CN206798581U - Vacuum sealing device and the vacuum steerable system for including it - Google Patents
Vacuum sealing device and the vacuum steerable system for including it Download PDFInfo
- Publication number
- CN206798581U CN206798581U CN201720588594.1U CN201720588594U CN206798581U CN 206798581 U CN206798581 U CN 206798581U CN 201720588594 U CN201720588594 U CN 201720588594U CN 206798581 U CN206798581 U CN 206798581U
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- Prior art keywords
- driving part
- vacuum
- sealing device
- vacuum sealing
- vacuum chamber
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Abstract
The utility model discloses a kind of vacuum sealing device and its vacuum steerable system is included, the vacuum sealing device includes：Casing, casing is provided with vacuum chamber and some drive holes, drive hole connect with vacuum chamber；Driving part, driving part is arranged in drive hole, and the both ends of driving part are respectively in vacuum chamber and outside casing；Bellows, bellows are used to seal the gap between driving part and drive hole.The vacuum steerable system includes vacuum sealing device as described above.Vacuum sealing device of the present utility model simplifies the overall structure of vacuum sealing device by the way that driving part, bellows and casing are combined；Meanwhile vacuum sealing device of the present utility model is the vacuum sealing for realizing vacuum chamber, realizes the structure that driving part is combined with vacuum chamber again, optimizes the allomeric function of vacuum sealing device.
Description
Technical field
It the utility model is related to a kind of vacuum sealing device and include its vacuum steerable system.
Background technology
In atmospheric environment, if necessary to cause that linearly movement has a variety of realization sides to object in the two directions simultaneously
Formula.But when being located at by mobile object in vacuum chamber, this linear movement just encounters difficulty.In general, for setting
The standby convenience simplified and connected up considers that driver (such as motor) is located at outside the vacuum sealing device provided with vacuum chamber
Atmospheric environment in, and driven object (such as extraction electrode of ion implantation apparatus) is then positioned at the true of vacuum sealing device
In cavity.But there is the problem of volume is excessive, complicated in vacuum sealing device of the prior art.
Utility model content
The technical problems to be solved in the utility model be in order to overcome in the prior art vacuum sealing device volume mistake be present
Greatly, the defects of complicated, there is provided a kind of vacuum sealing device and the vacuum steerable system for including it.
The utility model is that solve above-mentioned technical problem by following technical proposals：
A kind of vacuum sealing device, its feature are that the vacuum sealing device includes：
Casing, the casing are provided with vacuum chamber and some drive holes, and the drive hole connects with the vacuum chamber；
Driving part, the driving part is arranged in the drive hole, and the both ends of the driving part are located at institute respectively
State in vacuum chamber and outside the casing；
Bellows, the bellows are used to seal the gap between the driving part and the drive hole.
In the technical program, by the way that driving part, bellows and casing are combined, the whole of vacuum sealing device is simplified
Body structure；Meanwhile vacuum sealing device of the present utility model is the vacuum sealing for realizing vacuum chamber, realizes driving part again
The structure combined with vacuum chamber, optimize the allomeric function of vacuum sealing device.
It is preferred that the casing includes：
Main body frame, the main body frame are provided with the first vacuum chamber and opening, and the opening connects with first vacuum chamber
It is logical；
Executor trunk, the executor trunk corresponds to the opening and set, and the executor trunk is tightly connected
In the main body frame, the executor trunk is provided with the second vacuum chamber；
Wherein, second vacuum chamber is connected with first vacuum chamber and forms the vacuum chamber, and the drive hole is set
In the executor trunk.
In the technical program, by setting executor trunk, the overall volume of vacuum sealing device is reduced, and simplify
The structure of vacuum sealing device.
It is preferred that the executor trunk is removably attachable to the main body frame.
It is preferred that the bellows is set corresponding to the driving part, and one end of the bellows is sealedly attached to
The outer wall of the casing, the other end of the bellows are connected with the driving part, and the driving part is arranged in the ripple
Line pipe.
It is preferred that the driving part includes the first driving part and the second driving part, first driving part
The moving direction of moving direction and the second driving part is provided with angle.
In the technical program, by setting the first driving part and the second driving part of different moving directions, realize
The movement of driven object different directions in the vacuum chamber.
It is preferred that the angle is 90 degree.
It is preferred that first driving part includes an actuating arm, the actuating arm is L-shaped.
