CN2067711U - Gas seperating device for continuous processing equipment with multi-chamber - Google Patents
Gas seperating device for continuous processing equipment with multi-chamber Download PDFInfo
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- CN2067711U CN2067711U CN 89206896 CN89206896U CN2067711U CN 2067711 U CN2067711 U CN 2067711U CN 89206896 CN89206896 CN 89206896 CN 89206896 U CN89206896 U CN 89206896U CN 2067711 U CN2067711 U CN 2067711U
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Abstract
The utility model relates to a space gas isolation device for a continuous processing device with multiple chambers, comprising at least a low pressure isolation chamber, slit passages whose number is equal to the number which is the number of the isolation chambers plus one, and a gas sucking pipeline arranged on the isolation chamber and an inert gas supply pipeline. The gas sucking pipeline is connected with a vacuum pumping system by a stop valve, and the inert gas supply pipeline is connected with an inert gas source by a throttling valve and the stop valve. The space gas isolation device for a continuous processing device with multiple chambers of the utility model overcomes the defects that gas between each two processing chambers mutually adulterates, and working gas is difficult to be ensured to be uniform in the processing chambers. Meanwhile, the space gas isolation device for a continuous processing device with multiple chambers has the advantages of simple and convenient operation and stable work.
Description
The utility model relates to the gas barrier device, particularly relates to the space gas barrier device of multicell continuous processing apparatus.
In technological processs such as thermo-chemical treatment, metal coating, semiconducter device manufacturing and non-crystal silicon solar cell manufacturing, often adopt the multicell continuous processing apparatus to handle the workpiece of multiple shapes such as thread, the band shape of various continuous conveyings or bulk.In these equipment, often there is more than one treatment chamber to connect one by one, different work atmospheres or different air pressure can be arranged, for example hydrogen, nitrogen, carburizing atmosphere, siliconising atmosphere, metal vapors, chemical pyrolysis gas and even various ions or the like in each treatment chamber.When workpiece passes through these treatment chambers continuously, because the gas composition difference in each treatment chamber, the gas of each treatment chamber is isolated from each other, just can prevent mutual pollution, simultaneously, workpiece is unlikely again between chamber and chamber and is exposed in the air.
In the prior art, people such as Kan Neila disclose a kind of equipment and method in United States Patent (USP) 4438723 (on March 2nd 7,1984), between chamber and chamber, link with a slit, the slit size only allows workpiece to pass through, and causes the gas flow first from second treatment chamber, the uniflux of the 3rd treatment chamber to isolate with realization.Making continuous multicell deposition PIN (the unformed silicon of P type of P-boron-doping of substrate with Stainless Steel Band, the unformed silicon of the unadulterated I type of I-, N-mixes the unformed silicon of N type of phosphorus) in the equipment of non-crystal silicon solar cell, in order to prevent first of hotchpotch, second sediment chamber of the gas flow intrinsic layer (I) of the 3rd sediment chamber, the disrupter that adopts is the slit that connects chamber and chamber, and make the air pressure of second sediment chamber be higher than first, the 3rd sediment chamber, thereby cause second sediment chamber to flow to first by slit, the gas unidirectional of the 3rd sediment chamber flows, and reaches the isolated purpose of atmosphere.
But the shortcoming of above-mentioned gas barrier device of the prior art is: the first, and this kind disrupter only is applicable to that the working gas that allows in second Room flows to the situation of the first, the 3rd sediment chamber.Just only be applicable to and manufacture this specific occasion of non-crystal silicon solar cell; Second, because the gas in second sediment chamber continues to flow to the first and the 3rd Room, for keeping doping content in the first, the 3rd Room, not only to control the air pressure between each chamber, also to control the gas concentration of each sediment chamber, and be difficult to guarantee the homogeneity of working gas in the sediment chamber.
