CN206639814U - Macromolecule membrane polarization device - Google Patents
Macromolecule membrane polarization device Download PDFInfo
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- CN206639814U CN206639814U CN201621450041.1U CN201621450041U CN206639814U CN 206639814 U CN206639814 U CN 206639814U CN 201621450041 U CN201621450041 U CN 201621450041U CN 206639814 U CN206639814 U CN 206639814U
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- 229920002521 macromolecule Polymers 0.000 title claims abstract description 154
- 230000010291 membrane polarization Effects 0.000 title claims abstract description 59
- 230000005684 electric field Effects 0.000 claims abstract description 137
- 239000012528 membrane Substances 0.000 claims abstract description 96
- 230000010287 polarization Effects 0.000 claims abstract description 75
- 239000000758 substrate Substances 0.000 claims abstract description 20
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Abstract
It the utility model is related to thin film technique field, and in particular to a kind of macromolecule membrane polarization device.A kind of macromolecule membrane polarization device, for being polarized to the macromolecule membrane being formed in situ in substrate, it includes X-ray emitter, electric field component, article plummer and the second potential controller；X ray is provided using X-ray emitter, environmental gas above article plummer is ionized and moved under the electric field that the electric field component is formed and be deposited on the macromolecule membrane surface to be polarized by X ray, make to form the film internal electric field along the film thickness direction in the macromolecule membrane to be polarized, so as to complete the polarization of the macromolecule membrane.It is avoided that macromolecule membrane is breakdown, effectively improves the production qualification rate of polarized film, it is possible to achieve large-scale production.
Description
【Technical field】
It the utility model is related to thin film technique field, and in particular to a kind of macromolecule membrane polarization device.
【Background technology】
Polarization is an important step in thin-film material processing, and main purpose is point for making to be orientated in a jumble in thin-film material
Sub- dipole moment is consistently oriented along specific direction (such as polarized electric field direction), so that the thin-film material has piezoelectric property.
Between thin-film material is typically directly placed in electrode by membrane polarization, high voltage electric field caused by electrode is utilized to complete pole
Change, this method is very easy to puncture thin-film material.Some special high molecular film materials are directly formed at electronic device
Surface, directly polarized in high voltage electric field and be also easy to cause the damage of whole electronic device because of thin-film material breakdown, into
This costliness.And because whole polarization method production qualification rate is relatively low, it can not mass produce substantially.
【Utility model content】
To overcome existing membrane polarization to produce the relatively low technical problem of qualification rate, it is thin that the utility model provides a kind of macromolecule
Film polarization device.
The utility model is to provide a kind of macromolecule membrane polarization device to solve a technical scheme of above-mentioned technical problem,
For being polarized to the macromolecule membrane being formed in situ in substrate, the macromolecule membrane polarization device is sent out including X ray
Raw device, electric field component, article plummer and the second potential controller；The X-ray emitter is used to provide X ray, the thing
Product plummer is grounded for carrying the macromolecule membrane being formed in situ in substrate to be polarized, and makes the macromolecule to be polarized thin
Membrane potential is zero；The electric field component includes a high voltage electric field end and a low tension is extreme, and the high voltage electric field end is held positioned at article
Above microscope carrier, the low tension is extremely positioned at high voltage electric field end between article plummer；The high voltage electric field end potential compares low pressure
Electrode tip potential is high；Second potential controller is used to control the extreme potential of low tension；Ring above the article plummer
Border gas can be ionized by X ray and be moved under the electric field that the electric field component is formed and be deposited on described be formed in situ in substrate
Macromolecule membrane surface, make to form the film internal electric field along the film thickness direction in the macromolecule membrane, so as to complete
The polarization of the macromolecule membrane.
It is further that the high voltage electric field end includes array-like needle electrode or wire electrode or plate electrode or grid
Electrode.
The distance between it is further that the high voltage electric field end and low tension are extreme and is more than the low tension extremely and thing
The distance between product plummer.
It is further that the potential at the high voltage electric field end is 10-50kV, and the extreme potential of the low tension is 5-
40kV。
It is further plate electrode end of the low tension extremely for grid electrode end or with through-Penetration portion.
It is further that the low tension is 1-10mm extremely with article plummer distance.
It is further that the macromolecule membrane polarization device further comprises for measuring the thin of the macromolecule membrane
The current sensor of membrance current.
It is further that the macromolecule membrane polarization device further comprises control processor, for receiving electric current sense
The film current data of device is surveyed, it is determined that polarization terminal.
