CN206742206U - Automatic wedge bonding bonder fixture - Google Patents

Automatic wedge bonding bonder fixture Download PDF

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Publication number
CN206742206U
CN206742206U CN201720610874.8U CN201720610874U CN206742206U CN 206742206 U CN206742206 U CN 206742206U CN 201720610874 U CN201720610874 U CN 201720610874U CN 206742206 U CN206742206 U CN 206742206U
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CN
China
Prior art keywords
supporting body
device supporting
positioning
base
vacuum hole
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201720610874.8U
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Chinese (zh)
Inventor
杨建军
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CETC 13 Research Institute
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CETC 13 Research Institute
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Priority to CN201720610874.8U priority Critical patent/CN206742206U/en
Application granted granted Critical
Publication of CN206742206U publication Critical patent/CN206742206U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of automatic wedge bonding bonder fixture, it is related to technical field of semiconductor encapsulation;Including base, device supporting body and several locating pieces;Device supporting body is placed on base, and locating piece is placed on device supporting body;Base is provided with several screw positioning holes being connected with equipment;Base front surface is provided with the first vacuum hole;Device supporting body is provided with the bond devices positioning unit of more than 2;Each bond devices positioning unit includes some positioning counterbores, the locating piece being engaged with positioning counterbore and at least one second vacuum hole;The second vacuum tank that second vacuum hole is provided with by the device supporting body back side connects with the first vacuum hole;Simple in construction, easy to use, suitable for different products, use range is wide, saves material, improves operating efficiency.