People such as Barnard are at United States Patent (USP) 4,369, another kind of gas barrier method is disclosed in 730 (January 25 nineteen eighty-three), be in the middle of slit, to feed rare gas element, make rare gas element in the middle of slit, flow to first and second sediment chambers and the second and the 3rd sediment chamber respectively.This method has overcome first shortcoming in the previous partition method; But second shortcoming still exists.
The purpose of this utility model provides and a kind ofly is applied to prevent in the multicell continuous processing apparatus that the gas between each chamber from polluting mutually or effective disrupter of other extraneous gas body pollution, make its operation more simple and convenient, the better effects if that reaches.
Is how to realize above purpose below in conjunction with accompanying drawing with the external explanation the utility model of embodiment.
Brief description of drawings is as follows:
Fig. 1 is the disrupter of an insulated chamber double slit passage;
Fig. 2 is the disrupter of two insulated chambers, three narrow-gap channels;
Fig. 3 is the disrupter of three insulated chambers, four narrow-gap channels;
Fig. 1 represents that multicell of the present utility model handles the structure principle chart of gas barrier device embodiment () continuously, among the figure: the 1-insulated chamber; 2,3-narrow-gap channel; The 4-pump-line; The 5-stopping valve; 6-vacuum suction unit; 7-rare gas element steam line; The 8-throttling valve; The 9-stopping valve; 10-air pressure detector.
Fig. 2 is the disrupter structure principle chart of the utility model embodiment (two).Among the figure: 11,12-insulated chamber; 13,14,15-narrow-gap channel; 16,17-pump-line; The 18-stopping valve; 19-vacuum suction unit; 20-rare gas element steam line; The 21-throttling valve; The 22-stopping valve; 23-air pressure detector; 24,25-air pressure detector interface.
Fig. 3 is the disrupter structure principle chart of the utility model embodiment (three).31,32, the 33-insulated chamber among the figure:; 34,35,36,37-narrow-gap channel; 38,39-pump-line; 40,40 ', 40 " stopping valve; 41,41 '-the vacuum suction unit; 42-rare gas element steam line; The 43-throttling valve; 46-air pressure detector; 45,47-air pressure detector interface.
Primary structure of the present utility model is: in two figure of multicell continuous processing apparatus: 11,12-insulated chamber; 13,14,15-narrow-gap channel; 16,17-pump-line; The 18-stopping valve; 19-vacuum suction unit; 20-rare gas element steam line; The 21-throttling valve; The 22-stopping valve; 23-air pressure detector; 24,25-air pressure detector interface.
Fig. 3 is the disrupter structure principle chart of the utility model embodiment (three).31,32, the 33-insulated chamber among the figure:; 34,35,36, the 37-slit is logical first; 38,39-pump-line; 40,40 ', 40 " the false valves that end; 41,41 '-the vacuum suction unit; 42-rare gas element steam line; The 43-throttling valve; 46-air pressure detector; 45,47-air pressure detector interface.
Primary structure of the present utility model is: at the two ends of multicell continuous processing apparatus, be respectively two treatment chambers, one, two or more insulated chamber are housed therebetween, they link with treatment chamber respectively by narrow-gap channel, air pressure in each insulated chamber all is lower than chambers, the air pressure of inert gas filled intermediate isolating chamber and middle slit passage, and the rare gas element air pressure in this intermediate isolating chamber, middle slit passage can equal or a little more than the air pressure of chambers.The number of narrow-gap channel adds 1 for the insulated chamber number.The shape of narrow-gap channel should be decided on the workpiece shape, all narrow-gap channels of a disrupter, and its center should be in a straight line.
Intermediate isolating chamber, the middle slit passage of device is provided with the rare gas element conduit and links with throttling valve, stopping valve, inert gas source, is provided with the air pressure detector in addition.And on all the other insulated chambers, be provided with bleed conduit and with stopping valve, vacuum air pump set associative, on the chamber, also be provided with the air pressure detector interface.
During work, at first system is vacuumized, open throttling valve, the stopping valve of airing system, feed the rare gas element of certain air pressure by supply conduit from the chamber to each, the big I of its air pressure equals or a little more than the pressure of working gas in the chambers, its air pressure can be recorded by the air pressure detector.In treatment chamber, feed working gas then, just can work.