It is further that the macromolecule membrane polarization device further comprises for controlling high voltage electric field end potential
One potential controller.
It is further that first potential controller is used to regulate and control high voltage electric field end and low pressure with the second potential controller
Electrical potential difference between electrode tip is 5-30kV.
A kind of macromolecule membrane polarization device that the utility model also provides, X ray, thing are provided using X-ray emitter
Environmental gas above product plummer is ionized and moved under the electric field that the electric field component is formed and be deposited on described treat by X ray
Polarization macromolecule membrane surface, make to form the film internal electric field along the film thickness direction in the macromolecule membrane to be polarized,
So as to complete the polarization of the macromolecule membrane.Electrode is set compared to the upper and lower surface directly in macromolecule membrane, will not be made
Macromolecule membrane directly bears applied high voltage electric field, therefore is avoided that macromolecule membrane is breakdown, effectively improves polarized film
Production qualification rate, it is possible to achieve large-scale production；And obtained polarized film has stronger piezo-electric effect and longer use
Life-span.In addition, using X ray environment will not be caused dirty in a kind of macromolecule membrane polarization device provided by the utility model
Dye.The macromolecule membrane polarization device also includes being used to control the second potential controller of the extreme potential of low tension, can be with
The extreme potential of low tension is adjusted at any time, can be adjusted at any time in polarization process, or is adapted to different types of high
Molecular film.
【Brief description of the drawings】
Fig. 1 is the schematic flow sheet of macromolecule membrane polarization method in the utility model embodiment one.
Fig. 2 is the principle schematic of macromolecule membrane polarization method in the utility model embodiment one.
Fig. 3 is the test curve figure of the film electric current of macromolecule membrane polarization method in the utility model embodiment one.
(A) is the microstructure schematic diagram before ferroelectric polymer film polarization in the utility model embodiment one in Fig. 4；
(B) it is the microstructure schematic diagram after ferroelectric polymer film polarization in the utility model embodiment one.
(A) is the ferroelectric polymer under polarization process in the macromolecule membrane polarization method of the utility model embodiment one in Fig. 5
The schematic diagram of the ferroelectric hysteresis loop (polarity-film internal electric field) of thing film；(B) it is the Barkhausen noise signal and film under polarization process
Relation schematic diagram between internal electric field；(C) relation between the polarization crystallite density under polarization process and film internal electric field is illustrated
Figure；(D) relation schematic diagram between the film electric current and film internal electric field under polarization process.
Fig. 6 is the structural representation of the macromolecule membrane polarization device of the utility model embodiment four.
【Embodiment】
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only solving
The utility model is released, is not used to limit the utility model.
Embodiment one
As shown in figure 1, a kind of macromolecule membrane polarization method, including：
Step S1：Macromolecule membrane to be polarized is provided and makes the membrane potential be zero；
Step S2：High electric field and an existing fringing field, the high electric field are provided above the macromolecule membrane to be polarized
Potential is higher than the potential of the existing fringing field；
Step S3：Environmental gas above macromolecule membrane to be polarized is ionized using X ray and acted in the high electric field
Under, the macromolecule membrane surface is deposited on through the existing fringing field, makes to be formed along the film in the macromolecule membrane
The film internal electric field of thickness direction, so as to complete the polarization of the macromolecule membrane.
A kind of macromolecule membrane polarization method provided by the utility model, it is thin to ionize macromolecule to be polarized using X ray
Environmental gas above film and under high electric field effect, the macromolecule membrane table is deposited on through the existing fringing field
Face, make to form the film internal electric field along the film thickness direction in the macromolecule membrane, so as to complete the macromolecule membrane
Polarization.Electrode is set compared to the upper and lower surface directly in macromolecule membrane, macromolecule membrane will not be made directly to bear to be applied
The high voltage electric field added, therefore it is avoided that macromolecule membrane is breakdown, effectively improve the production qualification rate of polarized film, it is possible to achieve big
Large-scale production；And obtained polarized film has stronger piezo-electric effect and longer service life.In addition, in the utility model institute
Destruction will not be produced to atmospheric ozone layer using X ray in a kind of macromolecule membrane polarization method provided, thus will not be caused
Environmental pollution.