Description

Automatic wedge bonding bonder fixture
Technical field
It the utility model is related to technical field of semiconductor encapsulation.
Background technology
With the production-scale expansion of semiconductor devices, automatic wedge bonding bonder is more and more extensive to be applied in bonding work Skill.The fixture of automated bonding equipment plays an important role on the advantages that fully-automatic equipment is stable, efficient is played, jig Design Quality even influence whether the production capacity of an automatic equipment.The clamp structure that most of automated bonding machine equipment manufacturer carries Single and production poor universality.At present, the country is also without the fixture patent of automatic wedge bonding bonder.Similar bonding jig Design Patent:《A kind of wire bonding clamp》(Chinese CN102446803 A 2012.05.9)、《Flexible ultrasonic wire bonding jig》 (Chinese CN102335893B 2014.02.26)、《One kind bonding fixture》(Chinese CN104517881A 2015.04.15), Design is either complicated above needs gear drive or utilizes spring clamping device to be bonded or be simply adapted to single one The problem of planting product, bringing is that fixture fabrication cycle is long or different product fixture is incompatible, and can not realize that matrix form produces, These bonding fixtures are caused to be applied in automated production.
Utility model content
The technical problems to be solved in the utility model is to be directed to above-mentioned the deficiencies in the prior art, there is provided a kind of automatic wedge bonding key Conjunction machine fixture, it is simple in construction, it is easy to use, it is versatile, different products is can be suitably used for, material is saved, reduces cost, carry High workload efficiency.
In order to solve the above technical problems, technical solution adopted in the utility model is:Including base, device supporting body and Several locating pieces;Device supporting body is placed on base, and locating piece is placed on device supporting body;If the base is provided with The dry screw positioning hole being connected with equipment;Base front surface is provided with the first vacuum hole;It is characterized in that:On the device supporting body Provided with the bond devices positioning unit of more than 2;Each bond devices positioning unit includes some positioning counterbores and positioning counterbore The locating piece and at least one second vacuum hole being engaged;Second vacuum hole be provided with by the device supporting body back side second Vacuum tank connects with the first vacuum hole.
Preferably, device supporting body is divided into left side device supporting body and right side device supporting body, one of them is covered in On first vacuum hole;Independent positioning unit is equipped with left side device supporting body and right side device supporting body.
Preferably, the bond devices positioning unit of more than 2 is according to matrix arrangement.
Preferably, the first vacuum tank that base back surface is provided with, the first vacuum tank initiating terminal is true on machine equipment with being bonded Emptying aperture is corresponding, and the first vacuum tank clearing end is connected with the first vacuum hole.
Preferably, base is channel-shaped, base wherein three lateral edges are provided with several baffle plates, and baffle plate is to be spaced apart, Screw positioning hole is provided between two neighboring baffle plate.
Preferably, auxiliary positioning counterbore is additionally provided with device supporting body.
Preferably, the structure of locating piece includes location-plate and two or more inserting column, location-plate are fixed on inserting column, inserting column Insert in positioning counterbore or auxiliary positioning counterbore, location-plate is engaged with bond devices structure, between adjacent two inserting column away from It is engaged from the distance between positioning counterbore or auxiliary positioning counterbore.
Further, in addition to the annex of the second vacuum hole gas leakage is prevented.
Preferably, accessory structure includes an inserting column and the cover plate being arranged on inserting column.
Preferably, base, device supporting body and, locating piece and annex be all metal structure.
It is using beneficial effect caused by above-mentioned technical proposal:The utility model is simple in construction, easy to use, general Property is strong, can be suitably used for different products;The utility model is made using metal material, good thermal conduction, is advantageous to heat and is distributed;Spiral shell It is that channel-shaped can prevent device from carrying that silk positioning hole, which is advantageous to the utility model with being bonded the fastening of machine equipment heating platform, base, Body is moved;Two device supporting bodies are placed on base simultaneously, can circulate production, and one another can while produce Preheated and charge and discharge operations, improve production efficiency;The utility model uses the side of the plug locating piece on device supporting body Method realizes the compatible positioning of different sized products, and the positioning counterbore of plug locating piece is furnished with vacuum hole neighbouring position, counterbore Position distribution by optimize calculate after obtain, be divided into main positions and aided location, can compatible different product, use range Extensively, material is saved, reduces cost, improves operating efficiency;Automated bonding machine all has the function of matrix bonding, and the utility model will Second vacuum hole of each positioning unit and positioning counterbore matrix distribution meet the requirement of matrix production in fixture plane, Improve operating efficiency;