When the chambers with different operating gas is in running order, air-bleed system is taken away in time by rare gas element and working gas that pump-line will enter insulated chamber, causes the air pressure of each insulated chamber to be lower than the air pressure of the rare gas element in the air pressure of working gas of chambers and middle slit passage, the intermediate isolating chamber.Formed from treatment chamber a little amount of work gas to the uniflux of insulated chamber and rare gas element from middle narrow-gap channel, intermediate isolating chamber uniflux, to reach the purpose that the working gas that makes adjacent two treatment chambers is isolated from each other to each insulated chamber.
The utility model is owing to use rare gas element, and do not enter treatment chamber, so can not influence the purity of working gas in the treatment chamber, overcome in the past all shortcomings in the partition method.Workpiece becomes more clean through washing away of many places slit air-flow in addition.The inert gas pressure that need only regulate during work in throttle valve control intermediate isolating chamber or the middle slit passage gets final product, therefore easy and simple to handle, safe and reliable, isolation effect is good, is suitable for doing on the various multicell continuous processing apparatus space atmosphere disrupter.
Embodiment (one)
Shown in Figure 1 is a kind of single insulated chamber two channel gas disrupters of present embodiment ().It is by insulated chamber 1; Passage 2,3; The pump-line 4 that links with insulated chamber 1; Stopping valve 5; Air-bleed system 6; And the steam line 7 that links with insulated chamber 1; Throttling valve 8; Stopping valve 9 and air pressure detector 10 constitute.Passage 2 connects first treatment chamber and insulated chamber 1, and passage 3 connects the insulated chamber 1 and second treatment chamber, and its center of all narrow-gap channels is a straight line.
Use the device of present embodiment () will be between two treatment chambers, forming a subatmospheric insulated chamber 1, the order that gas is isolated from each other in first, second treatment chamber is had thereby cause gas to reach to the uniflux of insulated chamber 1 by first, second treatment chamber.For this reason, when designed channel, should make the conductance of slit very little, make the flow that flow to insulated chamber 1 from passage 2 and 3, thereby cause the air pressure of insulated chamber 1 always to be lower than the state of first, second treatment chamber less than the flow of being taken away from pipeline 4.
The operation of present embodiment device is performed such: at first open the air-bleed system of entire equipment, the air in the entire equipment is taken out; Close stopping valve 5 and air-bleed system 6, feed from steam line 7 and be equal to or a little more than the rare gas element of operating air pressure the treatment chamber, to cut off the UNICOM in first, second treatment chamber; Then, feed the working gas of certain air pressure in first, second treatment chamber, pressure is lower than the air pressure of the rare gas element in the insulated chamber 1 slightly; At last, open stopping valve 5 and air-bleed system 6, close stopping valve 9, treat that the mixed gas of rare gas element and working gas is taken out to the greatest extent in first, second treatment chamber after, can begin the work of chambers.
Embodiment (two)
Fig. 2 is the gas barrier device that a kind of two insulated chamber triple channel of present embodiment (two) constitute.It is by insulated chamber 11,12; Narrow-gap channel 13,14,15; The pump-line 16 and 17, stopping valve 18, air-bleed system 19, the air pressure detector mounting interface 24,25 that link separately with insulated chamber 11,12; The steam line 20, air pressure detector 23, throttling valve 21, the stopping valve 22 that link with center-aisle 14 constitute.Wherein, passage 13 connects first treatment chamber and insulated chamber 11; Center-aisle 14 connects insulated chamber 11 and insulated chamber 12; Passage 15 connects the insulated chamber 12 and second treatment chamber.
