CN206649054U - A kind of specimen holder for single particle effect irradiation experiment - Google Patents
A kind of specimen holder for single particle effect irradiation experiment Download PDFInfo
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- CN206649054U CN206649054U CN201720306335.5U CN201720306335U CN206649054U CN 206649054 U CN206649054 U CN 206649054U CN 201720306335 U CN201720306335 U CN 201720306335U CN 206649054 U CN206649054 U CN 206649054U
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- specimen holder
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Abstract
The utility model belongs to single particle effect irradiation experiment temperature control technology field, more particularly to a kind of specimen holder for single particle effect irradiation experiment, for carrying out temperature control to the sample chip (12) for carrying out single particle effect irradiation experiment in the vacuum target chamber of accelerator (11), it is characterized in that：For the top half of the specimen holder (1) to set several sample holders (2) of the sample chip (12), the latter half is internally provided with heating chamber (5) and refrigerating chamber (6)；The heating chamber (5) is used to set heater；The refrigerating chamber (6) connects the outside refrigerating plant of the vacuum target chamber (11), for accommodating refrigerant.High and low temperature operation can be carried out to more pieces of sample chips in an irradiation experiment using specimen holder provided by the utility model, the experimental period of preciousness is taken full advantage of, improve the utilization rate of the line of accelerator.
Description
Technical field
The utility model belongs to single particle effect irradiation experiment temperature control technology field, and in particular to one kind is used for single-particle and imitated
Answer the specimen holder of irradiation experiment.
Background technology
A large amount of high energy particles in space radiation environment be present, semiconductor devices (particularly memory) can be caused to occur single
(single particle effect refers to cause the anon-normal of device state when single high energy particle passes through the sensitive volume of microelectronic component particle effect
A kind of radiation effect often changed, including single-particle inversion, locking single particle, single event burnout, single-particle grid breakdown etc.), meeting
Have a strong impact on reliability and the life-span of spacecraft.Meanwhile extreme temperature environment in space be present, as moon direct sunlight temperature can
Up to 400K, night temperatures then as little as 90K.The rover Jade Hare number of the goddess in the moon No. three faces choosing for extreme temperature environment on the moon
War.In the survey of deep space in future, similar extreme temperature environment is too numerous to enumerate.Within the scope of so wide temperature, it is necessary to examine
Consider influence of the temperature to spaceborne semiconductor devices single particle effect.It is well known that many parameters (drift of control device electric property
Shifting, diffusion, dipolar effect etc.) be all temperature majorant, therefore the single particle effect of semiconductor devices is necessarily by temperature
Influence.Existing result of study shows, temperature to the single-particle inversion (Single Event Upset, SEU) of semiconductor devices and
Influence be present in locking single particle (Single Event Latchup, SEL).Many heavy ion experiments and TCAD analog results are equal
Display single event transient pulse width dramatically increases with the rise of temperature, and the transient pulse number measured is also with the rise of temperature
And increase.The TCAD analog results shared on 130-nm CMOS technology devices electric charge are shown in 200-420K temperature ranges,
Shared collect of electric charge increases with the rise of temperature.Temperature is single-particle with the influence of semiconductor devices single particle effect to aerospace
One of the important topic in effect study field, but it is domestic at present due to lacking temperature control and measurement equipment, it is most single
Particle effect experiment be carry out at room temperature (China Atomic Energy Science Research Institute is based on Beijing HI-13 tandem accelerators, adopts
With pin-hole collimation technology path, heavy ion microbeam irradiation devices are successfully developed, the heavy ion for obtaining 2 μm of spot yardstick is micro-
Beam.But micro irradiation experiment for many years is carried out at room temperature, does not possess the condition for carrying out Study on Temperature Effects).North
Single particle effect Special experimental terminal is completed on the HI-13 tandem accelerators of capital, and has carried out multinomial single-particle effect for successive years
It should test, a large amount of important referential datas are provided for radiation hardening department of China.Based on the irradiation terminal, have developed applicable
In the sample temperature TT＆C system (abbreviation sample temperature TT＆C system) of single particle effect research.But common sample temperature is surveyed
Control system is once only capable of observing and controlling chip piece in experiment, extremely low to the line utilization rate of accelerator, wastes the line of preciousness
Time (construction and use of accelerator are costly).
