CN206671171U - A kind of gaseous spectrum test device based on ellipsoid structure - Google Patents
A kind of gaseous spectrum test device based on ellipsoid structure Download PDFInfo
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- CN206671171U CN206671171U CN201720286628.1U CN201720286628U CN206671171U CN 206671171 U CN206671171 U CN 206671171U CN 201720286628 U CN201720286628 U CN 201720286628U CN 206671171 U CN206671171 U CN 206671171U
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- light
- ellipsometry
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Abstract
The utility model discloses a kind of gaseous spectrum test device based on ellipsoid structure, including incident light processing unit, emergent light processing unit and ellipsometry unit；Propagation characteristic of the utility model by light in oval ball structure, outgoing optical position and photoreceptor position are scheduled on the left focus and right focus of ellipsometry unit respectively, and concavees lens are set on the right side of left focus, charge coupled cell is set on right focus, the light that concavees lens are sent dissipates by the minute surface multi-angle of ellipsometry unit, by after gaseous sample and reflecting at charge coupled cell, it ensure that and fixed by the light path of gaseous sample in ellipsometry unit, this arrangement enhances the repeatable repeatability of measurement, the spectral measurement to gaseous sample aplanatism and multi-angle is accomplished, with simple in construction, cost is low, the advantages of monitoring result is accurate.
Description
Technical field
It the utility model is related to spectrometric instrument, especially a kind of gaseous spectrum test device based on ellipsoid structure.
Background technology
Spectral analysis technique, it is widely used to the chemical composition and relative amount of measurement of species.This technology has behaviour
Make it is simple, be quick on the draw, the advantages of data are accurate all many-sided.However, when need to use determine light path spectral measurement when, existing skill
The device of art is only the position for securing outgoing light exit and sensor devices, emergent light is directly injected through gaseous sample photosensitive
Device, to the light path of fixed whole piece light path.The problem of existing is that the structure causes light to inject photoreceptor with fixed angle
Part, considerably increase uneven, locus change, the change of incident angle and the reflection of light because of sample, scattering, partially
The influence shaken to measurement data, measurement result is caused to repeat the defects of repeatability is poor, and monitoring precision is low.
Utility model content
A kind of gas light based on ellipsoid structure that the purpose of this utility model is in view of the shortcomings of the prior art and provided
Compose test device, propagation characteristic of the utility model by light in oval ball structure, by outgoing optical position and photoreceptor position
Put on the left focus and right focus for being scheduled on ellipsometry unit respectively, and concavees lens are set on left focus, set on right focus
Charge coupled cell is put, the light that concavees lens are sent dissipates by the minute surface multi-angle of ellipsometry unit, after gaseous sample
And reflect and fixed by the light path of gaseous sample in ellipsometry unit at charge coupled cell, ensure that, the structure reduces
Due to the uneven influence to caused by measurement result that the shape and angle change and gaseous sample of incident light are distributed, improve
The repeatable repeatability of measurement, has accomplished the spectral measurement to gaseous sample aplanatism and multi-angle, have it is simple in construction, into
The advantages of this is low, and monitoring result is accurate.
Realizing the concrete technical scheme of the utility model purpose is：
A kind of gaseous spectrum test device based on ellipsoid structure, feature are that the device includes incident light processing unit, gone out
Light processing unit and ellipsometry unit are penetrated, the incident light processing unit is by monochromator, light source, incident optical channel and concavees lens
Form, and monochromator is provided with light inlet and light-emitting window；The emergent light processing unit is by fixing transverse axis, the fixed longitudinal axis, electric charge
Coupling element and upper structure into；The ellipsometry unit is oval global shell made of metal, and its inwall coats white mirror
Face reflecting material, oval global shell is interior to be provided with the short radius of major equatorial radius and equator, and left focus is respectively equipped with major equatorial radius
And right focus, elliptical shape ball housing wall is provided with air intake, gas outlet and Pressure monitoring mouth, and Pressure monitoring mouth is provided with air pressure transmission
Sensor.
The incident optical channel of the incident light processing unit is penetrated on the extended line of major equatorial radius by left focus
To the outside of ellipsometry unit, concavees lens are located at the end end of incident optical channel, left focus and the ellipsometry list of concavees lens
The left focus of member overlaps, and monochromator, light source are located at the outside of ellipsometry unit, and the light-emitting window of monochromator leads to located at incident light
Light connects between the light inlet of the initiating terminal in road, light source and monochromator.
On the short radius in equator of ellipsometry unit, fixed transverse axis is set the fixation longitudinal axis of the emergent light processing unit
In, between fixed transverse axis, charge coupled cell is located at fixed horizontal on the major equatorial radius of ellipsometry unit and positioned at right focus
One end of axle is overlapped with the right focus of ellipsometry unit, and host computer is located at the outside of ellipsometry unit, and cable, which passes through, to be fixed
Charge coupled cell is connected by the longitudinal axis and fixed transverse axis with host computer, and host computer is also connected by cable with monochromator.