Use the device of present embodiment (two) can between two treatment chambers, cause two subatmospheric insulated chambers 11 and 12, one equals or a little more than the passage 14 of chamber pressure, thereby cause gas from first treatment chamber and center-aisle 14 uniflux, to reach the purpose that the gas in first, second treatment chamber is isolated from each other to insulated chamber 11.For this reason, must do the conductance of passage 13,14,15 very little, flow into the flow that the flow of insulated chamber 1l is taken out from insulated chamber 11 less than pipeline 16 and make from passage 13,14, equally, passage 15,14 flows into the flow that the flow of insulated chambers 12 is taken out from insulated chamber 12 less than pipeline 17.Like this, can keep the air pressure of insulated chamber 11 and 12 to be lower than air pressure in two treatment chambers and the passage 14 all the time.
The concrete working condition of present embodiment (two) is such: at first by the air-bleed system in first, second treatment chamber and this device entire equipment is vacuumized, open stopping valve 22, throttling valve 21 then, feed the rare gas element of certain air pressure by pipeline 20, the big I of its air pressure equals or a little more than the required operating air pressure of first and second treatment chamber, pressure is recorded by air pressure detector 23; In first, second treatment chamber, feed the working gas of institute's palpus subsequently more respectively, because flowing into the gas of insulated chamber 11 from first treatment chamber and passage 14 is taken away by pipeline 15 in time, cause insulated chamber 11 gentle forcing down in the air pressure of first treatment chamber and passage 14, thereby formed from a little amount of work gas of first treatment chamber uniflux, and the rare gas element in the passage 14 is to the uniflux of insulated chamber 11 to insulated chamber 11.
Embodiment (three)
Figure 3 shows that the embodiment (three) of the gas barrier device of multicell continuous processing apparatus of the present utility model.
The two ends of device, be respectively two treatment chambers (first treatment chamber and second treatment chamber), three insulated chambers 31 are arranged therebetween, 32,33 (32 is the intermediate isolating chamber), use narrow-gap channel 34 between treatment chamber and the insulated chamber, 35,36,37 link, the number of narrow-gap channel adds 1 for the insulated chamber number, left end UNICOM first treatment chamber of passage 34, right-hand member UNICOM chamber 31, passage left end UNICOM chambers 31 35, right-hand member UNICOM chamber 32, the left end UNICOM chamber 32 of passage 36, right-hand member UNICOM chamber 33, passage left end UNICOM chambers 37 33 right-hand member UNICOMs second treatment chamber.On insulated chamber 31 and 33, be respectively equipped with bleed conduit 38 and 39, by stopping valve 40 and 40 ' respectively with air-bleed system 41 and 41 ' link.On chamber 32, be provided with supply conduit 42, by throttling valve 43 and stopping valve 40 and " link with the inertia source of the gas.31,33 mounting interfaces 45,47 that are provided with the air pressure detector are provided with air pressure detector 46 on chamber 32 in the chamber, can predict each chamber barometric information respectively by 45,46,47 like this.Thread or the banded workpiece of successive can carry out various processing respectively by first treatment chamber and second treatment chamber continuously by 34,35,36,37, three insulated chambers 31,32,33 of four passages.
Use present embodiment (three), can be first, cause two subatmospheric (with respect to the air pressure in two treatment chambers and the chamber 32) 32 between two treatment chambers, 33 and inert chamber 32 that equal air pressure in (or a little more than) treatment chamber, its using method is, after entire equipment is evacuated, " open; regulate throttling valve 43; make rare gas element feed chambers 32 from conduit 42; air pressure in the chamber 32 is roughly equated with air pressure in the most contiguous treatment chamber, air-bleed system 41 is in time 32 passing through narrow-gap channel 34 from first treatment chamber and from the chamber; 35 gases that flow into chamber 31 are taken out by pipeline 38 with stopping valve 40.Because the conductance of narrow-gap channel 34,35 designs very for a short time, so the air pressure in the insulated chamber 31 can be in all the time and be lower than first adjacent treatment chamber and the air pressure in the insulated chamber 32, thus caused from first treatment chamber to the chamber 31 and from the chamber 32 to the chamber uniflux of a small amount of gas of 31.Equally, the situation in chamber 33 is identical with situation in the chamber 31.So just reached the purpose that the working gas that makes adjacent two treatment chambers is isolated from each other.
