CN206635452U - Single crystal growing furnace and its concubine - Google Patents
Single crystal growing furnace and its concubine Download PDFInfo
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- CN206635452U CN206635452U CN201720322216.9U CN201720322216U CN206635452U CN 206635452 U CN206635452 U CN 206635452U CN 201720322216 U CN201720322216 U CN 201720322216U CN 206635452 U CN206635452 U CN 206635452U
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Abstract
This application discloses a kind of concubine of single crystal growing furnace, the concubine is telescopic structure.In the case where industrial building height and single crystal growing furnace whole height are certain, concubine can make concubine to meet requirement away from main furnace chamber, the distance between concubine and main furnace chamber by shrinking from bottom to top, the lower end of long crystal bar is exposed to the bottom of concubine, so as to which long crystal bar be taken out from concubine.It can be seen that the concubine in the case where factory building height is certain, can increase the production length of crystal bar, the production efficiency of crystal bar is improved.Disclosed herein as well is a kind of single crystal growing furnace of the application concubine.
Description
Technical field
Technical field of single crystal growth is the utility model is related to, more particularly to a kind of concubine of single crystal growing furnace, further relates to a kind of answer
With the single crystal growing furnace of the concubine.
Background technology
Single crystal growing furnace be one kind in inert gas environment, the polycrystalline materials such as polysilicon are melted with graphite heater, with straight
The equipment that daraf(reciprocal of farad) grows dislocation-free monocrystalline.
Existing single crystal growing furnace mainly includes frame, main furnace chamber, concubine, concubine hoisting mechanism, valve body, bell and crystal pull
Mechanism.Concubine is cylinder-like structure, and concubine is connected on the bell of main furnace chamber, and valve body is arranged between concubine and bell；Crystal
Shift mechanism enters in main furnace chamber through concubine, and lifting generation crystal bar is carried out to young crystalline substance, after the completion of crystal bar, is lifted into concubine；
Concubine hoisting mechanism can lift concubine, concubine is lifted away from main furnace chamber, and now concubine bottom is exposed in crystal bar lower end, passes through
Gripper mechanism grips crystal bar lower end, take out crystal.
For single crystal growing furnace when carrying out crystal production, boule length more long production efficiency is higher, and the height of single crystal growing furnace is higher, brilliant
The growth length of rod is longer, still, because factory is highly restricted, causes concubine to be promoted to requirement height, concubine bottom
Height from main furnace chamber is too low, long crystal bar can not be taken out from concubine, so as to limit the production length of crystal bar.
In summary, how to solve the problems, such as, because place height limitation causes long crystal bar can not to take out from concubine, to turn into
Those skilled in the art urgent problems to be solved.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of concubine of single crystal growing furnace, the certain feelings of ground level on the scene
Under condition, so that long crystal bar can take out from concubine, increase the production length of long crystal bar, improve crystal bar production efficiency.
Another purpose of the present utility model is to provide a kind of single crystal growing furnace of the application concubine, with identical place height
In the case of, increase the production length of crystal bar, improve the production efficiency of crystal bar.
To reach above-mentioned purpose, the utility model provides following technical scheme：
A kind of concubine of single crystal growing furnace, the concubine are telescopic structure.
Preferably, in above-mentioned concubine, the concubine includes：
Rigid concubine；
Can axial deformation resistance to compression concubine, be connected with the rigid concubine, stretched for axial deformation；
First concubine telescoping mechanism, the lifting both ends of the first concubine telescoping mechanism, which are connected to, described can axially become
The both ends of shape resistance to compression concubine.
Preferably, in above-mentioned concubine, it is described can axial deformation resistance to compression concubine be expansion corrugated pipe.
Preferably, in above-mentioned concubine, it is described can axial deformation resistance to compression concubine be arranged at one end of the rigid concubine
Or both ends or centre position.
Preferably, in above-mentioned concubine, the first concubine telescoping mechanism includes：
Motor, be arranged at it is described can axial deformation resistance to compression concubine one end；
Screw mandrel, it is connected with the output end of the motor；
Thread bush, be arranged at it is described can axial deformation resistance to compression concubine the other end, and be connected with the wire rod thread.
