CN206670152U

CN206670152U - Workbench fast cooling device in a kind of vacuum environment

Info

Publication number: CN206670152U
Application number: CN201720482894.1U
Authority: CN
Inventors: 王长梗; 任远; 李进
Original assignee: BEIJING CHUANGSHI WEINA TECHNOLOGY Co Ltd
Current assignee: BEIJING CHUANGSHI WEINA TECHNOLOGY Co Ltd
Priority date: 2017-05-04
Filing date: 2017-05-04
Publication date: 2017-11-24
Anticipated expiration: 2027-05-04

Abstract

The utility model discloses workbench fast cooling device in a kind of vacuum environment, the device is that interval spreads all over cooled gas path and independent fluid passage inside workbench, its channel entrance and outlet tap into by pipeline sealing, pick out vacuum chamber, not bleed vacuum, also do not contact directly and react with object in vacuum chamber simultaneously, and time-division transfer air inlet, water inlet, cooling course can be accelerated.Compared with prior art, the utility model constructs the air-liquid for being isolated from a vacuum environment coolant guiding channel, using two kinds of cooling mediums, enters at times, rationally make use of dielectric property, shorten cool time.

Description

Workbench fast cooling device in a kind of vacuum environment

Technical field

It the utility model is related to heat sink under a kind of vacuum environment, and in particular to a kind of vacuum environment high temperature heating plate Workbench fast cooling device.

Background technology

In vacuum industry, specific vacuum plasma industry, heating and the cooling of workbench are most common, due to true In Altitude, gas molecule is seldom, does not have gaseous exchange during cooling, so cooling rate is very slow, in the case of a high temperature, again can not Be eager to be passed through the gases such as nitrogen into cavity and cool by force, thus for such as high-temperature annealing furnace, magnetron sputtering coater, The devices such as evaporation coating machine, multi-Arc Ion Plating, can not solve hot operation platform and quickly cool problem.

By taking high-temperature vacuum annealing furnace as an example, high-temperature vacuum annealing furnace furnace wall welding protection with and cooling water cooling line, lead to Enter cooling water, workbench is one or a few heating plate with certain thickness, with larger thermal capacity, heating back or The fixed sheathed heater in inside, at present cooling use Temperature fall method, close heater, 150 are naturally cooling to through the long period DEG C~100 DEG C when, can just be passed through a small amount of drying nitrogen, accelerate cooling process, when reaching lower temperature, then be passed through again more Drying nitrogen, until be cooled to less than 50 DEG C, cavity is full of nitrogen.Aforesaid way is safe and reliable, will not make product (sample Product) at high operating temperatures with nitrogen " reaction ", cause to be denatured.But problem is that temperature fall time is long, experiment is relatively low with production efficiency.

Utility model content

In view of above-mentioned present situation, the utility model provides workbench fast cooling device in a kind of vacuum environment, and the device is Independent cooled gas path and independent fluid passage are set inside workbench, and its channel entrance and outlet are close by pipeline Sealing-in enters, picks out vacuum chamber, not bleed vacuum room, while does not also contact directly and negatively affect with object in vacuum chamber, and Time-division transfer air inlet, water inlet, can accelerate cooling course.

Technical solution adopted in the utility model is as follows：Workbench fast cooling device in a kind of vacuum environment, including The cooling liquid passage and cooled gas path set inside the workbench, wherein the cooling liquid passage and cooling gas Body passage is dispersed throughout inside the workbench, and is used at times, and the cooling liquid passage and cooled gas path are all logical Cross pipeline sealing and tap into and pick out the vacuum environment.

Further, the cooling liquid passage and cooled gas path share a kind of passage.

Further, the cooling liquid passage and cooled gas path use each independent passage.

Further say, the cooling liquid passage and cooled gas path are arranged in the workbench in bending shape of creeping It is internal.

Further say, the cooling liquid passage and cooled gas path is in spiral shape is arranged in the workbench Portion.

Further say, the cooling liquid passage and cooled gas path are linearly arranged in the workbench Portion.

Further say, linear channel there are N bars to be dispersed throughout in workbench, N ＞ 1.

Further say, N bars linear channel by between left and right every, up and down dislocation arrangement.

Further say, short side direction arrangement of the N bars linear channel along workbench.

Compared with prior art, it is of the present utility model significantly to have the beneficial effect that：1. it constructs one and is isolated from very The air-liquid coolant guiding channel of Altitude, while workbench in vacuum chamber cools down, either gas or liquid, to vacuum Article in room all can not be made injury.2. using two kinds of cooling mediums, air-liquid is simultaneously or interval enters, and rationally make use of medium Characteristic, shorten cool time.3. coolant guiding channel has a plurality of, and same pipeline is connected in parallel with the plurality of passages of medium On, it can synchronously be passed through, make workbench everywhere while cool.4. two kinds of coolant guiding channels are arranged at intervals, workbench can be made each Locate uniform decrease in temperature.

Other features of the present utility model will illustrate in the following description, and partial become aobvious from specification And be clear to, or understood by implementing the utility model.

Brief description of the drawings

Accompanying drawing is only used for showing the purpose of specific embodiment, and is not considered as to limitation of the present utility model, whole In accompanying drawing, identical reference symbol represents identical part.

Fig. 1 is the utility model first embodiment coolant guiding channel sectional drawing；

Fig. 2 is second embodiment coolant guiding channel layout drawing；

Fig. 3 is 3rd embodiment coolant guiding channel layout drawing；

Fig. 4 is fourth embodiment coolant guiding channel layout drawing；

Fig. 5 is the 5th embodiment coolant guiding channel section layout drawing；

Fig. 6 is the coolant guiding channel layout drawing in first embodiment, fourth embodiment, the 5th embodiment.