Claims (7)
1, a kind of space gas barrier device of multicell continuous processing apparatus, it is characterized in that: it is a kind of single insulated chamber two channel gas disrupters, two ends are respectively first and second treatment chambers, an insulated chamber 1 is arranged therebetween, between two treatment chambers and the insulated chamber respectively, by narrow-gap channel 2,3 link, the left end of passage 2 and first treatment chamber link, right-hand member and insulated chamber 1 link, the right-hand member of passage 3 and second treatment chamber link, left end and insulated chamber link, the conduit 4 of bleeding is housed on insulated chamber 1, link by stopping valve 5 and air-bleed system 6, air pressure detector 10 is housed on the insulated chamber 1 in addition, and steam line 7 is by throttling valve 8, stopping valve 9 links with inert gas source.
2, according to wanting sharp 1 the space gas barrier device that requires, it is characterized in that: insulated chamber air pressure is lower than adjacent two chamber pressure.
3, a kind of space gas barrier device of multicell continuous processing apparatus, it is characterized in that: it is the three-channel gas barrier devices of a kind of two insulated chambers, but center-aisle filling with inert gas, these device two ends are respectively first and second treatment chambers, two insulated chambers 11 are arranged therebetween, 12, respectively by narrow-gap channel 13,14,15 order UNICOMs, center-aisle is 14, its left end UNICOM insulated chamber 11, right-hand member UNICOM insulated chamber 12, narrow-gap channel 13 left end UNICOMs first treatment chamber, right-hand member UNICOM insulated chamber 11, narrow-gap channel 15 left end UNICOM insulated chambers 12, right-hand member UNICOM second treatment chamber, at insulated chamber 11, respectively be provided with pump-line 16 on 12,17, and link by stopping valve 18 and air-bleed system 19, center-aisle 14 is provided with steam line 20, and by throttling valve 21, stopping valve 22 links with inert gas source, also be provided with air pressure detector 23 on the center-aisle, at insulated chamber 11, air pressure detector mounting interface 24 is arranged respectively on 12,25.
4, according to the gas barrier device of claim 3, it is characterized in that:
The air pressure of (1) two insulated chamber is lower than the air pressure of treatment chamber and the rare gas element air pressure in the center-aisle.
(2) rare gas element air pressure is equal to or higher than air pressure in the treatment chamber in the center-aisle.
5, a kind of space gas barrier device of multicell continuous processing apparatus, it is characterized in that: it is a kind of gas barrier device of three insulated chamber four-ways, but intermediate isolating chamber filling with inert gas, on this device two ends relative position, be respectively first and second treatment chambers, three insulated chambers 31 are arranged therebetween, 32,33, by narrow-gap channel 34,35,36,37 link with the treatment chamber order, 34 left ends, 37 right-hand members link 34 right-hand members with the one the second treatment chambers respectively, 35 right-hand member UNICOM insulated chambers 31; 35 right-hand members, left end UNICOM intermediate isolating chambers 32 36,36 right-hand members, 37 left end UNICOM insulated chambers 33, at insulated chamber 31, pump-line 38 is housed respectively on 33,39, and with stopping valve 40,40 ' and air-bleed system 41,41 ' link, rare gas element steam line 42 is housed on intermediate isolating chamber 32, and by throttling valve 43, stopping valve 40 " links with inert gas source; air pressure detector 46 is housed, at insulated chamber 31 on insulated chamber 32; interface 45 that the air pressure detector is installed is arranged; 47 on 33.
6, according to the gas barrier device of claim 5, it is characterized in that:
(1) air pressure of insulated chamber 31,33 should be lower than the air pressure in adjacent treatment chamber and the intermediate isolating chamber 32.
(2) rare gas element air pressure should be equal to or higher than air pressure in the treatment chamber in the intermediate isolating chamber.