Preferably, in above-mentioned concubine, the first concubine telescoping mechanism also includes reductor, and the leading screw passes through institute
The output end for stating reductor and the motor is connected.
Preferably, in above-mentioned concubine, the concubine includes：
At least two can move to axial the rigid concubine of socket；
Second concubine telescoping mechanism, the lifting both ends of the second concubine telescoping mechanism connect the two of the concubine respectively
End.
The utility model additionally provides a kind of single crystal growing furnace, including concubine, main furnace chamber, lifting head and upright frame, its feature
It is, the concubine is the concubine described in any of the above item, and the bottom of the concubine is connected on the bell of the main furnace chamber, institute
The top for stating concubine is connected with the lifting head.
Preferably, in above-mentioned single crystal growing furnace, the concubine can axial deformation resistance to compression concubine both ends respectively with it is described
Rigid concubine connects with the lifting head, and the lifting both ends of the first concubine telescoping mechanism of the concubine are connected to described carry
On pull head and the rigid concubine.
Preferably, in above-mentioned single crystal growing furnace, the lifting head is horizontally rotated by swinging mounting is connected to upright frame
On.
Compared with prior art, the beneficial effects of the utility model are：
In the concubine of single crystal growing furnace provided by the utility model, concubine is telescopic structure, therefore, industrial building height and
In the case that single crystal growing furnace whole height is certain, concubine can make concubine away from main furnace chamber, concubine and master by shrinking from bottom to top
The distance between furnace chamber can meet requirement, and the lower end of long crystal bar is exposed to the bottom of concubine, so as to by long crystal bar from pair
Taken out in room.It can be seen that the concubine in the case where factory building height is certain, can increase the production length of crystal bar, crystal bar is improved
Production efficiency.
Single crystal growing furnace provided by the utility model applies the concubine in the application, therefore, in the situation of identical place height
Under, the production length of crystal bar is added, improves the production efficiency of crystal bar.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
It is embodiment of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other accompanying drawings can be obtained according to the accompanying drawing of offer.
Fig. 1 is a kind of structural representation of the concubine for single crystal growing furnace that the utility model embodiment provides；
Fig. 2 is a kind of structural representation for single crystal growing furnace that the utility model embodiment provides.
Wherein, 1 be concubine, 11 be rigid concubine, 12 for can axial deformation resistance to compression concubine, 13 be the first concubine elevator
Structure, 131 be motor, 132 be reductor, 133 be screw mandrel, 134 be thread bush, 2 be main furnace chamber, 3 be frame, 4 be lifting head, 5
It is rotating shaft for swinging mounting, 6,7 is upright frame.
Embodiment
Core of the present utility model there is provided a kind of concubine of single crystal growing furnace, can in the case that ground level on the scene is certain
Long crystal bar is taken out from concubine, add the production length of crystal bar, improve crystal bar production efficiency.
The utility model also provides a kind of single crystal growing furnace of the application concubine, in the case of identical place height, adds
The production length of crystal bar, improve the production efficiency of crystal bar.
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
Fig. 1 and Fig. 2 are refer to, the utility model embodiment provides a kind of concubine of single crystal growing furnace, and concubine 1 is telescopic knot
Structure, the generally cylindrical structure of concubine 1 can be along the axial stretching of concubine 1.During work, the upper end level position of concubine 1 is certain,
By the contraction of the bottom of concubine 1 from the bottom to top, the bottom of concubine 1 is left from the top of main furnace chamber 2, the bottom of concubine 1 with
The distance between top of main furnace chamber 2 reaches requirement, and the bottom of concubine 1 is exposed in the lower end for growing the long crystal bar of completion, passes through folder
Mechanism clamping crystal bar lower end is held, crystal bar can be taken out from concubine 1.
It can be seen that in the case where industrial building height is certain, by the upper end of concubine 1 at the top of factory building, monocrystalline is improved
The whole height of stove, then crystal bar can grow longer length during lifting, after the completion of crystal bar, it is not necessary to by concubine 1
Top lifting, it is only necessary to the bottom of concubine 1 is lifted from the bottom to top can complete crystal bar taking-up operation.Add crystal bar
Production length, improve the production efficiency of crystal bar.