Utility model content
For defect present in prior art, in order to improve conventional efficient, sample temperature TT＆C system is not being reduced
On the basis of energy, a kind of Special sample seat is devised, once experiment can measure more pieces of chips simultaneously, be greatly enhanced experiment effect
Rate.
To achieve the above objectives, the technical solution adopted in the utility model is：One kind is used for single particle effect irradiation experiment
Specimen holder, in the vacuum target chamber of accelerator to carry out single particle effect irradiation experiment sample chip enter trip temperature control
System, wherein, the top half of the specimen holder is to set several sample holders of the sample chip, the inside of the latter half
It is provided with heating chamber and refrigerating chamber；The heating chamber is used to set heater；The refrigerating chamber is connected outside the vacuum target chamber
The refrigerating plant in portion, for accommodating refrigerant.
Further, the specimen holder is made using oxygen-free copper.
Further, the refrigerating chamber is arranged on the middle part of the latter half of the specimen holder, close to the back of the body of the specimen holder
Plate, inlet and liquid outlet are provided with the refrigerating chamber, is respectively used to be connected with the feed tube of refrigerant, drain pipe.
Further, it is close between the inlet and the feed tube, between the liquid outlet and the drain pipe
Envelope connection.
Further, the heating chamber is two, is separately positioned on the both sides of the latter half of the specimen holder, away from described
The backboard of specimen holder, extended in the middle part of the specimen holder, set in the heating chamber described inwards by the specimen holder both sides
Heater is resistance heater.
Further, the sample holder is 4, is be arranged in parallel between each other, can be set on each sample holder
One piece of sample chip.
Further, it is provided with dead slot between two sample holders.
Further, the dead slot width is 1cm.
The beneficial effects of the utility model have it is following some：
1. by setting refrigerating chamber and heating chamber in specimen holder so that specimen holder can be in once testing to sample core
Piece carries out high and low temperature operation, is freezed or is heated, and precise control of temperature value, takes full advantage of the experimental period of preciousness, carries
The high utilization rate of the line of accelerator；
2. by using oxygen-free copper without Hydrogen Brittleness Phenomena, conductance is high, decay resistance and cryogenic property are excellent the characteristics of, energy
The needs of enough single particle effect irradiation experiments adapted to very well under vacuum environment；
3. by the way that sample holder is arranged into 4, it be arranged in parallel between each other, one piece can be set on each sample holder
Sample chip so that specimen holder can carry out high and low temperature operation in once testing to 4 pieces of sample chips, complete 4 pieces of sample cores
The single particle effect temperature control experiment of piece, further increase the utilization rate of the line of accelerator；
4. the middle part of the latter half by the way that refrigerating chamber to be arranged on to specimen holder, close to the backboard of specimen holder so that refrigeration
Agent is highly uniform to the refrigeration of specimen holder, ensure that the precision to the refrigerating operation of sample chip；
5. by the way that heating chamber is set as into two, the both sides of the latter half of specimen holder are separately positioned on, away from specimen holder
Backboard, extended to inwards in the middle part of specimen holder by specimen holder both sides so that heating of the resistance heater to specimen holder is highly uniform,
It ensure that the precision to the heating operation of sample chip.
Brief description of the drawings
Fig. 1 is the front view of the specimen holder described in the utility model embodiment；
Fig. 2 is the side view of the specimen holder described in the utility model embodiment；
Fig. 3 is the rearview of the specimen holder described in the utility model embodiment；
Fig. 4 is a kind of sample temperature for single particle effect irradiation experiment described in the utility model embodiment
Spend the schematic diagram of TT＆C system；
In figure：1- specimen holders, 2- sample holders, the upper tabletting mounting holes of 3-, 4- lower sheeting mounting holes, 5- heating chambers, 6- systems
Cold chamber, 7- thermometer mounting holes, 8- screws, 9- dead slots, 10- backboards, 11- vacuum target chambers, 12- sample chips, 13- specimen holder branch
Frame, 14- resistance heaters, 15- thermometers, 16- feed tubes, 17- drain pipes, 18- signal wires, 19- temperature controllers, 20- are pressurized certainly
Dewar tank, 21- pressure-reducing valves, 22- gas cylinders, 23- vacuum flanges.
Embodiment
The utility model is further described with reference to the accompanying drawings and examples.