The principle schematic of macromolecule membrane polarization method provided by the utility model is as shown in Figure 2, there is provided waits to polarize
Macromolecule membrane 103, and make the membrane potential be zero.In general, as shown in FIG., connect the macromolecule membrane 103
Ground.High electric field and an existing fringing field are provided above the macromolecule membrane 103 to be polarized, the high electric field potential is high
In the potential of the existing fringing field.The high electric field can as shown in fig. 1, pass through a potential release member 104 by potential source 101
There is provided, the potential release member 104 can be metal needle either lametta either plate electrode or electrodes etc..
The existing fringing field can as shown in fig. 1, be provided by the either flat board provided with through-Penetration portion of grid 105, such as more mutual
Parallel metal lines and plate electrode that is spaced apart and being formed, the interval between more wires form the tabular
The through-Penetration portion of electrode.In the present embodiment, existing fringing field is provided using grid 150.The grid 105 is arranged on power supply release member 104
Between macromolecule membrane 103.Environmental gas above macromolecule membrane to be polarized is ionized using X ray, it is powered so as to produce
Ion 102, charged ion 102 are deposited under high electric field effect through the low voltage electric field namely through grid 105
The surface of macromolecule membrane 103, make to be formed in the macromolecule membrane 103 along the film thickness direction (arrow P i.e. in figure
Direction) film internal electric field, so as to complete the polarization of the macromolecule membrane 103.Wherein, the grid 105 can determine
The potential of the place plane of grid 105, and the electric field at the place of air uniform grid 105, so as to ensure to be deposited on the macromolecule membrane
The uniformity of the charged ion 102 on 103 surfaces.
Preferably, the power supply release member 104 and the distance between grid 105 are thin more than the grid 105 and macromolecule
The distance between film 103.Preferably, the distance between the grid 105 and macromolecule membrane 103 are 1-10mm, pass through determination
The distance between grid 105 and macromolecule membrane 103, the film internal electric field formed in macromolecule membrane 103 can be preferably controlled,
So that film internal electric field is in a relatively high and stable state.It will be appreciated, of course, that in some preferred embodiments, only need
Ensure that the distance between described power supply release member 104 and grid 105 are more than between the grid 105 and macromolecule membrane 103
Distance.It is preferred that the distance between the power supply release member 104 and macromolecule membrane 103 are 10-500mm, it is optimal
It is that the distance between the power supply release member 104 and macromolecule membrane 103 are 300mm.
Preferably, the potential of the high electric field is 10-50kV, and the potential of the existing fringing field is 5-40kV, high by determining
The potential of electric field and the potential of existing fringing field, can guarantee that the stability of polarization process.Herein it should be noted that certainly still
Need to ensure that the potential of high electric field is higher than the potential of existing fringing field, further, it is preferred that potential of the potential of high electric field than existing fringing field
High 5-30kV.For example, the potential of the high electric field is 40kV, the potential of the existing fringing field is 12kV；Or, the electricity of the high electric field
Gesture is 30kV, and the potential of the existing fringing field is 10kV；Or, the potential of the high electric field is 20kV, the potential of the existing fringing field is
7kV；Or, the potential of the high electric field is 15kV, the potential of the existing fringing field is 5kV.Wherein, preferably it is the high electric field
Potential be 20kV, the potential of the existing fringing field is 7kV, under the potential of the high electric field and the potential of existing fringing field, polarization process
Stability it is good, the performance of gained polarized film is good.It is, of course, also possible to it is the potential of the high electric field and the potential of the existing fringing field
It is adjustable, can be adjusted at any time in polarization process can reach more preferable control effect.
In actual production, polarization method of the present utility model is that the macromolecule membrane is formed in situ in a substrate table
Face is polarized again, so as to obtain the substrate with the polarized film.This point is different to be different from the one of prior art, existing
The macromolecule membrane polarization of technology is typically by existing macromolecule membrane finished product is purchased, then by being adhered in substrate
To be polarized.Generally, the macromolecule membrane of this finished product needs first to be drawn high with certain stress and then again by being bonded in
Polarized again in substrate, the macromolecule membrane thickness that such a method is formed is not suitable with existing electronic device more than 30 μm
Frivolous development trend, and the piezoelectric sense device of this polarized film is used, because piezoelectric sense film is too thick, therefore resolution ratio
It is relatively low.And macromolecule membrane polarization method provided by the utility model, the macromolecule membrane are to be formed in situ in a substrate
On film, such as by chemical vapor deposition, physical vapour deposition (PVD), the conventional approaches such as coating are thought of as in substrate surface, therefore
The macromolecule membrane of very thin thickness can be formed, basic thickness can maintain less than 9 μm.Therefore, it is formed in situ using this
Polarized film piezoelectric sense device, resolution ratio greatly improves.