Described incident optical channel is the tube-like piece that outer surface coats white specular reflective material.
The described fixation longitudinal axis and fixed transverse axis are the tube-like piece that outer surface coats white specular reflective material.
Described charge coupled cell is the slim Charged Couple optical sensor of back-illuminated, and it is 2 that it, which selects the wave-length coverage of wave band,
Micron is to 300 microns.
Described monochromator is provided with light inlet and light-emitting window, and it selects the wave-length coverage of wave band micro- to 200 for 5 microns
Rice.
Propagation characteristic of the utility model by light in oval ball structure, by outgoing optical position and photoreceptor position point
It is not scheduled on the left focus and right focus of ellipsometry unit, and concavees lens is set on left focus, electricity is set on right focus
Lotus coupling element, the light that concavees lens are sent dissipates by the minute surface multi-angle of ellipsometry unit, by after gaseous sample and anti-
Inject charge coupled cell at, ensure that and fixed by the light path of gaseous sample in ellipsometry unit, this configuration reduces by
In the uneven influence to caused by measurement result that the shape and angle change and gaseous sample of incident light are distributed, survey is improved
The repeatable repeatability of amount, has accomplished the spectral measurement to gaseous sample aplanatism and multi-angle, has had simple in construction, cost
It is low, the advantages of monitoring result is accurate.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation of the utility model ellipsometry unit.
Embodiment
Refering to Fig. 1, Fig. 2, the utility model includes incident light processing unit 1, emergent light processing unit 2 and ellipsometry list
Member 3, the incident light processing unit 1 is made up of monochromator 12, light source 13, incident optical channel 10 and concavees lens 11, and monochromator
12 are provided with light inlet and light-emitting window；The emergent light processing unit 2 is by fixed transverse axis 21, the fixed longitudinal axis 22, Charged Couple member
Part 25 and host computer 24 are formed；The ellipsometry unit 3 is oval global shell made of metal, and its inwall coats white minute surface
Reflecting material, is provided with the short radius of major equatorial radius and equator in oval global shell, be respectively equipped with major equatorial radius left focus and
Right focus, elliptical shape ball housing wall is provided with air intake 31, gas outlet 32 and Pressure monitoring mouth, and Pressure monitoring mouth is provided with air pressure
Sensor 34.
The incident optical channel 10 of the utility model incident light processing unit 1 is located on the extended line of major equatorial radius, and by
Left focus is penetrated to the outside of ellipsometry unit 3, and concavees lens 11 are located at the end end of incident optical channel 10 and ellipsometry list
The left focus of member 3 is overlapped, and monochromator 12, light source 13 are located at the outside of ellipsometry unit 3, and the light-emitting window of monochromator 12 is located at
Light connects between the light inlet of the initiating terminal of incident optical channel 10, light source 13 and monochromator 12.
The fixation longitudinal axis 22 of the utility model emergent light processing unit 2 is located on the short radius in equator of ellipsometry unit 3,
Fixed transverse axis 21 is on the major equatorial radius of ellipsometry unit 3 and is located at right focus between fixing transverse axis 21, electric charge coupling
Close element 25 to overlap with the right focus of ellipsometry unit 3 located at one end of fixed transverse axis 21, host computer 24 is located at ellipsometry
The outside of unit 3, cable pass through the fixed longitudinal axis 22 and fixed transverse axis 21 to be connected charge coupled cell 25 with host computer 24, cable
Also host computer 24 is connected with monochromator 12.
Described incident optical channel 10 is the tube-like piece that outer surface coats white specular reflective material.
The described fixation longitudinal axis 22 and fixed transverse axis 21 are the tube-like piece that outer surface coats white specular reflective material.
Described charge coupled cell 25 is the slim Charged Couple optical sensor of back-illuminated, its select wave band wave-length coverage for
2 microns to 300 microns.
Described monochromator 12 is provided with light inlet and light-emitting window, and it selects the wave-length coverage of wave band micro- to 200 for 5 microns
Rice.
Embodiment
The present embodiment selects the wavelength of wave band to select ripple as 2 microns to 300 microns, monochromator 12 using charge coupled cell 25
Exemplified by the wavelength of section is 5 microns to 200 microns.
Preliminary preparation
Refering to Fig. 1, Fig. 2, it is automatically performed for ease of test process, the utility model coordinates with cyclelog and computer
Use, the utility model is provided with magnetic valve on air intake 31 and gas outlet 32, aspiration pump is connected on gas outlet 32；Computer
Linker controller, cyclelog respectively with the switch of light source 13 on incident light processing unit 1, penetrate on light processing unit 2
Host computer 24, air intake 31 and the magnetic valve, aspiration pump and baroceptor 34 of gas outlet 32 connect on ellipsometry unit 3
Connect.