The utility model, save for different components design fixture and the cycle made, save switching fixture operation And the heating-up time, and high and calibration initial position time is visited again, matrix form bonding production is realized, improves production effect Rate;One sleeve clamp can meet a variety of device productions, reduce the production cost of fixture making.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model base;
Fig. 2 is the structural representation of the utility model device supporting body;
Fig. 3 is the structural representation of the utility model locating piece embodiment 1;
Fig. 4 is the structural representation of the utility model locating piece embodiment 2;
Fig. 5 is the structural representation of the utility model annex.
In figure:1st, base;2nd, screw positioning hole;3rd, the first vacuum hole;4th, baffle plate;5th, device supporting body;6th, the second vacuum Hole;7th, positioning counterbore;8th, auxiliary positioning counterbore;9th, locating piece;10th, annex;11st, location-plate;12nd, inserting column.
Embodiment
The utility model is described in further detail with reference to the accompanying drawings and detailed description.
As Figure 1-5, it is a kind of one embodiment of automatic wedge bonding bonder fixture of the utility model,
Embodiment 1:
Including base 1, device supporting body 5 and several locating pieces 9;Device supporting body 5 is placed on base 1, locating piece 9 It is placed on device supporting body 5;Base 1 is provided with several screw positioning holes 2 being connected with equipment;The front of base 1 is provided with the One vacuum hole 3;Device supporting body 5 is provided with the bond devices positioning unit of more than 2;Each bond devices positioning unit includes Some positioning counterbores 7, the locating piece 9 being engaged with positioning counterbore 7 and at least one second vacuum hole 6;Second vacuum hole 6 passes through The second vacuum tank that the back side of device supporting body 5 is provided with connects with the first vacuum hole 3.
First vacuum hole 3 is one, and the first vacuum hole 3 is connected by the second vacuum tank with the second vacuum hole 6, plays drainage Effect;Base 1 is used for immobilising device supporting body 5;Locating piece 9 is used to fix bond devices.
Locating piece 9 is engaged with positioning counterbore 7 and inserted in positioning counterbore 7, and para-linkage device positioning, locating piece 9 can be inserted Enter or remove, can insert in different positioning counterbores 7, save what is designed different fixtures for different components and make In the cycle, switching fixture operation and heating-up time are saved, and visit high and calibration initial position time again;Substantially increase Operating efficiency, present apparatus use range is wide, compatible device to be bonded.One sleeve clamp can meet a variety of device productions, reduce The production cost that fixture makes.The method of plug locating piece 9 realizes the compatible positioning of different sized products, simplifies positioning side Formula, the positioning counterbore 7 of plug locating piece 9 is furnished with the neighbouring position of the second vacuum hole 6, the position distribution of positioning counterbore 7 passes through excellent Change and obtained after calculating, solve the problems, such as that fixture must be changed by changing product.
The bond devices positioning unit of more than 2, it can meet that multiple identical bond devices are placed on same device and held It is bonded on carrier 5, also meets that multiple different building are placed on same device supporting body 5 with device and be bonded, suitable for different Product uses, versatile.
Embodiment 2:
Base 1, the structure of device supporting body 5 and locating piece 9 and assembling are same as Example 1.
Device supporting body 5 divides for left side device supporting body and right side device supporting body, and one of them is covered in the first vacuum On hole 3;Independent positioning unit is equipped with left side device supporting body and right side device supporting body.
In use, left side device supporting body is placed on the first vacuum hole 3, device supporting body advanced line unit in left side closes, right Side device supporting body is preheated, and after the completion for the treatment of left side device supporting body, left side device supporting body is removed, right side device is held Carrier is slid on the first vacuum hole 3 on base 1, carries out the bonding of bond devices on the device supporting body of right side.
The setting of two blocks of device supporting bodies, can circulate production, and another can be preheated and be loaded and unloaded while a production Operation, improves production efficiency.
Certainly, device supporting body 5 can also be 3 pieces etc., according to the size of base 1
Embodiment 3:
Base 1, the structure of device supporting body 5 and locating piece 9 and assembling are same as Example 1.
The bond devices positioning unit of more than 2 is according to matrix arrangement.
Second vacuum hole 6 and positioning counterbore 7 are divided into several positioning units, and positioning unit is according to matrix arrangement.Second The position distribution of vacuum hole 6 and positioning counterbore 7 meets the requirement of the existing device to be bonded used by being calculated; Calculated by optimization, obtain the second vacuum hole 6 of 5 inner positioning unit of device supporting body and the position distribution of positioning counterbore 7, afterwards By positioning unit according to matrix arrangement in device supporting body 5, automated bonding machine all has the function of matrix bonding, will be each Second vacuum hole 6 of positioning unit and the matrix distribution of positioning counterbore 7 meet matrix production in the plane of device supporting body 5 It is required that the second vacuum hole 6 and positioning counterbore 7 of matrix arrangement so that automated bonding machine can be according to the continuous key of the program to improve Clutch part, centre do not have pause, meet mass production, improve operating efficiency.