As shown in Figure 1, 2, 3, a kind of specimen holder (abbreviation for single particle effect irradiation experiment provided by the utility model
Specimen holder), it is to coordinate a kind of sample temperature TT＆C system (see Fig. 4) for single particle effect irradiation experiment, for accelerating
Temperature control is carried out to the sample chip 12 for carrying out single particle effect irradiation experiment in the vacuum target chamber 11 of device.
Due to oxygen-free copper have without Hydrogen Brittleness Phenomena, conductance is high the characteristics of, it is and processing characteristics, welding performance, corrosion-resistant
Performance and cryogenic property are excellent, meet the demand of the single particle effect irradiation experiment under vacuum environment, therefore specimen holder 1 uses nothing
Oxygen copper is made.
Specimen holder 1 is broadly divided into two parts, and top half is used to setting sample chip 12, the latter half be used to carrying out it is high,
Low temperature controls.Specifically, the top half of specimen holder 1 is sets the sample holder 2 of sample chip 12, sample holder 2 is 4,
Each sample holder 2 is be arranged in parallel between each other, and one piece of sample chip 12 can be set on each sample holder 2.Each two sample
Dead slot 9 is provided between product support 2.The width of dead slot 9 is 1cm.Dead slot 9 is used for by outside sample chip 12 and vacuum target chamber 11
The flat wire that detection device and wiring board are connected.And the compatible most of flat pack device of size of sample holder 2.
The latter half of specimen holder 1 is internally provided with heating chamber 5 and refrigerating chamber 6；Heating chamber 5 is used to set heating dress
Put, to carry out heating operation to specimen holder 1 using heater；Refrigerating chamber 6 connects the refrigerating plant outside vacuum target chamber 11,
For accommodating refrigerant so that specimen holder 1 realizes refrigerating operation in the presence of refrigerant.
Refrigerating chamber 6 is arranged on the middle part of the latter half of specimen holder, close to the backboard 10 of specimen holder 1, is set on refrigerating chamber 6
There are inlet and liquid outlet, inlet with the feed tube 16 of refrigerant for being connected, liquid outlet is used to be connected with drain pipe 17.Enter
It is to be tightly connected between liquid mouth and feed tube 16, between liquid outlet and drain pipe 17, ensures that refrigerant enters from refrigeration plant
Refrigerating chamber 6 does not leak smoothly simultaneously during outflow.
Heating chamber 5 is two, is separately positioned on the both sides of the latter half of specimen holder 1, the backboard 10 away from specimen holder 1,
The middle part of specimen holder 1 is extended to inwards by the both sides of specimen holder 1, and the heater set in heating chamber is resistance heater 14.
With reference to the sample temperature TT＆C system for single particle effect irradiation experiment, illustrate provided by the utility model one
Kind is used for effect of the specimen holder of single particle effect irradiation experiment in single particle effect irradiation experiment.
Single particle effect irradiation experiment, to carrying out, passes through the particle beams caused by accelerator in the vacuum target chamber 11 of accelerator
Single particle effect is produced in sample chip 12, product temperature control system is used for carrying out the sample chip 12 in vacuum target chamber 11
Temperature control, so as to realize the observing and controlling to the single particle effect in the case of high and low temperature.
As shown in figure 4, product temperature control system includes specimen holder 1, heater, refrigerating plant and temperature controller 19, vacuum
Flange 23, and connecting pipeline between upper-part etc..
Wherein, specimen holder 1 is arranged in vacuum target chamber 11, and for placing sample chip 12, heater is arranged on sample
In seat 1, specimen holder 1 is arranged in the vacuum target chamber 11 of accelerator that (specimen holder 1 is set by screw 8 by sample seat support 13
On sample seat support 13), the refrigerating chamber 6 of specimen holder 1 is tightly connected with feed tube 16, for being passed through refrigerant to specimen holder 1
Freezed, feed tube 16 is connected to outside vacuum target chamber 11 by vacuum flange 23；Drain pipe is additionally provided with refrigerating chamber 6
17, one end and the refrigerating chamber 6 of drain pipe 17 are tightly connected, and the other end is connected to outside vacuum target chamber 11 by vacuum flange 23,
Drain pipe 17 is used for refrigerant outflow refrigerating chamber 6；Heater is arranged in the heating chamber 5 of the both sides of the latter half of specimen holder 1,
Heater uses resistance heater 14, and resistance heater 14 connects the power supply outside vacuum target chamber 11 by electric wire, and electric wire leads to
Vacuum flange 23 is crossed to be located on vacuum target chamber 11.Heated up by carrying out electrified regulation specimen holder 1 to resistance heater 14
(and then being heated to the sample chip 12 on specimen holder 1).The heating power height of heater is controlled by temperature controller 19
System.