As shown in figure 1, present embodiments providing a kind of concubine 1 of specific telescopic structure, it is secondary that the concubine 1 includes rigidity
Room 11, can axial deformation resistance to compression concubine 12 and the first concubine telescoping mechanism 13.Wherein, rigid concubine 11 is rigid structure, is not sent out
Change shape.Can axial deformation resistance to compression concubine 12 be flexible structure, axial deformation can be carried out and stretched, and can resist radially press
Power, radial deformation will not occur, can axial deformation resistance to compression concubine 12 be connected with rigid concubine 11, form concubine agent structure.The
The flexible both ends of one concubine telescoping mechanism 13 be connected to can axial deformation resistance to compression concubine 12 both ends, for drive can be axial
It is flexible to deform resistance to compression concubine 12.
The concubine 1 at work, can axial deformation resistance to compression pair by the driving of the first concubine telescoping mechanism 13 when taking crystal bar
12 axial bottom right of room is shunk upwards, so that the whole relatively main furnace chamber 2 of concubine 1 rises, main furnace chamber 2 one is left in the bottom of concubine 1
Segment distance, the crystal bar lower end for facilitating gripper mechanism grips to expose.
As optimization, in the present embodiment, can axial deformation resistance to compression concubine 12 be expansion corrugated pipe.Expansion corrugated pipe can
The flexible of axial direction is carried out, but there is the anti-pressure ability of radial direction, can prevent expansion corrugated pipe from being produced because of internal negative pressure radially
Deformation.Expansion corrugated pipe is preferably stainless steel, corrosion-resistant.Certainly, can axial deformation resistance to compression concubine 12 can also be other
Structure, such as have radial support flexible metal conduit, as long as can axial stretching denaturation, it is not limited to listed by the present embodiment
The structure type of act.
As shown in figure 1, in the present embodiment, can axial deformation resistance to compression concubine 12 be preferably provided in the upper of rigid concubine 11
End, the lower end of rigid concubine 11 are used to be connected with main furnace chamber 2.Correspondingly, the both ends of the first concubine telescoping mechanism 13 connect respectively
Rigid concubine 11 and can axial deformation resistance to compression concubine 12 remote rigid concubine 11 one end on.Can axial deformation so as to drive
Resistance to compression concubine 12 carries out axial stretching.Certainly, can axial deformation resistance to compression concubine 12 can also be arranged at the lower end of rigid concubine 11,
Then can axial deformation resistance to compression concubine 12 lower end be used for be connected with main furnace chamber 2, the lower end of the first concubine telescoping mechanism 13 with can axle
Connected to the lower end of deformation resistance to compression concubine 12, the upper end of the first concubine telescoping mechanism 13 is connected with rigid concubine 11.Or rigidity
The both ends of concubine 11 be all connected with one can axial deformation resistance to compression concubine 12, each can the corresponding installation one of axial deformation resistance to compression concubine 12
Individual first concubine telescoping mechanism 13.Or rigid concubine 11 middle optional position set one can axial deformation resistance to compression pair
Room 12, then the upper and lower ends of the first concubine telescoping mechanism 13 be connected to positioned at can the both ends of axial deformation resistance to compression concubine 12 it is firm
On property concubine 11.As long as the flexible of concubine 1 can be realized.It is not limited to the installation site cited by the present embodiment.
A kind of specific first concubine telescoping mechanism 13 is present embodiments provided, it includes motor 131, screw mandrel 133 and spiral shell
Line set 134.Wherein, motor 131, screw mandrel 133 and thread bush 134 are at least two groups, are circumferentially arranged at the outer of concubine 1
Week.Motor 131 set can axial deformation resistance to compression concubine 12 one end, with specific reference to can axial deformation resistance to compression concubine 12 setting position
Depending on putting.The output end of screw mandrel 133 and motor 131 is connected, and the drive screw 133 of motor 131 rotates.Thread bush 134 is set
In can axial deformation resistance to compression concubine 12 the other end, with specific reference to can depending on the set location of axial deformation resistance to compression concubine 12, and
Thread bush 134 is connected with the screw thread of screw mandrel 133, and thread bush 134 is fixed, with the rotation of screw mandrel 133, thread bush 134
Moved axially on screw mandrel 133, thread bush 134 can also be nut etc..