Embodiment 4:
Base 1, the structure of device supporting body 5 and locating piece 9 and assembling are same as Example 1.
The first vacuum tank that the back side of base 1 is provided with, the first vacuum tank initiating terminal are relative with the vacuum hole on bonding machine equipment Should, the first vacuum tank clearing end is connected with the first vacuum hole 3.
First vacuum tank is strip rectangular slot, and the first vacuum tank plays drainage, makes the vacuum on bonding machine equipment Hole is connected with the first vacuum hole 3 on base 1.
Embodiment 5:
Base 1, the structure of device supporting body 5 and locating piece 9 and assembling are same as Example 1.
Base 1 is channel-shaped, and wherein three lateral edges of base 1 are provided with several baffle plates 4, and baffle plate 4 is is spaced apart, adjacent two Screw positioning hole 2 is provided between individual baffle plate 4.
Wherein three lateral edges of base 1 are provided with several baffle plates 4, and convenient device supporting body 5 picks and places, and baffle plate 4 is interval It is distributed, is provided with screw positioning hole 2 between two neighboring baffle plate 4, both saves material, do not interfere with the setting of screw positioning hole 2 again, The fixation of base 1 will not be hindered.
Embodiment 6:
Base 1, the structure of device supporting body 5 and locating piece 9 and assembling are same as Example 1.
Auxiliary positioning counterbore 8 is additionally provided with device supporting body 5, auxiliary positioning counterbore 8 is reserved hole, can be with extended products The compatibility of size, laid the groundwork to produce new scale device later.
Embodiment 7:
Base 1, the structure of device supporting body 5 and locating piece 9 and assembling are same as Example 1.
The structure of locating piece 9 includes location-plate 11 and two or more inserting column 12, and location-plate 11 is fixed on inserting column 12, inserting column 12 are inserted in positioning counterbore 7 or auxiliary positioning counterbore 87, and location-plate 11 is engaged with device architecture to be bonded, adjacent two inserting column The distance between 12 are engaged with the distance between positioning counterbore 7 or auxiliary positioning counterbore 87.
Location-plate 11 can be the square that rectangle, two rectangles surround, and inserting column 12 is fixed under location-plate 11, insert Post 12 can be two or 3, or more;The distance of inserting column 12 is determined according to the distance of positioning counterbore 7;Positioning The thickness and the length of inserting column 12 of block 9 are determined that the spacing of two inserting column 12 is by fixed by locating piece 9 in the stability that device supporting body 5 is placed The spacing of position counterbore 7 determines.
Locating piece 9 is used to fix the bond devices being placed in the second vacuum hole 6, under this structure, it is only necessary to retainingf key The arbitrarily vertical both sides of clutch part can be fixed by device to be bonded, and positioning method simplifies, by the positioning side on four general sides Method is reduced to both sides positioning mode, uses more convenient, positioning more simple and fast.
Embodiment 8:
Base 1, the structure of device supporting body 5 and locating piece 9 and assembling are same as Example 1.
Also include the annex 10 for preventing the gas leakage of the second vacuum hole 6.
The structure of annex 10 includes an inserting column 12 and the cover plate being arranged on inserting column 12, and the effect of annex 10 is to work as automatic key Conjunction matrix is changed or had inserts the second vacuum hole 6 during no vacuum hole by the inserting column 12 of annex 10, prevents gas leakage, annex 10 mainly prevent the gas leakage of the second vacuum hole of free time 6 on device supporting body 5;The structure of annex 10 can also only have inserting column 12, As long as the second vacuum hole 6 can be blocked.
Base 1, device supporting body 5 and, locating piece 9 and annex 10 be all metal structure, metal heat transfer is good, is advantageous to Heat transmission.
Use process:
Device supporting body 5 is placed on base 1, bond devices are placed on the second vacuum hole 6, according to size of devices shape Shape regioselective block 9 is inserted in the positioning counterbore 7 on device supporting body 5, is blocked any vertical both sides of bond devices, will be treated After bond devices occupy device supporting body 5 by matrix, vacuum is opened, it is possible to produced.When automated bonding matrix changes Or have and the inserting column 12 of annex 10 is inserted into the second vacuum hole 6 during no vacuum hole, prevent gas leakage.
Two device supporting bodies 5, the left side device supporting body 5 being placed on base 1 on first vacuum hole 3 are placed on base 1 Bonding production is carried out, the right side device supporting body 5 not on the first vacuum hole 3 is preheated, and treats that left side device supporting body 5 produces After the completion of, left side device supporting body 5 is removed, right side device supporting body 5 is moved to the top of the first vacuum hole 3, right side device Supporting body 5 starts to produce.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model Protection domain within.