7, according to claim 1,3,5 gas barrier device, it is characterized in that:
(1) number of described narrow-gap channel adds 1 for the insulated chamber number.
(2) center of narrow-gap channel in a straight line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89206896 CN2067711U (en) | 1989-05-06 | 1989-05-06 | Gas seperating device for continuous processing equipment with multi-chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89206896 CN2067711U (en) | 1989-05-06 | 1989-05-06 | Gas seperating device for continuous processing equipment with multi-chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2067711U true CN2067711U (en) | 1990-12-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 89206896 Withdrawn CN2067711U (en) | 1989-05-06 | 1989-05-06 | Gas seperating device for continuous processing equipment with multi-chamber |
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| CN (1) | CN2067711U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101962755A (en) * | 2010-09-30 | 2011-02-02 | 深圳市金凯新瑞光电有限公司 | Continuous multiple sputter coating chamber atmosphere isolation system |
| CN101463471B (en) * | 2009-01-12 | 2011-05-04 | 浙江嘉远格隆能源股份有限公司 | Continuous thin film vacuum deposition method and apparatus |
| CN102534538A (en) * | 2010-12-17 | 2012-07-04 | 上海空间电源研究所 | Atmosphere isolation device between vacuum chambers |
| CN106277816A (en) * | 2016-07-29 | 2017-01-04 | 爱发科豪威光电薄膜科技(深圳)有限公司 | The multistage atmosphere isolation device of coating film production line |
| CN108624858A (en) * | 2017-03-23 | 2018-10-09 | 北京创昱科技有限公司 | Atmosphere isolation device and method between a kind of multi-chamber |
| WO2019109406A1 (en) * | 2017-12-06 | 2019-06-13 | 北京铂阳顶荣光伏科技有限公司 | Sheet coating apparatus with function of preventing gas from escaping |
| CN111172519A (en) * | 2020-01-17 | 2020-05-19 | 中国航发北京航空材料研究院 | Device and method for continuously preparing composite interface layer on surface of silicon carbide fiber |
| WO2021008057A1 (en) * | 2019-07-18 | 2021-01-21 | 中国科学院金属研究所 | Hfcvd device used for continuous preparation of diamond thin film, and coating method thereof |
-
1989
- 1989-05-06 CN CN 89206896 patent/CN2067711U/en not_active Withdrawn
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101463471B (en) * | 2009-01-12 | 2011-05-04 | 浙江嘉远格隆能源股份有限公司 | Continuous thin film vacuum deposition method and apparatus |
| CN101962755A (en) * | 2010-09-30 | 2011-02-02 | 深圳市金凯新瑞光电有限公司 | Continuous multiple sputter coating chamber atmosphere isolation system |
| CN102534538A (en) * | 2010-12-17 | 2012-07-04 | 上海空间电源研究所 | Atmosphere isolation device between vacuum chambers |
| CN106277816A (en) * | 2016-07-29 | 2017-01-04 | 爱发科豪威光电薄膜科技(深圳)有限公司 | The multistage atmosphere isolation device of coating film production line |
| CN106277816B (en) * | 2016-07-29 | 2019-08-23 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Coating film production line multistage atmosphere isolation device |
| CN108624858A (en) * | 2017-03-23 | 2018-10-09 | 北京创昱科技有限公司 | Atmosphere isolation device and method between a kind of multi-chamber |
| WO2019109406A1 (en) * | 2017-12-06 | 2019-06-13 | 北京铂阳顶荣光伏科技有限公司 | Sheet coating apparatus with function of preventing gas from escaping |
| WO2021008057A1 (en) * | 2019-07-18 | 2021-01-21 | 中国科学院金属研究所 | Hfcvd device used for continuous preparation of diamond thin film, and coating method thereof |
| CN111172519A (en) * | 2020-01-17 | 2020-05-19 | 中国航发北京航空材料研究院 | Device and method for continuously preparing composite interface layer on surface of silicon carbide fiber |
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