Further, in the present embodiment, the first concubine telescoping mechanism 13 also includes reductor 132, and leading screw 133 is by subtracting
The output end of fast machine 132 and motor 131 is connected.To control the rotating speed of screw mandrel 133.
Wherein, motor 131 can use common electric machine or stepper motor.
Certainly, the first concubine telescoping mechanism 13 can also be other mechanisms, be such as driven by telescoping cylinder, as long as energy
It is enough realize can axial deformation resistance to compression concubine 12 it is flexible, it is not limited to the structure type cited by the present embodiment.
The utility model embodiment additionally provides the concubine 1 of another telescopic structure, and the concubine 1 is stretched including the second concubine
Contracting mechanism and at least two rigid concubines 11 that can move to axial socket, pass through axial movement between multiple rigid concubines 11
Realize flexible；The lifting both ends of second concubine telescoping mechanism connect the both ends of concubine 1 respectively, are driven by the second concubine telescoping mechanism
Multiple rigid concubines 11 are moved to move to axial.Preferably, the second concubine telescoping mechanism can use and the first concubine telescopic machine
The identical structure of structure 13.
As shown in Fig. 2 based on the concubine 1 described by above example, the utility model embodiment additionally provides a kind of single
Brilliant stove, including concubine 1, main furnace chamber 2, lifting head 4, frame 36 and upright frame.Wherein, concubine 1 is any of the above embodiment institute
The concubine 1 of description, the bottom of concubine 1 are connected on the bell of main furnace chamber 2, and the top of concubine 1 is connected with lifting head 4.Vertical machine
Frame 7 is fixed in frame 3, and the height of upright frame 7 is depending on the height of industrial building, or the crystal bar produced as needed
Length setting.Lifting head 4 is used to lift young brilliant and crystal bar in concubine 1 and main furnace chamber 2.Lifting head 4 passes through the water of swinging mounting 5
Flat to be rotationally connected with upright frame 7, swinging mounting 5 is rotationally connected with upright frame 7 by rotating shaft 6.Lifting head 4, rotate
Support 5 can only rotate in the horizontal plane, it is impossible to which in the vertical direction moves, and therefore, the increase of the stability of lifting head 4, improves crystalline substance
Rod grows success rate.
During work, when length is brilliant, the lower end of concubine 1 is connected with main furnace chamber 2, and lifting head 4 constantly lifts crystal bar, works as completion
When long brilliant, crystal bar is promoted in concubine 1 by lifting head 4, afterwards, the lower end of concubine 1 is shunk from the bottom to top, the lower end of concubine 1
Main furnace chamber is left, the bottom of concubine 1 is exposed in the lower end of crystal bar, by gripper mechanism grips crystal bar, horizontally rotates swinging mounting 5,
Lifting head 4, concubine 1 and crystal bar are turned into the outside of main furnace chamber 2 from the surface of main furnace chamber 2, by clamping device by crystal bar from
Taken out in concubine 1.Because single crystal growing furnace uses the concubine 1 in the application, therefore, in identical factory building height and the feelings of single crystal growing furnace height
Under condition, the length of crystal bar can be increased by the contraction of concubine 1, improve the crystal bar production efficiency of single crystal growing furnace.
Further, in the present embodiment, concubine 1 can axial deformation resistance to compression concubine 12 both ends respectively with rigid concubine
11 and lifting head 4 connect, the lifting both ends of the first concubine telescoping mechanism 13 are connected on lifting head 4 and rigid concubine 11.
Such a mounting structure be adapted to can axial deformation resistance to compression concubine 12 be arranged on rigid concubine 11 upper end situation, certainly, for
Other arrangements, lifting head 4 are correspondingly connected with rigid concubine 11.
Each embodiment is described by the way of progressive in this specification, what each embodiment stressed be and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.
The foregoing description of the disclosed embodiments, professional and technical personnel in the field are enable to realize or new using this practicality
Type.A variety of modifications to these embodiments will be apparent for those skilled in the art, determine herein
The General Principle of justice can be realized in other embodiments in the case where not departing from spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (10)
1. a kind of concubine of single crystal growing furnace, it is characterised in that the concubine (1) is telescopic structure.