Before experiment is carried out, sample chip 12 is arranged on specimen holder 1, fastened sample chip 12 with lower sheeting
(upper tabletting, lower sheeting pass through upper tabletting mounting hole 3, the lower sheeting on sample holder 2 respectively as shown in Figure 1,3 on sample holder 2
Mounting hole 4 is arranged on sample holder 2), platinum resistance thermometer is attached to the package surface of sample chip 12 using heat-conducting glue
Close to opening at cap, one platinum resistance temperature of surface mount of each sample chip 12 is counted as measurement and used.Warp is installed on specimen holder 1
The silicon diode thermometer for crossing demarcation (pid parameter is adjusted) is used as temperature control (can also use platinum resistance thermometer).
Refrigerating plant and temperature controller 19 are arranged on outside vacuum target chamber 11；Refrigerating plant passes through feed tube 16 and specimen holder 1
It is connected, for providing refrigerant for the refrigeration of specimen holder 1；Refrigerating plant is included from supercharging Dewar tank 20, pressure-reducing valve 21 and high pressure
Gas cylinder 22；Wherein, it is connected from supercharging Dewar tank 20 with feed tube 16, is stored with refrigerant, refrigerant is used for into specimen holder 1
Specimen holder 1 is freezed in refrigerating chamber 6；Gas cylinder 22 is connected by pressure-reducing valve 21 with from supercharging Dewar tank 20, high pressure gas
Gases at high pressure in bottle are used as thrust power so that entered from the refrigerant in supercharging Dewar tank 20 in specimen holder 1, it is right
Specimen holder is freezed (and then freezing to the sample chip 12 on specimen holder 1).Refrigerant is liquid nitrogen, and gases at high pressure are nitrogen
Gas.
Thermometer 15 is additionally provided with specimen holder 1, temperature controller 19 connects thermometer 15 by signal wire 18, can detect sample
The temperature of product seat 1, temperature controller 19 can control the heating operation to heater by the temperature measurement value of thermometer 15, real
The accurate control of existing measurement temperature；Feed tube 16, signal wire 18 are located on vacuum target chamber 11 by vacuum flange 23.
The sample temperature investigating method of single particle effect irradiation experiment, comprises the following steps：
(1) when more than room temperature being heated up to specimen holder 1, close refrigeration plant (cut-out refrigerating chamber 6 and from supercharging Dewar tank 20 it
Between connection), set temperature value (room temperature temperatures above) is inputted in temperature controller 19, and selected be used as temperature controlled temperature
Meter, the temperature signal measured is fed back into temperature controller 19 for temperature controlled thermometer, temperature controller 19 controls resistance heater
14 working condition and power output simultaneously carry out PID and adjust (i.e. pid parameter is adjusted), the temperature of specimen holder 1 is maintained setting
Temperature value (room temperature temperatures above)；
(2) when cooling below room temperature to specimen holder 1, open refrigeration plant (so that refrigerating chamber 6 and from supercharging Dewar tank 20 it
Between connect, refrigerant can flow through refrigerating chamber 6), and gas cylinder 22 (is opened pressure-reducing valve with being connected from supercharging Dewar tank 20
21), the interior pressure from supercharging Dewar tank 20 is made to be maintained at maintenance level so as to improve system control by the ftercompction of gas cylinder 22
Precision.Set temperature value (room temperature temperature below), when specimen holder 1 is down to set temperature value, temperature control are inputted in temperature controller 19
Instrument 19 drives resistance heater 14 to carry out temperature-compensating, makes the temperature stabilization of specimen holder 1 in set temperature value (temperature below room temperature
Degree).
Single particle effect irradiation experiment content includes：
(1) after sample temperature TT＆C system makes sample chip 12 reach set temperature value, irradiation experiment is carried out, measures sample
The single particle effect of product chip 12, record experimental result.
(2) rear statistical experiment result is terminated to all duplicate measurements processes (1) of sample chip 12 to be measured, experiment.
Embodiment
Using the embodiment of the particle effect irradiation experiment of specimen holder provided by the utility model.