Preferably, the macromolecule membrane polarization method further comprise by monitor in the macromolecule membrane 103 by
The terminal that polarizes is determined in film internal electric field and caused film electric current I.It is appreciated that a current sensor and the height are set
Molecular film 103 is connected, you can measures the film electric current.Compared in existing technical scheme, for polarizing each time
By identical polarization duration, the terminal that polarizes only is determined by way of timing in preparation or production, so causes each pole
The polarization film properties height obtained after change differs, and performance described here generally refers to foregoing piezo-electric effect and use
Life-span；And determine to polarize by monitoring the change of film electric current in macromolecule membrane polarization method provided by the utility model
Terminal, can preferably ensure to obtain that piezo-electric effect is strong and the polarized film of service life length, and the polarized film obtained every time after polarization
Consistency of performance is good.
Specifically, the film electric current I measured curve is as shown in figure 3, in figure 3 using polarization time t as abscissa, film
Electric current I is ordinate.As shown in FIG., in polarization process, with the increase of polarization time, film internal electric field is also increasing, thin
Membrance current I is integrally in the trend being stepped up, and vibrated in polarization process.Therefore in monitoring process, obtain thin
Slope between membrance current I and polarization time t, the region of vibration is entered when negative occurs in slope, then when slope is kept
For positive number and little change when, you can the position in be defined as polarizing terminal, that is, Fig. 3 indicated by Y points.Specifically, can be with
It is when the variable quantity between the slope continuously acquired is less than 1-5%, confirms as the terminal that polarizes, so as to terminates polarization.
It is further that the macromolecule membrane is ferroelectric polymer film, such as polyvinylidene fluoride PVDF；Gather inclined difluoro
Ethene trifluoro-ethylene PVDF-TrFE, polymetylmethacrylate, polytetrafluoroethylene (PTFE) TEFLON etc..The film electric current exists
The oscillation behavior characteristic of Barkhausen noise is shown in polarization process, that is, occurs the part of oscillating curve in figure 3, is schemed
The Δ t marked in 31Time section be that the section of embodied oscillation behavior characteristic is influenceed by Barkhausen noise.Cause
This more can accurately determine the terminal that polarizes by determining influence of the Barkhausen noise to film electric current.Specifically, in Fig. 3
In have an extreme point X in the part of oscillating curve, when being that Barkhausen noise signal is most strong corresponding to the point, when monitoring
During this, polarization terminal can be predicted, so that it is determined that polarization terminal.
Generation for Barkhausen noise herein and the influence to the film electric current are further explained.In non-pole
In the ferroelectric polymer film of change, the person's of presence α phases, β phases and non crystalline structure.Polarization process is mainly in ferroelectric polymer film
Process of the α phases to β phase in version.Specifically, what is embodied in microstructure is the change of magnetic domain polar orientation.(A) is iron in Fig. 4
Microstructure schematic diagram before electric polymer membrane polarization, the structure of surrounding and watching of the ferroelectric polymer film include multiple magnetic domains
(non-label) and non crystalline structure 604, the transition zone between magnetic domain is domain wall 602, the polar orientation in multiple magnetic domains be with
Machine, i.e., as shown in arrow 601,603,606.And after polarization, (B) is microcosmic after ferroelectric polymer film polarizes in Fig. 4
Structural representation, the polar orientation of each magnetic domain change, and polar orientation is as shown in arrow 605,606,608, therefore entirety
Polar orientation forms unification for upper, i.e., as shown in dotted arrow 6010.The polar orientation of magnetic domain occurs in polarization process
Change, so as to be embodied in ferroelectric polymer film from α phases to the transformation of β phases, and domain wall 602,607 can be moved so as to
Barkhausen noise is produced, will also influence the film electric current.
Existing α phases also have β phases, the content of β phases and polarization in the polarized film of gained after the ferroelectric polymer film polarization
The piezo-electric effect of film is corresponding, and when content shared by β phases is 60-70%, polarized film has preferable piezo-electric effect, β phases
The piezo-electric effect of content more high polarization film is better.But hyperpolarization can produce unnecessary unnecessary electric charge etc., these are unnecessary
Electric charge easily recombines with other electric charges on polymer surfaces, so as to influence the performance of gained polarized film.Therefore this practicality
New provided macromolecule membrane polarization method, the situation of polarize incomplete or hyperpolarization is avoided that, can be very good
It is determined that polarization terminal；And required polarized film can be obtained, the required polarized film herein referred to refer to having specific α phases and
β phase contents, the i.e. polarized film of the piezo-electric effect with particular size.For the polarized film applied to piezo-electric effect, then need to the greatest extent
α phases in ferroelectric polymer film are converted to β phases substantially more than possible.