2. concubine according to claim 1, it is characterised in that the concubine (1) includes：
Rigid concubine (11)；
Can axial deformation resistance to compression concubine (12), be connected with the rigid concubine (11), stretched for axial deformation；
First concubine telescoping mechanism (13), the lifting both ends of the first concubine telescoping mechanism (13) be connected to it is described can axle
To the both ends of deformation resistance to compression concubine (12).
3. concubine according to claim 2, it is characterised in that it is described can axial deformation resistance to compression concubine (12) be flexible ripple
Pipe.
4. the concubine according to Claims 2 or 3, it is characterised in that it is described can axial deformation resistance to compression concubine (12) be arranged at
The one or both ends or centre position of the rigid concubine (11).
5. the concubine according to Claims 2 or 3, it is characterised in that the first concubine telescoping mechanism (13) includes：
Motor (131), be arranged at it is described can axial deformation resistance to compression concubine (12) one end；
Screw mandrel (133), it is connected with the output end of the motor (131)；
Thread bush (134), be arranged at it is described can axial deformation resistance to compression concubine (12) the other end, and with the screw mandrel (133) spiral shell
Line is connected.
6. concubine according to claim 5, it is characterised in that the first concubine telescoping mechanism (13) also includes reductor
(132), the leading screw (133) is connected by the output end of the reductor (132) and the motor (131).
7. concubine according to claim 1, it is characterised in that the concubine (1) includes：
At least two can move to axial the rigid concubine (11) of socket；
Second concubine telescoping mechanism, the lifting both ends of the second concubine telescoping mechanism connect the both ends of the concubine (1) respectively.
8. a kind of single crystal growing furnace, including concubine (1), main furnace chamber (2), lifting head (4) and upright frame (7), it is characterised in that described
Concubine (1) is the concubine (1) as described in claim any one of 1-7, and the bottom of the concubine (1) is connected to the main furnace chamber
(2) on bell, the top of the concubine (1) is connected with the lifting head (4).
9. single crystal growing furnace according to claim 8, it is characterised in that the concubine (1) can axial deformation resistance to compression concubine
(12) both ends are connected with the rigid concubine (11) and the lifting head (4) respectively, and the first concubine of the concubine (1) stretches
The lifting both ends of mechanism ((13)) are connected on the lifting head (4) and the rigid concubine (11).
10. single crystal growing furnace according to claim 8 or claim 9, it is characterised in that the lifting head (4) passes through swinging mounting (5) water
It is flat to be rotationally connected with the upright frame (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720322216.9U CN206635452U (en) | 2017-03-29 | 2017-03-29 | Single crystal growing furnace and its concubine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720322216.9U CN206635452U (en) | 2017-03-29 | 2017-03-29 | Single crystal growing furnace and its concubine |
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| Publication Number | Publication Date |
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| CN206635452U true CN206635452U (en) | 2017-11-14 |
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ID=60259590
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106702475A (en) * | 2017-03-29 | 2017-05-24 | 天通吉成机器技术有限公司 | Single crystal furnace and secondary chamber thereof |
| CN113174630A (en) * | 2021-04-08 | 2021-07-27 | 中国电子科技集团公司第十三研究所 | Large-size semiconductor single crystal growth system |
| CN113249778A (en) * | 2021-04-08 | 2021-08-13 | 中国电子科技集团公司第十三研究所 | Preparation method of large-size compound semiconductor single crystal |
-
2017
- 2017-03-29 CN CN201720322216.9U patent/CN206635452U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106702475A (en) * | 2017-03-29 | 2017-05-24 | 天通吉成机器技术有限公司 | Single crystal furnace and secondary chamber thereof |
| CN113174630A (en) * | 2021-04-08 | 2021-07-27 | 中国电子科技集团公司第十三研究所 | Large-size semiconductor single crystal growth system |
| CN113249778A (en) * | 2021-04-08 | 2021-08-13 | 中国电子科技集团公司第十三研究所 | Preparation method of large-size compound semiconductor single crystal |
| CN113174630B (en) * | 2021-04-08 | 2022-08-19 | 中国电子科技集团公司第十三研究所 | Large-size semiconductor single crystal growth system |
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