacuum pumping (51) and vacuum cavity (1), be provided with the second isolating valve (54) between described high vacuum gauge (52) and vacuum cavity (1), between described high vacuum pumping (51) and the first rough vacuum pumping (41), be provided with the 3rd solenoid valve (55);
Described process system (2) comprises the second rough vacuum pumping (21) and processing procedure air inlet pipeline (22), described second rough vacuum pumping (21) is connected by pipeline with vacuum cavity (1), butterfly valve (23) and the 4th solenoid valve (24) of adjustable valve member aperture is provided with between described second rough vacuum pumping (21) and vacuum cavity (1), described processing procedure air inlet pipeline (22) is connected with vacuum cavity (1), and described processing procedure air inlet pipeline (22) is provided with control valve (25);
Described vacuum breaker system (3) comprises the first air inlet pipeline (31) and the second air inlet pipeline (32), described first air inlet pipeline (31) is all connected with vacuum cavity (1) with the second air inlet pipeline (32), described first air inlet pipeline (31) is provided with the first air inlet electromagnetic valve (33), described second air inlet pipeline (32) is provided with the needle-valve (34) for slow air inlet and the second air inlet electromagnetic valve (35);
Described vacuum cavity is connected with air pipe line (6), on described air pipe line, (6) are provided with the 3rd air inlet electromagnetic valve (61).
2. a kind of vaccum-pumping equipment according to claim 1, is characterized in that: the suction port of described high vacuum pumping and air outlet are provided with the filter tap (56) for filtering gas.
3. a kind of vaccum-pumping equipment according to claim 1, is characterized in that: described processing procedure air inlet pipeline (22) is one or two.
4. a kind of vaccum-pumping equipment according to claim 1, is characterized in that: each pipeline described all adopts arc transition.
5. a kind of vaccum-pumping equipment according to claim 1, is characterized in that: adopt seamless welding to connect between each pipeline described.
6. a kind of vaccum-pumping equipment according to claim 1, is characterized in that: described vacuum cavity (1) internal surface does polishing treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520222525.XU CN204627910U (en) | 2015-04-14 | 2015-04-14 | A kind of vaccum-pumping equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520222525.XU CN204627910U (en) | 2015-04-14 | 2015-04-14 | A kind of vaccum-pumping equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204627910U true CN204627910U (en) | 2015-09-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520222525.XU Withdrawn - After Issue CN204627910U (en) | 2015-04-14 | 2015-04-14 | A kind of vaccum-pumping equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204627910U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104832398A (en) * | 2015-04-14 | 2015-08-12 | 山西南烨立碁光电有限公司 | Vacuum extraction equipment |
-
2015
- 2015-04-14 CN CN201520222525.XU patent/CN204627910U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104832398A (en) * | 2015-04-14 | 2015-08-12 | 山西南烨立碁光电有限公司 | Vacuum extraction equipment |
| CN104832398B (en) * | 2015-04-14 | 2018-02-06 | 山西南烨立碁光电有限公司 | Vaccum-pumping equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150909 Effective date of abandoning: 20180206 |
|
| AV01 | Patent right actively abandoned |