Please refer to fig. 5, it is further described for influence of the Barkhausen noise to polarization process.In Fig. 5 (A)
For the schematic diagram of the ferroelectric hysteresis loop (polarity-film internal electric field) of the ferroelectric polymer film under polarization process, wherein with film internal electric field
Ein-filmFor abscissa, using polarity P as ordinate, curve 71 is initial magnetization curve；(B) is under polarization process in Fig. 5
The performance of relation schematic diagram between Barkhausen noise signal and film internal electric field, wherein Barkhausen noise signal can be electric current
Signal or electric potential signal, using the Barkhausen noise signal for showing as current signal in the present embodiment；Fig. 5
In (C) be polarization process under polarization crystallite density and film internal electric field between relation schematic diagram；(D) is polarization process in Fig. 5
Under film electric current and film internal electric field between relation schematic diagram.Abscissa is film internal electric field E in Figure 5in-film, and relatively
Should.
(A), (B) in comparison diagram 5, can clearly learn when domain wall is moved in ferroelectric thin film, that is, α phases start to turn
When being changed into β phases, namely when Barkhausen noise starts to occur, the initial magnetization curve vibrates；It can contrast together simultaneously
In Fig. 5 (D), same when Barkhausen noise starts to occur, just there is oscillation area 72 in the film current curve.With
The progress of polarization process, when domain wall drift is nearly completed, now Barkhausen noise reaches extreme value, that is, occurs in Fig. 5 shown in (B)
Spike when, be corresponding with the point where X in Fig. 3.Therefore, when it is determined that spike occurs in Barkhausen noise in polarization process
When, polarization terminal can be predicted, be avoided that relatively early by prediction or relatively just stop polarizing late, ensure gained polarized film
High-performance.E in Figure 5opAs optimal polarization terminal, and (C) in Fig. 5 is further added into contrast, with film internal electric field
Ein-filmIncrease, the polarization crystallite density of the macromolecule membrane is also being stepped up, and the polarization crystallite density can reflect
The performance of gained polarized film.Namely in optimum polarization terminal, crystallite density substantially constant, namely the pole of ferroelectric polymer film
Change is basically completed, and domain wall drift is also basically completed, now polarize membrane property it is best, namely piezo-electric effect and service life it is optimal.
Embodiment two
The utility model also provides a kind of polarized film, using the macromolecule membrane polarization method system provided in embodiment one
It is standby to obtain.As described in embodiment one, polarized film provided by the utility model has stronger piezo-electric effect and longer made
Use the life-span.And because the polarized film is macromolecule membrane, such as ferroelectric polymer film, the pole after substrate surface is formed in situ
Change forms, therefore the film thickness that polarizes is less than 9 μm, reduces the integral thickness for including such a polarization membrane module, can more meet the need in market
Ask.
Embodiment three
The utility model also provides a kind of electronic device, and it includes substrate and is formed in situ in the polarization in the substrate
Film.Because the polarized film has stronger piezo-electric effect, effectively widen the application of the electronic device and strengthen its competitiveness.Tool
The electronic device for having piezo-electric effect is widely used in sensor field, and can be applied to the communication apparatus such as mobile phone, tablet personal computer
In.Because the thickness of the polarized film is less than 9 μm, the lightening trend of present communication apparatus is more adapted to.
Example IV
As shown in figure 5, the utility model also provides a kind of macromolecule membrane polarization device 20, for the macromolecule membrane that polarizes
203, the macromolecule membrane polarization device 20 includes X-ray emitter 22, electric field component 23 and article plummer 24；The X
Ray generator is used to provide X ray, and the article plummer 24 is grounded for carrying macromolecule membrane 203 to be polarized and making this
The potential of macromolecule membrane 203 to be polarized is zero.The electric field component includes a high voltage electric field end 234 and a low tension extreme 235.Institute
State high voltage electric field end 234 and be located at the top of article plummer 24, the low tension extreme 235 is located at high voltage electric field end 234 with treating thing
Between product plummer 24.The potential of high voltage electric field end 234 235 potential more extreme than low tension is high.The top of article plummer 24
Environmental gas is ionized and moved under the electric field that the electric field component 23 is formed and to be deposited on the macromolecule to be polarized thin by X ray
The surface of film 203, make to form the film internal electric field along the film thickness direction in the macromolecule membrane 203 to be polarized, so as to complete
Into the polarization of the macromolecule membrane 203.