The dispensing of gaseous sample
Refering to Fig. 1, Fig. 2, when analyzing gaseous sample, sample storage bottle is connected to the air intake 31 of ellipsometry unit 3
On, cyclelog control pumping pump startup, make the atmospheric pressure value that setting is obtained in ellipsometry unit 3, baroceptor 34 will
The atmospheric pressure value of detection is transferred to cyclelog, and when atmospheric pressure value reaches setting value, cyclelog control aspiration pump is closed, entered
Gas port 31 and the closed electromagnetic valve of gas outlet 32, after stable gas pressure in ellipsometry unit 3, cyclelog starts host computer
24 input the wavelength signals of dispersion to monochromator 12, and collect corresponding wavelength light intensity signal by charge coupled cell 25, on
Position machine 24 records the wavelength signals and the light intensity signal of the corresponding wavelength light of charge coupled cell 25 of the output of monochromator 12, warp simultaneously
Computer disposal, successful delineation go out the spectrogram of corresponding gaseous sample.
The test process of gaseous spectrum
Refering to Fig. 1, Fig. 2, when analysis gaseous sample is filled with ellipsometry unit 3 and reaches the atmospheric pressure value of setting, program
Controller opens the switch of light source 13, and the polychromatic light of light source 13 is injected monochromator 12 and by the dispersion of monochromator 12, obtained real
The monochromatic light of needs is tested, monochromatic light is reached on concavees lens 11 by incident optical channel 10 through ellipsometry unit 3, due to recessed
The left focus of mirror 11 overlaps with the left focus of ellipsometry unit 3, parallel incident monochromatic light is scattered at concavees lens 11
Open, and the reverse extending line of these light being scattered passes through the left focus of ellipsometry unit 3, monochromatic light passes through concavees lens
After 11 scatterings, the inner surface of ellipsometry unit 3 is transmitted into, then right focus is reflexed to by the inner surface of ellipsometry unit 3, by
Overlapped in charge coupled cell 25 with the right focus of ellipsometry unit 3, monochromatic light is received in right focus by charge coupled cell 25
Collect and change into electric signal, the wavelength signals that host computer 24 records the output of monochromator 12 simultaneously are corresponding with charge coupled cell 25
The light intensity signal of wavelength light, is handled through computer, and successful delineation goes out the spectrogram of corresponding gaseous sample.
Refering to Fig. 1, Fig. 2, incident optical channel 10 of the present utility model is each provided at ellipsometry list with charge coupled cell 25
On the major equatorial radius and its extended line of member 3, the fixed longitudinal axis 22 is fixed vertical on the short radius in equator of ellipsometry unit 3
Axle 22 is located between incident optical channel 10 and charge coupled cell 25, is blocked the parallel incident monochromatic light of monochromator 12, is prevented
Incident reflection of the monochromatic light without the minute surface of ellipsometry unit 3 is emitted directly toward in charge coupled cell 25, avoids expected light
The reduction of journey.
Refering to Fig. 1, Fig. 2, the utility model uses being electrically connected between monochromator 12, host computer 24 and charge coupled cell 25
Connect, so that host computer 24 can control the wavelength of optical signal that the dispersion of monochromator 12 goes out, while charge coupled cell 25 transmits out
The light intensity signal of corresponding wavelength light, host computer 24 record wavelength of optical signal and charge coupled cell that the dispersion of monochromator 12 goes out simultaneously
25 transmit out the light intensity signal of corresponding wavelength light, are handled through computer, and successful delineation goes out the spectrogram of corresponding gaseous sample, ensure
Fixed by the light path of gaseous sample in ellipsometry unit 3, this configuration reduces shape due to incident light and angle to become
Change and the uneven of gaseous sample distribution influences to caused by measurement result, improve the repeatable repeatability of measurement, accomplish
To the spectral measurement of gaseous sample aplanatism and multi-angle, it is used cooperatively, makes whole with cyclelog and computer in addition
Detection process accomplish integration, automation and it is easy to operate.
Refering to Fig. 1, Fig. 2, the utility model is using left Jiao at the optical port of incident optical channel 10 being ellipsometry unit 3
Point right side sets the concavees lens 11 of circular mirror surface, and the left focus and the left focus of ellipsometry unit 3 for making concavees lens 11 overlap, ellipse
Charge coupled cell 25 is set on the right focus of ball measuring unit 3, and the directional light that monochromator 12 is injected is scattered by concavees lens 11
Come, directional light multi-party potential scattering in ellipsometry unit 3, the light of scattering is after the inwall mirror-reflection of ellipsometry unit 3, again
Concentrate and inject in charge coupled cell, the injection light for successfully solving incident optical channel 10 can only ask from what single channel was injected
Topic.