Carry out on the HI-13 tandem accelerators of Beijing and sram chip and SET chips single-particle effect are irradiated under different temperatures
It should test, 3 pieces of sram chips in 235K-385K temperature ranges, 1 piece of SET test chip different temperatures are measured in once testing
Under single particle effect response.Four pieces of chips are arranged on specimen holder 1, each other by polytetrafluoroethylene (PTFE) partiting thermal insulation, are led to
Cross flat wire and chip is connected to FPGA test boards, each chip surface is equipped with a platinum resistance thermometer to monitor chip temperature
Degree, among specimen holder 1 close at chip (see Fig. 1,3 thermometer mounting hole 7) equipped with silicon diode thermometer to
Control the temperature of sample temperature TT＆C system.After sample temperature TT＆C system reaches design temperature, chip to be measured is irradiated successively, is obtained
The single particle effect response of chip, is greatly carried when having arrived C ions under different temperatures, C1 ions, Ge ions and I ion incidences
High line utilization rate.
Device described in the utility model is not limited to the embodiment described in embodiment, those skilled in the art
Other embodiments are drawn according to the technical solution of the utility model, also belong to technological innovation scope of the present utility model.
Claims (8)
1. a kind of specimen holder (1) for single particle effect irradiation experiment, in the vacuum target chamber of accelerator (11) to entering
The sample chip (12) of row single particle effect irradiation experiment carries out temperature control, it is characterized in that：The first half of the specimen holder (1)
It is divided into several sample holders (2) that the sample chip (12) is set, the latter half is internally provided with heating chamber (5) and system
Cold chamber (6)；The heating chamber (5) is used to set heater；The refrigerating chamber (6) connects vacuum target chamber (11) outside
Refrigerating plant, for accommodating refrigerant.
2. specimen holder as claimed in claim 1, it is characterized in that：The specimen holder (1) is made using oxygen-free copper.
3. specimen holder as claimed in claim 1, it is characterized in that：The refrigerating chamber (6) is arranged on the lower half of the specimen holder
The middle part divided, close to the backboard (10) of the specimen holder (1), inlet and liquid outlet are provided with the refrigerating chamber (6), respectively
It is connected for the feed tube (16) with refrigerant, drain pipe (17).
4. specimen holder as claimed in claim 3, it is characterized in that：Between the inlet and the feed tube (16), it is described go out
It is to be tightly connected between liquid mouth and the drain pipe (17).
5. specimen holder as claimed in claim 1, it is characterized in that：The heating chamber (5) is two, is separately positioned on the sample
The both sides of the latter half of seat (1), the backboard (10) away from the specimen holder (1), are extended inwards by the specimen holder (1) both sides
In the middle part of to the specimen holder (1), the heater set in the heating chamber is resistance heater (14).
6. specimen holder as claimed in claim 1, it is characterized in that：The sample holder (2) is 4, is be arranged in parallel between each other,
One piece of sample chip (12) can be set on each sample holder (2).
7. specimen holder as claimed in claim 6, it is characterized in that：Dead slot (9) is provided between two sample holders (2).
8. specimen holder as claimed in claim 7, it is characterized in that：Dead slot (9) width is 1cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720306335.5U CN206649054U (en) | 2017-03-27 | 2017-03-27 | A kind of specimen holder for single particle effect irradiation experiment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720306335.5U CN206649054U (en) | 2017-03-27 | 2017-03-27 | A kind of specimen holder for single particle effect irradiation experiment |
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| Publication Number | Publication Date |
|---|---|
| CN206649054U true CN206649054U (en) | 2017-11-17 |
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ID=60280166
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720306335.5U Active CN206649054U (en) | 2017-03-27 | 2017-03-27 | A kind of specimen holder for single particle effect irradiation experiment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900986A (en) * | 2019-03-07 | 2019-06-18 | 中国科学院近代物理研究所 | A kind of single particle effect test device and method based on mobile platform |
| CN112666595A (en) * | 2021-01-05 | 2021-04-16 | 中国原子能科学研究院 | Proton beam current measuring device and method |
-
2017
- 2017-03-27 CN CN201720306335.5U patent/CN206649054U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900986A (en) * | 2019-03-07 | 2019-06-18 | 中国科学院近代物理研究所 | A kind of single particle effect test device and method based on mobile platform |
| CN112666595A (en) * | 2021-01-05 | 2021-04-16 | 中国原子能科学研究院 | Proton beam current measuring device and method |
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