It is preferred that the actuating arm includes drive rod and drive connection bar, one end of the drive rod and the bellows
Connection, the central axis of the drive rod is parallel with the moving direction of first driving part, in the drive connection bar
Mandrel line is perpendicular to the central axis of the drive rod, and one end of the drive connection bar is sheathed on the another of the drive rod
End.
In the technical program, by setting the structure of actuating arm, the overall space-consuming of the first driving part is reduced,
The overall structure of vacuum sealing device is simplified simultaneously.
It is preferred that the drive rod is arranged with universal joint, the universal joint is used for the moving direction for keeping the drive rod.
In the technical program, by being arranged universal joint in drive rod, it is steady to ensure that drive rod moves along moving direction
Qualitative and moving direction accuracy.
A kind of vacuum steerable system, its feature are that the vacuum steerable system fills including vacuum sealing as described above
Put.
Positive effect of the present utility model is：
It is close to simplify vacuum by the way that driving part, bellows and casing are combined for vacuum sealing device of the present utility model
The overall structure of seal apparatus；Meanwhile vacuum sealing device of the present utility model is the vacuum sealing for realizing vacuum chamber, is realized again
The structure that driving part is combined with vacuum chamber, optimize the allomeric function of vacuum sealing device.
Brief description of the drawings
Fig. 1 is the structural representation of the vacuum sealing device of the utility model preferred embodiment.
Fig. 2 is the part-structure installation diagram of the vacuum sealing device of the utility model preferred embodiment.
Description of reference numerals
Casing 10
Drive hole 11
Main body frame 12
Executor trunk 13
First vacuum chamber 14
Second vacuum chamber 15
Opening 16
Bellows 20
First driving part 30
Actuating arm 31
Drive rod 32
Drive connection bar 33
Universal joint 34
Second driving part 40
Embodiment
The utility model is further illustrated below by the mode of embodiment, but is not therefore limited in the utility model
Among described scope of embodiments.
Understood incorporated by reference to Fig. 1 and Fig. 2, the implementation case provides a kind of vacuum sealing device.The vacuum sealing dress
Put including：Casing 10, bellows 20 and driving part.
Casing 10 is provided with vacuum chamber and some drive holes 11, and drive hole 11 connects with the vacuum chamber.
Casing 10 includes：Main body frame 12 and executor trunk 13, main body frame 12 are provided with the first vacuum chamber 14 and opening
16, opening 16 connects with the first vacuum chamber 14.Executor trunk 13 is set corresponding to opening 16, and the sealing of executor trunk 13 connects
Main body frame 12 is connected to, executor trunk 13 is provided with the second vacuum chamber 15.Wherein, the second vacuum chamber 15 connects with the first vacuum chamber 14
Lead to and form the vacuum chamber, drive hole 11 is located at executor trunk 13.In other embodiments, executor trunk 13 can also
It is removably attached to main body frame 12.So, by setting executor trunk 13, the entirety of vacuum sealing device is reduced
Volume, and simplify the structure of vacuum sealing device.
Bellows 20 is used to seal the gap between the driving part and drive hole 11.Bellows 20 corresponds to the drive
Dynamic component is set, and one end of bellows 20 is sealedly attached to the outer wall of casing 10, the other end of bellows 20 and the driving
Part connects, and the driving part is arranged in bellows 20.
The driving part is arranged in drive hole 11, and the both ends of the driving part respectively in the vacuum chamber and
Outside casing 10.
The driving part includes the first driving part 30 and the second driving part 40, the mobile side of the first driving part 30
Angle is provided with to the moving direction with the second driving part 40.It is preferred that the angle is 90 degree.So, it is different by setting
The first driving part 30 and the second driving part 40 of moving direction, realize the shifting of driven object different directions in the vacuum chamber
It is dynamic.
First driving part 30 includes an actuating arm 31, and actuating arm 31 is L-shaped.In the present embodiment, actuating arm 31 includes
Drive rod 32 and drive connection bar 33, one end of drive rod 32 are connected with bellows 20, the central axis of drive rod 32 and first
The moving direction of driving part 30 is parallel, and the central axis upright of drive connection bar 33 drives in the central axis of drive rod 32
One end of dynamic connecting rod 33 is sheathed on the other end of drive rod 32.By setting the structure of actuating arm 31, the first driving is reduced
The overall space-consuming of part 30, while simplify the overall structure of vacuum sealing device.
In the present embodiment, drive rod 32 is arranged with universal joint 34, and universal joint 34 is used for the mobile side for keeping drive rod 32
To.So, by being arranged universal joint 34 in drive rod 32, stability and move that drive rod 32 moves along moving direction be ensure that
The accuracy in direction.