The utility model additionally uses the slim Charged Couple optical sensor of back-illuminated as charge coupled cell 25, ties measurement
Fruit is more accurate, and photosensitive wavelength band is wider.
Claims (5)
1. a kind of gaseous spectrum test device based on ellipsoid structure, it is characterised in that the device includes incident light processing unit
（1）, emergent light processing unit（2）And ellipsometry unit（3）, the incident light processing unit（1）By monochromator（12）, light source
（13）, incident optical channel（10）And concavees lens（11）Form, and monochromator（12）It is provided with light inlet and light-emitting window；
The emergent light processing unit（2）By fixed transverse axis（21）, the fixed longitudinal axis（22）, charge coupled cell（25）And host computer
（24）Form；
The ellipsometry unit（3）For oval global shell made of metal, its inwall coats white specular reflective material, oval
The short radius of major equatorial radius and equator is provided with global shell, left focus and right focus, elliptical shape ball are respectively equipped with major equatorial radius
Housing wall is provided with air intake（31）, gas outlet（32）And Pressure monitoring mouth, and Pressure monitoring mouth is provided with baroceptor
（34）；
The incident light processing unit（1）Incident optical channel（10）Located at ellipsometry unit（3）The extension of major equatorial radius
On line, and penetrated by left focus to ellipsometry unit（3）Outside, concavees lens（11）Located at incident optical channel（10）End
End, concavees lens（11）Left focus and ellipsometry unit（3）Left focus overlap, monochromator（12）, light source（13）It is located at
Ellipsometry unit（3）Outside, monochromator（12）Light-emitting window be located at incident optical channel（10）Initiating terminal, light source（13）With
Monochromator（12）Light inlet between light connects；
The emergent light processing unit（2）The fixation longitudinal axis（22）Located at ellipsometry unit（3）The short radius in equator on, it is fixed
Transverse axis（21）Located at ellipsometry unit（3）Major equatorial radius on and positioned at right focus to fixed transverse axis（21）Between, electric charge
Coupling element（25）Located at fixed transverse axis（21）One end and ellipsometry unit（3）Right focus overlap, host computer（24）If
In ellipsometry unit（3）Outside, cable passes through the fixed longitudinal axis（22）And fixed transverse axis（21）By charge coupled cell（25）
With host computer（24）Connection, cable is by host computer（24）With monochromator（12）Connection.
A kind of 2. gaseous spectrum test device based on ellipsoid structure according to claim 1, it is characterised in that incident light
Passage（10）The tube-like piece of white specular reflective material is coated for outer surface.
3. a kind of gaseous spectrum test device based on ellipsoid structure according to claim 1, it is characterised in that fixed vertical
Axle（22）And fixed transverse axis（21）It is the tube-like piece that outer surface coats white specular reflective material.
A kind of 4. gaseous spectrum test device based on ellipsoid structure according to claim 1, it is characterised in that electric charge coupling
Close element（25）For the slim Charged Couple optical sensor of back-illuminated, it is 2-300 microns that it, which selects the wave-length coverage of wave band,.
A kind of 5. gaseous spectrum test device based on ellipsoid structure according to claim 1, it is characterised in that monochromator
（12）Light inlet and light-emitting window are provided with, it is 5-200 microns that it, which selects the wave-length coverage of wave band,.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720286628.1U CN206671171U (en) | 2017-03-23 | 2017-03-23 | A kind of gaseous spectrum test device based on ellipsoid structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720286628.1U CN206671171U (en) | 2017-03-23 | 2017-03-23 | A kind of gaseous spectrum test device based on ellipsoid structure |
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| Publication Number | Publication Date |
|---|---|
| CN206671171U true CN206671171U (en) | 2017-11-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720286628.1U Withdrawn - After Issue CN206671171U (en) | 2017-03-23 | 2017-03-23 | A kind of gaseous spectrum test device based on ellipsoid structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106841038A (en) * | 2017-03-23 | 2017-06-13 | 华东师范大学 | A kind of gaseous spectrum test device based on ellipsoid structure |
-
2017
- 2017-03-23 CN CN201720286628.1U patent/CN206671171U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106841038A (en) * | 2017-03-23 | 2017-06-13 | 华东师范大学 | A kind of gaseous spectrum test device based on ellipsoid structure |
| CN106841038B (en) * | 2017-03-23 | 2023-05-12 | 华东师范大学 | Gas spectrum testing device based on ellipsoidal structure |
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Granted publication date: 20171124 Effective date of abandoning: 20230512 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20171124 Effective date of abandoning: 20230512 |
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| AV01 | Patent right actively abandoned |