Macromolecule membrane polarization device 20 provided by the utility model, X ray, thing are provided using X-ray emitter 22
The environmental gas of the top of product plummer 24 is ionized and moved under the electric field that the electric field component 23 is formed and be deposited on institute by X ray
The surface of macromolecule membrane 203 to be polarized is stated, makes to be formed along the film thickness direction in the macromolecule membrane 203 to be polarized
Film internal electric field, so as to complete the polarization of the macromolecule membrane.Set compared to the upper and lower surface directly in macromolecule membrane 203
Electrode, macromolecule membrane 203 will not be made directly to bear applied high voltage electric field, therefore be avoided that macromolecule membrane 203 is hit
Wear, effectively improve the production qualification rate of polarized film, it is possible to achieve large-scale production；And obtained polarized film has stronger piezoelectricity
Effect and longer service life.In addition, use X in a kind of macromolecule membrane polarization device 20 provided by the utility model
Ray will not cause environmental pollution.
The macromolecule membrane polarization device 20 also includes a housing 21, and one is provided for the macromolecule membrane 203 polarization
Closing space.The housing 21 is not intended as limitation of the present utility model, and the housing 21 can be box, case, bucket an even room
.
Due to polarization in situ can be realized using the macromolecule membrane polarization device 20, therefore can be in article plummer 24
The upper substrate 204 for setting a device, the macromolecule membrane 203 are formed at the surface of substrate 204, you can so that in the base
The polarization in situ of the macromolecule membrane 203 on the surface of bottom 204.The setting macromolecule membrane 203 include in the surface of substrate 204 but
It is not limited to general common plated film mode to be formed, such as chemical vapour deposition technique, physical vaporous deposition, dip-coating, coating etc..This
The macromolecule membrane of utility model is because be to be formed in situ in substrate surface, therefore the macromolecule that can form very thin thickness is thin
Film, basic thickness can maintain less than 9 μm.
The potential at the high voltage electric field end 234 can be provided by a potential source 231, it is preferable that the high voltage electric field end 234
Including array-like needle electrode or wire electrode or plate electrode or grid electrode, can guarantee that to obtain described high electric field.And
The high voltage electric field end 234 is more than the low tension extreme 235 with the low tension extreme the distance between 235 and carried with article
The distance between platform 24.
Preferably, the low tension extreme 235 is grid electrode end or the plate electrode end with through-Penetration portion.The low pressure
Electrode tip 235 can determine the potential of the extreme 235 place plane of low tension, and the electric field at the place of uniform low pressure electrode tip 235.
Through-Penetration portion is offered on the plate electrode end to allow charged ion to pass through such as more metal wires parallel to each other and interval
Certain distance and the plate electrode formed, the interval between more wires form the through-Penetration portion of the planar electrode.It is excellent
Choosing, the low tension extreme 235 is grid electrode end, and the grid electrode end is grid electrode, wherein it is preferred that net
The area of each grid is 1-100mm on mesh-like electrode2, that is to say, that when the grid is square, the side of the grid
A length of 1-10mm.
Preferably, the distance between the low tension extreme 235 and article plummer 24 are 1-10mm, by determining low tension
The distance between extreme 235 and article plummer 24, the film internal electric field formed in macromolecule membrane 203 can be preferably controlled,
So that film internal electric field is in a relatively high and stable state.Certainly, be further, the high voltage electric field end 234 with it is described
Low tension extreme the distance between 235 is more than the distance between the low tension extreme 235 and article plummer 24.It is wherein preferred
, the distance between the high voltage electric field end 234 and the article plummer 24 are 10-500mm, optimal, the height
The distance between piezoelectric field end 234 and the article plummer 24 are 300mm.