Embodiment

The utility model is described in detail with reference to the accompanying drawings and examples, but those skilled in the art should Know, accompanying drawing and unique restriction that embodiment is not to technical solutions of the utility model work are every in the utility model technology Any equivalents done under scheme Spirit Essence or change, it is regarded as belonging to the scope of protection of the utility model.

As shown in figure 1, the utility model utilizes the architectural characteristic of workbench itself, particularly there is heater strip 2 in armouring In hot operation platform 1, cooling liquid passage 3 and cooled gas path 4 are set in the bottom of row's heater strip 2, cooling liquid is led to Road 3 and the passage of cooled gas path 4 are dispersed throughout inside workbench 1, no matter cooling liquid or gas, can closely to heating Silk 2 plays cooling effect, and even not hot without the heater strip 2 or heater strip 2 of heat, the liquid or gas of cooling also can low coverages Cooled down to the object on workbench 1 and workbench 1.Cooling liquid is generally water, and cooling gas is generally nitrogen.

For cooling liquid passage 3 and the arrangement of cooled gas path 4, there are various embodiments：

Embodiment one, as shown in figure 1, only setting a kind of passage, this passage is linear path, has N bar passages to spread all over In workbench 1, N ＞ 1, it is arranged side by side, it is this to be both used as cooling liquid passage 3, cooled gas path 4 can be used as again Passage.Because for the hot operation platform in vacuum, our purpose is fast cooling, and when temperature is higher (100 More than DEG C) it is not suitable for using water, cooling gas fast cooling can only be used, after temperature drops to a certain degree, the fast prompt drop of water can be used Temperature, therefore water uses at times with gas, synchronization, which has no, to influence each other.

Embodiment two, as shown in Fig. 2 cooling liquid passage 3 and cooled gas path 4 are divided to for two kinds of independent passages, often Kind passage has one, is arranged in bend shape of creeping in workbench.

Embodiment three, as shown in figure 3, cooling liquid passage 3 and cooled gas path 4 are divided to for two kinds of independent passages, often Kind passage has one, is arranged in for spiral in workbench.

Example IV, as shown in figure 4, cooling liquid passage 3 and cooled gas path 4 are divided to for two kinds of independent passages, often Kind passage has N bars, N ＞ 1, is linear, is arranged side by side, two kinds of passages are divided into upper and lower two row and are dispersed throughout in workbench.

Embodiment five, as shown in figure 5, be the further improvement as example IV, can be by two kinds of passages in workbench Inside is by between left and right every, dislocation arrangement up and down so that no matter takes any mode to cool, can ensure that temperature drop is balanced.

In the embodiment shown in Fig. 1, Fig. 4, Fig. 5, cooling liquid passage 3 and cooled gas path 4 are linear path, As shown in Figure 6.In this fashion, cooling liquid passage 3 and cooled gas path 4 carry over the short side direction arrangement of workbench, this Sample, the mileage of single channel shorten, and by fast, the temperature drop of whole workbench is just more uniform for liquid, gas；And same medium Each bar passage be connected in parallel on same main pipe rail, be synchronously passed through in workbench, cool simultaneously everywhere.

Cooling liquid passage 3 and the import and export of cooled gas path 4 are introduced by pipeline, draw vacuum chamber, the port of export Pipeline first introduces a water cooling cold-trap, and is provided with isolating valve before cold-trap is entered, it is therefore an objective to water-cooled cooling is carried out in exit, And make safeguard protection.

During work, when workbench has higher temperature, 300 or 400 degree are first naturally cooled to, cooling is very fast during high temperature, Then gas is passed through in pipeline can accelerate cooling velocity to 100 degree, fast cooling, when reaching less than 100 DEG C, close nitrogen, then Cooling water is passed through in water route, can thus reach the purpose of fast cooling.For vacuum plasma industry, due to being passed through Nitrogen gas and water be not exposed in vacuum cavity, so will not to object form pyroreaction.Due to the workbench one in vacuum chamber As directly object is heated, so, solve the In- in vacuum industry, vacuum plasma industry to a certain extent The cooling problem of Line equipment.

Claims

A kind of 1. workbench fast cooling device in vacuum environment, it is characterised in that：Described device is included in the workbench The cooling liquid passage and cooled gas path that portion is set, wherein the cooling liquid passage and cooled gas path are dispersed throughout institute State inside workbench, and use at times, the cooling liquid passage and cooled gas path are tapped into by pipeline sealing With pick out the vacuum environment.
2. workbench fast cooling device in vacuum environment according to claim 1, it is characterised in that：The cooling liquid Passage and cooled gas path share a kind of passage.
3. workbench fast cooling device in vacuum environment according to claim 1, it is characterised in that：The cooling liquid Passage and cooled gas path use each independent passage.
4. workbench fast cooling device in the vacuum environment according to claim 1 or 2 or 3, it is characterised in that：It is described cold But fluid passage and cooled gas path are arranged in inside the workbench in bending shape of creeping.
5. workbench fast cooling device in the vacuum environment according to claim 1 or 2 or 3, it is characterised in that：It is described cold But fluid passage and cooled gas path is in spiral shape is arranged in inside the workbench.
6. workbench fast cooling device in the vacuum environment according to claim 1 or 2 or 3, it is characterised in that：It is described cold But fluid passage and cooled gas path are linearly arranged in inside the workbench.
7. workbench fast cooling device in vacuum environment according to claim 6, it is characterised in that：Linear channel has N bars are dispersed throughout in workbench, N ＞ 1.
8. workbench fast cooling device in vacuum environment according to claim 7, it is characterised in that：N bars linearly lead to Road by between left and right every, up and down dislocation arrangement.
9. workbench fast cooling device in the vacuum environment according to claim 7 or 8, it is characterised in that：N bars are linear Short side direction arrangement of the passage along workbench.