It is close to simplify vacuum by the way that driving part, bellows and casing are combined for vacuum sealing device of the present utility model
The overall structure of seal apparatus；Meanwhile vacuum sealing device of the present utility model is the vacuum sealing for realizing vacuum chamber, is realized again
The structure that driving part is combined with vacuum chamber, optimize the allomeric function of vacuum sealing device.
The utility model also provides a kind of vacuum steerable system, and it is close that the vacuum steerable system includes vacuum as described above
Seal apparatus.
Although the foregoing describing specific embodiment of the present utility model, it will be appreciated by those of skill in the art that
These are merely illustrative of, and the scope of protection of the utility model is defined by the appended claims.Those skilled in the art
Member can make numerous variations or repair to these embodiments on the premise of without departing substantially from principle of the present utility model and essence
Change, but these changes and modification each fall within the scope of protection of the utility model.
Claims (10)
1. a kind of vacuum sealing device, it is characterised in that the vacuum sealing device includes：
Casing, the casing are provided with vacuum chamber and some drive holes, and the drive hole connects with the vacuum chamber；
Driving part, the driving part is arranged in the drive hole, and the both ends of the driving part are respectively positioned at described true
In cavity and outside the casing；
Bellows, the bellows are used to seal the gap between the driving part and the drive hole.
2. vacuum sealing device as claimed in claim 1, it is characterised in that the casing includes：
Main body frame, the main body frame are provided with the first vacuum chamber and opening, and the opening connects with first vacuum chamber；
Executor trunk, the executor trunk corresponds to the opening and set, and the executor trunk is sealedly attached to institute
Main body frame is stated, the executor trunk is provided with the second vacuum chamber；
Wherein, second vacuum chamber connects with first vacuum chamber and forms the vacuum chamber, and the drive hole is located at institute
State executor trunk.
3. vacuum sealing device as claimed in claim 2, it is characterised in that the executor trunk is removably attachable to institute
State main body frame.
4. vacuum sealing device as claimed in claim 1, it is characterised in that the bellows is set corresponding to the driving part
Put, and one end of the bellows is sealedly attached to the outer wall of the casing, the other end of the bellows and the drive division
Part connects, and the driving part is arranged in the bellows.
5. vacuum sealing device as claimed in claim 4, it is characterised in that the driving part include the first driving part and
Second driving part, the moving direction of first driving part and the moving direction of the second driving part are provided with angle.
6. vacuum sealing device as claimed in claim 5, it is characterised in that the angle is 90 degree.
7. vacuum sealing device as claimed in claim 5, it is characterised in that first driving part includes an actuating arm,
The actuating arm is L-shaped.
8. vacuum sealing device as claimed in claim 7, it is characterised in that the actuating arm includes drive rod and drive connection
Bar, one end of the drive rod are connected with the bellows, the central axis of the drive rod and first driving part
Moving direction is parallel, and the central axis upright of the drive connection bar is in the central axis of the drive rod, and the driving connects
One end of extension bar is sheathed on the other end of the drive rod.
9. vacuum sealing device as claimed in claim 8, it is characterised in that the drive rod is arranged with universal joint, and described ten thousand
To saving in the moving direction for keeping the drive rod.
10. a kind of vacuum steerable system, it is characterised in that the vacuum steerable system is included as any one in claim 1-9
Vacuum sealing device described in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720588594.1U CN206798581U (en) | 2017-05-24 | 2017-05-24 | Vacuum sealing device and the vacuum steerable system for including it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720588594.1U CN206798581U (en) | 2017-05-24 | 2017-05-24 | Vacuum sealing device and the vacuum steerable system for including it |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206798581U true CN206798581U (en) | 2017-12-26 |
Family
ID=60742767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720588594.1U Active CN206798581U (en) | 2017-05-24 | 2017-05-24 | Vacuum sealing device and the vacuum steerable system for including it |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206798581U (en) |
-
2017
- 2017-05-24 CN CN201720588594.1U patent/CN206798581U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220629 Address after: Floor 3, block A2, digital manor, No. 1, Disheng West Road, Daxing District, Beijing 100176 Patentee after: Beijing kaishitong Semiconductor Co.,Ltd. Address before: Unit 1, building 7, 200 Newton Road, Zhangjiang High Tech Park, Pudong New Area, Shanghai 201203 Patentee before: KINGSTONE SEMICONDUCTOR Co.,Ltd. |