It is preferred that the macromolecule membrane polarization device 20 also includes being used to control the of the potential of high voltage electric field end 234
One potential controller 2311, it is possible to understand that first potential controller 2311 is connected with potential source 231, by controlling potential source
231 potential is the potential at controllable high voltage electric field end 234, thus can adjust height at any time by the first potential controller 2311
It the potential at piezoelectric field end 234, can be at any time adjusted in polarization process, or adapt to different types of macromolecule membrane
203。
Preferably, macromolecule membrane polarization device 20 also includes being used for the second potential for controlling extreme 235 potential of low tension
Controller 2351, the potential of low tension extreme 235 can be adjusted at any time, can be adjusted at any time in polarization process, or
It is to adapt to different types of macromolecule membrane 203.First potential controller 2311 and the coordinated regulation of the second potential controller 2351,
To control the electrical potential difference between high voltage electric field end 234 i.e. potential source 231 and low tension extreme 235.
Preferably, the potential at the high voltage electric field end 234 is 10-50kV, and the potential at low voltage electric field end 235 is 5-
40kV.By determining the potential at high voltage electric field end 234 and the potential at low voltage electric field end 235, the stabilization of polarization process can guarantee that
Property.Herein it should be noted that certainly there is still a need for ensureing the potential at high voltage electric field end 234 higher than low voltage electric field end 235
Potential, further, it is preferred that the potential at high voltage electric field end 234 is higher 5-30kV than the potential at low voltage electric field end 235.It is for example, described
The potential at high voltage electric field end 234 is 40kV, and the potential at the low voltage electric field end 235 is 12kV；Or, the high voltage electric field end 234
Potential be 30kV, the potential at the low voltage electric field end 235 is 10kV；Or, the potential at the high voltage electric field end 234 is 20kV,
The potential at the low voltage electric field end 235 is 7kV；Or, the potential at the high voltage electric field end 234 is 15kV, the low voltage electric field end
235 potential is 5kV.Wherein, preferably it is that the potential at the high voltage electric field end 234 is 20kV, the low voltage electric field end 235
Potential be 7kV, under the potential at the high voltage electric field end 234 and the potential at low voltage electric field end 235, the stability of polarization process
Good, the performance of gained polarized film is good.
Preferably, the macromolecule membrane polarization device 20 further comprises for measuring the macromolecule membrane 203
The current sensor 2031 of film electric current, the film electric current by monitoring the macromolecule membrane 203 can determine the terminal that polarizes.
Specifically, can be the change of the film electric current by obtaining in real time, for example slope variation be judged so as to terminate polarization.
It is further preferred that macromolecule membrane polarization device 20 further comprises control processor (not shown), for receiving aforementioned currents
The film current data that sensor 2031 is monitored.It is appreciated that the control processor can be straight with current sensor 2031
Connect data wire to be attached, and realize the transmission of data；Can also be by the way of being wirelessly transferred, such as bluetooth or WIFI,
Realize the transmission of data.The slope of film electric current with the change curve of analysed film electric current, can be such as utilized using control processor
Change accurately to determine the terminal that polarizes.Its principle has elaborated in embodiment one, will not be repeated here.
Compared with prior art, the utility model also provides a kind of macromolecule membrane polarization device, using X-ray emitter
X ray is provided, the environmental gas above article plummer ionized by X ray and under the electric field that the electric field component is formed it is mobile simultaneously
The macromolecule membrane surface to be polarized is deposited on, makes to be formed along the film thickness direction in the macromolecule membrane to be polarized
Film internal electric field, so as to complete the polarization of the macromolecule membrane.Set compared to the upper and lower surface directly in macromolecule membrane
Electrode, macromolecule membrane will not be made directly to bear applied high voltage electric field, therefore be avoided that macromolecule membrane is breakdown, effectively
Improve the production qualification rate of polarized film, it is possible to achieve large-scale production；And obtained polarized film have stronger piezo-electric effect and
Longer service life.In addition, will not using X ray in a kind of macromolecule membrane polarization device provided by the utility model
Cause environmental pollution.The macromolecule membrane polarization device also includes being used for the second electricity for controlling the extreme potential of low tension
Gesture controller, the extreme potential of low tension can be adjusted at any time, can be adjusted at any time in polarization process, or adapt to
Different types of macromolecule membrane.
It is further that the high voltage electric field end includes array-like needle electrode or wire electrode or plate electrode or grid
Electrode, guarantee obtain required high electric field.The distance between being further that the high voltage electric field end and low tension are extreme is more than
The low tension is the distance between extremely with article plummer.
It is further that the potential at the high voltage electric field end is 10-50kV, and the extreme potential of the low tension is 5-
40kV.By the potential for determining high electric field and grid electric field so that the stability of polarization process is good, the performance of gained polarized film
It is good.