Claims (10)

1. a kind of automatic wedge bonding bonder fixture, including base(1), device supporting body(5)With several locating pieces(9);Device Part supporting body(5)It is placed on base(1)On, locating piece(9)It is placed on device supporting body(5)On;The base(1)If provided with The dry screw positioning hole being connected with equipment(2);Base(1)Front is provided with the first vacuum hole(3);It is characterized in that:The device Part supporting body(5)It is provided with the bond devices positioning unit of more than 2;It is heavy that each bond devices positioning unit includes some positioning Hole(7)With positioning counterbore(7)The locating piece being engaged(9)With at least one second vacuum hole(6);Second vacuum hole(6) Pass through device supporting body(5)The second vacuum tank and the first vacuum hole that the back side is provided with(3)Connection.
2. automatic wedge bonding bonder fixture according to claim 1, it is characterised in that the device supporting body(5)It is divided into Left side device supporting body and right side device supporting body, one of them is covered in the first vacuum hole(3)On;Left side device supporting body and Independent positioning unit is equipped with the device supporting body of right side.
3. automatic wedge bonding bonder fixture according to claim 1, it is characterised in that the bond devices of described more than 2 Positioning unit is according to matrix arrangement.
4. automatic wedge bonding bonder fixture according to claim 1, it is characterised in that the base(1)What the back side was provided with First vacuum tank, the first vacuum tank initiating terminal is corresponding with the vacuum hole on bonding machine equipment, the first vacuum tank clearing end and the One vacuum hole(3)It is connected.
5. automatic wedge bonding bonder fixture according to claim 1, it is characterised in that the base(1)For channel-shaped, bottom Seat(1)Wherein three lateral edges are provided with several baffle plates(4), baffle plate(4)To be spaced apart, two neighboring baffle plate(4)Between set There is screw positioning hole(2).
6. automatic wedge bonding bonder fixture according to claim 1, it is characterised in that the device supporting body(5)It is upper to go back Provided with auxiliary positioning counterbore(8).
7. automatic wedge bonding bonder fixture according to claim 1, it is characterised in that the locating piece(9)Structure bag Include location-plate(11)With two or more inserting column(12), location-plate(11)It is fixed on inserting column(12)On, inserting column(12)Insert and positioning Counterbore(7)Or auxiliary positioning counterbore(8)In, location-plate(11)It is engaged with bond devices structure, adjacent two inserting column(12)Between Distance and positioning counterbore(7)Or auxiliary positioning counterbore(8)The distance between be engaged.
8. automatic wedge bonding bonder fixture according to claim 1, it is characterised in that also include preventing the second vacuum hole (6)The annex of gas leakage(10).
9. automatic wedge bonding bonder fixture according to claim 8, it is characterised in that the annex(10)Structure includes One inserting column(12)Be arranged on inserting column(12)On cover plate.
10. automatic wedge bonding bonder fixture according to claim 1, it is characterised in that the base(1), device carrying Body(5)With, locating piece(9)And annex(10)All it is metal structure.
CN201720610874.8U 2017-05-27 2017-05-27 Automatic wedge bonding bonder fixture Withdrawn - After Issue CN206742206U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720610874.8U CN206742206U (en) 2017-05-27 2017-05-27 Automatic wedge bonding bonder fixture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720610874.8U CN206742206U (en) 2017-05-27 2017-05-27 Automatic wedge bonding bonder fixture

Publications (1)

Publication Number Publication Date
CN206742206U true CN206742206U (en) 2017-12-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720610874.8U Withdrawn - After Issue CN206742206U (en) 2017-05-27 2017-05-27 Automatic wedge bonding bonder fixture

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107039317A (en) * 2017-05-27 2017-08-11 中国电子科技集团公司第十三研究所 Automatic wedge bonding bonder fixture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107039317A (en) * 2017-05-27 2017-08-11 中国电子科技集团公司第十三研究所 Automatic wedge bonding bonder fixture
CN107039317B (en) * 2017-05-27 2023-06-30 中国电子科技集团公司第十三研究所 Clamp for automatic wedge welding bonding machine

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Granted publication date: 20171212

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Effective date of abandoning: 20230630

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