It is further plate electrode end of the low tension extremely for grid electrode end or with through-Penetration portion.It is described low
Piezoelectricity can extremely determine the potential of the extreme place plane of low tension, and the electric field at uniform low pressure electrode tip place.
It is further that the low tension is 1-10mm extremely with article plummer distance.Macromolecule can preferably be controlled
The film internal electric field formed in film so that film internal electric field is in a relatively high and stable state.
It is further that the macromolecule membrane polarization device further comprises for measuring the thin of the macromolecule membrane
The current sensor of membrance current.Film electric current by monitoring the macromolecule membrane can determine the terminal that polarizes.
It is further that the macromolecule membrane polarization device further comprises control processor, for receiving electric current sense
The film current data of device is surveyed, and polarization terminal is determined according to the change of the film electric current.It can be divided using control processor
The change curve of film electric current is analysed, it is more accurate to determine polarization terminal.
It is further that the macromolecule membrane polarization device further comprises for controlling high voltage electric field end potential
One potential controller.The potential of potential source can be adjusted at any time, can be adjusted at any time in polarization process, or is adapted to
Different types of macromolecule membrane.
It is further that first potential controller is used to regulate and control high voltage electric field end and low pressure with the second potential controller
Electrical potential difference between electrode tip is 5-30kV.Ensure the stability of polarization process.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
Any modification made within the principle of utility model, equivalent substitution and improvement etc. all should include the scope of protection of the utility model
Within.
Claims (10)
1. a kind of macromolecule membrane polarization device, for being polarized to the macromolecule membrane being formed in situ in substrate, it is special
Sign is：The macromolecule membrane polarization device includes X-ray emitter, electric field component, article plummer and the second potential control
Device processed；
The X-ray emitter is used to provide X ray, and the article plummer is grounded for carrying to be polarized be formed in situ
Macromolecule membrane in substrate, and make the macromolecule membrane potential to be polarized be zero；The electric field component includes a high voltage electric field end
Extreme with a low tension, the high voltage electric field end is located above article plummer, and the low tension is extremely located at high voltage electric field end
With between article plummer；High voltage electric field end potential potential more extreme than low tension is high；Second potential controller is used to control
The extreme potential of low tension processed；
Environmental gas above the article plummer can be ionized by X ray and move and sink under the electric field that the electric field component is formed
Accumulate on the macromolecule membrane surface being formed in situ in substrate, make to be formed along the film thickness in the macromolecule membrane
The film internal electric field in direction, so as to complete the polarization of the macromolecule membrane.
2. macromolecule membrane polarization device as described in the appended claim 1, it is characterised in that：The high voltage electric field end includes array-like
Needle electrode or wire electrode or plate electrode or grid electrode.
3. macromolecule membrane polarization device as stated in claim 2, it is characterised in that：The high voltage electric field end and low-field electrode
The distance between end is more than the low tension the distance between extremely with article plummer.
4. macromolecule membrane polarization device as described in the appended claim 1, it is characterised in that：The potential at the high voltage electric field end is
10-50kV, the extreme potential of the low tension are 5-40kV.
5. macromolecule membrane polarization device as described in the appended claim 1, it is characterised in that：The low tension is extremely grid electrode
End or the plate electrode end with through-Penetration portion.
6. macromolecule membrane polarization device as described in the appended claim 1, it is characterised in that：The low tension extremely carries with article
Platform distance is 1-10mm.
7. the macromolecule membrane polarization device as described in claim any one of 1-5, it is characterised in that：Further comprise being used to measure
The current sensor of the film electric current of the macromolecule membrane.
8. macromolecule membrane polarization device as recited in claim 7, it is characterised in that：Further comprise control processor, use
In the film current data for receiving current sensor, it is determined that polarization terminal.
9. the macromolecule membrane polarization device as described in claim any one of 1-5, it is characterised in that：Further comprise being used to control
First potential controller of high voltage electric field end potential.
10. macromolecule membrane polarization device as claimed in claim 9, it is characterised in that：First potential controller is with
Two potential controllers be used for regulate and control high voltage electric field end and low tension it is extreme between electrical potential difference be 5-30kV.
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| CN201621450041.1U CN206639814U (en) | 2016-12-27 | 2016-12-27 | Macromolecule membrane polarization device |
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|---|---|---|---|
| CN201621450041.1U CN206639814U (en) | 2016-12-27 | 2016-12-27 | Macromolecule membrane polarization device |
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